CN219776927U - Optical fiber temperature measurement system - Google Patents
Optical fiber temperature measurement system Download PDFInfo
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- CN219776927U CN219776927U CN202320372292.6U CN202320372292U CN219776927U CN 219776927 U CN219776927 U CN 219776927U CN 202320372292 U CN202320372292 U CN 202320372292U CN 219776927 U CN219776927 U CN 219776927U
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- optical fiber
- temperature measuring
- connector
- temperature
- fluorescent
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- 239000013307 optical fiber Substances 0.000 title claims abstract description 140
- 238000009529 body temperature measurement Methods 0.000 title claims abstract description 23
- 239000000523 sample Substances 0.000 claims abstract description 19
- 238000000034 method Methods 0.000 claims abstract description 11
- 239000007850 fluorescent dye Substances 0.000 claims abstract description 8
- 239000002184 metal Substances 0.000 claims description 15
- 229910052751 metal Inorganic materials 0.000 claims description 15
- 239000000835 fiber Substances 0.000 claims description 7
- 239000013308 plastic optical fiber Substances 0.000 claims description 6
- 239000010453 quartz Substances 0.000 claims description 6
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 6
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 3
- 229910052802 copper Inorganic materials 0.000 claims description 3
- 239000010949 copper Substances 0.000 claims description 3
- 238000004861 thermometry Methods 0.000 claims 6
- 238000005259 measurement Methods 0.000 abstract description 7
- 235000012431 wafers Nutrition 0.000 description 11
- 239000000126 substance Substances 0.000 description 7
- 238000010586 diagram Methods 0.000 description 4
- 238000005530 etching Methods 0.000 description 4
- 230000005284 excitation Effects 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 3
- 238000001020 plasma etching Methods 0.000 description 3
- 238000001514 detection method Methods 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 238000005192 partition Methods 0.000 description 2
- 238000005240 physical vapour deposition Methods 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 230000007704 transition Effects 0.000 description 2
- 229920004747 ULTEM® 1000 Polymers 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 239000008358 core component Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 238000011900 installation process Methods 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 230000013011 mating Effects 0.000 description 1
- 239000013618 particulate matter Substances 0.000 description 1
- 229920001601 polyetherimide Polymers 0.000 description 1
- 239000002861 polymer material Substances 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
Abstract
The utility model particularly relates to an optical fiber temperature measuring system, which solves the problems that the existing optical fiber sensing system adopts a whole slender optical fiber as a temperature measuring optical fiber, so that the measurement precision is easy to be reduced, the temperature measuring optical fiber is damaged in the assembling and disassembling processes of an electrostatic chuck and a supporting structure, and the cost of hardware equipment is increased. The optical fiber temperature measurement system comprises a transmitter and at least one temperature measurement unit; the temperature measuring unit comprises a connector, an optical fiber assembly and a fluorescent probe, wherein one end of the connector is connected with the transmitter; the optical fiber assembly comprises an adapter optical fiber, an adapter and a temperature measuring optical fiber which are connected with the other end of the connector; the fluorescent probe comprises a probe shell and a fluorescent disk; the adapter is used for connecting the switching optical fiber and the temperature measuring optical fiber; the probe shell is used for connecting the temperature measuring optical fiber and the fluorescent disk; the fluorescent disc is arranged at the forefront of the probe shell so as to accurately measure the temperature of the electrostatic chuck to be measured.
Description
Technical Field
The utility model particularly relates to an optical fiber temperature measurement system.
Background
An electrostatic Chuck (E-Chuck) is a core component of high-end equipment such as PVD (Physical Vapor Deposition) equipment, etchers, ion implanters, and the like. The electrostatic chuck is an ultra-clean wafer carrier suitable for vacuum and plasma tool environments, and utilizes the electrostatic adsorption principle to carry out flat and uniform clamping of an ultra-thin wafer. Compared with a mechanical chuck, the electrostatic chuck reduces mechanical moving parts, reduces particle pollution and increases the effective area of a wafer; compared with a vacuum chuck, the electrostatic chuck can be used in a low pressure (vacuum) environment, and is suitable for occasions of controlling the temperature of a wafer by utilizing the electrostatic chuck.
Plasma etching is an important process for wafer processing, and as the characteristic size of wafer processing advances from micron-scale to nanometer-scale technology nodes, the control requirement of the plasma etching on wafer defects is more and more strict. The wafer temperature is an important factor affecting the etching rate and uniformity, the chemical reaction in etching is very sensitive to temperature, and a small temperature difference may cause a great etching deviation, so that a good etching effect requires a stable and uniform temperature distribution of the wafer. Accordingly, the electrostatic chuck apparatus further comprises a temperature detecting means for measuring the temperature of the electrostatic chuck.
