CN219834444U - Atmospheric pressure plasma equipment for realizing wide-amplitude glow discharge - Google Patents
Atmospheric pressure plasma equipment for realizing wide-amplitude glow discharge Download PDFInfo
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- CN219834444U CN219834444U CN202321363920.0U CN202321363920U CN219834444U CN 219834444 U CN219834444 U CN 219834444U CN 202321363920 U CN202321363920 U CN 202321363920U CN 219834444 U CN219834444 U CN 219834444U
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- spray head
- glow discharge
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- pressure plasma
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- 239000007921 spray Substances 0.000 claims abstract description 24
- 239000000919 ceramic Substances 0.000 claims abstract description 6
- 230000001105 regulatory effect Effects 0.000 claims description 11
- 238000011282 treatment Methods 0.000 abstract description 10
- 238000004140 cleaning Methods 0.000 abstract description 6
- 239000000463 material Substances 0.000 abstract description 3
- 230000005611 electricity Effects 0.000 abstract description 2
- 230000003068 static effect Effects 0.000 abstract description 2
- 239000010409 thin film Substances 0.000 abstract description 2
- 208000028659 discharge Diseases 0.000 description 20
- 230000009286 beneficial effect Effects 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 230000003213 activating effect Effects 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000010891 electric arc Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000010248 power generation Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 238000004381 surface treatment Methods 0.000 description 1
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- Plasma Technology (AREA)
Abstract
The utility model relates to the field of DBD wide-amplitude glow discharge, and discloses normal-pressure plasma equipment for realizing wide-amplitude glow discharge, which comprises a shell and a spray head, wherein a gas flow control structure is arranged in the shell, a high-voltage pulse source is arranged in the shell, a direct-current power supply is fixedly arranged on the side surface of the high-voltage pulse source, the gas flow control structure is connected with the spray head, a plasma spray orifice is arranged on one side of the spray head, an air inlet interface is arranged on the spray head, an electric inlet is arranged at the other end of the spray head, three groups of pressure equalizing air passages are arranged in the spray head, a wide electrode electrically connected with the electric inlet is arranged in the spray head, ceramic is arranged on the outer side of the wide electrode, and the normal-pressure plasma equipment for realizing wide-amplitude glow discharge has low treatment temperature, can be used for thin film and heat-sensitive material treatment, is free of static electricity, and can be used for cleaning precise components.
Description
Technical Field
The utility model relates to the field of DBD wide-amplitude glow discharge, in particular to normal pressure plasma equipment for realizing wide-amplitude glow discharge.
Background
The normal pressure plasma cleaning equipment is surface treatment equipment which uses a direct current high-voltage or high-frequency high-voltage power supply to ionize the gas between the cathode and the anode to generate plasma under normal pressure environment, and then the gas drives the plasma to the surface of a product so as to achieve the effect of cleaning and activating. The gas becomes a conductor after ionization, the discharge mode is converted from wire-like power generation to spark discharge, and the discharge is concentrated at the tip position, so that the discharge area is limited, and the spark discharge treatment uniformity is poor and accompanied by high voltage.
Therefore, most of the existing cleaning applications with larger area are repeated treatments by the spray heads in reciprocating motion or are treated by using a plurality of spray heads side by side, and the existing normal pressure jet spray head technology has the following defects: the single treatment width is limited, and large-area cleaning is difficult to realize;
arc discharge, poor process uniformity; along with high pressure and high heat, heat sensitive materials and electronic components are not suitable to be treated, and therefore, a normal pressure plasma device for realizing wide-amplitude glow discharge is provided.
Disclosure of Invention
(one) solving the technical problems
Aiming at the defects of the prior art, the utility model provides normal pressure plasma equipment for realizing wide-amplitude glow discharge, and solves the problems.
