CN219800818U - Vacuum chuck with expansion function - Google Patents
Vacuum chuck with expansion function Download PDFInfo
- Publication number
- CN219800818U CN219800818U CN202320917277.5U CN202320917277U CN219800818U CN 219800818 U CN219800818 U CN 219800818U CN 202320917277 U CN202320917277 U CN 202320917277U CN 219800818 U CN219800818 U CN 219800818U
- Authority
- CN
- China
- Prior art keywords
- suction
- circular
- contact sensors
- holes
- box
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000001179 sorption measurement Methods 0.000 claims abstract description 67
- 125000006850 spacer group Chemical group 0.000 claims description 13
- 230000029058 respiratory gaseous exchange Effects 0.000 claims description 2
- 238000005192 partition Methods 0.000 abstract description 4
- 239000013078 crystal Substances 0.000 description 6
- 238000001514 detection method Methods 0.000 description 3
- 238000004806 packaging method and process Methods 0.000 description 3
- 235000012431 wafers Nutrition 0.000 description 3
- 238000004891 communication Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Landscapes
- Manipulator (AREA)
Abstract
The utility model discloses a vacuum chuck with an expansion function, which belongs to the technical field of vacuum chucks and comprises a circular adsorption box, wherein an air suction pipe is arranged at the top of the circular adsorption box, a plurality of inner suction holes are formed in the bottom of the circular adsorption box, and a plurality of middle suction holes are formed in the bottom of the circular adsorption box. According to the utility model, the inner suction hole, the middle suction hole and the outer suction hole are arranged at different positions on the bottom surface of the circular suction box, the outer partition ring and the inner partition ring are utilized to separate the areas above the inner suction hole, the middle suction hole and the outer suction hole of the inner cavity of the circular suction box, in addition, the first electric push rod and the second electric push rod drive the inner baffle ring block and the outer baffle ring block to move, and the inner baffle ring block and the outer baffle ring block are utilized to seal the upper parts of the middle suction hole and the outer suction hole, so that the suction area below the suction cup is adjusted, the function of expanding the suction force of the suction cup is realized, and the function of adsorbing and transferring grains with different sizes is realized.
Description
Technical Field
The utility model relates to the technical field of vacuum chucks, in particular to a vacuum chuck with an expanding function.
Background
In the semiconductor manufacturing process, circuit patterns are transplanted onto manufactured wafers, the finished wafers are sent to a downstream IC packaging factory for packaging and testing, the wafers are cut into rectangular grains before packaging, the grains are adhered to a PCB, and then the joints of the grains are welded to the PCB, wherein a transfer mechanism is often needed to transfer smaller grains onto the PCB, and a vacuum chuck is generally needed to transfer the grains.
Through searching, the utility model patent with the bulletin number of CN201455844U discloses a grain sucker which comprises a sucker body, an air pipe and an exhaust fan, wherein one surface of the sucker body is provided with a plurality of small cavity bodies, the other surface of the sucker body is provided with an opening connected with the air pipe, the opening of the sucker body is connected with the air pipe, and the air pipe is connected with the exhaust fan; the suction fan is used for sucking air to form negative pressure in the cavity of the sucker body, and the crystal grains are attached to the surface of the sucker body with small holes, so that the crystal grains are moved, and the sucker is convenient to use. However, the above patent has the following disadvantages: the small hole cavities below the sucker are fixed, and only grains with certain size can be adsorbed and transferred. For this purpose we propose a vacuum chuck with expansion function.
Disclosure of Invention
Aiming at the problems in the prior art, the utility model aims to provide a vacuum chuck with an expanding function.
