CN219714541U - Signal processing circuit of vibration sensor - Google Patents

Signal processing circuit of vibration sensor Download PDF

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Publication number
CN219714541U
CN219714541U CN202321020671.5U CN202321020671U CN219714541U CN 219714541 U CN219714541 U CN 219714541U CN 202321020671 U CN202321020671 U CN 202321020671U CN 219714541 U CN219714541 U CN 219714541U
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amplifier
resistor
input end
vibration sensor
output
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李坚
周明杰
谢刚
陈俊龙
陈昌鹏
柯银鸿
翁新全
许静玲
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Xiamen Niell Electronics Co ltd
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Xiamen Niell Electronics Co ltd
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Abstract

The utility model discloses a signal processing circuit of a vibration sensor, which is characterized in that a differential input end is connected with the vibration sensor; the charge conversion unit is connected with the differential input end so as to receive charge signals generated by the vibration sensor in a differential mode, and converts and amplifies the charge signals to obtain acceleration voltage signals; the first buffer output unit is connected with the charge conversion unit and is used for buffering and outputting the acceleration voltage signal; the speed integral conversion unit is connected with the charge conversion unit and converts the acceleration voltage signal into a speed voltage signal; the second buffer output unit is connected with the speed integral conversion unit and is used for buffering and outputting the speed voltage signal; therefore, acceleration and speed signals can be output simultaneously, and the influence of common-mode interference is well eliminated by adopting a differential input mode; the constant voltage source voltage is adopted for power supply, so that the circuit output is more stable and reliable.

Description

Signal processing circuit of vibration sensor
Technical Field
The utility model relates to the technical field of sensors, in particular to a signal processing circuit of a vibration sensor.
Background
In the related art, the existing vibration sensors are basically piezoelectric acceleration sensors, acceleration signals are output, and the practical situation for vibration measurement is that most of application occasions are characterized and analyzed by vibration speeds, because the speed sensors can better reflect vibration intensity, and are more convenient; meanwhile, in the existing acceleration sensor, in order to reduce signal lines, a two-wire power supply mode of a constant current source is basically adopted, but the amplitude of an output signal (voltage) of the acceleration sensor is unstable along with the intensity of the output signal and the positive or negative direction of vibration, so that the power supply voltage of devices in a circuit is unstable and is easy to generate distortion, and in addition, the use environment of the vibration sensor is generally severe, so that a plurality of common-mode interference signals exist.
Disclosure of Invention
The present utility model aims to solve at least to some extent one of the technical problems in the above-described technology. Therefore, the utility model aims to provide a signal processing circuit of a vibration sensor, which not only provides acceleration output signals, but also provides speed output signals which are more convenient to analyze and process; meanwhile, as voltage power supply is adopted, the devices in the circuit are ensured to have stable power supply voltage and direct current working points; and the charge signal of the input end adopts a differential amplifying circuit, so that the influence of common-mode interference is well eliminated.
In order to achieve the above object, a signal processing circuit of a vibration sensor according to an embodiment of the present utility model includes: the differential input end is connected with the vibration sensor; the charge conversion unit is connected with the differential input end so as to receive a charge signal generated by the vibration sensor in a differential mode, and converts and amplifies the charge signal to obtain an acceleration voltage signal; the first buffer output unit is connected with the charge conversion unit and is used for buffering and outputting the acceleration voltage signal; the speed integration conversion unit is connected with the charge conversion unit and converts the acceleration voltage signal into a speed voltage signal; and the second buffer output unit is connected with the speed integral conversion unit and is used for buffering and outputting the speed voltage signal.
The signal processing circuit of the vibration sensor comprises a differential input end, a charge conversion unit, a first buffer output unit, a speed integral conversion unit and a second buffer output unit, wherein the differential input end is connected with the vibration sensor; the charge conversion unit is connected with the differential input end so as to receive charge signals generated by the vibration sensor in a differential mode, and converts and amplifies the charge signals to obtain acceleration voltage signals; the first buffer output unit is connected with the charge conversion unit and is used for buffering and outputting the acceleration voltage signal; the speed integral conversion unit is connected with the charge conversion unit and converts the acceleration voltage signal into a speed voltage signal; the second buffer output unit is connected with the speed integral conversion unit and is used for buffering and outputting the speed voltage signal; therefore, acceleration and speed signals can be output simultaneously, the influence of common-mode interference is well eliminated by adopting a differential input mode, and constant-voltage source voltage is adopted for power supply, so that the circuit output is more stable and reliable.