(II) technical scheme
In order to achieve the above purpose, the present utility model provides the following technical solutions: the utility model provides an realize ordinary pressure plasma equipment of broad width glow discharge, includes equipment shell and shower nozzle, the inside of shell is provided with gas flow control structure, the inside of shell is provided with high-voltage pulse source, the side fixed mounting of high-voltage pulse source has DC power supply, and gas flow control structure is connected with the shower nozzle, and the plasma jet orifice has been seted up to one side of shower nozzle, installs the interface that admits air on the shower nozzle, and the other one end of shower nozzle is provided with into electric inlet, the inside three pressure equalizing air flue that is provided with of shower nozzle, the inside of shower nozzle is provided with the broad width electrode with electric connection of intaking electric inlet, the outside of broad width electrode is provided with pottery.
Preferably, the power inlet comprises a wiring terminal and a wiring protection cover, the wiring protection cover is arranged on the outer side of the wiring terminal, and the wiring terminal is connected with the wide electrode.
Preferably, the plasma jet port is rectangular and long.
Preferably, the gas flow control structure comprises a pressure regulating valve, a throttle valve and a flowmeter, wherein the pressure regulating valve and the flowmeter are fixedly arranged on the side face of the equipment shell, the touch screen, the throttle valve and the switch are fixedly arranged on the other side of the equipment shell, the pressure regulating valve, the flowmeter and the throttle valve are connected through pipelines, and the output end of the throttle valve is connected with the air inlet interface through a pipeline.
Preferably, the side surface of the equipment shell is fixedly provided with I/O.
(III) beneficial effects
Compared with the prior art, the utility model provides the normal pressure plasma equipment for realizing wide glow discharge, which has the following beneficial effects:
1. the normal pressure plasma equipment for realizing wide glow discharge can realize wide treatment, and the single treatment width can reach more than 500 mm.
2. The atmospheric plasma equipment for realizing wide-width glow discharge ensures the treatment uniformity due to the glow discharge characteristic.
3. The normal pressure plasma equipment for realizing wide glow discharge has low treatment temperature, can be used for treating thin films and thermosensitive materials, has no static electricity, and can be used for cleaning precise components.
Drawings
FIG. 1 is a schematic perspective view of the present utility model;
fig. 2 is a schematic cross-sectional view of a spray head.
In the figure: 1. a touch screen; 2. a throttle valve; 3. a switch; 4. a high voltage pulse source; 5. a pressure regulating valve; 6. I/O; 7. a flow meter; 8. a direct current power supply; 9. an air inlet interface; 10. an electric inlet; 11. a plasma jet port; 12. binding posts; 13. a wiring protection cover; 14. a pressure equalizing air passage; 15. a ceramic; 16. wide-width electrode.
Detailed Description
The following description of the embodiments of the present utility model will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present utility model, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.
Referring to fig. 1-2, an atmospheric pressure plasma device for realizing wide glow discharge comprises a device housing and a nozzle, wherein a gas flow control structure is arranged in the housing, a high-voltage pulse source 4 is arranged in the housing, a direct-current power supply 8 is fixedly arranged on the side surface of the high-voltage pulse source 4, the gas flow control structure is connected with the nozzle, a plasma jet orifice 11 is arranged on one side of the nozzle, an air inlet interface 9 is arranged on the nozzle, an electric inlet 10 is arranged at the other end of the nozzle, three groups of pressure equalizing air passages 14 are arranged in the nozzle, a wide electrode 16 electrically connected with the electric inlet 10 is arranged in the nozzle, and ceramic 15 is arranged on the outer side of the wide electrode 16.
Further, the power inlet 10 includes a terminal 12 and a terminal protection cover 13, the terminal protection cover 13 is disposed outside the terminal 12, and the terminal 12 is connected to the wide electrode 16.
Further, the plasma jet port 11 has a rectangular elongated shape.
Further, the gas flow control structure comprises a pressure regulating valve 5, a throttle valve 2 and a flowmeter 7, the pressure regulating valve 5 and the flowmeter 7 are fixedly arranged on the side face of the equipment shell, the touch screen 1, the throttle valve 2 and the switch 3 are fixedly arranged on the other side of the equipment shell, the pressure regulating valve 5, the flowmeter 7 and the throttle valve 2 are connected through pipelines, and the output end of the throttle valve 2 is connected with the air inlet interface 9 through the pipelines.
