CN216831665U

CN216831665U - Wire cutting device

Info

Publication number: CN216831665U
Application number: CN202123319625.9U
Authority: CN
Inventors: 郭宇轩
Original assignee: Xian Eswin Material Technology Co Ltd
Current assignee: Xian Eswin Material Technology Co Ltd
Priority date: 2021-12-27
Filing date: 2021-12-27
Publication date: 2022-06-28
Anticipated expiration: 2031-12-27

Abstract

The utility model relates to a wire cutting device, including at least a set of spool, every group spool is including receiving spool and paying out reel, at least a set of spool has the first set of spool of first cutting wire including the winding, first cutting wire is including the cutting line section that is used for carrying out the cutting, the cutting line section for cutting thread and spiral winding in the compound line of line formation is assisted in the cutting on the outer peripheral face of cutting thread.

Description

Wire cutting device

Technical Field

The utility model relates to the field of semiconductor technology, especially, relate to a wire cutting device.

Background

The silicon wafer processing technology mainly comprises two types of multi-line mortar cutting and inner circle cutting. Compared with inner circle cutting, the wire cutting has the advantages of high cutting effect, good cutting quality and high wafer yield, so that the wire cutting is widely applied. The principle of the wire cutting technology is that a cutting wire forms a steel wire mesh with different intervals through a group of grooved wheels, abrasive materials are brought into a processing area of materials to be cut to be ground through high-speed reciprocating motion of the cutting wire, and a workpiece to be cut is fed in the vertical direction through lifting of a workbench, so that the workpiece is simultaneously cut into a plurality of sheets with required sizes and shapes. However, the current wire cutting apparatus has the following problems: firstly, the method comprises the following steps: the type of the steel wire for cutting is single, only one steel wire is needed, and the wire breakage risk exists. Secondly, the method comprises the following steps: the mortar carrying capacity of one steel wire is poor, the processing time is long, and the quality of the processed silicon wafer is poor.

SUMMERY OF THE UTILITY MODEL

In order to solve the technical problem, the utility model provides a wire cutting device solves the copper wire that carries out the cutting and carries the mortar ability poor, easy broken string scheduling problem.

In order to achieve the above object, the embodiment of the present invention adopts the following technical solutions: a wire cutting device comprises at least one group of bobbins, each group of bobbins comprises a wire winding shaft and a wire unwinding shaft, the at least one group of bobbins comprises a first group of bobbins wound with first cutting wires, the first cutting wires comprise cutting wire sections used for cutting, and the cutting wire sections are composite wires formed by a cutting main wire and cutting auxiliary wires spirally wound on the outer peripheral surface of the cutting main wire.

Optionally, the cutting main line and the cutting auxiliary line are made of different materials.

Optionally, the main cutting line is made of a steel wire, and the auxiliary cutting line is made of polyethylene.

Optionally, the wire diameter of the auxiliary cutting wire is smaller than the wire diameter of the main cutting wire.

Optionally, the diameter of the cutting main line is 0.05-0.2mm, and the diameter of the cutting auxiliary line is 0.05-0.2 mm.

Optionally, in the axial direction of the cutting main line, the spiral pitch of the cutting auxiliary line is 5-10 cm.

Optionally, at least two groups of spools are included, and the diameters of the cutting lines on the at least two groups of spools are different.

Optionally, the first group of bobbins includes a first pay-off shaft, a first take-up shaft, and a cutting structure located between the first pay-off shaft and the first take-up shaft;

the first pay-off shaft comprises a first sub pay-off shaft wound with the cutting main line and a second sub pay-off shaft wound with the cutting auxiliary line;

the cutting structure comprises a plurality of winding grooves extending along the extending direction of the first cutting line and a cutting part located between the winding grooves and the first winding shaft, the cutting main line and the cutting auxiliary line share one winding groove, and one end of the cutting auxiliary line is wound on the first winding shaft after rotating for a preset angle, so that the cutting auxiliary line is wound on the cutting main line to form the composite line entering the cutting part in the transmission process of the first cutting line.

Optionally, a plurality of winding guide wheels are arranged between the first paying-off shaft and the first winding shaft.

Optionally, an adjusting structure for adjusting the tension of the first cutting line is arranged between the first pay-off shaft and the first take-up shaft.