In addition, the signal processing circuit of the vibration sensor according to the present utility model may further have the following additional technical features:
optionally, the method further comprises: a first voltage amplifying unit connected between the charge converting unit and the first buffer output unit so as to amplify the acceleration voltage signal by the first voltage amplifying unit; and a second voltage amplifying unit connected between the speed-integrating converting unit and the second buffer output unit so as to amplify the speed voltage signal by the second voltage amplifying unit.
Optionally, the differential inputs include a positive charge signal input and a negative charge signal input.
Optionally, the charge conversion unit includes: a first amplifier; one end of the first resistor is connected with the negative input end of the first amplifier, and the other end of the first resistor is connected with the output end of the first amplifier; a first capacitor connected in parallel with the first resistor; one end of the second capacitor is connected with the positive charge signal input end; one end of the second resistor is connected with the other end of the second capacitor, and the other end of the second resistor is connected with the negative input end of the first amplifier; the positive input end of the second amplifier is connected with the positive input end of the first amplifier and is connected to a reference voltage; one end of the third resistor is connected with the negative input end of the second amplifier, and the other end of the third resistor is connected with the output end of the second amplifier; a third capacitor connected in parallel with the third resistor; one end of the fourth capacitor is connected with the negative charge signal input end; one end of the fourth resistor is connected with the other end of the fourth capacitor, and the other end of the fourth resistor is connected with the negative input end of the second amplifier; the negative input end of the third amplifier is connected with the output end of the first amplifier through a fifth resistor, the positive input end of the third amplifier is connected with the output end of the second amplifier through a sixth resistor, the negative input end of the third amplifier is connected with the output end of the third amplifier through a seventh resistor, and the positive input end of the third amplifier is connected to a reference voltage through an eighth resistor.
Optionally, the first voltage amplifying unit includes: the positive input end of the fourth amplifier is connected with the eighth resistor and is connected to a reference voltage; a ninth resistor, one end of which is connected with the output end of the third amplifier, and the other end of which is connected with the negative input end of the fourth amplifier; a tenth resistor, one end of which is connected with the negative input end of the fourth amplifier, and the other end of which is connected with the output end of the fourth amplifier; and a fifth capacitor connected in parallel with the tenth resistor.
Optionally, the first buffer output unit includes: the negative input end of the fifth amplifier is connected with the output end of the fifth amplifier; and one end of the eleventh resistor is connected with the output end of the fourth amplifier, and the other end of the eleventh resistor is connected with the positive input end of the fifth amplifier.
Optionally, the speed integral conversion unit includes: a sixth amplifier, the negative input of which is connected to the output of the fourth amplifier through a twelfth resistor; a thirteenth resistor, one end of which is connected with the negative input end of the sixth amplifier, and the other end of which is connected with the output end of the sixth amplifier; and a sixth capacitor connected in parallel with the thirteenth resistor.
Optionally, the second voltage amplifying unit includes: and the positive input end of the seventh amplifier is connected with the positive input end of the sixth amplifier and is connected to the reference voltage, the negative input end of the seventh amplifier is connected with the output end of the sixth amplifier through a fourteenth resistor, and the negative input end of the seventh amplifier is also connected with the output end of the seventh amplifier through a fifteenth resistor.
Optionally, the second buffer output unit includes: and the positive input end of the eighth amplifier is connected with the output end of the seventh amplifier through a sixteenth resistor, and the negative input end of the eighth amplifier is connected with the output end of the eighth amplifier.
Drawings
FIG. 1 is a block diagram of a signal processing circuit of a vibration sensor according to one embodiment of the present utility model;
FIG. 2 is a circuit schematic of a signal processing circuit of a vibration sensor according to one embodiment of the present utility model;
fig. 3 is a schematic circuit diagram of the charge conversion unit shown in fig. 2;
fig. 4 is a schematic circuit diagram of the first voltage amplifying unit shown in fig. 2;
FIG. 5 is a schematic circuit diagram of the first buffer output unit shown in FIG. 2;
fig. 6 is a schematic circuit diagram of the second voltage amplifying unit shown in fig. 2;
fig. 7 is a schematic circuit diagram of the speed integral conversion unit shown in fig. 2;
fig. 8 is a schematic circuit diagram of the second buffer output unit shown in fig. 2.
