CN219885684U - Trichlorosilane purifying device - Google Patents
Trichlorosilane purifying device Download PDFInfo
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- CN219885684U CN219885684U CN202321556527.3U CN202321556527U CN219885684U CN 219885684 U CN219885684 U CN 219885684U CN 202321556527 U CN202321556527 U CN 202321556527U CN 219885684 U CN219885684 U CN 219885684U
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- ZDHXKXAHOVTTAH-UHFFFAOYSA-N trichlorosilane Chemical compound Cl[SiH](Cl)Cl ZDHXKXAHOVTTAH-UHFFFAOYSA-N 0.000 title claims abstract description 60
- 239000005052 trichlorosilane Substances 0.000 title claims abstract description 60
- 239000012530 fluid Substances 0.000 claims abstract description 53
- 238000001179 sorption measurement Methods 0.000 claims abstract description 52
- 238000000746 purification Methods 0.000 claims abstract description 18
- 238000010992 reflux Methods 0.000 claims abstract description 14
- 238000004891 communication Methods 0.000 claims description 8
- 238000005265 energy consumption Methods 0.000 abstract description 8
- 239000000463 material Substances 0.000 description 53
- 230000001105 regulatory effect Effects 0.000 description 18
- 239000012535 impurity Substances 0.000 description 15
- 238000012546 transfer Methods 0.000 description 12
- 238000004519 manufacturing process Methods 0.000 description 9
- 238000010438 heat treatment Methods 0.000 description 8
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 7
- 229920005591 polysilicon Polymers 0.000 description 7
- 238000000034 method Methods 0.000 description 5
- 230000000694 effects Effects 0.000 description 4
- 238000011161 development Methods 0.000 description 2
- 238000000605 extraction Methods 0.000 description 2
- 230000002035 prolonged effect Effects 0.000 description 2
- 239000002994 raw material Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000012856 packing Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
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- Silicon Compounds (AREA)
Abstract
The utility model discloses a trichlorosilane purifying device, which comprises: the bottom of the first-stage rectifying tower is provided with a first bottom outlet and a first bottom inlet, and the top of the first-stage rectifying tower is provided with a first top outlet and a reflux port; the feed inlet of the first reboiler is communicated with the first bottom outlet, and the discharge outlet of the first reboiler is communicated with the first bottom inlet; the bottom of the secondary rectifying tower is provided with a second bottom outlet and a second bottom inlet, and the top of the secondary rectifying tower is provided with a second top outlet; the feed inlet of the second reboiler is communicated with the second bottom outlet, and the discharge outlet of the second reboiler is communicated with the second bottom inlet; an inlet of the heat pump device is communicated with the first ejection outlet, and an outlet of the heat pump device is communicated with a fluid inlet of the second reboiler; the inlet of the adsorption device is communicated with the fluid outlet of the second reboiler, and the outlet of the adsorption device is communicated with the feed inlet of the secondary rectifying tower. The purification device can reduce energy consumption and effectively improve the purity of trichlorosilane.
Description
Technical Field
The utility model belongs to the technical field of polysilicon, and particularly relates to a trichlorosilane purifying device.
Background
Polysilicon is a basic raw material of solar energy industry and semiconductor industry, and is an important raw material necessary for development of electronic information industry and solar photovoltaic industry in China. The improved Siemens method is a main production method of the existing polysilicon, can be compatible with the production of electronic grade and solar grade polysilicon, and mainly has the problems of high energy consumption, serious potential pollution and the like. At present, the rectification technology used in the domestic polysilicon production has a remarkable gap from developed countries, and becomes one of main technical bottlenecks for restricting the production of high-quality polysilicon materials in China. Along with the development of industry, the purity requirement on trichlorosilane is higher and higher, the production energy consumption of the existing rectification and purification system is high in the process of purifying the trichlorosilane, impurities in the trichlorosilane are not easy to remove, the purification effect is poor, and the production and application of the trichlorosilane are affected.
Disclosure of Invention
The embodiment of the utility model aims to provide a trichlorosilane purifying device which is used for solving the problems that in the process of purifying trichlorosilane, the existing rectifying and purifying system is high in production energy consumption, impurities in the trichlorosilane are not easy to remove, and the purifying effect is poor.