In order to solve the problems, the utility model adopts the following technical scheme:
the utility model provides a vacuum chuck with expansion function, includes circular adsorption case, the top of circular adsorption case is provided with the breathing pipe, a plurality of interior suction holes have been seted up to the bottom of circular adsorption case, a plurality of well suction holes have been seted up to the bottom of circular adsorption case, a plurality of outer suction holes have been seted up to the bottom of circular adsorption case inner chamber, the bottom of circular adsorption case inner chamber just is located and is provided with interior spacer ring between interior suction hole and the well suction hole, the bottom of circular adsorption case inner chamber just is located and is provided with outer spacer ring between well suction hole and the outer suction hole, be provided with outer suction chamber between outer spacer ring and the interior spacer ring, the top of circular adsorption case is provided with first electric putter, the output of first electric putter extends to the inner chamber of circular adsorption case and fixedly connected with inner retaining ring piece, the top of circular adsorption case is provided with the second electric putter, the output of second electric putter extends to the inner chamber of circular adsorption case and fixedly connected with outer retaining ring piece.
As a preferable scheme of the utility model, an anti-slip pad is arranged at the bottom of the circular adsorption box, a plurality of first contact sensors are fixedly arranged at the bottom of the circular adsorption box, a plurality of second contact sensors are fixedly arranged at the bottom of the circular adsorption box, a plurality of third contact sensors are fixedly arranged at the bottom of the circular adsorption box, a plurality of avoidance holes are formed in the anti-slip pad, the first contact sensors, the second contact sensors and the third contact sensors are respectively positioned in inner cavities of the avoidance holes, a plurality of adsorption holes are formed in the anti-slip pad, the positions of the adsorption holes are respectively corresponding to the inner adsorption holes, the middle adsorption holes and the outer adsorption holes, and the bottom surfaces of the anti-slip pad are respectively leveled with the first contact sensors, the second contact sensors and the third contact sensors.
As a preferable scheme of the utility model, the outer baffle ring block is positioned right above the inner cavity of the outer suction chamber, and the external shape size of the outer baffle ring block is matched with the size of the inner cavity of the outer suction chamber.
As a preferable scheme of the utility model, the inner baffle ring block is positioned right above the inner cavity of the inner suction chamber, and the outer shape size of the inner baffle ring block is matched with the inner cavity size of the inner suction chamber.
As a preferable scheme of the utility model, a plurality of the internal suction holes are circumferentially arranged at the center of the circular adsorption box, a plurality of the first contact sensors are circumferentially arranged at the center of the circular adsorption box, and the internal suction holes and the first contact sensors are positioned on the same virtual circle.
As a preferable scheme of the utility model, the plurality of middle suction holes are circumferentially arranged at the center of the circular suction box, the plurality of second contact sensors are circumferentially arranged at the center of the circular suction box, and the middle suction holes and the second contact sensors are positioned on the same virtual circle.
As a preferable scheme of the utility model, the plurality of external suction holes are circumferentially arranged at the center of the circular suction box, the plurality of third contact sensors are circumferentially arranged at the center of the circular suction box, and the external suction holes and the third contact sensors are positioned on the same virtual circle.
Compared with the prior art, the utility model has the advantages that:
according to the utility model, the inner suction hole, the middle suction hole and the outer suction hole are arranged at different positions on the bottom surface of the circular suction box, the outer partition ring and the inner partition ring are utilized to separate the areas above the inner suction hole, the middle suction hole and the outer suction hole of the inner cavity of the circular suction box, in addition, the first electric push rod and the second electric push rod drive the inner baffle ring block and the outer baffle ring block to move, and the inner baffle ring block and the outer baffle ring block are utilized to seal the upper parts of the middle suction hole and the outer suction hole, so that the suction area below the suction cup is adjusted, the function of expanding the suction force of the suction cup is realized, and the function of adsorbing and transferring grains with different sizes is realized.
Drawings
FIG. 1 is a schematic diagram of the overall structure of the present utility model;
FIG. 2 is a schematic bottom view of the present utility model;
FIG. 3 is a schematic bottom view of a circular adsorption tank of the present utility model;
FIG. 4 is an internal schematic view of a circular adsorption tank according to the present utility model;
FIG. 5 is a schematic view of the structure of the inner and outer retaining ring blocks of the present utility model.