Detailed Description
Embodiments of the present utility model are described in detail below, examples of which are illustrated in the accompanying drawings, wherein like or similar reference numerals refer to like or similar elements or elements having like or similar functions throughout. The embodiments described below by referring to the drawings are illustrative and intended to explain the present utility model and should not be construed as limiting the utility model.
In order that the above-described aspects may be better understood, exemplary embodiments of the present utility model will be described in more detail below with reference to the accompanying drawings. While exemplary embodiments of the present utility model are shown in the drawings, it should be understood that the present utility model may be embodied in various forms and should not be limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the utility model to those skilled in the art.
In order to better understand the above technical solutions, the following detailed description will refer to the accompanying drawings and specific embodiments.
Referring to fig. 1 to 8, a signal processing circuit of a vibration sensor according to an embodiment of the present utility model includes a differential input terminal, a charge conversion unit 10, a first buffer output unit 30, a speed integration conversion unit 40, and a second buffer output unit 60.
The differential input end is connected with the vibration sensor; the charge conversion unit 10 is connected to the differential input terminals to receive the charge signal generated by the vibration sensor in a differential form, and converts and amplifies the charge signal to obtain an acceleration voltage signal; the first buffer output unit 30 is connected with the charge conversion unit 10, and the first buffer output unit 30 buffers and outputs the acceleration voltage signal; the speed integration conversion unit 40 is connected with the charge conversion unit 10, and the speed integration conversion unit 40 converts the acceleration voltage signal into a speed voltage signal; the second buffer output unit 60 is connected to the speed-integral converting unit 40, and the second buffer output unit 60 buffers the speed voltage signal.
As one embodiment, the signal processing circuit of the vibration sensor further includes: a first voltage amplifying unit 20 and a second voltage amplifying unit 50.
Wherein the first voltage amplifying unit 20 is connected between the charge converting unit 10 and the first buffer output unit 30 so as to amplify the acceleration voltage signal by the first voltage amplifying unit 20; the second voltage amplifying unit 50 is connected between the speed-integration converting unit 40 and the second buffer output unit 60 so as to amplify the speed voltage signal by the second voltage amplifying unit 50.
As an example, the differential inputs include a positive charge signal input q+ and a negative charge signal input Q-.
That is, when the piezoelectric sensor senses an external vibration signal, a charge signal Q proportional to the vibration acceleration is generated, and the charge signal Q is divided into two signal lines of q+ and Q-and is input into the charge conversion unit 10 in a differential form, so that the influence of common mode interference is well eliminated by adopting a differential input method.
As an embodiment, as shown in fig. 3, the charge conversion unit 10 includes: the first amplifier U1A, the first resistor R2, the first capacitor C1, the second capacitor C3, the second resistor R3, the second amplifier U1B, the third resistor R16, the third capacitor C6, the fourth capacitor C5, the fourth resistor R15, the fifth resistor R4, the sixth resistor R13, the seventh resistor R5, the eighth resistor R14 and the third amplifier U1C.
One end of the first resistor R2 is connected with the negative input end of the first amplifier U1A, and the other end of the first resistor R2 is connected with the output end of the first amplifier U1A; the first capacitor C1 is connected with the first resistor R2 in parallel; one end of the second capacitor C3 is connected with the positive charge signal input end Q+; one end of the second resistor R3 is connected with the other end of the second capacitor C3, and the other end of the second resistor R3 is connected with the negative input end of the first amplifier U1A; the positive input end of the second amplifier U1B is connected with the positive input end of the first amplifier U1A and is connected to the reference voltage Vref; one end of the third resistor R16 is connected with the negative input end of the second amplifier U1B, and the other end of the third resistor R16 is connected with the output end of the second amplifier U1B; the third capacitor C6 is connected in parallel with the third resistor R16; one end of the fourth capacitor C5 is connected with the negative charge signal input end Q < - >; one end of a fourth resistor R15 is connected with the other end of the fourth capacitor C5, and the other end of the fourth resistor R15 is connected with the negative input end of the second amplifier U1B; the negative input end of the third amplifier U1C is connected with the output end of the first amplifier U1A through a fifth resistor R4, the positive input end of the third amplifier U1C is connected with the output end of the second amplifier U1B through a sixth resistor R13, the negative input end of the third amplifier U1C is connected with the output end of the third amplifier U1C through a seventh resistor R5, and the positive input end of the third amplifier U1C is connected to the reference voltage Vref through an eighth resistor R14.
