CN219855383U - Cutting line for cutting crystal bar and cutting machine - Google Patents
Cutting line for cutting crystal bar and cutting machine Download PDFInfo
- Publication number
- CN219855383U CN219855383U CN202321355256.5U CN202321355256U CN219855383U CN 219855383 U CN219855383 U CN 219855383U CN 202321355256 U CN202321355256 U CN 202321355256U CN 219855383 U CN219855383 U CN 219855383U
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- cutting
- cutting line
- crystal bar
- ingot
- cut
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- 238000005520 cutting process Methods 0.000 title claims abstract description 151
- 239000013078 crystal Substances 0.000 title claims abstract description 42
- 229910000831 Steel Inorganic materials 0.000 claims abstract description 29
- 239000010959 steel Substances 0.000 claims abstract description 29
- 239000000463 material Substances 0.000 claims abstract description 13
- 239000011248 coating agent Substances 0.000 claims abstract description 6
- 238000000576 coating method Methods 0.000 claims abstract description 6
- 238000004804 winding Methods 0.000 claims description 15
- 239000004760 aramid Substances 0.000 claims description 14
- 229920003235 aromatic polyamide Polymers 0.000 claims description 9
- 239000004570 mortar (masonry) Substances 0.000 claims description 9
- 239000002121 nanofiber Substances 0.000 claims description 9
- 238000005299 abrasion Methods 0.000 abstract description 13
- 238000004519 manufacturing process Methods 0.000 abstract description 10
- 238000000034 method Methods 0.000 abstract description 7
- 235000012431 wafers Nutrition 0.000 description 19
- 229920006231 aramid fiber Polymers 0.000 description 5
- 239000002131 composite material Substances 0.000 description 4
- 239000000126 substance Substances 0.000 description 4
- 239000002253 acid Substances 0.000 description 2
- 239000003513 alkali Substances 0.000 description 2
- 238000010276 construction Methods 0.000 description 2
- 238000005260 corrosion Methods 0.000 description 2
- 230000007797 corrosion Effects 0.000 description 2
- 238000000227 grinding Methods 0.000 description 2
- 238000012423 maintenance Methods 0.000 description 2
- 239000002086 nanomaterial Substances 0.000 description 2
- 238000002360 preparation method Methods 0.000 description 2
- 230000002787 reinforcement Effects 0.000 description 2
- 239000003082 abrasive agent Substances 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000001523 electrospinning Methods 0.000 description 1
- 230000002035 prolonged effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 238000002166 wet spinning Methods 0.000 description 1
Abstract
The utility model discloses a cutting line and a cutting machine for cutting a crystal bar, wherein the cutting line comprises: a steel inner core; and the outer sheath is used for coating the inner core, and the wear resistance of the material of the outer sheath is greater than that of steel. Because the element which is directly contacted with the crystal bar and generates friction with the crystal bar is the outer sheath, the abrasion resistance of the outer sheath is relatively higher compared with that of the material steel, compared with the existing steel cutting line, the cutting line provided by the utility model is not easy to generate abrasion even if the crystal bar is cut for a long time, thereby ensuring that the cut wafer meets the high-precision dimension requirement, ensuring that the surface quality of the cut wafer meets the requirement, prolonging the service life of the cutting line, greatly reducing the occurrence of line breaking condition in the process of cutting the crystal bar, avoiding the scrapping of the cut crystal bar and avoiding the production loss.
Description
Technical Field
The utility model relates to the field of semiconductor wafer production, in particular to a cutting line and a cutting machine for cutting a crystal bar.
Background
In the production of wafers, after pulling the ingot with a crystal pulling furnace, the ingot needs to be cut into a plurality of round slices in order to finish the finished wafer.
In the field of crystal bar cutting, the multi-wire cutting has the advantages of high cutting efficiency, good cutting quality and high wafer yield, so that the multi-wire cutting device is widely applied. The multi-wire cutting is realized in such a way that: the abrasive materials are brought into the processing area of the crystal bar to be cut through the high-speed movement of the cutting lines to be ground, and the crystal bar to be cut is fed in the vertical direction through the lifting of the workbench, so that the crystal bar is cut into a plurality of round sheets at the same time.