The reference numerals in the figures illustrate:
1. a circular adsorption box; 2. an air suction pipe; 3. a suction hole; 4. a middle suction hole; 5. an external suction hole; 6. an outer spacer ring; 7. an inner spacer ring; 8. an inner suction chamber; 9. an outer suction chamber; 10. a first electric push rod; 11. a second electric push rod; 12. an inner baffle ring block; 13. an outer baffle ring block; 14. an anti-slip pad; 15. a first contact sensor; 16. a second contact sensor; 17. a third contact sensor; 18. avoidance holes; 19. adsorption holes.
Detailed Description
The technical solutions in the embodiments of the present utility model will be clearly and completely described below with reference to the drawings in the embodiments of the present utility model. It is apparent that the described embodiments are only some embodiments of the present utility model, not all embodiments, and that all other embodiments obtained by persons of ordinary skill in the art without making creative efforts based on the embodiments in the present utility model are within the protection scope of the present utility model.
In the description of the present utility model, it should be noted that the positional or positional relationship indicated by the terms such as "upper", "lower", "inner", "outer", "top/bottom", etc. are based on the positional or positional relationship shown in the drawings, are merely for convenience of describing the present utility model and simplifying the description, and do not indicate or imply that the apparatus or elements referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as limiting the present utility model. Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
In the description of the present utility model, it should be noted that, unless explicitly specified and limited otherwise, the terms "mounted," "configured to," "engaged with," "connected to," and the like are to be construed broadly, and may be either fixedly connected, detachably connected, or integrally connected, for example; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present utility model will be understood in specific cases by those of ordinary skill in the art.
Examples:
referring to fig. 1-5, a vacuum chuck with expansion function comprises a circular adsorption box 1, an air suction pipe 2 is arranged at the top of the circular adsorption box 1, a plurality of inner suction holes 3 are formed in the bottom of the circular adsorption box 1, a plurality of middle suction holes 4 are formed in the bottom of the circular adsorption box 1, a plurality of outer suction holes 5 are formed in the bottom of the circular adsorption box 1, an inner baffle ring 7 is arranged at the bottom of the inner cavity of the circular adsorption box 1 and between the inner suction holes 3 and the middle suction holes 4, an outer baffle ring 6 is arranged at the bottom of the inner cavity of the circular adsorption box 1 and between the middle suction holes 4 and the outer suction holes 5, an inner chamber 8 is arranged between the outer baffle ring 6 and the inner baffle ring 7, an outer chamber 9 is arranged between the outer baffle ring 6 and the inner wall of the circular adsorption box 1, a first electric push rod 10 is arranged at the top of the circular adsorption box 1, an output end of the first electric push rod 10 extends to the inner cavity of the circular adsorption box 1 and is fixedly connected with an inner baffle ring 12, and an electric push rod 11 is arranged at the top of the electric push rod 1 and is connected with the output end of the circular push rod 11.
In this embodiment, the plurality of inner suction holes 3 are located near the middle of the bottom surface of the circular suction box 1, the plurality of outer suction holes 5 are located near the outer of the bottom surface of the middle suction hole 4, and the plurality of middle suction holes 4 are located between the inner suction holes 3 and the outer suction holes 5.
Specifically, referring to fig. 2 and 3, an anti-slip pad 14 is disposed at the bottom of the circular adsorption box 1, a plurality of first contact sensors 15 are fixedly disposed at the bottom of the circular adsorption box 1, a plurality of second contact sensors 16 are fixedly disposed at the bottom of the circular adsorption box 1, a plurality of third contact sensors 17 are fixedly disposed at the bottom of the circular adsorption box 1, a plurality of avoiding holes 18 are disposed on the anti-slip pad 14, the first contact sensors 15, the second contact sensors 16 and the third contact sensors 17 are respectively disposed in the inner cavities of the avoiding holes 18, a plurality of adsorption holes 19 are disposed on the anti-slip pad 14, the positions of the adsorption holes 19 are respectively corresponding to the inner suction holes 3, the middle suction holes 4 and the outer suction holes 5, and the bottom surfaces of the anti-slip pad 14 are respectively flush with the first contact sensors 15, the second contact sensors 16 and the third contact sensors 17.