That is, the charge signal is converted into a voltage by the charge conversion unit 10, and the converted voltage signal is amplified.
Note that, the charge signal:
Q=Sq*a
wherein Q is the charge quantity generated by the piezoelectric sensor, and the unit is pC; sq is the charge sensitivity of the piezoelectric sensor in pC/m/s 2 The method comprises the steps of carrying out a first treatment on the surface of the a is real-time acceleration of vibration in m/s 2
Since the charge signal is weak and very sensitive to out-of-band signals, especially low frequency signals, a high-resistance input needs to be ensured at the differential input end; the acceleration voltage output amplitude A1 converted by the charge conversion unit 10 as described above is as follows:
wherein, A1 is the amplitude of the output voltage of the charge conversion unit 10, and the unit is mV; c5 is the integrating capacitance in the charge conversion unit 10 in nF; q is the amount of charge generated by the piezoelectric sensor in pC.
As an embodiment, as shown in fig. 4, the first voltage amplifying unit 20 includes: a fourth amplifier U1D, a ninth resistor R9, a tenth resistor R7, and a fifth capacitor C4.
The positive input end of the fourth amplifier U1D is connected with the eighth resistor R14 and is connected to the reference voltage Vref; one end of a ninth resistor R9 is connected with the output end of the third amplifier U1C, and the other end of the ninth resistor R9 is connected to the negative input end of the fourth amplifier U1D; one end of a tenth resistor R7 is connected with the negative input end of the fourth amplifier U1D, and the other end of the tenth resistor R7 is connected with the output end of the fourth amplifier U1D; the fifth capacitor C4 is connected in parallel with the tenth resistor R7.
It should be noted that, in some applications, since a larger voltage sensitivity output is required, it is necessary to further add the first voltage amplifying unit 20 to the circuit, so as to meet the final output requirement of the product; the voltage output A2 after passing through the first voltage amplifying unit 20 is as follows:
the fifth capacitor C4 can properly adjust the frequency response in the circuit.
As an embodiment, as shown in fig. 5, the first buffer output unit 30 includes: a fifth amplifier U2A and an eleventh resistor R1.
The negative input end of the fifth amplifier U2A is connected with the output end of the fifth amplifier U2A; one end of the eleventh resistor R1 is connected to the output terminal of the fourth amplifier U1D, and the other end of the eleventh resistor R1 is connected to the positive input terminal of the fifth amplifier U2A.
It should be noted that, the purpose of the first buffer output unit 30 is to enhance the circuit driving capability and match the impedance of the back-end acquisition circuit; the amplitude Ao of which is shown below:
as an embodiment, as shown in fig. 6, the speed integral conversion unit 40 includes: a sixth amplifier U2B, a twelfth resistor R10, a thirteenth resistor R6, and a sixth capacitor C2.
Wherein the negative input end of the sixth amplifier U2B is connected to the output end of the fourth amplifier U1D through a twelfth resistor R10; one end of a thirteenth resistor R6 is connected with the negative input end of the sixth amplifier U2B, and the other end of the thirteenth resistor R6 is connected with the output end of the sixth amplifier U2B; the sixth capacitor C2 is connected in parallel with the thirteenth resistor R6.
It should be noted that, after passing through a suitable integrating circuit, the acceleration signal becomes a velocity signal, and its transfer function is shown in the following formula 5:
2πf*V1*Sv=Sa*a
wherein f is the vibration frequency of the sensor, and the unit is Hz; v1 is the acceleration voltage value converted into speedThe voltage value is in m/s; sv is the speed sensitivity in mV/m/s; sa is acceleration sensitivity in mV/m/s 2 The method comprises the steps of carrying out a first treatment on the surface of the a is real-time acceleration of vibration in m/s 2
The following formula can be obtained from the above formula:
as an embodiment, as shown in fig. 7, the second voltage amplifying unit 50 includes: a seventh amplifier U2C, a fourteenth resistor R11, and a fifteenth resistor R8.