In semiconductor processing technology, a temperature sensing device typically employs a thermocouple measurement element. The thermocouple measuring element can directly measure the temperature of the electrostatic chuck, and convert the temperature signal into a thermoelectromotive signal, and convert the thermoelectromotive signal into the temperature of the electrostatic chuck through an electric instrument (namely a secondary instrument). That is, the thermocouple uses a voltage signal during the temperature measurement. However, during the semiconductor processing, since rf energy is used, the rf energy generates electromagnetic signals, and thus, during the semiconductor processing, the electromagnetic signals may interfere with voltage signals generated during the temperature measurement of the thermocouple measurement element, thereby affecting the measurement accuracy of the thermocouple measurement element. In order to accurately measure the temperature of the electrostatic chuck, in the field of semiconductor processing, an optical fiber sensing system is adopted to measure the temperature of the electrostatic chuck, such as fluorescent optical fiber temperature sensing, wherein the fluorescent optical fiber temperature sensing is realized by detecting the fluorescence intensity or the fluorescence service life according to the one-to-one correspondence relationship between the fluorescent parameters emitted after the fluorescent substance is excited and the temperature.
However, existing fiber optic sensing systems employ a single elongated optical fiber as the temperature sensing fiber. In general, when the electrostatic chuck and the supporting structure are assembled, the electrostatic chuck passes through the measuring end of the temperature measuring optical fiber, and the temperature measuring optical fiber section close to the measuring end is installed in the electrostatic chuck, so that the electrostatic chuck and the supporting structure are assembled. When the electrostatic chuck device is disassembled, the electrostatic chuck also needs to pass through the measuring end of the temperature measuring optical fiber. Therefore, in the process of installing and detaching the electrostatic chuck device, the electrostatic chuck is very easy to touch the probe arranged at the measuring end of the temperature measuring optical fiber, and the measuring precision of the temperature sensor is reduced. In addition, because the temperature measuring optical fiber is very fragile, in the process of installing and dismantling the electrostatic chuck device, the temperature measuring optical fiber is easily damaged, and the hardware equipment cost is increased.
Disclosure of Invention
The utility model aims to solve the problems that the existing optical fiber sensing system adopts a whole slender optical fiber as a temperature measuring optical fiber, so that the measurement accuracy is reduced, the temperature measuring optical fiber is damaged in the assembling and disassembling processes of an electrostatic chuck and a supporting structure, and the cost of hardware equipment is increased.
In order to solve the technical problems, the utility model adopts the following technical scheme:
an optical fiber temperature measurement system comprises a transmitter and at least one temperature measurement unit; the temperature measuring unit comprises a connector, an optical fiber assembly and a fluorescent probe, wherein one end of the connector is connected with the transmitter;
the special feature is that:
the optical fiber assembly comprises an adapter optical fiber, an adapter and a temperature measuring optical fiber which are connected with the other end of the connector;
the fluorescent probe comprises a probe shell and a fluorescent disk;
the adapter is used for connecting the switching optical fiber and the temperature measuring optical fiber;
the probe shell is used for connecting the temperature measuring optical fiber and the fluorescent disk;
the fluorescent disk is arranged at the forefront of the probe shell.
Further, the probe housing comprises a sleeve and a metal cap;
the lower end of the sleeve is connected with one end of the temperature measuring optical fiber, the upper end of the sleeve is connected with the other end of the metal cap, and the fluorescent disk is positioned between the sleeve and the metal cap;
the other end of the temperature measuring optical fiber is arranged opposite to one end of the switching optical fiber through the switching connector.
Further, the adapter comprises a nut, a threaded cap and a ferrule;
the upper end of the nut is matched with the lower end of the sleeve, and the lower end of the nut is matched with one end of the ferrule;
the other end of the temperature measuring optical fiber sequentially passes through the nut and the threaded cap and is inserted into one end of the insertion core;
one end of the switching optical fiber is inserted into the other end of the inserting core, and the end part of one end of the switching optical fiber and the end part of the other end of the temperature measuring optical fiber are oppositely arranged in the inserting core;
the other end of the switching optical fiber is connected with the transmitter through a connector.
