CN219684483U - Positioning fixture for brazing electrode rod of semiconductor ceramic heater - Google Patents
Positioning fixture for brazing electrode rod of semiconductor ceramic heater Download PDFInfo
- Publication number
- CN219684483U CN219684483U CN202321305828.9U CN202321305828U CN219684483U CN 219684483 U CN219684483 U CN 219684483U CN 202321305828 U CN202321305828 U CN 202321305828U CN 219684483 U CN219684483 U CN 219684483U
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- positioning
- electrode rod
- electrode
- brazing
- connecting hole
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- 239000000919 ceramic Substances 0.000 title claims abstract description 40
- 238000005219 brazing Methods 0.000 title claims abstract description 23
- 239000004065 semiconductor Substances 0.000 title claims abstract description 18
- 238000003466 welding Methods 0.000 claims abstract description 59
- 238000010438 heat treatment Methods 0.000 claims abstract description 48
- 238000000034 method Methods 0.000 abstract description 23
- 230000005484 gravity Effects 0.000 description 6
- 239000000463 material Substances 0.000 description 5
- 229910000679 solder Inorganic materials 0.000 description 5
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 4
- 238000000605 extraction Methods 0.000 description 3
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 2
- 230000006978 adaptation Effects 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 229910052750 molybdenum Inorganic materials 0.000 description 2
- 239000011733 molybdenum Substances 0.000 description 2
- 229910052759 nickel Inorganic materials 0.000 description 2
- 238000003825 pressing Methods 0.000 description 2
- 238000001179 sorption measurement Methods 0.000 description 2
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 2
- 229910052721 tungsten Inorganic materials 0.000 description 2
- 239000010937 tungsten Substances 0.000 description 2
- 235000012431 wafers Nutrition 0.000 description 2
- 230000001174 ascending effect Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
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Abstract
The utility model discloses a positioning fixture for brazing electrode rods of a semiconductor ceramic heater, which comprises a heating disc, wherein a cavity tube is connected to the heating disc, one end, far away from the heating disc, of the cavity tube is connected with a counterweight cap in a sliding manner, an electrode rod is arranged in the cavity tube, one end of the electrode rod is connected with the heating disc, and the other end of the electrode rod is abutted to the counterweight cap. The utility model provides a positioning clamp for brazing electrode rods of a semiconductor ceramic heater, which can continuously give proper pressure to the electrode rods in the welding process so as to extrude a welding area and extrude internal bubbles, so that the electrode rods are fully contacted with the welding area, and the connection reliability of the welding area is ensured.
Description
Technical Field
The utility model relates to the technical field of semiconductor manufacturing equipment, in particular to a positioning clamp for brazing an electrode rod of a semiconductor ceramic heater.
Background
In the semiconductor process, the ceramic heater is used as an important component of PVD, CVD, etching, ion implantation and other equipment to play an important role in carrying wafers, adsorbing wafers, controlling temperature, feeding radio frequency and the like. The structure of the heating plate is a heating plate and a ceramic tube, and the material is aluminum nitride generally; wherein a heating layer and a radio frequency layer or an electrostatic adsorption layer are distributed in the ceramic disc, the material is usually tungsten or molybdenum, welding pins are reserved, and the welding pins are led out through electrode rods; the electrode rod is led out through the ceramic tube and connected with a power supply, is made of nickel generally, and is connected with the heating layer, the electrostatic adsorption layer and the radio frequency layer in a brazing manner; the ceramic tube is provided with a screw hole site which is fixedly connected with the equipment cavity through a screw.
For example, publication number "CN114158147a" discloses a "connection structure for an extraction electrode of a ceramic heating disc and a connection method thereof", which includes a joint embedded in a ceramic substrate, an extraction electrode, and a connection hole, where the extraction electrode includes an electrode tube section and an electrode rod section, a first gap is set between the electrode tube section and the connection hole, and a second gap is set between the electrode rod section and the electrode tube section. However, in the actual welding process, the electrode rod is fixed on the heating plate through the fixed connecting structure, so that the distance between the electrode rod and the heating plate is always kept fixed during welding, the electrode rod cannot obtain proper pressure, bubbles or gaps are easily generated at the welding position, and the connecting strength is poor after welding.