In this embodiment, the inner diameter of the suction hole 19 is slightly larger than the inner diameters of the inner suction hole 3, the middle suction hole 4 and the outer suction hole 5.
Specifically, referring to fig. 4 and 5, the outer baffle ring 13 is located directly above the inner cavity of the outer suction chamber 9, and the outer shape of the outer baffle ring 13 is adapted to the inner cavity of the outer suction chamber 9.
In this embodiment, the outer baffle ring 13 extends into the inner cavity of the outer suction chamber 9 to seal the inner cavity of the outer suction chamber 9, so that the suction force is not generated by the outer suction hole 5 below the inner cavity of the outer suction chamber 9.
Specifically, referring to fig. 4 and 5, the inner retaining ring block 12 is located directly above the inner cavity of the inner suction chamber 8, and the outer shape size of the inner retaining ring block 12 is adapted to the inner cavity size of the inner suction chamber 8.
In this embodiment, the inner baffle ring block 12 is made to extend into the inner cavity of the inner suction chamber 8 to block the inner cavity of the inner suction chamber 8, so that the suction force is not generated by the middle suction hole 4 below the inner cavity of the inner suction chamber 8.
Specifically, referring to fig. 2, the plurality of suction holes 3 are circumferentially arranged at the center of the circular suction box 1, the plurality of first contact sensors 15 are circumferentially arranged at the center of the circular suction box 1, and the suction holes 3 and the first contact sensors 15 are located on the same virtual circle.
In this embodiment, the plurality of first contact sensors 15 and the inner suction holes 3 are located on the same virtual circle with the circular suction box 1 as the center of the circle, the number of the first contact sensors 15 is four, and the first contact sensors 15 are uniformly distributed on the virtual circle, and the first contact sensors 15 are used for carrying out contact detection on the crystal grains, so that all the inner suction holes 3 can be guaranteed to absorb the crystal grains.
Specifically, referring to fig. 2, the plurality of middle suction holes 4 are circumferentially arranged at the center of the circular suction box 1, the plurality of second contact sensors 16 are circumferentially arranged at the center of the circular suction box 1, and the middle suction holes 4 and the second contact sensors 16 are located on the same virtual circle.
In this embodiment, the plurality of second contact sensors 16 and the middle suction holes 4 are located on the same virtual circle with the circular suction box 1 as the center of the circle, the number of the second contact sensors 16 is four, and the second contact sensors 16 are uniformly distributed on the virtual circle, and the second contact sensors 16 are used for performing contact detection on the crystal grains, so that all the middle suction holes 4 can be guaranteed to adsorb the crystal grains.
Specifically, referring to fig. 2, the outer suction holes 5 are circumferentially arranged at the center of the circular suction box 1, the third contact sensors 17 are circumferentially arranged at the center of the circular suction box 1, and the outer suction holes 5 and the third contact sensors 17 are located on the same virtual circle.
In this embodiment, the plurality of third contact sensors 17 and the external suction holes 5 are located on the same virtual circle with the circular suction box 1 as the center of the circle, the number of the third contact sensors 17 is four, and the third contact sensors 17 are uniformly distributed on the virtual circle, and the third contact sensors 17 are used for performing contact detection on the grains, so that all the external suction holes 5 can be guaranteed to adsorb the grains.