Further, the device also comprises a spring and a threaded connecting piece matched with the spring;
the threaded connecting piece is sleeved at the other end of the lock pin, and the spring is positioned between the threaded connecting piece and the outer wall of the other end of the lock pin;
the threaded connecting piece is provided with a splicing hole matched with the outer diameter of the switching optical fiber; one end of the switching optical fiber passes through the inserting hole and is inserted into the other end of the inserting core.
Further, the optical fiber connector also comprises a sheath sleeved outside the switching optical fiber and connected with the connector.
Further, the temperature measuring optical fiber is selected from single-mode quartz optical fiber or multimode quartz optical fiber or plastic optical fiber or polymer optical fiber;
PEI is selected as the sleeve;
the metal cap material is copper;
the connector is a standard ST connector.
Further, the temperature measuring units are four.
Compared with the prior art, the technical scheme of the utility model has the beneficial effects that:
(1) According to the optical fiber temperature measurement system, the switching optical fiber is of a split type structure, so that the damage to the temperature measurement optical fiber and the switching optical fiber is avoided in the process of installing or detaching the electrostatic chuck to be measured, and the risk of the increase of the hardware equipment cost caused by the damage to the temperature measurement optical fiber is reduced.
(2) According to the optical fiber temperature measuring system, the temperature measuring optical fiber is of a split type structure, so that the electrostatic chuck and the supporting structure are more flexible in the assembling and disassembling processes when the electrostatic chuck to be measured is detected, and different optical fiber materials can be selected according to the structure of the electrostatic chuck to be measured and the requirement of the temperature resistance.
(3) The optical fiber temperature measuring system utilizes the optical fiber sensing technology of the temperature measuring optical fiber and the switching optical fiber, so that electromagnetic interference generated by external radio frequency energy sources can not influence the stability and the reliability of the system.
(4) The optical fiber temperature measurement system can monitor the real-time temperature of each partition in the insulating substrate when detecting the temperature of the insulating substrate in the electrostatic chuck to be detected, can accurately control the process conditions in the plasma etching process, and improves the processing quality of wafers.
(5) The optical fiber temperature measuring system can measure the multi-point temperature in real time, has high integration degree and can reach the temperature measuring precision of +/-0.1 ℃.
Drawings
FIG. 1 is an assembled schematic view of an embodiment of an optical fiber temperature measurement system according to the present utility model;
FIG. 2 is a schematic diagram of a probe housing in an embodiment of an optical fiber temperature measurement system according to the present utility model;
FIG. 3 is a schematic diagram illustrating the assembly of a transition joint, a transition fiber, a sheath and a connector in an embodiment of an optical fiber temperature measurement system according to the present utility model;
FIG. 4 is a schematic diagram illustrating the assembly of a probe housing and a temperature sensing optical fiber in an embodiment of an optical fiber temperature sensing system according to the present utility model;
FIG. 5 is a schematic diagram of a transit joint in an embodiment of an optical fiber temperature measurement system according to the present utility model.
The reference numerals in the drawings are:
the device comprises a 1-temperature measuring optical fiber, a 111-probe shell, a 112-sleeve, a 113-fluorescent disk, a 114-metal cap, a 12-nut, a 2-switching optical fiber, a 211-threaded cap, a 212-ferrule, a 213-spring, a 214-threaded connector, a 22-switching connector, a 23-sleeve, a 3-transmitter, a 24-connector and a 4-electrostatic chuck to be tested.
Detailed Description
The following description of the embodiments of the present utility model will be made apparent and complete in conjunction with the accompanying drawings, in which it is evident that the embodiments described are some, but not all embodiments of the present utility model. Based on the technical solution of the present utility model, all other embodiments obtained by a person skilled in the art without making any creative effort fall within the protection scope of the present utility model.
As shown in fig. 1, an optical fiber temperature measurement system comprises a transmitter 3 and four temperature measurement units; each temperature measuring unit comprises a connector 24, an optical fiber assembly and a fluorescent probe, one end of which is connected with the transmitter 3. The optical fiber assembly comprises a switching optical fiber 2, an adapter 22 and a temperature measuring optical fiber 1 which are connected with the other end of the connector 24;
as shown in fig. 2 and 3, the fluorescent probe includes a probe housing 111 and a fluorescent disk 113; the adapter 22 is used for connecting the adapter optical fiber 2 and the temperature measuring optical fiber 1; the probe shell 111 is used for connecting the temperature measuring optical fiber 1 and the fluorescent plate 113; the fluorescence disk 113 is disposed at the forefront of the probe housing 111.