The utility model has the advantages that: the cutting line segment for cutting is composed of a cutting main line and a composite line spirally wound on the peripheral surface of the cutting main line, so that the mechanical strength of the cutting line is improved, and the mortar carrying capacity of the cutting line is improved.

Drawings

FIG. 1 is a schematic structural view of a wire cutting apparatus according to an embodiment of the present invention;

fig. 2 shows a schematic structural view of the winding slot in the embodiment of the present invention.

10 cutting the main line; 20, cutting auxiliary lines; 30 composite wires; 100 a first payoff shaft; 101 a first sub paying-off shaft; 102, a second sub pay-off shaft; 200 a first take-up shaft; 400 cutting the structure; 500 winding a guide wheel; 600 an adjustment mechanism; 601, swinging an arm; 602 an adjustment wheel; 700 winding slots.

Detailed Description

In order to make the purpose, technical solution and advantages of the embodiments of the present invention clearer, the drawings of the embodiments of the present invention are combined below to clearly and completely describe the technical solution of the embodiments of the present invention. It is to be understood that the embodiments described are only some of the embodiments of the present invention, and not all of them. All other embodiments, which can be derived from the description of the embodiments of the present invention by a person skilled in the art, are within the scope of the present invention.

In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplification of description, but do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.

In the process of wire cutting, the processing table slowly descends, the silicon single crystal rod is contacted with the cutting wire for cutting, and the cutting wire reciprocates at a high speed to cut the silicon rod. At present, a wire cutting machine generally uses a single pay-off reel and a single take-up reel, wherein a cutting wire of 400 plus 1000 kilometers is wound on the pay-off reel at the beginning, and no cutting wire is wound on the take-up reel, and the specific reciprocating cutting process is as follows: the paying-off shaft starts paying off, the take-up shaft takes up the wire, the speed of the cutting wire is gradually increased and advances for a certain distance after reaching the set cutting speed, and then the speed is reduced to 0; then, the take-up shaft starts to pay off, the pay-off shaft starts to take up, the speed of the cutting line is gradually increased, the cutting line advances for a certain distance after reaching the set cutting speed, and then the speed is reduced to 0; and repeating the two processes until the crystal bar is cut, wherein the advancing distance of the pay-off shaft is greater than that of the take-up shaft, so that the cutting lines on the pay-off shaft are gradually reduced, and the cutting lines on the take-up shaft are gradually increased until the cutting lines on the pay-off shaft are used up.

The cutting line is generally a steel wire, has single type, is easy to break in the cutting process, has poor mortar carrying capacity, long processing time and reduced efficiency.

Referring to fig. 1 (only one set of spools is shown in fig. 1), in order to solve the above problem, the present embodiment provides a wire cutting device, which includes at least one set of spools, each set of spools includes a take-up spool and a pay-off spool, the at least one set of spools includes a first set of spools wound with a first cutting wire, the first cutting wire includes a cutting wire segment for cutting, and the cutting wire segment is a composite wire 30 formed by a cutting main wire 10 and a cutting auxiliary wire 20 spirally wound on an outer circumferential surface of the cutting main wire 10.

The composite wire 30 is used for cutting, so that the mechanical strength of the cutting wire is improved, the wire breakage is avoided, and the composite wire 30 is composed of the cutting main wire 10 and the auxiliary cutting wire 20 spirally wound on the peripheral surface of the cutting main wire 10, so that the mortar carrying capacity of the cutting wire is enhanced, and the cutting efficiency is improved.

The first cutting line may have a plurality of specific structural forms, the materials forming the main cutting line 10 and the auxiliary cutting line 20 may be the same or different, in some embodiments of this embodiment, the main cutting line 10 and the auxiliary cutting line 20 are made of different materials, and different properties of different materials are superimposed, for example, the main cutting line 10 is made of a steel wire, the auxiliary cutting line 20 is made of polyethylene, the steel wire has high heat dissipation efficiency and low expansion coefficient, and the surface energy of the polyethylene line can enhance the capability of carrying mortar.

In some embodiments, the main cutting line 10 is made of a steel wire, and the steel wire may be made of steel having a C content of 0.5 to 1.0%, steel having a Mn content of 0.05 to 0.1%, or steel having a Cr content of 0.01 to 0.1%, but not limited thereto.