The embodiment of the utility model provides a trichlorosilane purifying device, which comprises:
the bottom of the primary rectifying tower is provided with a first bottom outlet and a first bottom inlet, and the top of the primary rectifying tower is provided with a first top outlet and a reflux port;
the feed inlet of the first reboiler is communicated with the first bottom outlet, and the discharge outlet of the first reboiler is communicated with the first bottom inlet;
the bottom of the secondary rectifying tower is provided with a second bottom outlet and a second bottom inlet, and the top of the secondary rectifying tower is provided with a second top outlet;
the feed inlet of the second reboiler is communicated with the second bottom outlet, and the discharge outlet of the second reboiler is communicated with the second bottom inlet;
the inlet of the heat pump device is communicated with the first ejection outlet, and the outlet of the heat pump device is communicated with the fluid inlet of the second reboiler;
and the inlet of the adsorption device is communicated with the fluid outlet of the second reboiler, and the outlet of the adsorption device is communicated with the feed inlet of the secondary rectifying tower.
Optionally, the outlet of the heat pump apparatus is in communication with the fluid inlet of the first reboiler.
Optionally, the fluid outlet of the first reboiler is in communication with the reflux port of the primary rectification column.
Optionally, the trichlorosilane purifying device further comprises:
and one end of the first pipeline is communicated with the fluid outlet of the first reboiler, and the other end of the first pipeline is communicated with the reflux port.
Optionally, the trichlorosilane purifying device further comprises:
one end of the second pipeline is communicated with the outlet of the heat pump device, and the other end of the second pipeline is communicated with the fluid inlet of the first reboiler;
and one end of the third pipeline is communicated with the outlet of the heat pump device, and the other end of the third pipeline is communicated with the fluid inlet of the second reboiler.
Optionally, the trichlorosilane purifying device further comprises:
one end of the fourth pipeline is communicated with the fluid outlet of the second reboiler, and the other end of the fourth pipeline is communicated with the inlet of the adsorption device;
and one end of the fifth pipeline is communicated with the outlet of the adsorption device, and the other end of the fifth pipeline is communicated with the feed inlet of the secondary rectifying tower.
Optionally, the trichlorosilane purifying device further comprises:
the bottom of the primary rectifying tower is provided with a third bottom outlet and a third bottom inlet, a feed inlet of the third reboiler is communicated with the third bottom outlet, and a discharge outlet of the third reboiler is communicated with the third bottom inlet.
Optionally, the heat pump device comprises a compressor.
Optionally, the adsorption device is disposed between the primary rectifying tower and the secondary rectifying tower.
Optionally, the fluid outlet of the first reboiler is in communication with the inlet of the adsorption device.
According to the trichlorosilane purification device provided by the embodiment of the utility model, in the purification process, trichlorosilane containing impurities is added into a first-stage rectifying tower through a feed inlet of the first-stage rectifying tower for rectification, materials in a tower kettle of the first-stage rectifying tower can be conveyed to the tower kettle of the first-stage rectifying tower again after being heated by a first reboiler, light-phase materials flowing out of a first ejection outlet of the tower top of the first-stage rectifying tower can enter a heat pump device, the heat pump device is used for pressurizing and heating, the light-phase materials after being pressurized and heated by the heat pump device can enter a second reboiler for heating materials in a second reboiler, the materials in the tower kettle of the second-stage rectifying tower can enter the second reboiler for heating by the light-phase materials, the materials in the tower kettle of the second-stage rectifying tower can be conveyed to the tower kettle of the second-stage rectifying tower again after being heated by the second reboiler, the light-phase materials flow out of the second reboiler and enter an adsorption device, the impurities in the trichlorosilane can be adsorbed by the adsorption device, and the purity of the trichlorosilane is improved. Because the temperature of the light phase material is reduced after passing through the second reboiler, the light phase material enters the adsorption device for adsorption after the temperature is reduced, the damage of high temperature to the adsorption device can be reduced, the service time of the adsorption device is prolonged, the light phase material flowing out of the adsorption device is added into the second rectifying tower for rectification, and the trichlorosilane is further purified, so that the purity of the trichlorosilane is higher. Heat in the trichlorosilane can be effectively utilized through a heat pump device and a reboiler in the trichlorosilane purification device, energy consumption is reduced, impurities in the trichlorosilane can be effectively removed through adsorption and impurity removal between the two rectifying towers through an adsorption device, and the purity of the trichlorosilane is effectively improved.
Drawings
FIG. 1 is a schematic diagram showing a connection of a trichlorosilane purifying apparatus according to an embodiment of the present utility model.