For a multi-wire dicing process, the quality of the dicing wire is critical to dicing the boule into wafers. At present, a steel wire is generally used as a cutting line to complete the multi-wire cutting process, but the abrasion resistance of the steel wire is poor, and after long-time use, the quality of a cut wafer is reduced, for example, the thickness is not satisfied, the surface quality is reduced, and even a breakage occurs to discard a crystal bar.
Disclosure of Invention
In order to solve the above technical problems, it is desirable to provide a cutting line and a cutting machine for cutting a crystal bar, which can ensure that a cut wafer meets the high-precision dimension requirement, the surface quality meets the requirement, and the service life of the cutting line is prolonged, so that the occurrence of line breakage in the process of cutting the crystal bar is greatly reduced.
The technical scheme of the utility model is realized as follows:
in a first aspect, an embodiment of the present utility model provides a cutting line for cutting a crystal ingot, the cutting line comprising:
a steel inner core;
and the outer sheath is used for coating the inner core, and the wear resistance of the material of the outer sheath is greater than that of steel.
Since the element which is directly contacted with the crystal bar and generates friction with the crystal bar is the outer sheath, and the abrasion resistance of the outer sheath is relatively higher compared with that of the steel material, compared with the existing steel cutting line, the cutting line according to the embodiment of the utility model is not easy to generate abrasion even if the crystal bar is cut for a long time, thereby ensuring that the cut wafer meets the high-precision dimension requirement, ensuring that the surface quality of the cut wafer meets the requirement, greatly reducing the occurrence of line breakage condition in the process of cutting the crystal bar, avoiding scrapping the cut crystal bar and avoiding production loss.
Preferably, the sheath is made of aramid nanofibers.
The aramid nanofiber has a unique nanoscale structure, has the diameter of 3-30 nanometers and the length of 10 micrometers, has a large length-diameter ratio, plays an important role in interface reinforcement and material toughening in the preparation of a composite material as a construction unit, successfully solves the problem that macroscopic aramid fibers cannot be applied to the field of the composite material due to weak interface bonding caused by smooth surface and high chemical inertia, and meanwhile, the aramid nanofiber simultaneously retains the excellent mechanical property and temperature resistance of the aramid fibers, and particularly has the characteristics of low density, high strength (5-6 times of steel wires), high modulus, high toughness, excellent high temperature resistance (600 ℃) and good chemical corrosion resistance (acid and alkali resistance) and the like, and the durability of cutting lines can be greatly improved by coating the aramid nanofibers on the periphery of a steel inner core.
Preferably, the ratio between the radius of the inner core and the thickness of the outer sheath is between 4 and 8.
In this way, the cutting wire 10 can have sufficient wear-resistant layer to ensure wear resistance of the cutting wire 10, and also can have sufficient steel wire characteristics such as modulus, toughness and the like, so that the cutting wire can be more suitable for application in existing cutting machines.
Preferably, the diameter of the cutting line is greater than 0.130mm.
In this way, the cutting line according to the embodiment can be suitable for cutting existing crystal bars with various diameters, for example, when a crystal bar with a larger diameter needs to be cut, a cutting line with a larger diameter can be correspondingly selected, and when a crystal bar with a smaller diameter needs to be cut, a cutting line with a smaller diameter can be correspondingly selected.
In a second aspect, embodiments of the present utility model provide a cutting machine for cutting a crystal ingot, the cutting machine comprising a cutting line according to the first aspect.