Working principle: the suction pipe 2 is arranged on the grain transfer equipment through the suction pipe 2, the suction pipe 2 is connected with the vacuumizing device, the circular suction box 1 is firstly moved to the upper side of the grain to be moved by the grain transfer equipment, the bottom surface of the anti-slip pad 14 is contacted with the top surface of the grain, the first contact sensor 15, the second contact sensor 16 or the third contact sensor 17 are used for detecting the contact condition between the anti-slip pad 14 and the top surface of the grain, when the first contact sensor 15 is completely detected to be contacted, the second contact sensor 16 is not detected to be contacted, the first electric push rod 10 and the second electric push rod 11 are started to drive the inner baffle ring block 12 and the outer baffle ring block 13 to extend into the inner cavity of the inner suction chamber 8 and the outer suction chamber 9 to block the inner cavity of the inner suction ring block 3, so that only the inner suction hole 3 is generated, and the first contact sensor 15 and the second contact sensor 16 are completely detected to be contacted, and the second contact sensor 17 is independently started to drive the outer baffle ring block 13 to extend into the inner cavity 9 to be contacted to the inner side of the inner suction ring block 3, and the inner suction hole 4 is not detected to be completely sucked into the inner suction hole 3, and the inner suction hole 4 is completely sucked and the inner hole 4 is not detected to be sucked into the inner hole 4 and the inner suction hole is completely detected to be sucked and the inner hole 3 is completely sucked and sucked into the inner hole 4.
The present utility model is not limited to the above-mentioned embodiments, and any person skilled in the art, based on the technical solution of the present utility model and the improved concept thereof, can be equivalently replaced or changed within the scope of the present utility model.
Claims (7)
1. The utility model provides a vacuum chuck with expansion function, includes circular adsorption case (1), its characterized in that: the utility model discloses a circular adsorption case, including circular adsorption case (1), outer spacer ring (6) are provided with in the top of circular adsorption case (1) breathing pipe (2), a plurality of interior suction holes (3) have been seted up to the bottom of circular adsorption case (1), a plurality of outer suction holes (5) have been seted up to the bottom of circular adsorption case (1), the bottom of circular adsorption case (1) inner chamber just is provided with interior spacer ring (7) between interior suction holes (3) and well suction holes (4), the bottom of circular adsorption case (1) inner chamber just is provided with outer spacer ring (6) between well suction holes (4) and outer suction holes (5), be provided with interior suction chamber (8) between outer spacer ring (6) and interior spacer ring (7), be provided with outer chamber (9) between outer spacer ring (6) and the circular adsorption case (1) inner wall, the top of circular adsorption case (1) is provided with first electric putter (10), the output end of first electric putter (10) extends to electric putter (1) and is connected with electric putter inner spacer ring (12) and fixed in the inner chamber (13) of second electric putter (1), the fixed top is provided with electric putter (13).
2. A vacuum chuck with expanding function as in claim 1, wherein: the anti-slip mat is characterized in that an anti-slip mat (14) is arranged at the bottom of the circular adsorption box (1), a plurality of first contact sensors (15) are fixedly arranged at the bottom of the circular adsorption box (1), a plurality of second contact sensors (16) are fixedly arranged at the bottom of the circular adsorption box (1), a plurality of third contact sensors (17) are fixedly arranged at the bottom of the circular adsorption box (1), a plurality of avoiding holes (18) are formed in the anti-slip mat (14), the first contact sensors (15), the second contact sensors (16) and the third contact sensors (17) are respectively located in inner cavities of the avoiding holes (18), a plurality of adsorption holes (19) are formed in the anti-slip mat (14), the positions of the adsorption holes (19) are respectively corresponding to the inner adsorption holes (3), the middle adsorption holes (4) and the outer adsorption holes (5), and the bottom surfaces of the anti-slip mat (14) are respectively flush with the first contact sensors (15), the second contact sensors (16) and the third contact sensors (17).