Disclosure of Invention
Aiming at the problem that bubbles and gaps cannot be eliminated in the welding process in the prior art, the utility model provides a positioning clamp for brazing an electrode rod of a semiconductor ceramic heater, which can continuously give proper pressure to the electrode rod in the welding process so as to squeeze a welding area and squeeze out internal bubbles, so that the electrode rod is fully contacted with the welding area, and the connection reliability of the welding area is ensured.
The second object of the utility model is to ensure that the electrode rod is in the correct position during the welding process, avoiding tilting.
In order to achieve the above purpose, the present utility model adopts the following technical scheme.
The utility model provides a positioning fixture that semiconductor ceramic heater electrode pole used of brazing, includes the heating dish, be connected with the cavity pipe on the heating dish, cavity pipe keeps away from heating dish one end sliding connection has the counter weight cap, be provided with the electrode pole in the cavity pipe, electrode pole one end is connected with the heating dish, other end butt counter weight cap. The ceramic heater comprises a heating disc, a cavity tube and an electrode rod, wherein the heating disc is generally a ceramic disc, the cavity tube is generally a ceramic tube, the electrode rod is required to be welded on the heating disc, the welding process adopts brazing, the balance weight cap connected to the cavity tube is in sliding connection and is abutted to the electrode tube, one end of the electrode rod, which is close to the heating disc, can be tightly attached to the heating disc under the gravity action of the balance weight cap, a molten pool formed in a welding area can be sunk into the molten pool under the pressure action of the balance weight cap in the welding process, part of bubbles in the connecting area are extruded, and gaps are reduced, so that the molten pool is in full contact with the electrode rod, after the welding is completed, compared with the existing welding mode, the welding area is better in quality, the contact is more full, the pressure is applied in the self-adapting mode in the welding process, manual intervention is not needed, the welding uniformity between products is better, and errors are not easy to occur.
Preferably, a positioning groove is formed in one end, close to the electrode rod, of the counterweight cap, and the end of the electrode rod is sleeved in the positioning groove. The second utility model is characterized in that the counterweight cap is provided with a positioning groove, the counterweight cap is sleeved with the electrode rod through the positioning groove, the counterweight cap is in sliding connection with the cavity tube, the sliding direction is along the gravity direction, and the other directions are restrained, the positioning groove ensures that the counterweight cap can stably exert pressure on the electrode rod, offset dislocation between the counterweight cap and the electrode rod in the pressing process is avoided, offset of the electrode rod except the gravity direction can be limited, the stability of the relative position between the electrode rod and the cavity tube is ensured, the electrode rod can be in a correct position in the welding process, and inclination is avoided.
Preferably, one side of the cavity tube far away from the heating plate is connected with a positioning block, a positioning hole is formed in the positioning block, and the counterweight cap is connected to the positioning hole in a sliding mode. Set up the locating hole on the locating piece, the locating hole size slightly is greater than the counter weight cap size, realizes clearance fit for the counter weight cap can realize the upper and lower displacement on the locating hole, and restrict the ascending motion of other directions, thereby the electrode rod can be stabilized and receive the pressurization that the counter weight cap produced in welding process, guarantees welding quality, and can make the electrode rod be in correct position and form.
Preferably, the positioning block is provided with a plurality of positioning holes, the positioning block is provided with a waist-shaped connecting hole, and the positioning block is connected with the cavity tube through the waist-shaped connecting hole. The positioning block is provided with a plurality of positioning holes, adjacent positioning holes form a group, the arrangement of each group of positioning holes is identical to the distribution of electrode rods on heaters with different specifications, so that the universality of the positioning block is improved, when the positioning block is connected with different cavity pipes, the corresponding positioning hole groups are matched by adjusting the alignment angle around rotation, and the connection between the positioning block and the cavity pipes is realized through the waist-shaped connecting holes, so that the utilization rate of the positioning block is improved.
