CN219683158U

CN219683158U - Gluing clamping device

Info

Publication number: CN219683158U
Application number: CN202321027570.0U
Authority: CN
Inventors: 李昌科; 李周坤
Original assignee: Shenzhen Jingshi Photomask Technology Co ltd
Current assignee: Shenzhen Jingshi Photomask Technology Co ltd
Priority date: 2023-05-04
Filing date: 2023-05-04
Publication date: 2023-09-15
Anticipated expiration: 2033-05-04

Abstract

The utility model provides a gluing clamping device, which relates to the technical field of clamping devices and comprises a mounting plate, wherein the mounting plate is fixedly connected with a fixing plate, the fixing plate is fixedly connected with a first electrohydraulic push rod, the first electrohydraulic push rod is fixedly connected with a clamping fixing frame, the clamping fixing frame is fixedly connected with a movable slide block, the movable slide block is in sliding connection with a slide groove, the clamping fixing frame is fixedly connected with a limiting guide rail, the limiting guide rail is in sliding connection with a limiting slide block, and the limiting slide block is fixedly connected with a clamping plate. According to the utility model, when the clamping plates move relatively, the clamping plates drive the limiting sliding blocks to slide along the surfaces of the limiting guide rails, the limiting sliding blocks are limited through the limiting guide rails, the stability of the clamping plates during clamping movement is improved, the two sides of the photomask substrate material are conveniently clamped horizontally, and the displacement of the clamping plates on one side in the vertical direction in the clamping process is avoided, so that the heights of the two sides of the photomask substrate material are different.

Description

Gluing clamping device

Technical Field

The utility model relates to the technical field of clamping devices, in particular to a gluing clamping device.

Background

The photomask substrate is an ideal photosensitive blank plate for manufacturing a fine photomask pattern, a required photomask can be obtained through a photoetching plate making process, and when the photomask substrate is subjected to gluing processing, a clamping device is required to be used for clamping and limiting the photomask substrate.

For example, chinese patent number is: CN212846347U, "a photoresist chuck for photomask", includes: a chuck base; the annular groove is arranged on the front surface of the chuck seat; the clamping structure is annularly arranged on the front surface of the chuck seat and comprises clamping rings, the clamping rings are annularly arranged on the front surface of the chuck seat, and two sides of the top of the inner wall of each clamping ring are fixedly connected with miniature telescopic columns; the friction structure is annularly arranged on the front surface of the annular groove.

In the prior art, when carrying out the centre gripping spacing to photomask base plate, clamping device centre gripping end horizontal position is fixed, and the rubberizing mechanism on upper portion can cause the motion to interfere to the operation of putting into photomask base plate in the vertical direction, leads to the photomask base plate to place inconvenient, causes the photomask base plate to place the position inaccurate easily, leads to the rubber coating position inaccurate, causes the rubber coating failure, and simultaneously the clamping device splint of majority is in carrying out the centre gripping engineering, lacks limiting measure, and the displacement of vertical direction appears easily to splint, causes photomask base plate centre gripping in-process one side perk, leads to photomask base plate surface levelness to reduce, causes the rubber coating thickness inconsistent.

Disclosure of Invention

The utility model aims to solve the problems that in the prior art, when a photomask substrate is clamped and limited, the clamping end of a clamping device is fixed in a horizontal position, a gluing mechanism at the upper part can cause motion interference to the operation of placing the photomask substrate in a vertical direction, so that the photomask substrate is inconvenient to place, the photomask substrate is easy to place in an inaccurate position, the gluing position is inaccurate, the gluing is failed, and meanwhile, a plurality of clamping device clamping plates are in clamping engineering, lack of limiting measures, the clamping plates are easy to displace in the vertical direction, one side of the clamping device clamping plates is tilted, the surface levelness of the photomask substrate is reduced, and the gluing thickness is inconsistent.

In order to achieve the above purpose, the present utility model adopts the following technical scheme: the utility model provides a rubber coating clamping device, includes the mounting panel, mounting panel and fixed plate fixed connection, fixed plate and No. one electrohydraulic push rod fixed connection, no. one electrohydraulic push rod and centre gripping mount fixed connection, centre gripping mount and removal slider fixed connection, remove slider and spout sliding connection, centre gripping mount and limit rail fixed connection, limit rail and limit slider sliding connection, limit slider and splint fixed connection, splint and No. one guard plate fixed connection, no. one guard plate and place board fixed connection.

Preferably, the sliding groove is fixedly connected with the limiting rod, and the movable sliding block is in sliding connection with the limiting rod.

Preferably, a plurality of limit guide rails are arranged on the surface of the clamping and fixing frame, and the limit guide rails are uniformly distributed on the surface of the clamping and fixing frame.