The positive input end of the seventh amplifier U2C is connected to the positive input end of the sixth amplifier U2B and to the reference voltage Vref, the negative input end of the seventh amplifier U2C is connected to the output end of the sixth amplifier U2B through a fourteenth resistor R11, and the negative input end of the seventh amplifier U2C is also connected to the output end of the seventh amplifier U2C through a fifteenth resistor R8.
The second voltage amplifying unit 50 has the same function as the first voltage amplifying unit 20, and the second voltage amplifying unit 50 needs to be added to satisfy the appropriate speed sensitivity output. The speed output V2 amplified by the second voltage amplifying unit 50 is as follows:
as an embodiment, as shown in fig. 8, the second buffer output unit 60 includes: an eighth amplifier U2D and a sixteenth resistor R12.
The positive input end of the eighth amplifier U2D is connected to the output end of the seventh amplifier U2C through the sixteenth resistor R12, and the negative input end of the eighth amplifier U2D is connected to the output end of the eighth amplifier U2D.
It should be noted that the second buffer output unit 60 has the same purpose as the first buffer output unit 30, so as to enhance the circuit driving capability and match the impedance of the back-end acquisition circuit; the amplitude Vo is as follows:
in summary, the signal processing circuit of the vibration sensor according to the present utility model includes a differential input terminal, a charge conversion unit, a first buffer output unit, a speed integration conversion unit, and a second buffer output unit, where the differential input terminal is connected to the vibration sensor; the charge conversion unit is connected with the differential input end so as to receive charge signals generated by the vibration sensor in a differential mode, and converts and amplifies the charge signals to obtain acceleration voltage signals; the first buffer output unit is connected with the charge conversion unit and is used for buffering and outputting the acceleration voltage signal; the speed integral conversion unit is connected with the charge conversion unit and converts the acceleration voltage signal into a speed voltage signal; the second buffer output unit is connected with the speed integral conversion unit and is used for buffering and outputting the speed voltage signal; therefore, acceleration and speed signals can be output simultaneously, the influence of common-mode interference is well eliminated by adopting a differential input mode, and constant-voltage source voltage is adopted for power supply, so that the circuit output is more stable and reliable.
In the description of the present utility model, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings are merely for convenience in describing the present utility model and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the present utility model.
Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include one or more such feature. In the description of the present utility model, the meaning of "a plurality" is two or more, unless explicitly defined otherwise.
In the present utility model, unless explicitly specified and limited otherwise, the terms "mounted," "connected," "secured," and the like are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally formed; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communicated with the inside of two elements or the interaction relationship of the two elements. The specific meaning of the above terms in the present utility model can be understood by those of ordinary skill in the art according to the specific circumstances.
In the present utility model, unless expressly stated or limited otherwise, a first feature "above" or "below" a second feature may include both the first and second features being in direct contact, as well as the first and second features not being in direct contact but being in contact with each other through additional features therebetween. Moreover, a first feature being "above," "over" and "on" a second feature includes the first feature being directly above and obliquely above the second feature, or simply indicating that the first feature is higher in level than the second feature. The first feature being "under", "below" and "beneath" the second feature includes the first feature being directly under and obliquely below the second feature, or simply means that the first feature is less level than the second feature.
In the description of the present specification, a description referring to terms "one embodiment," "some embodiments," "examples," "specific examples," or "some examples," etc., means that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the present utility model. In this specification, schematic representations of the above terms should not be understood as necessarily being directed to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples. Further, one skilled in the art can engage and combine the different embodiments or examples described in this specification.
While embodiments of the present utility model have been shown and described above, it will be understood that the above embodiments are illustrative and not to be construed as limiting the utility model, and that variations, modifications, alternatives and variations may be made to the above embodiments by one of ordinary skill in the art within the scope of the utility model.

Claims (9)

1. A signal processing circuit of a vibration sensor, comprising:
the differential input end is connected with the vibration sensor;
the charge conversion unit is connected with the differential input end so as to receive a charge signal generated by the vibration sensor in a differential mode, and converts and amplifies the charge signal to obtain an acceleration voltage signal;
the first buffer output unit is connected with the charge conversion unit and is used for buffering and outputting the acceleration voltage signal;
the speed integration conversion unit is connected with the charge conversion unit and converts the acceleration voltage signal into a speed voltage signal;
and the second buffer output unit is connected with the speed integral conversion unit and is used for buffering and outputting the speed voltage signal.