Further, I/O6 is fixedly installed on the side face of the equipment shell.
Working principle: the switch 3 is closed, the device is started, the pressure regulating valve 5, the throttle valve 2 and the flowmeter 7 control the gas flow, the gas is connected into the gas inlet 9 of the spray head through a gas pipe, and the gas is uniformly sprayed out of the plasma spray port 11 through the pressure equalizing air passage 14 in the spray head. After the relevant parameters are set, the touch screen 1 can output a given signal to the high-voltage pulse source 4, the pulse voltage output by the high-voltage pulse source 4 is conducted to the wide electrode 16 of the spray head through the high-voltage cable and the binding post 12, so that the ceramic 15 wrapping the electrode is polarized, electrons are accumulated on the surface, and finally a large amount of charged particles are diffused to form macroscopic continuous discharge. The ceramic 15 can limit the conversion of discharge to arc, maintain stable glow plasma discharge, and ensure treatment uniformity. Meanwhile, the equipment can realize external control, information reading, alarming and running state output through the I/O6.
Although embodiments of the present utility model have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made therein without departing from the principles and spirit of the utility model, the scope of which is defined in the appended claims and their equivalents.
Claims (5)
1. The atmospheric pressure plasma equipment for realizing wide-width glow discharge is characterized by comprising an equipment shell and a spray head, wherein a gas flow control structure is arranged in the shell, a high-voltage pulse source (4) is arranged in the shell, a direct-current power supply (8) is fixedly arranged on the side face of the high-voltage pulse source (4), the gas flow control structure is connected with the spray head, a plasma spray opening (11) is formed in one side of the spray head, an air inlet interface (9) is arranged on the spray head, an electric inlet (10) is formed in the other end of the spray head, three groups of pressure equalizing air passages (14) are formed in the spray head, wide electrodes (16) electrically connected with the electric inlet (10) are arranged in the spray head, and ceramic (15) is arranged on the outer side of the wide electrodes (16).
2. An atmospheric pressure plasma apparatus for realizing broad-width glow discharge according to claim 1, wherein: the power inlet (10) comprises a binding post (12) and a wiring protection cover (13), the wiring protection cover (13) is arranged on the outer side of the binding post (12), and the binding post (12) is connected with a wide electrode (16).
3. An atmospheric pressure plasma apparatus for realizing broad-width glow discharge according to claim 1, wherein: the plasma jet (11) is rectangular and long.
4. An atmospheric pressure plasma apparatus for realizing broad-width glow discharge according to claim 1, wherein: the gas flow control structure comprises a pressure regulating valve (5), a throttle valve (2) and a flowmeter (7), wherein the pressure regulating valve (5) and the flowmeter (7) are fixedly arranged on the side face of the touch screen (1), the throttle valve (2) and the switch (3) are fixedly arranged on the other side of the touch screen (1), the pressure regulating valve (5), the flowmeter (7) and the throttle valve (2) are connected through pipelines, and the output end of the throttle valve (2) is connected with an air inlet interface (9) through a pipeline.
5. An atmospheric pressure plasma apparatus for realizing broad-width glow discharge according to claim 1, wherein: I/O (6) is fixedly arranged on the side face of the equipment shell.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321363920.0U CN219834444U (en) | 2023-05-31 | 2023-05-31 | Atmospheric pressure plasma equipment for realizing wide-amplitude glow discharge |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321363920.0U CN219834444U (en) | 2023-05-31 | 2023-05-31 | Atmospheric pressure plasma equipment for realizing wide-amplitude glow discharge |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN219834444U true CN219834444U (en) | 2023-10-13 |
Family
ID=88245448
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202321363920.0U Active CN219834444U (en) | 2023-05-31 | 2023-05-31 | Atmospheric pressure plasma equipment for realizing wide-amplitude glow discharge |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN219834444U (en) |
-
2023
- 2023-05-31 CN CN202321363920.0U patent/CN219834444U/en active Active
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