Reference numerals
A primary rectifying column 10; a first reboiler 11;
a secondary rectifying column 20; a second reboiler 21;
a heat pump device 30;
an adsorption device 40;
a first pipe 51; a second conduit 52; a third line 53;
fourth line 54; a fifth line 55;
a third reboiler 60.
Detailed Description
The following description of the embodiments of the present utility model will be made clearly and fully with reference to the accompanying drawings, in which it is evident that the embodiments described are some, but not all embodiments of the utility model. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.
The terms first, second and the like in the description and in the claims, are used for distinguishing between similar elements and not necessarily for describing a particular sequential or chronological order. It is to be understood that the data so used may be interchanged where appropriate such that embodiments of the utility model may be practiced otherwise than as specifically illustrated or described herein. Furthermore, in the description and claims, "and/or" means at least one of the connected objects, and the character "/", generally means that the associated object is an "or" relationship.
The trichlorosilane purifying device provided by the embodiment of the utility model is described in detail below by means of a specific embodiment and an application scene thereof with reference to fig. 1.
As shown in fig. 1, a trichlorosilane purifying apparatus according to an embodiment of the present utility model includes: the tower bottom of the primary rectifying tower 10 is provided with a first bottom outlet and a first bottom inlet, the top of the primary rectifying tower 10 is provided with a first top outlet and a reflux port, and reflux can be carried out through the reflux port. The feed inlet of the first reboiler 11 is communicated with the first bottom outlet, and the discharge outlet of the first reboiler 11 is communicated with the first bottom inlet. The materials in the tower kettle of the primary rectifying tower 10 can be heated through the first reboiler 11, and then are conveyed to the tower kettle after being heated. The trichlorosilane containing impurities can be added into the first-stage rectifying tower 10 through a feed inlet on the first-stage rectifying tower 10 for rectification.
The bottom of the secondary rectifying tower 20 is provided with a second bottom outlet and a second bottom inlet, the top of the secondary rectifying tower 20 is provided with a second top outlet, and the rectified gas phase component can be extracted from the second top outlet at the top of the secondary rectifying tower. The feed inlet of the second reboiler 21 is communicated with the second bottom outlet, and the discharge outlet of the second reboiler 21 is communicated with the second bottom inlet. The materials in the tower bottom of the secondary rectifying tower 20 can be heated by the second reboiler 21, and then are conveyed to the tower bottom after being heated. The inlet of the heat pump device 30 is communicated with the first ejection port, the outlet of the heat pump device 30 is communicated with the fluid inlet of the second reboiler 21, the inlet of the adsorption device 40 is communicated with the fluid outlet of the second reboiler 21, and the outlet of the adsorption device 40 is communicated with the feed inlet of the secondary rectifying tower 20. The light phase material flowing out from the first ejection outlet at the top of the primary rectifying tower 10 can enter the heat pump device 30 for pressurizing and heating. The bottom of the tower kettle of the primary rectifying tower 10 can be provided with a extraction pipeline for extracting heavy component materials, and the bottom of the tower kettle of the secondary rectifying tower 20 can be provided with a extraction pipeline for extracting heavy component materials.
The light phase material flowing out of the first ejection outlet of the top of the primary rectifying tower 10 can enter the heat pump device 30, the heat pump device 30 is used for pressurizing and heating, the light phase material pressurized and heated by the heat pump device 30 can enter the second reboiler 21 to heat the material in the second reboiler 21, the material in the tower kettle of the secondary rectifying tower 20 enters the second reboiler 21 to heat the light phase material, and the material in the tower kettle of the secondary rectifying tower 20 can be conveyed to the tower kettle of the secondary rectifying tower 20 again after being heated by the second reboiler 21. The light phase material flows out from the second reboiler 21 and then enters the adsorption device 40, and impurities in the trichlorosilane can be adsorbed through the adsorption device 40, so that the purity of the trichlorosilane is improved. The adsorption device 40 may be an adsorption tower, and the adsorption tower may be filled with an adsorption packing or an adsorption column.