As shown in fig. 2 and 4, the probe housing 111 includes a sleeve 112 and a metal cap 114; the lower end of the sleeve 112 is connected with one end of the temperature measuring optical fiber 1, the upper end of the sleeve 112 is connected with the other end of the metal cap 114, and the fluorescent disk 113 is positioned between the sleeve 112 and the metal cap 114; the other end of the temperature measuring optical fiber 1 is arranged opposite to one end of the switching optical fiber 2 through a switching joint 22.
As shown in fig. 3 and 5, the adapter 22 includes a nut 12, a threaded cap 211, and a ferrule 212; the upper end of the nut 12 is matched with the lower end of the sleeve 112, and the lower end of the nut 12 is matched with one end of the ferrule 212; the other end of the temperature measuring optical fiber 1 sequentially passes through the nut 12 and the threaded cap 211 and is inserted into one end of the insert 212; one end of the switching optical fiber 2 is inserted into the other end of the inserting core 212, and the end part of one end of the switching optical fiber 2 is opposite to the end part of the other end of the temperature measuring optical fiber 1; the other end of the switching optical fiber 2 is connected with the transmitter 3 through a connector 24.
In the embodiment, a sheath 23, a spring 213 and a threaded connector 214 matched with the spring 213 are also arranged; the threaded connector 214 is sleeved at the other end of the ferrule 212, and the spring 213 is positioned between the threaded connector 214 and the outer wall of the other end of the ferrule 212; the threaded connector 214 is provided with a plug hole matched with the outer diameter of the switching optical fiber 2; one end of the stub fiber 2 is inserted into the mating bore and the other end of the ferrule 212. The sheath 23 is sleeved outside the switching optical fiber 2 and connected with the connector 24.
Preferably, the connector 24 is a standard ST connector; the temperature measuring optical fiber 1 is a single-mode quartz optical fiber, and in other embodiments, a multimode quartz optical fiber, a plastic optical fiber or a polymer optical fiber can be selected; the sleeve 112 is made of a temperature-resistant and light-transmitting polymer material, such as ULTEM 1000; the fluorescent disk 113 contains a fluorescent substance; the excitation wavelength of the fluorescent substances should be the same (or similar); the fluorescent substances can be selected from the same materials with different concentrations (or different materials with similar excitation wavelengths), and the fluorescence life of each selected fluorescent substance does not have an overlapping area in a certain temperature range. The metal cap 114 is made of copper with high thermal conductivity, and protects the fluorescent disk 113.
The transmitter 3 integrates an excitation light source module, a filter element, a modulation signal source, a data processing module, a photoelectric detector, a phase shifter, a data processing system and other modules, and is used for outputting optical signals to the temperature measuring optical fiber 1 through the switching optical fiber 2, detecting and processing the optical signals reversely transmitted by the switching optical fiber 2 by the temperature measuring optical fiber 1, and completing the temperature measurement of the electrostatic chuck 4 to be measured.
The installation process of the optical fiber temperature measurement system of the utility model is as follows:
first, a fluorescent disk 113 is provided between a metal cap 114 and a sleeve 112, and then the lower end of the metal cap 114 is screw-coupled with the upper end of the sleeve 112.
Then, one end of the temperature measuring optical fiber 1 is inserted into the lower end of the sleeve 112, and the other end of the temperature measuring optical fiber 1 sequentially passes through the nut 12 and the threaded cap 211 and is inserted into one end of the ferrule 212; the nut 12 is connected with the lower end of the sleeve 112 in a threaded manner; then one end of the switching optical fiber 2 is inserted into the other end of the inserting core 212, and a spring 213 and a threaded connector 214 are sleeved on the outer wall of the other end of the inserting core 212; the other end of the switching optical fiber 2 is connected with the transmitter 3 through a connector 24.
Finally, the temperature measuring unit is installed inside the accessory part of the electrostatic chuck 4 to be measured.
The working process of the above embodiment is specifically as follows:
the output light of the intensity modulation excitation light source module in the transmitter 3 is transmitted to the temperature measuring optical fiber 1 through the switching optical fiber 2; fluorescent substances in the temperature measuring optical fiber 1 emit fluorescence after being excited, and the temperature measuring optical fiber 1 collects the fluorescence and is reversely transmitted by the switching optical fiber 2; the fluorescence is detected by a photoelectric detector in the transmitter 3 after passing through the filter element; the fluorescence detected by the photoelectric detector is subjected to phase-locking detection by changing the reference signal phase for K times through the phase shifter, so that K groups of measurement data are obtained; the data processing system demodulates the phase-locked detection signal to obtain a group of fluorescence lifetime information; and comparing the obtained fluorescence information with a pre-calibrated change curve of the fluorescence life of each fluorescent substance along with the temperature, and obtaining the real-time temperature of the temperature measuring point.