Preferably, the positioning block is detachably connected to the cavity tube. The positioning block is fixed with the cavity pipe through detachable connection, the detachable connection comprises but not limited to threaded connection, plug pin connection and clamping connection, and the installation and separation between the positioning block and the cavity pipe can be conveniently and rapidly carried out while the connection stability is ensured through the connection mode, so that the welding efficiency is improved.
Preferably, the positioning block is provided with a first connecting hole, the first connecting hole is connected with a positioning pin, the cavity tube is provided with a second connecting hole, the first connecting hole is aligned with the second connecting hole, and the positioning pin is connected with the first connecting hole and the second connecting hole. The locating pin is connected with the first connecting hole and the second connecting hole, and the locating pin preferably uses two or more, so that offset is avoided between the locating block and the cavity tube, and the locating block and the locating pin can be made of high-temperature resistant materials such as ceramics, tungsten, molybdenum, nickel and the like.
Preferably, a welding pin is arranged on one side, close to the electrode rod, of the heating disc, and the electrode rod is abutted with the welding pin. The welding pin that sets up on the heating plate is the recess with the electrode rod adaptation, places the solder on the welding pin in the welding process to make electrode rod tip and the solder contact on the welding pin, place whole heater and weld in the brazing furnace, can accomplish the connection between electrode rod and the heating plate.
The beneficial effects of the utility model are as follows:
(1) The electrode rod can be subjected to uninterrupted application of proper pressure in the welding process, so that the welding quality of a welding area is ensured, the connection between the electrode rod and the heating plate is ensured to be tight, and the generation of bubbles and gaps is reduced;
(2) The counterweight cap can limit the electrode rod, and the position of the electrode rod can be ensured to be parallel to the cavity tube by matching with the limiting block, so that the motor rod can be always positioned at a correct position in the brazing process;
(3) Through a plurality of locating holes arranged on the locating block and waist-shaped connecting holes on the locating block, the locating block can be adapted to electrode rod arrangement of different specifications, and the utilization rate and application range of the locating block are improved.
Drawings
Fig. 1 is an exploded view of the present utility model.
Fig. 2 is an isometric view of the present utility model.
Fig. 3 is a cross-sectional view of the present utility model.
Fig. 4 is a partial enlarged view at a in fig. 1.
Fig. 5 is a schematic view of the construction of the weight cap of fig. 3.
Fig. 6 is a schematic structural view of the positioning block in embodiment 2.
In the figure: the heating device comprises a heating plate 1, a welding pin 11, a hollow tube 2, a connecting hole 21, a counterweight cap 3, a positioning groove 31, an electrode rod 4, a positioning block 5, a positioning hole 51, a waist-shaped connecting hole 52, a connecting hole 53 and a positioning pin 54.
Detailed Description
The utility model is further described below with reference to the drawings and specific embodiments.
Example 1:
as shown in fig. 1 and 2, a positioning fixture for brazing an electrode rod 4 of a semiconductor ceramic heater comprises a heating disc 1, wherein a cavity tube 2 is connected to the heating disc 1, one end, far away from the heating disc 1, of the cavity tube 2 is slidably connected with a counterweight cap 3, an electrode rod 4 is arranged in the cavity tube 2, one end of the electrode rod 4 is connected with the heating disc 1, and the other end of the electrode rod is abutted to the counterweight cap 3.
The ceramic heater comprises a heating disc 1, a cavity tube 2 and an electrode rod 4, wherein the heating disc 1 is a ceramic disc in the embodiment, the cavity tube 2 is a ceramic tube in the embodiment, the electrode rod 4 is required to be welded on the heating disc 1, the welding process adopts brazing, the balance weight cap 3 connected on the cavity tube 2 is in sliding connection, the balance weight cap 3 is abutted on the electrode tube, one end, close to the heating disc 1, of the electrode rod 4 can be tightly attached to the heating disc 1 under the gravity action of the balance weight cap 3, a molten pool formed in a welding area is formed in the welding process, the electrode rod 4 can be sunk into the molten pool under the pressure action of the balance weight cap 3, and part of bubbles in the connecting area are extruded to reduce gaps, so that the molten pool is fully contacted with the electrode rod 4.