In the trichlorosilane purifying device provided by the embodiment of the utility model, in the purifying process, trichlorosilane containing impurities is added into the first-stage rectifying tower 10 through the feed inlet of the first-stage rectifying tower 10 for rectification, materials at the tower bottom of the first-stage rectifying tower 10 can be conveyed to the tower bottom of the first-stage rectifying tower 10 again after being heated by the first reboiler 11, light-phase materials at the tower top of the first-stage rectifying tower 10 can enter the heat pump device 30, the heat pump device 30 is used for pressurizing and heating, the light-phase materials after being pressurized and heated by the heat pump device 30 can enter the second reboiler 21 for heating materials in the second reboiler 21, the materials at the tower bottom of the second-stage rectifying tower 20 can enter the second reboiler 21 for heating through the light-phase materials, the materials at the tower bottom of the second-stage rectifying tower 20 can be conveyed to the tower bottom of the second-stage rectifying tower 20 again after being heated by the second reboiler 21, the light-phase materials can enter the adsorption device 40 after flowing out from the second reboiler 21, and the impurities in the trichlorosilane can be adsorbed by the adsorption device 40, and the purity of the trichlorosilane is improved. Because the temperature of the light phase material is reduced after passing through the second reboiler 21, the light phase material enters the adsorption device 40 for adsorption after the temperature is reduced, the damage of high temperature to the adsorption device can be reduced, the service time of the adsorption device is prolonged, the light phase material flowing out of the adsorption device 40 is added into the secondary rectifying tower 20 for rectification, and the trichlorosilane is further purified, so that the purity of the trichlorosilane is higher. Heat in the trichlorosilane flowing out of the first-stage rectifying tower can be effectively utilized through a heat pump device and a reboiler in the trichlorosilane purifying device, energy consumption is reduced, impurities in the trichlorosilane can be effectively removed through adsorption and impurity removal between the two rectifying towers, and the purity of the trichlorosilane is effectively improved. The light phase material is adsorbed and decontaminated by the adsorption device 40 and then enters the secondary rectifying tower 20 for rectification, so that the purification effect of trichlorosilane is improved. By adopting the trichlorosilane purifying device, the production energy consumption can be reduced, and meanwhile, the B, P and other impurities can be removed, and the quality requirement of the electronic grade polysilicon production can be met.
In some embodiments, the outlet of the heat pump device 30 may be communicated with the fluid inlet of the first reboiler 11, the light phase material pressurized and heated by the heat pump device 30 may enter the first reboiler 11, the material in the tower bottom of the first-stage rectifying tower 10 may enter the first reboiler 11, and the light phase material entering the first reboiler 11 may be used to heat the material in the tower bottom of the first-stage rectifying tower 10 entering the first reboiler 11, so that heat in the light phase material may be effectively utilized, and energy consumption is reduced.
In other embodiments, the fluid outlet of the first reboiler 11 may be in communication with a reflux port of the primary rectification column 10. The light phase material is cooled after heat exchange, then flows out from the fluid outlet of the first reboiler 11, and the light phase material flowing out from the fluid outlet of the first reboiler 11 enters the first-stage rectifying tower 10 through the reflux port for reflux.
Optionally, the trichlorosilane purifying apparatus may further include: a first pipe 51, one end of the first pipe 51 communicates with the fluid outlet of the first reboiler 11, and the other end of the first pipe 51 communicates with the reflux port.
A first transfer pump may be provided in the first line 51, through which fluid may be transferred to the return port. At least one of a first flow rate detector, a first temperature detector, a first pressure detector, and a first regulating valve may be provided in the first pipe 51, the fluid flow rate in the first pipe 51 may be detected by the first flow rate detector, the fluid temperature in the first pipe 51 may be detected by the first temperature detector, the fluid pressure in the first pipe 51 may be detected by the first pressure detector, and the fluid flow rate in the first pipe 51 may be regulated by the first regulating valve. The outside of the first pipe 51 may be covered with a heat insulating layer to reduce heat transfer with the outside.
Optionally, the trichlorosilane purifying apparatus may further include: the second pipe 52 is connected to the third pipe 53, one end of the second pipe 52 is connected to the outlet of the heat pump apparatus 30, and the other end of the second pipe 52 is connected to the fluid inlet of the first reboiler 11.
A second transfer pump may be provided on the second pipe 52, through which the light phase material flowing out of the outlet of the heat pump apparatus 30 may be transferred to the first reboiler 11. At least one of a second flow rate detector, a second temperature detector, a second pressure detector, and a second regulating valve may be provided in the second pipe 52, the flow rate of the fluid in the second pipe 52 may be detected by the second flow rate detector, the temperature of the fluid in the second pipe 52 may be detected by the second temperature detector, the pressure of the fluid in the second pipe 52 may be detected by the second pressure detector, and the flow rate of the fluid in the second pipe 52 may be regulated by the second regulating valve. The outside of the second pipe 52 may be covered with a heat insulating layer to reduce heat transfer with the outside.