In some embodiments of this embodiment, the diameter of the auxiliary cutting wire 20 is smaller than that of the main cutting wire 10.

The line diameter of the auxiliary cutting line 20 is smaller than that of the main cutting line 10, so that the auxiliary cutting line 20 is wound on the main cutting line 10, the overall line diameter of the first cutting line is reduced, and cutting is facilitated.

In some embodiments of this embodiment, the diameter of the main cutting line 10 is 0.05-0.2mm, and the diameter of the auxiliary cutting line 20 is 0.05-0.2mm, but not limited thereto.

In some embodiments of the present embodiment, the spiral pitch of the cutting auxiliary line 20 is 5 to 10cm in the axial direction of the cutting main line 10.

The auxiliary cutting wire 20 is spirally wound on the outer circumferential surface of the main cutting wire 10 at a certain interval, so that the mechanical strength of the first cutting wire is enhanced, and the mortar carrying capacity is enhanced, and the auxiliary cutting wire 20 is wound on the outer circumferential surface of the main cutting wire 10, which is equivalent to that a plurality of grooves are formed on the outer circumferential surface of the main cutting wire 10, so as to increase the space for accommodating the mortar.

In some embodiments of this embodiment, the winding length of the cutting main line 10 is 150-700km, and the winding length of the cutting auxiliary line 20 is 150-700 km.

Generally, the line of cutting twines can have certain thickness on the spool, and when this thickness exceeded a definite value, outside wire winding can lead to the fact the influence to inside wire winding because outside wire winding is used for the cutting earlier, and in reciprocal cutting process, the mortar can be taken the unwrapping wire epaxially, causes the pollution to influence inside wire winding quality. In response to this problem, in some embodiments of the present embodiment, the wire cutting device is provided with at least two sets of spools to reduce the thickness of the cutting wire wound on each set of spools, thereby improving the effect on the cutting quality due to the winding thickness of the cutting wire.

In some embodiments of this embodiment, the wire cutting device comprises at least two sets of spools, the diameters of the wires wound on the at least two sets of spools being different. For example, the wire cutting device further includes at least a second group of spools on which the second cutting wire is wound with a different wire diameter from the first cutting wire (the second cutting wire has the same structure as the first cutting wire).

When cutting is performed, the cutting process is divided into at least two cutting periods corresponding to the number of at least two groups of spools, and cutting lines with different wire diameters are sequentially used for cutting according to the sequence of the wire diameters from small to large, for example, the at least two groups of spools include a first group of spools and a second group of spools, the wire diameter of the first cutting line wound on the first group of spools is smaller than that of the second cutting line wound on the second group of spools (the structure of the first cutting line is the same as that of the second cutting line). The cutting process is divided into two cutting time intervals, in the first cutting time interval (initial cutting time interval), the first cutting line is used for cutting, in the second cutting time interval, the second cutting line is used for cutting, and the mortar cutting capacity is reduced along with the increase of the cutting times, so that the quality reduction caused by the reduction of the mortar cutting capacity is compensated by increasing the line diameter of the cutting line (the thicker the cutting line is, the stronger the mortar carrying capacity is, and the stronger the relative cutting capacity is).

The diameter of the cutting wires wound on the different sets of spools can be set according to the actual requirement, for example, the diameter of the first cutting wire is 0.12-0.14mm, and the diameter of the second cutting wire is 0.14-0.16mm, but not limited thereto.

In some embodiments of this embodiment, the wire cutting device includes at least two sets of spools, and the material wound on the at least two sets of spools is different.

For example, in some embodiments of the present embodiment, the first cutting line is a composite line 30 formed by combining the main cutting line 10 and the auxiliary cutting line 20, so that the first set of spools includes a pay-off spool and a take-up spool. For example, in some embodiments of the present invention, the first set of spools includes a first payout spool 100, a first take-up spool 200, and a cutting structure 400 located between the first payout spool 100 and the first take-up spool 200;

the first pay-off shaft 100 comprises a first sub pay-off shaft 101 wound around the cutting main wire 10 and a second sub pay-off shaft 102 wound around the cutting auxiliary wire 20;

the cutting structure 400 includes a plurality of winding slots 700 extending along an extending direction of the first cutting line, and a cutting portion located between the winding slots 700 and the first winding shaft 200, wherein the cutting main line 10 and the cutting auxiliary line 20 share one winding slot 700, and one end of the cutting auxiliary line 20 is rotated by a predetermined angle and then wound on the first winding shaft 200, so that the cutting auxiliary line 20 is wound on the cutting main line 10 to form the composite line 30 entering the cutting portion during the transmission of the first cutting line.