In the same way, since the element of the cutting line which is directly contacted with the crystal bar and generates friction with the crystal bar is the outer sheath, and the abrasion resistance of the outer sheath is relatively higher than that of the material steel, the cutting line is not easy to generate abrasion even if the crystal bar is cut for a long time compared with the traditional steel cutting line, thereby ensuring that the cut wafer meets the high-precision dimension requirement, ensuring that the surface quality of the cut wafer meets the requirement, greatly reducing the occurrence of line breaking condition in the process of cutting the crystal bar, avoiding the scrapping of the crystal bar which is cut, avoiding the production loss, and reducing the frequency of changing the cutting line in the cutting machine, reducing the maintenance time of equipment and improving the production efficiency because the cutting line is more abrasion resistant.
Preferably, the cutting machine further comprises two winding spindles disposed at a distance from each other, wherein a single cutting wire is wound on the two winding spindles in a plurality of turns to form a plurality of cutting wires which are in the same plane and parallel to each other between the two winding spindles, wherein the plurality of cutting wires are moved by the rotation of the two winding spindles.
In this way, it is possible to realize in an easier way the movement of the lengths of cutting lines lying in the same plane and parallel to each other with respect to the ingot, thus completing the cutting of the ingot.
Preferably, the cutting machine further comprises a feeding table for fixing the crystal bar and driving the crystal bar to move toward the multi-section cutting line in a direction perpendicular to a plane in which the multi-section cutting line is located. Thus, the ingot can be cut into a plurality of wafers.
Preferably, the two winding spindles are rotated such that the multi-segment cutting wire reciprocates. Thus, not only the cutting of the ingot can be realized, but also the length of the single cutting line can be reduced.
Preferably, the cutting machine further comprises a supply for supplying mortar to the multi-section cutting line.
In this way, the cutting line brings the abrasive in the mortar into the cutting joint of the crystal bar to be cut through high-speed movement, the crystal bar is cut through grinding, and in addition, the mortar can also play a role in cooling the cut crystal bar.
Preferably, the number of the suppliers is two and two of the suppliers are disposed at different sides of the ingot.
In this way, when the multi-stage cutting line reciprocates, the mortar can be made to enter the kerf of the ingot from different sides of the ingot.
Drawings
Fig. 1 is a schematic perspective view of a cutting line for cutting a ingot according to an embodiment of the present utility model;
FIG. 2 is a schematic cross-sectional view of a cutting line for cutting a ingot according to an embodiment of the present utility model taken along line A-A in FIG. 1;
FIG. 3 is a schematic cross-sectional view of a cutting line for cutting a ingot according to an embodiment of the present utility model taken along line B-B in FIG. 1;
fig. 4 is a schematic structural view of a cutting machine for cutting a boule according to an embodiment of the present utility model.
Detailed Description
In order to more clearly illustrate the embodiments of the present utility model or the technical solutions in the prior art, the technical solutions in the embodiments of the present utility model will be clearly and completely described below with reference to the drawings in the embodiments of the present utility model, and it is apparent that the described embodiments are only some embodiments of the present utility model, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.
The existing cutting lines for cutting the ingot R as shown in fig. 4 are generally made of steel, in which case, since the abrasion resistance of the steel is poor, after the ingot R is cut for a long time using such cutting lines, the cutting lines are worn out, and thus the cut wafer cannot meet the high-precision dimensional requirements and the surface quality of the wafer cannot meet the requirements, and even the cutting lines are broken, resulting in the rejection of the ingot R being cut, resulting in great production loss.
In this regard, referring to fig. 1 to 3, an embodiment of the present utility model provides a cutting line 10 for cutting a boule R as shown in fig. 4, the cutting line 10 may include:
a steel inner core 11;
and an outer sheath 12 covering the inner core 11, wherein the wear resistance of the material of the outer sheath 12 is greater than that of steel.
In the cutting line 10 according to the above embodiment of the present utility model, since the element which is in direct contact with the ingot R and generates friction with the ingot R is the sheath 12, and the abrasion resistance of the sheath 12 is relatively high compared to the material steel, the cutting line 10 according to the above embodiment of the present utility model is less likely to generate abrasion than the conventional steel cutting line even if the ingot R is cut for a long period of time, thereby enabling to ensure that the cut wafer meets the high precision dimension requirement and the surface quality of the cut wafer meets the requirement, and in addition, enabling to increase the lifetime of the cutting line 10, greatly reducing the occurrence of the break line condition during the cutting of the ingot R, not causing the rejection of the ingot R being cut, and avoiding the production loss.