One end of the third pipe 53 communicates with the outlet of the heat pump apparatus 30, and the other end of the third pipe 53 communicates with the fluid inlet of the second reboiler 21.
A third transfer pump may be provided in the third line 53, and the light phase material flowing out of the outlet of the heat pump apparatus 30 may be transferred to the second reboiler 21 by the third transfer pump. At least one of a third flow rate detector, a third temperature detector, a third pressure detector, and a third regulating valve may be provided in the third pipe 53, the fluid flow rate in the third pipe 53 may be detected by the third flow rate detector, the fluid temperature in the third pipe 53 may be detected by the third temperature detector, the fluid pressure in the third pipe 53 may be detected by the third pressure detector, and the fluid flow rate in the third pipe 53 may be regulated by the third regulating valve. The outside of the third pipe 53 may be covered with a heat insulating layer to reduce heat transfer with the outside. The delivery pumps and the regulating valves on the second pipeline 52 and the third pipeline 53 can be regulated as required to control the flow on the pipelines.
In some embodiments, the trichlorosilane purification apparatus may further include: fourth line 54, fifth line 55, one end of fourth line 54 communicates with the fluid outlet of second reboiler 21, and the other end of fourth line 54 communicates with the inlet of adsorption unit 40.
A fourth transfer pump may be provided in the fourth line 54, through which the light phase material exiting the fluid outlet of the second reboiler 21 may be transferred to the adsorption apparatus 40. At least one of a fourth flow rate detector, a fourth temperature detector, a fourth pressure detector, and a fourth regulating valve may be provided in the fourth pipe 54, the fluid flow rate in the fourth pipe 54 may be detected by the fourth flow rate detector, the fluid temperature in the fourth pipe 54 may be detected by the fourth temperature detector, the fluid pressure in the fourth pipe 54 may be detected by the fourth pressure detector, and the fluid flow rate in the fourth pipe 54 may be regulated by the fourth regulating valve. The outside of the fourth pipe 54 may be covered with a heat insulating layer to reduce heat transfer with the outside.
One end of the fifth pipeline 55 is communicated with the outlet of the adsorption device 40, and the other end of the fifth pipeline 55 is communicated with the feed inlet of the secondary rectifying tower 20.
A fifth transfer pump may be provided in the fifth line 55, and the light phase material flowing out of the outlet of the adsorption device 40 may be transferred to the secondary rectifying column 20 by the fifth transfer pump. At least one of a fifth flow rate detector, a fifth temperature detector, a fifth pressure detector, and a fifth regulating valve may be provided in the fifth pipe 55, the fluid flow rate in the fifth pipe 55 may be detected by the fifth flow rate detector, the fluid temperature in the fifth pipe 55 may be detected by the fifth temperature detector, the fluid pressure in the fifth pipe 55 may be detected by the fifth pressure detector, and the fluid flow rate in the fifth pipe 55 may be regulated by the fifth regulating valve. The outside of the fifth pipe 55 may be covered with a heat insulating layer to reduce heat transfer with the outside.
Optionally, the trichlorosilane purifying apparatus may further include: the bottom of the first-stage rectifying tower 10 is provided with a third bottom outlet and a third bottom inlet, the feed inlet of the third reboiler 60 is communicated with the third bottom outlet, and the discharge outlet of the third reboiler 60 is communicated with the third bottom inlet. The third reboiler 60 can heat the materials in the tower bottom of the first-stage rectifying tower 10, and the materials are conveyed to the tower bottom after being heated. For the temperature difference caused by component fluctuation, the temperature change can be regulated through the standby third reboiler 60, so that the device can run stably.
Alternatively, the heat pump apparatus 30 may include a compressor. For example, the heat pump device 30 may be a compressor, and the light phase material flowing out from the top of the primary rectifying tower 10 may be pressurized and heated by the compressor, so as to provide heat for subsequent processes.
Alternatively, the adsorption device 40 may be disposed between the primary rectifying column 10 and the secondary rectifying column 20. The trichlorosilane rectified by the primary rectifying tower 10 is adsorbed and decontaminated by the adsorption device 40, and then enters the secondary rectifying tower 20 for rectification, so that the purification effect of the trichlorosilane is improved.