Fig. 2 is a schematic structural view illustrating a winding slot 700, in which the auxiliary cutting wire 20 is wound around the first winding shaft 200 after being rotated by a predetermined angle, such that the auxiliary cutting wire 20 has a certain torque, such that the main cutting wire 10 and the auxiliary cutting wire 20 share one winding slot 700, and when the main cutting wire 10 and the auxiliary cutting wire 20 reciprocate at the same speed, the auxiliary cutting wire 20 is wound around the main cutting wire 10 to form a composite wire 30, and is cut by the composite wire 30.

It should be noted that the cutting portion may employ a cutting component in the prior art (for example, a cutting platform for carrying the material to be cut, etc.), and is not limited herein.

The preset angle for rotating the auxiliary cutting line 20 may be set according to actual needs, and the auxiliary cutting line 20 may rotate by different angles, so that the auxiliary cutting line 20 has different torques, for example, 90 to 180 degrees, and the torque of the auxiliary cutting line 20 may be 0 to 100N · m, but is not limited thereto.

The number of the winding slots 700 may be set according to actual needs, for example, when a boule is cut, the number of silicon wafers to be cut may be set, but is not limited thereto.

In some embodiments of the present invention, a plurality of winding guide wheels 500 are disposed between the first paying out reel 100 and the first winding reel 200.

The number and the arrangement position of the winding guide wheels 500 can be set according to actual needs.

In this embodiment, an adjusting structure 600 for adjusting the tension of the first cutting line is disposed between the first pay-off reel 100 and the first take-up reel 200.

The adjusting structure 600 comprises a swing arm 601 and an adjusting wheel 602 arranged at the free end of the swing arm 601, and the angle between the extending direction of the swing arm 601 and the vertical direction is adjusted to adjust the tension of the first cutting line.

In this embodiment, two sets of the adjusting structures 600 are provided, but not limited thereto.

It is to be understood that the above embodiments are merely exemplary embodiments adopted to illustrate the principles of the present invention, and the present invention is not limited thereto. It will be apparent to those skilled in the art that various modifications and improvements can be made without departing from the spirit and scope of the invention, and such modifications and improvements are also considered to be within the scope of the invention.

Claims

1. A wire cutting device comprises at least one group of spools, each group of spools comprises a wire take-up shaft and a wire pay-off shaft, and the wire cutting device is characterized in that the at least one group of spools comprises a first group of spools wound with a first cutting wire, the first cutting wire comprises a cutting wire section used for cutting, and the cutting wire section is a composite wire formed by a cutting main wire and an auxiliary cutting wire spirally wound on the outer peripheral surface of the cutting main wire.

2. The wire cutting device according to claim 1, wherein the main cutting wire and the auxiliary cutting wire are made of different materials.

3. The wire cutting device according to claim 2, wherein the cutting main wire is made of steel wire, and the cutting auxiliary wire is made of polyethylene.

4. The wire cutting device according to claim 1, wherein a wire diameter of the cutting auxiliary wire is smaller than a wire diameter of the cutting main wire.

5. The wire cutting device according to claim 4, wherein the wire diameter of the main cutting wire is 0.05-0.2mm, and the wire diameter of the auxiliary cutting wire is 0.05-0.2 mm.

6. The wire cutting device according to claim 2, wherein a spiral pitch of the cutting auxiliary wire in an axial direction of the cutting main wire is 5-10 cm.

7. A cutting device according to claim 1 including at least two sets of spools, the diameter of the cutting line on at least two sets of spools being different.

8. The wire cutting device of claim 1 wherein the first set of spools includes a first payout spool, a first take-up spool, and a cutting structure positioned between the first payout spool and the first take-up spool;

9. The wire cutting device of claim 8 wherein a plurality of wire guide wheels are disposed between the first payout spindle and the first take-up spindle.

10. The wire cutting device according to claim 8, wherein an adjusting structure for adjusting the tension of the first cutting wire is provided between the first reel and the first reel.