For the specific material of the outer sheath 12, in a preferred embodiment of the present utility model, the material of the outer sheath 12 may be aramid nanofibers. The aramid nanofiber has a unique nanoscale structure, has the diameter of 3-30 nanometers and the length of 10 micrometers, has a large length-diameter ratio, plays an important role in interface reinforcement and material toughening in the preparation of a composite material as a construction unit, successfully solves the problem that macroscopic aramid fibers cannot be applied to the field of the composite material due to weak interface bonding caused by smooth surface and high chemical inertia, and meanwhile, the aramid nanofiber simultaneously retains the excellent mechanical property and temperature resistance of the aramid fibers, and particularly has the characteristics of low density, high strength (5-6 times of steel wires), high modulus, high toughness, excellent high temperature resistance (600 ℃) and good chemical corrosion resistance (acid and alkali resistance) and the like, and the durability of the cutting line 10 can be greatly improved by coating the aramid fibers on the periphery of the steel inner core 11. In addition, for a specific implementation manner of coating the outer circumference of the steel inner core 11 with the aramid nanofibers, an existing electrospinning method or a wet spinning method may be adopted.
In a preferred embodiment of the utility model, see fig. 2, the ratio between the radius r of the inner core 11 and the thickness t of the outer sheath 12 may be between 4 and 8. In this way, the cutting wire 10 can have sufficient wear-resistant layer to ensure wear resistance of the cutting wire 10, and also can have sufficient steel wire characteristics such as modulus, toughness and the like, so that the cutting wire can be more suitable for application in existing cutting machines.
In a preferred embodiment of the utility model, the diameter d of the cutting line 10 may be greater than 0.130mm. Thus, the cutting line 10 according to the present embodiment can be applied to cutting various existing crystal bars R with different diameters, for example, when a crystal bar R with a larger diameter needs to be cut, a cutting line 10 with a larger diameter can be selected accordingly, and when a crystal bar R with a smaller diameter needs to be cut, a cutting line 10 with a smaller diameter can be selected accordingly.
Referring to fig. 4, the embodiment of the present utility model also provides a cutting machine 1 for cutting a crystal bar R, and the cutting machine 1 may include a cutting line 10 according to various embodiments of the present utility model.
In the cutting machine 1 according to the above embodiment of the present utility model, as well, since the element of the cutting line 10 that is in direct contact with the ingot R and that generates friction with the ingot R is the sheath 12, and the abrasion resistance of the sheath 12 is relatively high compared to the material steel, the cutting line 10 is less likely to be worn than the conventional steel cutting line, even if the ingot R is cut for a long period of time, whereby it is possible to ensure that the cut wafer meets the high precision dimension requirement, and to ensure that the surface quality of the cut wafer meets the requirement, and furthermore, it is possible to increase the lifetime of the cutting line 10, greatly reduce the occurrence of the breakage during the cutting of the ingot R, not to cause the rejection of the ingot R being cut, to avoid the production loss, and in addition, since the cutting line 10 is more abrasion resistant, it is possible to reduce the frequency of replacement of the cutting line 10 in the cutting machine 1, reduce the equipment maintenance time, and improve the production efficiency.
In a preferred embodiment of the present utility model, referring to fig. 4, the cutting machine 1 may further include two winding spindles 20 disposed to be spaced apart from each other, wherein a single cutting wire 10 is wound on the two winding spindles 20 in a plurality of turns to form a multi-stage cutting wire in the same plane and parallel to each other between the two winding spindles 20, wherein the multi-stage cutting wire is moved by the rotation of the two winding spindles 20.