In some embodiments, the fluid outlet of the first reboiler 11 is in communication with the inlet of the adsorption device 40. The light phase material can enter the adsorption device 40 for adsorption impurity removal after flowing out of the first reboiler 11, and can enter the secondary rectifying tower 20 for rectification after adsorption impurity removal.
The first reboiler 11, the second reboiler 21 and the third reboiler 60 can be heat exchangers, and the light phase material and the material in the tower kettle can exchange heat through the heat exchangers.
The embodiments of the present utility model have been described above with reference to the accompanying drawings, but the present utility model is not limited to the above-described embodiments, which are merely illustrative and not restrictive, and many forms may be made by those having ordinary skill in the art without departing from the spirit of the present utility model and the scope of the claims, which are to be protected by the present utility model.
Claims (10)
1. A trichlorosilane purification apparatus, comprising:
the bottom of the primary rectifying tower is provided with a first bottom outlet and a first bottom inlet, and the top of the primary rectifying tower is provided with a first top outlet and a reflux port;
the feed inlet of the first reboiler is communicated with the first bottom outlet, and the discharge outlet of the first reboiler is communicated with the first bottom inlet;
the bottom of the secondary rectifying tower is provided with a second bottom outlet and a second bottom inlet, and the top of the secondary rectifying tower is provided with a second top outlet;
the feed inlet of the second reboiler is communicated with the second bottom outlet, and the discharge outlet of the second reboiler is communicated with the second bottom inlet;
the inlet of the heat pump device is communicated with the first ejection outlet, and the outlet of the heat pump device is communicated with the fluid inlet of the second reboiler;
and the inlet of the adsorption device is communicated with the fluid outlet of the second reboiler, and the outlet of the adsorption device is communicated with the feed inlet of the secondary rectifying tower.
2. The trichlorosilane purification plant of claim 1, wherein the outlet of the heat pump device is in communication with the fluid inlet of the first reboiler.
3. The apparatus according to claim 1, wherein the fluid outlet of the first reboiler is in communication with the reflux port of the primary rectifying column.
4. A trichlorosilane purification apparatus according to claim 3, further comprising:
and one end of the first pipeline is communicated with the fluid outlet of the first reboiler, and the other end of the first pipeline is communicated with the reflux port.
5. The trichlorosilane purification apparatus according to claim 1, further comprising:
one end of the second pipeline is communicated with the outlet of the heat pump device, and the other end of the second pipeline is communicated with the fluid inlet of the first reboiler;
and one end of the third pipeline is communicated with the outlet of the heat pump device, and the other end of the third pipeline is communicated with the fluid inlet of the second reboiler.
6. The trichlorosilane purification apparatus according to claim 1, further comprising:
one end of the fourth pipeline is communicated with the fluid outlet of the second reboiler, and the other end of the fourth pipeline is communicated with the inlet of the adsorption device;
and one end of the fifth pipeline is communicated with the outlet of the adsorption device, and the other end of the fifth pipeline is communicated with the feed inlet of the secondary rectifying tower.
7. The trichlorosilane purification apparatus according to claim 1, further comprising:
the bottom of the primary rectifying tower is provided with a third bottom outlet and a third bottom inlet, a feed inlet of the third reboiler is communicated with the third bottom outlet, and a discharge outlet of the third reboiler is communicated with the third bottom inlet.
8. The trichlorosilane purification apparatus of claim 1, wherein the heat pump apparatus comprises a compressor.
9. The trichlorosilane purification apparatus according to claim 1, wherein the adsorption apparatus is disposed between the primary rectifying tower and the secondary rectifying tower.
10. The trichlorosilane purification apparatus of claim 1, wherein the fluid outlet of the first reboiler is in communication with the inlet of the adsorption apparatus.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321556527.3U CN219885684U (en) | 2023-06-19 | 2023-06-19 | Trichlorosilane purifying device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321556527.3U CN219885684U (en) | 2023-06-19 | 2023-06-19 | Trichlorosilane purifying device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN219885684U true CN219885684U (en) | 2023-10-24 |
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|---|---|---|---|
| CN202321556527.3U Active CN219885684U (en) | 2023-06-19 | 2023-06-19 | Trichlorosilane purifying device |
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| CN (1) | CN219885684U (en) |
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2023
- 2023-06-19 CN CN202321556527.3U patent/CN219885684U/en active Active
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