As shown in fig. 3 and 5, a positioning groove 31 is formed in one end, close to the electrode rod 4, of the counterweight cap 3, the end of the electrode rod 4 is sleeved in the positioning groove 31, a positioning block 5 is connected to one side, away from the heating plate 1, of the cavity tube 2, a positioning hole 51 is formed in the positioning block 5, and the counterweight cap 3 is slidably connected to the positioning hole 51.
The positioning groove 31 is formed in the counterweight cap 3, the electrode rod 4 is sleeved on the positioning groove 31, the counterweight cap 3 is connected with the cavity tube 2 in a sliding mode, the sliding direction is along the gravity direction, the other directions are restrained, the positioning groove 31 ensures that the counterweight cap 3 can stably apply pressure to the electrode rod 4, offset dislocation between the counterweight cap 3 and the electrode rod 4 in the pressing process is avoided, meanwhile, offset of the electrode rod 4 except the gravity direction can be limited, stability of the relative position between the electrode rod 4 and the cavity tube 2 is ensured, the electrode rod 4 can be in a correct position in the welding process, inclination is avoided, the positioning hole 51 is formed in the positioning block 5, the size of the positioning hole 51 is slightly larger than the size of the counterweight cap 3, clearance fit is achieved, the counterweight cap 3 can realize up-down displacement on the positioning hole 51, movement in the other directions is limited, the electrode rod 4 can stably receive the pressurizing force generated by the counterweight cap 3 in the welding process, welding quality is ensured, and the electrode rod 4 can be in a correct position and form.
As shown in fig. 1 and 4, the positioning block 5 is provided with a first connecting hole 53, the first connecting hole 53 is connected with a positioning pin 54, the cavity tube 2 is provided with a second connecting hole 21, the first connecting hole 53 is aligned with the second connecting hole 21, and the positioning pin 54 connects the first connecting hole 53 and the second connecting hole 21.
The locating piece 5 is fixed with the cavity pipe 2 through the locating pin, when guaranteeing connection stability, can conveniently carry out the installation between locating piece 5 and the cavity pipe 2 fast, improve welding efficiency, locating pin 54 connects connecting hole 53 and No. two connecting holes 21, and locating pin 54 preferably uses two or more, avoids producing the skew between locating piece 5 and the cavity pipe 2, and the material selection high temperature resistant material of locating piece 5 and locating pin 54.
As shown in fig. 1 and 3, a welding pin 11 is provided on the heating plate 1 near the electrode rod 4, and the electrode rod 4 abuts against the welding pin 11. The welding pin 11 that sets up on the heating plate 1 is the recess with electrode rod 4 adaptation, places the solder on welding pin 11 in the welding process to make electrode rod 4 tip and the solder contact on the welding pin 11, place whole heater and weld in the brazing furnace, can accomplish the connection between electrode rod 4 and the heating plate 1.
The assembly and working process of the positioning fixture used for brazing the electrode rod 4 of the semiconductor ceramic heater in the embodiment are as follows: in this embodiment, the ceramic heater includes a heating plate 1 and a cavity tube 2, where the heating plate 1 is a ceramic plate, the cavity tube 2 is a ceramic tube, three electrode rods 4 are welded on the ceramic plate, firstly, solder is placed at the welding pins 11 on the ceramic plate, the welding pins 11 are three, the positioning block 5 is placed at one end of the ceramic tube far away from the ceramic plate, the first connecting hole 53 is aligned with the second connecting hole 21, and is connected together by a positioning pin 54, the positioning block 5 is fixed on the ceramic tube, then the electrode rods 4 pass through the positioning holes 51 on the positioning block 5, so that the ends of the electrode rods 4 are placed on the welding pins 11 of the ceramic plate, a balancing weight is sleeved on the ends of the electrode rods 4 far away from the ceramic plate, the lower ends of the balancing weight pass through the positioning holes 51, then the balancing weight is loosened, the pressure is adaptively generated on the electrode rods 4, then the assembled whole device is placed in a brazing furnace for welding, after the welding is completed, the counterweight cap 3 is removed, and the positioning block 5 is detached, so that the welding work of the electrode rods 4 is completed.