In this way, it is possible to realize in an easier way the movement of the plurality of cutting lines, which are in the same plane and parallel to each other, with respect to the ingot R, thus completing the cutting of the ingot R.
In a preferred embodiment of the present utility model, referring to fig. 4, the cutting machine 1 may further include a feeding table 30, the feeding table 30 being configured to fix the ingot R and drive the ingot R to move toward the multi-stage cutting line in a direction perpendicular to a plane in which the multi-stage cutting line is located. Thus, the ingot R can be cut into a plurality of wafers.
In a preferred embodiment of the present utility model, referring to fig. 4, the two winding spindles 20 may be rotated such that the multi-stage cutting wire reciprocates. In this way, not only the cutting of the ingot R can be achieved, but also the length of the single cutting line 10 can be reduced.
In a preferred embodiment of the present utility model, referring to fig. 4, the cutter 1 may further comprise a supply 40, the supply 40 being for supplying mortar S to the multi-stage cutting line. In this way, the cutting line 10 brings the abrasive in the mortar S into the kerf of the ingot R to be cut by high-speed movement, and cuts the ingot R by grinding, and in addition, the mortar S can also serve to cool down the cut ingot R.
In a preferred embodiment of the present utility model, referring to fig. 4, the number of the suppliers 40 may be two and two of the suppliers 40 are disposed at different sides of the ingot R. In this way, when the multi-stage cutting line reciprocates, the mortar S can be made to enter the kerf of the ingot R from different sides of the ingot R.
The foregoing is merely illustrative of the present utility model, and the present utility model is not limited thereto, and any changes or substitutions easily contemplated by those skilled in the art within the scope of the present utility model should be included in the present utility model. Therefore, the protection scope of the present utility model shall be subject to the protection scope of the claims.
Claims (10)
1. A cutting line for cutting a boule, the cutting line comprising:
a steel inner core;
and the outer sheath is used for coating the inner core, and the wear resistance of the material of the outer sheath is greater than that of steel.
2. The cutting wire according to claim 1, wherein the sheath is made of aramid nanofibers.
3. The cutting wire according to claim 1 or 2, characterized in that the ratio between the radius of the inner core and the thickness of the outer sheath is comprised between 4 and 8.
4. A cutting line according to claim 3, characterized in that the diameter of the cutting line is greater than 0.130mm.
5. A cutting machine for cutting a crystal ingot, characterized in that it comprises a cutting line according to any one of claims 1 to 4.
6. The cutting machine of claim 5, further comprising two winding spindles disposed spaced apart from each other, wherein a single wire is wound in multiple turns around the two winding spindles to form a multi-segment wire in a same plane and parallel to each other between the two winding spindles, wherein the multi-segment wire is moved by rotation of the two winding spindles.
7. The cutting machine of claim 6, further comprising a feed table for holding the ingot and driving the ingot toward the multi-segmented cutting line in a direction perpendicular to a plane in which the multi-segmented cutting line lies.
8. The cutter of claim 6, wherein the two winding spindles are rotated to reciprocate the multi-segment cutting wire.
9. The cutter of claim 8, further comprising a supply for supplying mortar to the multi-segment cutting line.
10. The cutting machine of claim 9, wherein the number of supplies is two and two of the supplies are disposed on different sides of the ingot.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321355256.5U CN219855383U (en) | 2023-05-31 | 2023-05-31 | Cutting line for cutting crystal bar and cutting machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321355256.5U CN219855383U (en) | 2023-05-31 | 2023-05-31 | Cutting line for cutting crystal bar and cutting machine |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN219855383U true CN219855383U (en) | 2023-10-20 |
Family
ID=88347445
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202321355256.5U Active CN219855383U (en) | 2023-05-31 | 2023-05-31 | Cutting line for cutting crystal bar and cutting machine |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN219855383U (en) |
-
2023
- 2023-05-31 CN CN202321355256.5U patent/CN219855383U/en active Active
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| GR01 | Patent grant | ||
| GR01 | Patent grant |