The transmitter 3 is powered by an external power supply, the transmitter 3 is connected with the temperature measuring optical fiber 1 through the switching optical fiber 2, the temperature measuring optical fiber 1 feeds back the temperature of the electrostatic chuck 4 to be measured to the transmitter 3, and the real-time temperature of the electrostatic chuck 4 to be measured in a partition mode is calculated by the transmitter 3. The optical fiber temperature measuring system and the external heating/cooling system simultaneously act, and finally, the wafer is ensured to have stable and uniform temperature distribution.
Claims (7)
1. An optical fiber temperature measurement system comprises a transmitter (3) and at least one temperature measurement unit; the temperature measuring unit comprises a connector (24), an optical fiber assembly and a fluorescent probe, wherein one end of the connector is connected with the transmitter (3);
the method is characterized in that:
the optical fiber assembly comprises a switching optical fiber (2), an adapter (22) and a temperature measuring optical fiber (1) which are connected with the other end of the connector (24);
the fluorescent probe comprises a probe shell (111) and a fluorescent disc (113);
the adapter (22) is used for connecting the adapter optical fiber (2) and the temperature measuring optical fiber (1);
the probe shell (111) is used for connecting the temperature measuring optical fiber (1) and the fluorescent disk (113);
the fluorescent plate (113) is arranged at the forefront of the probe shell (111).
2. An optical fiber thermometry system according to claim 1, wherein:
the probe housing (111) comprises a sleeve (112) and a metal cap (114);
the lower end of the sleeve (112) is connected with one end of the temperature measuring optical fiber (1), the upper end of the sleeve (112) is connected with the other end of the metal cap (114), and the fluorescent disk (113) is positioned between the sleeve (112) and the metal cap (114);
the other end of the temperature measuring optical fiber (1) is arranged opposite to one end of the switching optical fiber (2) through the switching connector (22).
3. An optical fiber thermometry system according to claim 2, wherein:
the adapter (22) comprises a nut (12), a threaded cap (211) and a ferrule (212);
the upper end of the nut (12) is matched with the lower end of the sleeve (112), and the lower end of the nut (12) is matched with one end of the ferrule (212);
the other end of the temperature measuring optical fiber (1) sequentially passes through the nut (12) and the threaded cap (211) to be inserted into one end of the inserting core (212);
one end of the switching optical fiber (2) is inserted into the other end of the inserting core (212), and the end part of one end of the switching optical fiber (2) and the end part of the other end of the temperature measuring optical fiber (1) are oppositely arranged in the inserting core (212);
the other end of the switching optical fiber (2) is connected with the transmitter (3) through a connector (24).
4. A fiber optic thermometry system according to claim 3, wherein:
the device also comprises a spring (213) and a threaded connector (214) matched with the spring (213);
the threaded connector (214) is sleeved at the other end of the ferrule (212), and the spring (213) is positioned between the threaded connector (214) and the outer wall of the other end of the ferrule (212);
the threaded connector (214) is provided with a plug hole matched with the outer diameter of the switching optical fiber (2); one end of the switching optical fiber (2) is inserted into the other end of the inserting core (212) through the inserting hole.
5. The fiber optic thermometry system of claim 4, wherein:
the optical fiber connector also comprises a sheath (23) which is sleeved outside the switching optical fiber (2) and is connected with the connector (24).
6. The fiber optic thermometry system of claim 5, wherein:
the temperature measuring optical fiber (1) is a single-mode quartz optical fiber or a multimode quartz optical fiber or a plastic optical fiber or a polymer optical fiber;
the sleeve (112) is PEI;
the metal cap (114) is copper.
7. An optical fiber thermometry system according to claim 1, wherein:
the number of the temperature measuring units is four.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202320372292.6U CN219776927U (en) | 2023-03-02 | 2023-03-02 | Optical fiber temperature measurement system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202320372292.6U CN219776927U (en) | 2023-03-02 | 2023-03-02 | Optical fiber temperature measurement system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN219776927U true CN219776927U (en) | 2023-09-29 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202320372292.6U Active CN219776927U (en) | 2023-03-02 | 2023-03-02 | Optical fiber temperature measurement system |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN219776927U (en) |
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2023
- 2023-03-02 CN CN202320372292.6U patent/CN219776927U/en active Active
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