CN219799279U - Multi-angle inspection device for hole filling quality of three-dimensional ceramic substrate with through hole structure - Google Patents
Multi-angle inspection device for hole filling quality of three-dimensional ceramic substrate with through hole structure Download PDFInfo
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- CN219799279U CN219799279U CN202223177316.7U CN202223177316U CN219799279U CN 219799279 U CN219799279 U CN 219799279U CN 202223177316 U CN202223177316 U CN 202223177316U CN 219799279 U CN219799279 U CN 219799279U
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- 239000000919 ceramic Substances 0.000 title claims abstract description 55
- 239000000758 substrate Substances 0.000 title claims abstract description 55
- 238000007689 inspection Methods 0.000 title claims abstract description 33
- 230000003044 adaptive effect Effects 0.000 claims description 2
- 238000001514 detection method Methods 0.000 abstract description 12
- 238000003780 insertion Methods 0.000 abstract description 8
- 230000037431 insertion Effects 0.000 abstract description 8
- 238000002601 radiography Methods 0.000 description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 238000000137 annealing Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000009659 non-destructive testing Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
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- Analysing Materials By The Use Of Radiation (AREA)
Abstract
The utility model discloses a multi-angle inspection device for hole filling quality of a three-dimensional ceramic substrate with a through hole structure, and belongs to the technical field of ceramic substrate reliability detection. The inspection device comprises a mother board, a multi-angle limiting daughter board, an edge number card and a position number card; wherein: the mother board is provided with a slot, and the multi-angle limiting daughter board is connected with the mother board by being inserted into the slot; the edge number card is connected with the motherboard through the insertion slot; the position serial number card is connected with the motherboard through the insertion slot. The inspection device can be used for placing the three-dimensional ceramic substrate with the through hole structure at multiple angles, can be used for rapidly, accurately and nondestructively detecting the position of the hollow hole in the ceramic substrate, avoids uncertain detection results caused by overlapping of the positions of the multiple through holes, and improves the detection success rate.
Description
Technical Field
The utility model relates to the technical field of ceramic substrate reliability detection, in particular to a multi-angle inspection device for hole filling quality of a three-dimensional ceramic substrate with a through hole structure.
Background
Along with the development of semiconductor technology in China, the complexity of devices is gradually increased, and ceramic substrates with three-dimensional through holes are increasingly paid attention to. However, after the through holes are filled in the ceramic substrate having the three-dimensional through holes, it is impossible to directly observe whether the through holes are completely filled with metal. If the holes exist in the holes, the reliability problems of cracks, damage, surface copper expansion and the like can be generated in the subsequent high-temperature annealing process, and the product reliability is seriously affected. At present, the nondestructive testing means of the filling quality is to take an X-ray photograph of the side face of the three-dimensional ceramic substrate to obtain an X-ray photograph of the through hole, and the through hole is observed to see the color, and the existence of a region with lighter color is considered to be a cavity. Due to the complex structure of the ceramic substrate, inspection of the pore-filling quality of the three-dimensional ceramic substrate having a plurality of through holes becomes difficult. When the side view is performed, if the positions of the plurality of through holes are overlapped, the detection results are also overlapped in the same radiography, so that the hollow area may be covered by other through holes, and an effective detection result of each through hole cannot be obtained.
Disclosure of Invention
The utility model aims to provide a multi-angle inspection device for the hole filling quality of a three-dimensional ceramic substrate with a through hole structure, which can rapidly, accurately and nondestructively detect the position of a hollow hole in the ceramic substrate, avoid uncertain detection results caused by overlapping of the positions of multiple through holes and improve the detection success rate.
The aim of the utility model is realized by the following technical scheme:
the multi-angle inspection device for the hole filling quality of the three-dimensional ceramic substrate with the through hole structure comprises a mother board, a multi-angle limiting daughter board and ceramic substrate slots, wherein a plurality of daughter board slots are formed in the mother board, and the lower parts of the multi-angle limiting daughter boards are inserted into the daughter board slots; and a square ceramic substrate slot is arranged at the central position of the multi-angle limiting sub-board and used for inserting the ceramic substrate to be tested.
The multi-angle limiting daughter board is of a regular polygon structure, the shape of the daughter board slot is matched with the shape of the lower part of the multi-angle limiting daughter board (namely, the stable insertion and extraction of the lower part of the multi-angle limiting daughter board in the daughter board slot can be ensured), the bottom surface of the daughter board slot is a plane, the bottom surface of the daughter board slot is matched with the size of one bottom edge of the multi-angle limiting daughter board, and the angle between the bottom surface and the side surface of the daughter board slot is the same as the inner angle of the multi-angle limiting daughter board.
The multi-angle limiting daughter board is perpendicular to the upper surface of the mother board and is inserted into the daughter board slot.
The number of edges of the multi-angle limiting sub-board is 5-20.
And numbers are written on each side edge of the multi-angle limiting sub-board, the numbers are sequentially 1-n along the clockwise or anticlockwise direction, and n is the edge number.
The ceramic substrate slot is adaptive to the size of the ceramic substrate to be tested.
The inspection device further comprises an edge number card slot and a position number card slot which are arranged on the motherboard, and the edge number card and the position number card are respectively inserted into the edge number card slot and the position number card slot.
The utility model has the following advantages and beneficial effects:
the utility model provides a multi-angle inspection device for hole filling quality of a three-dimensional ceramic substrate with a through hole structure. The device has a motherboard and a multi-angle limiting daughterboard. The ceramic substrate to be measured, the multi-angle limiting daughter board and the mother board are inserted together at one time, the mother board is inserted into the multi-angle limiting daughter board through different angles, the ceramic substrate can be driven to rotate, different-angle radiography pictures are correspondingly formed, and independent detection of all through holes is realized, so that the reliability of products is effectively ensured, and the ceramic substrate has high practical value and social value.
Drawings
FIG. 1 is a top view of a motherboard of the inspection apparatus of the present utility model.
FIG. 2 is a cross-sectional view of a master plate (section A in FIG. 1) of the inspection apparatus of the present utility model.
FIG. 3 is a cross-sectional view of a master plate (section B in FIG. 1) of the inspection apparatus of the present utility model.
Fig. 4 is a cross-sectional view of a master plate (section C in fig. 1) of the inspection apparatus of the present utility model.
FIG. 5 is a front view of a multi-angle positioning sub-board of the inspection apparatus of the present utility model.
FIG. 6 is a top view of the multi-angle positioning daughter board of the inspection apparatus of the present utility model.
FIG. 7 is an assembly diagram of a motherboard, a multi-angle limiting daughter board, and a ceramic substrate of the inspection apparatus of the present utility model.
FIG. 8 is a top view of an edge card of the inspection apparatus of the present utility model.
FIG. 9 is a front view of an edge card of the inspection apparatus of the present utility model.
FIG. 10 is a top view of a multi-angle positioning daughter board of the inspection apparatus of the present utility model.
FIG. 11 is a front view of a test device position number card of the present utility model.
FIG. 12 is a schematic view of the X-ray photographic orientation of the inspection apparatus of the present utility model.
In the figure: 100-mother board; 200-a sub-plate slot; 201-a daughter board; 202-position serial number identification; 203-ceramic substrate insertion grooves; 204-a ceramic substrate; 300-edge number card slots; 400-position number card slot.
Detailed Description
The utility model is further described in detail below with reference to the attached drawings, but the examples are only for further illustrating the features and advantages of the utility model and are not limiting on the claims of the utility model.
The utility model provides a multi-angle inspection device for the filling quality of a three-dimensional ceramic substrate with a through hole structure, which is shown in figures 1-12, and comprises a mother board 100, a multi-angle limiting daughter board 201, an edge number card and a position number card; wherein: the mother board is provided with a multi-angle limiting daughter board slot 200, and the multi-angle limiting daughter board is connected with the mother board through the inserting slot; the motherboard is provided with an edge number card slot 300, and the edge number card is connected with the motherboard through an insertion slot; the motherboard is provided with a position serial number card slot 400, and the position serial number card is connected with the motherboard through the insertion slot.
The multi-angle limiting daughter board slot is cuboid, and the top view is rectangular; the edge number card slot is cuboid, the top view is square, the position number card slot is cuboid, and the top view is square. The multi-angle limiting daughter board is vertically erected in a daughter board slot of the mother board.
The multi-angle limiting sub-board is provided with a square ceramic substrate insertion groove 203, and the ceramic substrate 204 is connected with the multi-angle limiting sub-board through the insertion groove.
The multi-angle limiting sub-board has a polygonal shape. The polygon number is 5-20. And numbers are written on each side edge of the multi-angle limiting sub-board, and the numbers are 1-polygon numbers.
The edge number card and the position number card are written with or printed with position information numbers in advance by using a pencil. The number of the edges is consistent with that of the multi-angle limiting sub-board. After the X-ray 500 is photographed, the number is photographed and developed on the photo, and a user can know the position number corresponding to the photo by reading the number, so that the user knows the angle corresponding to each rotation of the ceramic substrate; angle=360 +..
X-ray photographing of the front surface of the ceramic substrate shows that the positions of the through holes are symmetrical, and if photographing is performed from the side surface, detection results of a plurality of through holes are overlapped.
Example 1:
the ceramic substrate had a size of 10mm long, 10mm wide and 300 μm thick. The multi-angle limiting daughter board is a decagon daughter board, the thickness of the multi-angle limiting daughter board is 300 mu m, and a square ceramic substrate slot with the length of 10mm and the width of 10mm is arranged in the middle. Numbers of 1 (first position), 2 (second position) and … … 10 (tenth position) are written on the side edge of the multi-angle limiting sub-board in sequence. The daughter board slot width on the motherboard is also 300 μm.
(1) Inserting the ceramic substrate to be detected into a multi-angle limiting sub-board;
(2) Inserting the stacked ceramic substrate to be detected and the multi-angle limiting daughter board into the base mother board at a first position;
(3) Repeating the steps (1) and (2), inserting a plurality of ceramic substrates into the multi-angle limiting daughter board, and finally inserting the ceramic substrates into the base mother board, so as to ensure that the directions of the ceramic substrates are consistent, and ensuring that each multi-angle limiting daughter board is inserted into the base mother board at a first position;
(4) The edge number card and the position number card are written or printed with position information numbers 1, 2 and … … by pencil in advance, and the edge number is consistent with the edge number of the multi-angle limiting sub-board; inserting the edge number card and the position number card into an edge number card slot and a position number card slot on a base mother board on the base mother board according to the edge number card and the position number card;
(5) Placing the assembled base mother board into X-ray photographing equipment to photograph the base mother board;
(6) Repeating the steps (1) - (5), sequentially changing the position sequence of the multi-angle limiting daughter board inserted into the base mother board, changing from the first position, the second position and the third position to the final position, and respectively photographing; after radiography, 1, 2 and … … 10 are photographed and developed on a photo, and the position number corresponding to the photo is known through numbers, so that the corresponding angle of each rotation of the ceramic substrate is known; angle=360++10×1, 2, … … 10.
The utility model provides a multi-angle inspection device for the filling quality of a three-dimensional ceramic substrate with a through hole structure, which can be used for placing the three-dimensional ceramic substrate with the through hole structure at multiple angles, so that the multi-angle inspection of the filling quality can be realized, the uncertainty of the detection result caused by the overlapping of the positions of the multiple through holes is avoided, and the detection success rate is improved.
Claims (7)
1. A multi-angle inspection device for hole filling quality of a three-dimensional ceramic substrate with a through hole structure is characterized in that: the device comprises a mother board, a multi-angle limiting daughter board and ceramic substrate slots, wherein a plurality of daughter board slots are formed in the mother board, and the lower parts of the multi-angle limiting daughter boards are inserted into the daughter board slots; and a square ceramic substrate slot is arranged at the central position of the multi-angle limiting sub-board and used for inserting the ceramic substrate to be tested.
2. The multi-angle inspection device for hole filling quality of three-dimensional ceramic substrate with through hole structure according to claim 1, wherein: the multi-angle limiting sub-board is of a regular polygon structure, the shape of the sub-board slot is matched with the shape of the lower part of the multi-angle limiting sub-board, the bottom surface of the sub-board slot is a plane, the bottom surface of the sub-board slot is matched with the size of one bottom edge of the multi-angle limiting sub-board, and the angle between the bottom surface and the side surface of the sub-board slot is the same as the inner angle of the multi-angle limiting sub-board.
3. The multi-angle inspection device for hole filling quality of three-dimensional ceramic substrate with through hole structure according to claim 1, wherein: the multi-angle limiting daughter board is perpendicular to the upper surface of the mother board and is inserted into the daughter board slot.
4. The multi-angle inspection device for hole filling quality of three-dimensional ceramic substrate with through hole structure according to claim 1, wherein: the number of edges of the multi-angle limiting sub-board is 5-20.
5. The multi-angle inspection device for hole filling quality of three-dimensional ceramic substrate with through hole structure according to claim 1 or 2, characterized in that: and numbers are written on each side edge of the multi-angle limiting sub-board, the numbers are sequentially 1-n along the clockwise or anticlockwise direction, and n is the edge number.
6. The multi-angle inspection device for hole filling quality of three-dimensional ceramic substrate with through hole structure according to claim 1, wherein: the ceramic substrate slot is adaptive to the size of the ceramic substrate to be tested.
7. The multi-angle inspection device for hole filling quality of three-dimensional ceramic substrate with through hole structure according to claim 1, wherein: the inspection device further comprises an edge number card slot and a position number card slot which are arranged on the motherboard, and the edge number card and the position number card are respectively inserted into the edge number card slot and the position number card slot.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202223177316.7U CN219799279U (en) | 2022-11-29 | 2022-11-29 | Multi-angle inspection device for hole filling quality of three-dimensional ceramic substrate with through hole structure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202223177316.7U CN219799279U (en) | 2022-11-29 | 2022-11-29 | Multi-angle inspection device for hole filling quality of three-dimensional ceramic substrate with through hole structure |
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| Publication Number | Publication Date |
|---|---|
| CN219799279U true CN219799279U (en) | 2023-10-03 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202223177316.7U Active CN219799279U (en) | 2022-11-29 | 2022-11-29 | Multi-angle inspection device for hole filling quality of three-dimensional ceramic substrate with through hole structure |
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| Country | Link |
|---|---|
| CN (1) | CN219799279U (en) |
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- 2022-11-29 CN CN202223177316.7U patent/CN219799279U/en active Active
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