Example 2:
as shown in fig. 5, unlike embodiment 1, in this embodiment, a plurality of positioning holes 51 are provided in different arrangements in the positioning block 5, a waist-shaped connecting hole 52 is provided in the positioning block 5, and the positioning block 5 is connected to the hollow tube 2 through the waist-shaped connecting hole 52. Adjacent positioning holes 51 form a group, the arrangement of each group of positioning holes 51 is identical to the distribution of electrode rods 4 on heaters with different specifications, so that the universality of the positioning block 5 is improved, when the positioning block 5 is connected with different cavity pipes 2, the corresponding positioning hole 51 group is matched by adjusting the alignment angle around rotation, and the connection between the positioning block 5 and the cavity pipes 2 is realized through the waist-shaped connecting holes 52, so that the utilization rate of the positioning block 5 is improved.
Claims (7)
1. The utility model provides a positioning fixture that semiconductor ceramic heater electrode pole used of brazing, its characterized in that, including the heating dish, be connected with the cavity pipe on the heating dish, cavity pipe keeps away from heating dish one end sliding connection has the counter weight cap, be provided with the electrode pole in the cavity pipe, electrode pole one end is connected with the heating dish, other end butt counter weight cap.
2. The positioning fixture for brazing the electrode rod of the semiconductor ceramic heater according to claim 1, wherein a positioning groove is formed in one end, close to the electrode rod, of the counterweight cap, and the end of the electrode rod is sleeved in the positioning groove.
3. A positioning fixture for brazing an electrode rod of a semiconductor ceramic heater according to claim 1 or 2, wherein a positioning block is connected to one side of the cavity tube away from the heating plate, a positioning hole is formed in the positioning block, and the counterweight cap is slidably connected to the positioning hole.
4. A positioning fixture for brazing an electrode rod of a semiconductor ceramic heater according to claim 3, wherein the positioning block is provided with a plurality of positioning holes, the positioning block is provided with waist-shaped connecting holes, and the positioning block is connected with a cavity tube through the waist-shaped connecting holes.
5. A positioning fixture for brazing electrode bars of a semiconductor ceramic heater according to claim 3, wherein the positioning block is detachably connected to the cavity tube.
6. The positioning fixture for brazing electrode rods of semiconductor ceramic heaters according to claim 5, wherein the positioning block is provided with a first connecting hole, the first connecting hole is connected with a positioning pin, the cavity tube is provided with a second connecting hole, the first connecting hole is aligned with the second connecting hole, and the positioning pin connects the first connecting hole with the second connecting hole.
7. A positioning fixture for brazing electrode rods of a semiconductor ceramic heater according to claim 1 or 2, wherein a welding pin is arranged on one side of the heating disc, which is close to the electrode rods, and the electrode rods are abutted against the welding pin.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321305828.9U CN219684483U (en) | 2023-05-23 | 2023-05-23 | Positioning fixture for brazing electrode rod of semiconductor ceramic heater |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321305828.9U CN219684483U (en) | 2023-05-23 | 2023-05-23 | Positioning fixture for brazing electrode rod of semiconductor ceramic heater |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN219684483U true CN219684483U (en) | 2023-09-15 |
Family
ID=87969156
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202321305828.9U Active CN219684483U (en) | 2023-05-23 | 2023-05-23 | Positioning fixture for brazing electrode rod of semiconductor ceramic heater |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN219684483U (en) |
-
2023
- 2023-05-23 CN CN202321305828.9U patent/CN219684483U/en active Active
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