2. The signal processing circuit of a vibration sensor of claim 1, further comprising:
a first voltage amplifying unit connected between the charge converting unit and the first buffer output unit so as to amplify the acceleration voltage signal by the first voltage amplifying unit;
and a second voltage amplifying unit connected between the speed-integrating converting unit and the second buffer output unit so as to amplify the speed voltage signal by the second voltage amplifying unit.
3. The signal processing circuit of a vibration sensor of claim 2, wherein the differential inputs comprise a positive charge signal input and a negative charge signal input.
4. A signal processing circuit of a vibration sensor according to claim 3, wherein the charge conversion unit includes:
a first amplifier;
one end of the first resistor is connected with the negative input end of the first amplifier, and the other end of the first resistor is connected with the output end of the first amplifier;
a first capacitor connected in parallel with the first resistor;
one end of the second capacitor is connected with the positive charge signal input end;
one end of the second resistor is connected with the other end of the second capacitor, and the other end of the second resistor is connected with the negative input end of the first amplifier;
the positive input end of the second amplifier is connected with the positive input end of the first amplifier and is connected to a reference voltage;
one end of the third resistor is connected with the negative input end of the second amplifier, and the other end of the third resistor is connected with the output end of the second amplifier;
a third capacitor connected in parallel with the third resistor;
one end of the fourth capacitor is connected with the negative charge signal input end;
one end of the fourth resistor is connected with the other end of the fourth capacitor, and the other end of the fourth resistor is connected with the negative input end of the second amplifier;
the negative input end of the third amplifier is connected with the output end of the first amplifier through a fifth resistor, the positive input end of the third amplifier is connected with the output end of the second amplifier through a sixth resistor, the negative input end of the third amplifier is connected with the output end of the third amplifier through a seventh resistor, and the positive input end of the third amplifier is connected to a reference voltage through an eighth resistor.
5. The signal processing circuit of a vibration sensor according to claim 4, wherein the first voltage amplifying unit includes:
the positive input end of the fourth amplifier is connected with the eighth resistor and is connected to a reference voltage;
a ninth resistor, one end of which is connected with the output end of the third amplifier, and the other end of which is connected with the negative input end of the fourth amplifier;
a tenth resistor, one end of which is connected with the negative input end of the fourth amplifier, and the other end of which is connected with the output end of the fourth amplifier;
and a fifth capacitor connected in parallel with the tenth resistor.
6. The signal processing circuit of a vibration sensor according to claim 5, wherein the first buffer output unit includes:
the negative input end of the fifth amplifier is connected with the output end of the fifth amplifier;
and one end of the eleventh resistor is connected with the output end of the fourth amplifier, and the other end of the eleventh resistor is connected with the positive input end of the fifth amplifier.
7. The signal processing circuit of a vibration sensor according to claim 5, wherein the speed-integration converting unit includes:
a sixth amplifier, the negative input of which is connected to the output of the fourth amplifier through a twelfth resistor;
a thirteenth resistor, one end of which is connected with the negative input end of the sixth amplifier, and the other end of which is connected with the output end of the sixth amplifier;
and a sixth capacitor connected in parallel with the thirteenth resistor.
8. The signal processing circuit of the vibration sensor according to claim 7, wherein the second voltage amplifying unit includes:
and the positive input end of the seventh amplifier is connected with the positive input end of the sixth amplifier and is connected to the reference voltage, the negative input end of the seventh amplifier is connected with the output end of the sixth amplifier through a fourteenth resistor, and the negative input end of the seventh amplifier is also connected with the output end of the seventh amplifier through a fifteenth resistor.
9. The signal processing circuit of the vibration sensor according to claim 8, wherein the second buffer output unit includes:
and the positive input end of the eighth amplifier is connected with the output end of the seventh amplifier through a sixteenth resistor, and the negative input end of the eighth amplifier is connected with the output end of the eighth amplifier.
CN202321020671.5U 2023-04-28 2023-04-28 Signal processing circuit of vibration sensor Active CN219714541U (en)

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Application Number Priority Date Filing Date Title
CN202321020671.5U CN219714541U (en) 2023-04-28 2023-04-28 Signal processing circuit of vibration sensor

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