3. A vacuum chuck with expanding function as in claim 1, wherein: the outer baffle ring block (13) is positioned right above the inner cavity of the outer suction chamber (9), and the appearance size of the outer baffle ring block (13) is matched with the inner cavity size of the outer suction chamber (9).
4. A vacuum chuck with expanding function as in claim 1, wherein: the inner baffle ring block (12) is positioned right above the inner cavity of the inner suction chamber (8), and the outer shape size of the inner baffle ring block (12) is matched with the inner cavity size of the inner suction chamber (8).
5. A vacuum chuck with expanding function as set forth in claim 2, wherein: the plurality of the internal suction holes (3) are circumferentially arranged at the center of the circular adsorption box (1), the plurality of the first contact sensors (15) are circumferentially arranged at the center of the circular adsorption box (1), and the internal suction holes (3) and the first contact sensors (15) are positioned on the same virtual circle.
6. A vacuum chuck with expanding function as set forth in claim 2, wherein: the middle suction holes (4) are circumferentially arranged at the center of the circular suction box (1), the second contact sensors (16) are circumferentially arranged at the center of the circular suction box (1), and the middle suction holes (4) and the second contact sensors (16) are located on the same virtual circle.
7. A vacuum chuck with expanding function as set forth in claim 2, wherein: the outer suction holes (5) are circumferentially arranged at the center of the circular suction box (1), the third contact sensors (17) are circumferentially arranged at the center of the circular suction box (1), and the outer suction holes (5) and the third contact sensors (17) are located on the same virtual circle.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202320917277.5U CN219800818U (en) | 2023-04-22 | 2023-04-22 | Vacuum chuck with expansion function |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202320917277.5U CN219800818U (en) | 2023-04-22 | 2023-04-22 | Vacuum chuck with expansion function |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN219800818U true CN219800818U (en) | 2023-10-03 |
Family
ID=88156831
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202320917277.5U Active CN219800818U (en) | 2023-04-22 | 2023-04-22 | Vacuum chuck with expansion function |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN219800818U (en) |
-
2023
- 2023-04-22 CN CN202320917277.5U patent/CN219800818U/en active Active
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN2892771Y (en) | Exhaust suction disc | |
| CN110744578A (en) | Negative pressure box body with chuck of clamp and auxiliary clamp thereof | |
| CN202996802U (en) | Dustproof vacuum suction pen for concentrating photovoltaic cell | |
| CN219800818U (en) | Vacuum chuck with expansion function | |
| CN110056566A (en) | A kind of vacuum chuck for compromise face absorption | |
| CN213164997U (en) | Wafer adsorption carrying disc | |
| CN211980588U (en) | Wafer positioning structure for reducing film defects | |
| CN210805729U (en) | Wafer adsorption carrying disc | |
| CN114975208B (en) | Wafer picking and placing method and thinning machine | |
| CN218827036U (en) | Vacuum adjusting device for adsorbing wafer | |
| CN216189170U (en) | Semiconductor chip production manipulator conveyer | |
| CN213715699U (en) | Ceramic sucker for photoetching machine | |
| CN211388843U (en) | Negative pressure box body with chuck of clamp and auxiliary clamp thereof | |
| CN216889653U (en) | Sponge suction tool | |
| CN212372212U (en) | Gravity-based multi-linkage manipulator sucker | |
| CN217255739U (en) | Metal product vacuum adsorption device | |
| CN207448499U (en) | Non-contact suction cup | |
| CN219267629U (en) | Double-sided suction pen for silicon wafer | |
| CN110654866A (en) | Braided bag sucking device and unstacker | |
| CN216971687U (en) | Novel composite suction tool | |
| CN213445042U (en) | Batch pipe taking device | |
| CN211766671U (en) | Suction cup for taking and opening bag | |
| CN218024140U (en) | Vacuum suction tool for workpieces with indefinite shapes | |
| CN217884009U (en) | Suction nozzle structure | |
| CN113889399B (en) | Liquid seepage prevention trimming process |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant |