CN219793104U - Graphite boat bearing oar adjusting structure and PECVD coating equipment - Google Patents
Graphite boat bearing oar adjusting structure and PECVD coating equipment Download PDFInfo
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- CN219793104U CN219793104U CN202320335959.5U CN202320335959U CN219793104U CN 219793104 U CN219793104 U CN 219793104U CN 202320335959 U CN202320335959 U CN 202320335959U CN 219793104 U CN219793104 U CN 219793104U
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- paddle
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- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 title claims abstract description 39
- 229910002804 graphite Inorganic materials 0.000 title claims abstract description 39
- 239000010439 graphite Substances 0.000 title claims abstract description 39
- 239000011248 coating agent Substances 0.000 title claims abstract description 14
- 238000000576 coating method Methods 0.000 title claims abstract description 14
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 title claims abstract description 13
- 230000008093 supporting effect Effects 0.000 claims abstract description 84
- 238000007747 plating Methods 0.000 claims abstract description 5
- 210000001503 joint Anatomy 0.000 claims description 5
- 230000000670 limiting effect Effects 0.000 description 11
- 230000000694 effects Effects 0.000 description 5
- 238000000034 method Methods 0.000 description 5
- 230000008569 process Effects 0.000 description 5
- 238000012423 maintenance Methods 0.000 description 3
- 230000007246 mechanism Effects 0.000 description 3
- 230000009471 action Effects 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 2
- 230000005484 gravity Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000008859 change Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000011065 in-situ storage Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
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- Chemical Vapour Deposition (AREA)
Abstract
The utility model discloses a graphite boat supporting paddle adjusting structure and PECVD (plasma enhanced chemical vapor deposition) coating equipment. Graphite boat bearing oar adjusts structure includes: the bearing paddle is used for bearing the graphite boat; one end of the bearing paddle is connected with the bearing pipe; the bearing frame can be connected with the film plating equipment main body, cambered surface supporting grooves are formed in two lateral sides of the bearing frame, and the axes of the cambered surface supporting grooves are perpendicular to the axes of the bearing pipes; the connecting piece is connected with the bearing pipe and is provided with a rotating shaft section which is transversely overlapped in the cambered surface supporting groove; the transverse adjusting assembly is connected with the bearing frame, can transversely adjust the bearing pipe and transversely fix the bearing pipe; the vertical adjusting assembly is connected with the bearing frame, can take the rotating shaft section as a rotating fulcrum, vertically adjusts the bearing pipe and vertically fixes the bearing pipe.
Description
Technical Field
The utility model relates to the technical field of photovoltaic cell coating equipment, in particular to a graphite boat supporting paddle adjusting structure and PECVD coating equipment.
Background
The structure of the graphite boat which is taken and placed in the PECVD film plating equipment and goes in and out of the reaction chamber is named as a boat pushing mechanism. Along with the progress of the times and the development of the technology, the process and the productivity of the photovoltaic coating equipment show a trend of diversification and high yield and high efficiency. On the premise of not consuming product yield and product quality, the graphite boat supporting paddle adjusting structure of the photovoltaic coating equipment can be optimized for improving equipment stability and equipment production efficiency.
The existing boat pushing mechanism has the following problems: 1. the problem that the assembly precision is poor due to the fact that the structural rigidity is insufficient and the bearing tube is easy to deform easily occurs. 2. The whole adjustment mode is too complicated, the adjustment operation space is narrow and small, and the adjustment time is long. 3. The maintenance is inconvenient, and after the adjusting component is taken down when maintenance is required, the adjusting component is reinstalled and put on the shelf to be readjusted, so that the adjustment time is long and the production capacity is influenced.
Disclosure of Invention
The present utility model aims to solve at least one of the technical problems existing in the prior art. Therefore, the utility model provides a graphite boat supporting paddle adjusting structure which has the characteristic of convenient adjustment.
The utility model also provides PECVD coating equipment with the graphite boat supporting paddle adjusting structure.
According to an embodiment of the first aspect of the utility model, a graphite boat support paddle adjusting structure comprises:
the bearing paddle is used for bearing the graphite boat;
one end of the bearing paddle is connected with the bearing pipe;
the bearing frame can be connected with the film plating equipment main body, cambered surface supporting grooves are formed in two lateral sides of the bearing frame, and the axes of the cambered surface supporting grooves are perpendicular to the axes of the bearing pipes;
the connecting piece is connected with the bearing pipe and is provided with a rotating shaft section which is transversely overlapped in the cambered surface supporting groove;
the transverse adjusting assembly is connected with the bearing frame, can transversely adjust the bearing pipe and transversely fix the bearing pipe;
the vertical adjusting assembly is connected with the bearing frame, can take the rotating shaft section as a rotating fulcrum, vertically adjusts the bearing pipe and vertically fixes the bearing pipe.
The graphite boat bearing paddle adjusting structure provided by the embodiment of the utility model has at least the following beneficial effects: the lever structure design is adopted, the cambered surface supporting groove is a gravity supporting point, the supporting point is contacted by a large cambered surface, so that the stress area can be increased, the stress pressure at the supporting point is reduced, the cambered surface has centering capability, and the position accuracy during adjustment can be kept.
When the transverse adjustment is carried out, the bearing tube is transversely adjusted through the transverse adjustment assembly, and after the bearing tube is adjusted in place, the bearing tube is fixed in the cambered surface supporting groove, so that the purpose of transverse adjustment is achieved. The left-right distance of the graphite boat is ensured.
When vertical adjustment is carried out, the vertical adjustment assembly is used for enabling the bearing pipe to pitch and rotate around the rotation pivot by taking the rotation shaft section as the rotation pivot, the purpose of vertically adjusting the bearing pipe is achieved, and after the bearing pipe is adjusted in place, the bearing pipe is fixed and positioned.
It can be understood that when maintaining and changing, when putting on the shelf again after the dismouting, only need to put back the bearing pipe in situ, the structure in cambered surface supporting groove can make the pivot section get back to the position before the dismouting, saves the trouble that the post-dismouting put on the shelf needs readjustment in the past.
According to some embodiments of the utility model, the connecting piece comprises a first pipe clamp and a second pipe clamp, the first pipe clamp and the second pipe clamp can be mutually buckled to form the connecting piece, the rotating shaft sections are formed on two sides of the connecting piece, and the connecting piece can be clamped and fixedly connected to the bearing tube.
According to some embodiments of the utility model, the lateral adjustment assembly includes a first set of adjustment screws and a second set of adjustment screws;
the first adjusting screw group is arranged at one end, far away from the bearing paddle, of the bearing pipe, the first adjusting screw group comprises at least two first screws which are oppositely arranged, the two first screws are transversely arranged at two sides of the bearing pipe, the first screws are in threaded connection with the bearing frame, and the end parts of the first screws are in butt joint with the bearing pipe;
the second adjusting screw group comprises at least two second screws which are oppositely arranged, the two second screws are transversely arranged on two sides of the bearing tube, the second screws are in threaded connection with the bearing frame, and the end parts of the second screws are connected with the connecting piece.
According to some embodiments of the utility model, a first abutment block is provided at an end of the first screw and abuts the support tube via the first abutment block.
According to some embodiments of the utility model, the vertical adjustment assembly comprises at least one third screw, the third screw is arranged at one end of the bearing pipe far away from the bearing paddle, the third screw is vertically arranged above the bearing pipe, the third screw is in threaded connection with the bearing frame, and the end part of the third screw is in butt joint with the bearing pipe.
According to some embodiments of the utility model, an end of the third screw is connected to a second abutment block and abuts against the support tube through the second abutment block.
According to some embodiments of the utility model, a surface of the second abutting block abutting against the bearing pipe is an arc surface, and the arc surface is matched with the bearing pipe.
According to some embodiments of the utility model, the supporting frame is provided with a mounting frame, the mounting frame is arranged at one end of the supporting frame far away from the supporting paddle, the mounting frame is provided with a limiting through hole, and one end of the supporting tube far away from the supporting paddle is penetrated at the limiting through hole.
According to some embodiments of the utility model, the mounting frame is detachably connected to the holding frame, and the vertical adjustment assembly is mounted on the mounting frame.
According to a second aspect of the utility model, a PECVD coating device comprises the graphite boat supporting paddle adjusting structure of the embodiment.
Additional aspects and advantages of the utility model will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the utility model.
Drawings
The utility model is further described with reference to the accompanying drawings and examples, in which:
FIG. 1 is a schematic perspective view of a graphite boat support paddle adjustment structure according to an embodiment of the present utility model;
FIG. 2 is a schematic diagram showing a perspective structure of a graphite boat supporting paddle adjusting structure according to an embodiment of the present utility model;
FIG. 3 is a schematic view of a partially enlarged structure of a graphite boat support paddle adjustment structure according to an embodiment of the present utility model;
FIG. 4 is an exploded view of a graphite boat support paddle adjustment mechanism in accordance with one embodiment of the present utility model;
fig. 5 is a schematic side view of a graphite boat support paddle adjustment structure according to an embodiment of the present utility model.
Reference numerals:
a support paddle 100; a carrier 200; a support frame 300; a cambered surface supporting groove 310; a connector 400; a shaft segment 410; a first pipe clamp 420; a first set of adjustment screws 510; a second set of adjustment screws 520; a first abutment block 530; a second abutment block 540; a vertical adjustment assembly 600; a mounting frame 700; and a limit through hole 710.
Detailed Description
Embodiments of the present utility model are described in detail below, examples of which are illustrated in the accompanying drawings, wherein like or similar reference numerals refer to like or similar elements or elements having like or similar functions throughout. The embodiments described below by referring to the drawings are illustrative only and are not to be construed as limiting the utility model.
In the description of the present utility model, it should be understood that the direction or positional relationship indicated with respect to the description of the orientation, such as up, down, etc., is based on the direction or positional relationship shown in the drawings, is merely for convenience of describing the present utility model and simplifying the description, and does not indicate or imply that the apparatus or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as limiting the present utility model.
In the description of the present utility model, plural means two or more. The description of the first and second is for the purpose of distinguishing between technical features only and should not be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated or implicitly indicating the precedence of the technical features indicated.
In the description of the present utility model, unless explicitly defined otherwise, terms such as arrangement, installation, connection, etc. should be construed broadly and the specific meaning of the terms in the present utility model can be reasonably determined by a person skilled in the art in combination with the specific contents of the technical scheme.
Referring to fig. 1 to 4, a graphite boat supporting paddle adjusting structure of the present utility model includes:
a supporting paddle 100 for supporting the graphite boat;
a bearing tube 200, one end of the bearing paddle 100 is connected with the bearing tube 200;
the bearing frame 300 can be connected with the film plating equipment main body, cambered surface supporting grooves 310 are formed in two lateral sides of the bearing frame 300, and the axes of the cambered surface supporting grooves 310 are perpendicular to the axes of the bearing pipes 200;
the connecting piece 400 is connected with the bearing pipe 200, the connecting piece 400 is provided with a rotating shaft section 410, and the rotating shaft section 410 is transversely lapped in the cambered surface supporting groove 310;
a lateral adjustment assembly connected to the support frame 300, capable of laterally adjusting the support tube 200 and laterally fixing the support tube 200;
the vertical adjustment assembly 600 is connected to the support frame 300, and is capable of vertically adjusting the support frame 200 with the rotation shaft section 410 as a rotation fulcrum and vertically fixing the support frame 200.
It can be appreciated that the supporting paddle 100 is used for supporting a graphite boat, the graphite boat supported by the supporting paddle 100 is heavy, the whole is of a cantilever structure, and the reaction chamber of the coating equipment is a cylindrical cavity, and the internal space is limited, so that: 1. the pitch angle of the prop paddle 100 needs to be adjusted to ensure that the cantilever is level after loading. 2. Because the left and right range of the inner space is limited, the left and right distance of the graphite boat needs to be accurately adjusted for placing and entering the reaction chamber.
In this embodiment, a lever structure design is adopted, the cambered surface supporting groove 310 is a gravity supporting point, and the fulcrum is in contact with a large cambered surface, so that the stress area can be increased, the stress pressure at the fulcrum is reduced, the cambered surface has centering capability, and the position accuracy during adjustment can be kept.
When the horizontal adjustment is carried out, the supporting tube 200 is adjusted in the horizontal direction through the horizontal adjustment component, after the supporting tube 200 is adjusted in place, the supporting tube 200 is fixed, the left and right movement of the supporting tube is prevented, the purpose of horizontal adjustment is completed, and the left and right distance of the graphite boat is ensured. During the transverse adjustment process, the rotating shaft segment 410 is always located in the cambered surface supporting groove 310, so as to ensure the supporting effect on the bearing tube 200.
When the vertical adjustment is performed, the vertical adjustment assembly 600 takes the rotating shaft section 410 as a rotating fulcrum, so that the supporting tube 200 performs pitching rotation around the rotating fulcrum, the purpose of vertically adjusting the supporting tube 200 is achieved, and after the supporting tube 200 is adjusted in place, the supporting tube 200 is fixed, and the supporting tube 200 is positioned and fixed.
Referring to fig. 1 to 4, in some embodiments of the present utility model, the connector 400 includes a first pipe clamp 420 and a second pipe clamp, the first pipe clamp 420 and the second pipe clamp can be fastened to each other to form the connector 400, and a rotation shaft section 410 is formed at both sides of the connector 400, and the connector 400 can be fastened and fixedly connected to the socket 200.
In this embodiment, the connector 400 is integrally connected to the socket 200 by a first tube clamp 420 and a second tube clamp. The formed rotating shaft section 410 can keep fit with the cambered surface supporting groove 310, and can have good sliding adjustment effect.
Referring to fig. 1, 2 and 5, in some embodiments of the utility model, the lateral adjustment assembly includes a first set of adjustment screws 510 and a second set of adjustment screws 520;
the first adjusting screw group 510 is arranged at one end of the bearing tube 200 far away from the bearing paddle 100, the first adjusting screw group 510 comprises at least two first screws which are oppositely arranged, the two first screws are transversely arranged at two sides of the bearing tube 200, the first screws are in threaded connection with the bearing frame 300, and the end parts of the first screws are in butt joint with the bearing tube 200;
the second adjusting screw set 520 includes at least two second screws disposed opposite to each other, the two second screws are laterally disposed at both sides of the supporting tube 200, the second screws are screwed with the supporting frame 300, and the ends of the second screws are connected with the connecting member 400.
During the transverse adjustment, the end of the socket 200 is pushed to move left and right by screwing two first screws which are oppositely arranged. Simultaneously, two second screws which are oppositely arranged are screwed, and the connecting piece 400 is pulled by the second screws to be matched with the first screws, so that synchronous movement is realized. The purpose of transverse adjustment is achieved. After the adjustment is completed, the first screw and the second screw are locked and fixed, and the transverse positioning and fixing of the bearing tube 200 are completed.
It can be understood that when maintaining the change, only need dismouting first screw and second screw can take off whole set of adjustment structure, have easy dismounting's characteristics.
Referring to fig. 4 and 5, in some embodiments of the present utility model, a first abutment block 530 is provided at an end of the first screw, and abuts the socket 200 through the first abutment block 530.
In this embodiment, by providing the first abutment block 530 at the end of the first screw, the first screw is abutted against the supporting tube 200 by the first abutment block 530 during the tightening process, so that the abutment area between the first screw and the supporting tube 200 can be increased, and the fixing effect of the first screw on the supporting tube 200 can be ensured. Meanwhile, as the first abutting block 530 has a certain length in the vertical direction, the supporting pipe 200 can still complete locking and fixing of the supporting pipe 200 within a certain range of vertical adjustment, and the vertical adjustment of the supporting pipe 200 can be adapted.
It can be appreciated that the number of the first screws may be multiple, and the multiple first screws are simultaneously connected with the first abutting block 530, so that the first abutting block 530 is stressed more uniformly, and the locking effect is improved.
Referring to fig. 4 and 5, in some embodiments of the present utility model, the vertical adjustment assembly 600 includes at least one third screw disposed at an end of the socket 200 remote from the support paddle 100, the third screw being vertically disposed above the socket 200, the third screw being screwed with the support frame 300, and an end of the third screw being abutted with the support tube 200.
In this embodiment, the third screw is screwed to press down the end of the supporting tube 200, so that the supporting tube 200 performs pitching rotation around the rotation pivot, the purpose of vertically adjusting the supporting tube 200 is achieved, after the supporting tube 200 is adjusted in place, the supporting tube 200 is fixed by locking the third screw, and the supporting tube 200 is positioned and fixed. It will be appreciated that by adjusting the range of downward turning of the third screw, the effect of adjusting the pitch angle of the carrier 200 can be achieved.
Referring to fig. 4 and 5, in some embodiments of the present utility model, an end of the third screw is connected to the second abutment block 540 and abuts the socket 200 through the second abutment block 540.
In this embodiment, the second abutting block 540 is disposed at the end of the third screw, so that the second abutting block 540 abuts against the supporting tube 200 during the screwing process of the third screw, the abutting area between the third screw and the supporting tube 200 can be increased, and the fixing effect of the third screw on the supporting tube 200 is ensured. Meanwhile, since the second abutting block 540 has a certain length in the transverse direction, the supporting pipe 200 can still complete locking and fixing of the supporting pipe 200 within a certain range of transverse adjustment, and the supporting pipe 200 can be adapted to the transverse adjustment.
Referring to fig. 4 and 5, in some embodiments of the present utility model, a surface of the second abutting block 540 abutting against the support pipe 200 is a cambered surface, and the cambered surface matches the support pipe 200.
It will be appreciated that after the third screw is tightened, the lower end of the socket 200 is in a floating condition. After the third screw is locked, the position of the supporting tube 200 is kept fixed by the self weight of the supporting tube 200 and utilizing the lever principle. The second abutment block 540 is subjected to a large force.
In this way, in the present embodiment, the surface of the second contact block 540 that contacts the support pipe 200 is formed as the arc surface, so that the contact area between the support pipe 200 and the second contact block 540 can be increased, and the contact pressure between the second contact block 540 and the support pipe 200 can be reduced. Meanwhile, in the process of pressing down the socket pipe 200, the cambered surface structure of the second abutting block 540 can prevent the socket pipe 200 from shifting left and right.
Meanwhile, it can be understood that when maintenance and replacement are performed, during assembly and disassembly and re-racking, due to the cambered surface structure of the second abutting block 540, the supporting pipe 200 can be put back to the position before assembly and disassembly as long as the supporting pipe 200 is matched with the cambered surface of the second abutting block 540, and the supporting pipe 200 is transversely fixed, so that the trouble of re-adjustment after assembly and disassembly and racking in the past is omitted.
In addition, in this embodiment, the lateral adjustment assembly and the vertical adjustment assembly 600 are both externally arranged, which has the advantages of large operation space and convenient adjustment.
Referring to fig. 4 and 5, in some embodiments of the present utility model, the support frame 300 is provided with a mounting frame 700, the mounting frame 700 is disposed at an end of the support frame 300 away from the support paddle 100, the mounting frame 700 is provided with a limiting through hole 710, and an end of the support tube 200 away from the support paddle 100 is penetrated through the limiting through hole 710.
In this embodiment, the end of the supporting tube 200 far away from the supporting paddle 100 is inserted into the limiting through hole 710, so that the supporting tube 200 is limited in the limiting through hole 710 when being adjusted, and the excessive adjusting range of the supporting tube 200 is avoided. Particularly during pitch adjustment, the lower end of the carrier 200 is in a suspended state. If the range of the downward screwing of the third screw is too large, the carrier 200 may slide down under the action of its own weight. The setting of the limiting through hole 710 can prevent the carrier 200 from rotating too much downwards under the action of the third screw under the limiting action of the limiting through hole 710.
Referring to fig. 4 and 5, in some embodiments of the present utility model, the mounting frame 700 is detachably coupled to the bearing frame 300, and the vertical adjustment assembly 600 is mounted on the mounting frame 700.
In this embodiment, the mounting frame 700 is detachably connected to the supporting frame 300, and the mounting frame 700 and the supporting frame 300 are separately formed and assembled and connected together when in use. Meanwhile, the vertical adjustment assembly 600 is mounted on the mounting frame 700, i.e., the third screw is mounted on the mounting frame 700, and the mounting frame 700 provides a mounting location for the third screw.
The utility model also provides PECVD (plasma enhanced chemical vapor deposition) coating equipment, which comprises the graphite boat supporting paddle adjusting structure.
Because PECVD coating equipment adopts all technical schemes of the graphite boat supporting paddle adjusting structure of the embodiment, the PECVD coating equipment at least has all beneficial effects brought by the technical schemes of the embodiment, and the technical scheme is not repeated here.
The embodiments of the present utility model have been described in detail with reference to the accompanying drawings, but the present utility model is not limited to the above embodiments, and various changes can be made within the knowledge of one of ordinary skill in the art without departing from the spirit of the present utility model.
Claims (10)
1. Graphite boat bearing oar adjusts structure, a serial communication port, includes:
the bearing paddle is used for bearing the graphite boat;
one end of the bearing paddle is connected with the bearing pipe;
the bearing frame can be connected with the film plating equipment main body, cambered surface supporting grooves are formed in two lateral sides of the bearing frame, and the axes of the cambered surface supporting grooves are perpendicular to the axes of the bearing pipes;
the connecting piece is connected with the bearing pipe and is provided with a rotating shaft section which is transversely overlapped in the cambered surface supporting groove;
the transverse adjusting assembly is connected with the bearing frame, can transversely adjust the bearing pipe and transversely fix the bearing pipe;
the vertical adjusting assembly is connected with the bearing frame, can take the rotating shaft section as a rotating fulcrum, vertically adjusts the bearing pipe and vertically fixes the bearing pipe.
2. The graphite boat holding paddle adjustment structure of claim 1, wherein: the connecting piece includes first pipe clamp and second pipe clamp, first pipe clamp with the second pipe clamp can detain each other and become the connecting piece, and be formed with in the both sides of connecting piece the pivot section, the connecting piece can clamp and fixed connection be in on the holding frame.
3. The graphite boat holding paddle adjustment structure of claim 1, wherein: the transverse adjusting assembly comprises a first adjusting screw set and a second adjusting screw set;
the first adjusting screw group is arranged at one end, far away from the bearing paddle, of the bearing pipe, the first adjusting screw group comprises at least two first screws which are oppositely arranged, the two first screws are transversely arranged at two sides of the bearing pipe, the first screws are in threaded connection with the bearing frame, and the end parts of the first screws are in butt joint with the bearing pipe;
the second adjusting screw group comprises at least two second screws which are oppositely arranged, the two second screws are transversely arranged on two sides of the bearing tube, the second screws are in threaded connection with the bearing frame, and the end parts of the second screws are connected with the connecting piece.
4. A graphite boat holding paddle adjustment structure as set forth in claim 3, wherein: the end part of the first screw is provided with a first abutting block, and the first abutting block is abutted with the bearing pipe.
5. The graphite boat holding paddle adjustment structure of claim 1, wherein: the vertical adjusting assembly comprises at least one third screw, the third screw is arranged at one end of the bearing pipe away from the bearing paddle, the third screw is vertically arranged above the bearing pipe, the third screw is in threaded connection with the bearing frame, and the end part of the third screw is in butt joint with the bearing pipe.
6. The graphite boat holding paddle adjustment structure of claim 5, wherein: the end part of the third screw is connected with a second abutting block and abuts against the bearing pipe through the second abutting block.
7. The graphite boat holding paddle adjustment structure of claim 6, wherein: the second butt piece with the one side of bearing pipe butt is the cambered surface, the cambered surface with bearing pipe phase-match.
8. A graphite boat holding paddle adjustment structure as set forth in claim 3, wherein: the bearing frame is equipped with the installing frame, the installing frame sets up the bearing frame is kept away from the one end of bearing oar, the installing frame is equipped with spacing through-hole, the bearing pipe is kept away from the one end of bearing oar wears to establish spacing through-hole.
9. The graphite boat holding paddle adjustment structure of claim 8, wherein: the mounting frame is detachably connected with the bearing frame, and the vertical adjusting assembly is mounted on the mounting frame.
10. A PECVD coating device, which is characterized in that: a graphite boat support paddle adjustment structure comprising any of claims 1 to 9.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202320335959.5U CN219793104U (en) | 2023-02-17 | 2023-02-17 | Graphite boat bearing oar adjusting structure and PECVD coating equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202320335959.5U CN219793104U (en) | 2023-02-17 | 2023-02-17 | Graphite boat bearing oar adjusting structure and PECVD coating equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN219793104U true CN219793104U (en) | 2023-10-03 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202320335959.5U Active CN219793104U (en) | 2023-02-17 | 2023-02-17 | Graphite boat bearing oar adjusting structure and PECVD coating equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN219793104U (en) |
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2023
- 2023-02-17 CN CN202320335959.5U patent/CN219793104U/en active Active
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