Preferably, the surface of the limit guide rail is provided with a plurality of limit sliding blocks, and the limit sliding blocks are uniformly distributed on the surface of one side of the clamping plate.

Preferably, the clamping fixing frame is fixedly connected with the second electro-hydraulic push rod, and the second electro-hydraulic push rod is fixedly connected with the clamping plate.

Preferably, the clamping and fixing frame surface is provided with two second electro-hydraulic push rods, the clamping and fixing frame surface is provided with two clamping plates, and the two clamping plates are symmetrically distributed on two sides of the clamping and fixing frame.

Preferably, the upper surface of the placing plate is fixedly connected with the second protection plate, and one side of the second protection plate is attached to the surface of the first protection plate.

Compared with the prior art, the utility model has the advantages and positive effects that:

1. according to the utility model, the movable sliding block slides along the sliding groove to limit the horizontal movement of the clamping plate, meanwhile, the movable sliding block slides along the surface of the limiting rod, the limiting rod is used for limiting the horizontal movement of the movable sliding block, the horizontal movement direction of the clamping plate is limited again, the stability of the clamping plate is improved, the clamping plate is pushed out for feeding, and the problem of motion interference with the upper gluing mechanism during feeding is avoided.

2. According to the utility model, when the clamping plates move relatively, the clamping plates drive the limiting sliding blocks to slide along the surfaces of the limiting guide rails, the limiting sliding blocks are limited through the limiting guide rails, the stability of the clamping plates during clamping movement is improved, the two sides of the photomask substrate material are clamped horizontally, and the displacement of the clamping plates on one side in the vertical direction in the clamping process is avoided, so that the heights of the two sides of the photomask substrate material are different.

Drawings

Fig. 1 is a perspective view of a glue clamping device according to the present utility model;

fig. 2 is a perspective view, partly in section, of a glue gripping device according to the present utility model;

FIG. 3 is a perspective view of a second electro-hydraulic push rod of the glue clamping device according to the present utility model;

fig. 4 is a perspective view of a limit slider of a glue clamping device according to the present utility model.

Legend description: 1. a mounting plate; 2. a fixing plate; 3. a first electro-hydraulic push rod; 4. clamping a fixing frame; 5. a spacing guide rail; 6. a limit sliding block; 7. a clamping plate; 8. a first protection plate; 9. placing a plate; 10. a second protection plate; 11. a chute; 12. a limit rod; 13. a second electro-hydraulic push rod; 14. and moving the slide block.

Detailed Description

In order that the above objects, features and advantages of the utility model will be more clearly understood, a further description of the utility model will be rendered by reference to the appended drawings and examples. It should be noted that, without conflict, the embodiments of the present utility model and features in the embodiments may be combined with each other.

In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present utility model, however, the present utility model may be practiced otherwise than as described herein, and therefore the present utility model is not limited to the specific embodiments of the disclosure that follow.

Referring to fig. 1, 2, 3 and 4, the present utility model provides a technical solution: the utility model provides a rubber coating clamping device, including mounting panel 1, mounting panel 1 and fixed plate 2 fixed connection, fixed plate 2 and No. one electrohydraulic push rod 3 fixed connection, no. one electrohydraulic push rod 3 and centre gripping mount 4 fixed connection, centre gripping mount 4 and removal slider 14 fixed connection, removal slider 14 and spout 11 sliding connection, centre gripping mount 4 and spacing guide 5 fixed connection, spacing guide 5 and spacing slider 6 sliding connection, spacing slider 6 and splint 7 fixed connection, splint 7 and No. one guard plate 8 fixed connection, no. one guard plate 8 and place board 9 fixed connection. The chute 11 is fixedly connected with the limiting rod 12, and the movable slide block 14 is in sliding connection with the limiting rod 12.

The clamp plate 7 is pushed to slide outwards by the extension first electrohydraulic push rod 3, the clamp plate 7 drives the movable slide block 14 to slide along the chute 11 when the clamp plate 7 moves outwards, the movable slide block 14 slides along the chute 11 to limit the horizontal movement of the clamp plate 7, meanwhile, the movable slide block 14 slides along the surface of the limiting rod 12, the horizontal movement of the movable slide block 14 is limited by the limiting rod 12, the horizontal movement direction of the clamp plate 7 is limited again, the stability of the clamp plate 7 is improved, a photomask substrate material is placed on the surface of the second protection plate 10, the clamp plates 7 are driven to be close to each other by the shrinkage limiting rod 12, the photomask substrate material is clamped and fixed, the clamp plate 7 drives the limiting slide block 6 to slide along the surface of the limiting guide rail 5 when the clamp plate 7 moves relatively, the limiting slide block 6 is limited by the limiting guide rail 5, the stability when the clamp plate 7 moves in a clamping mode is improved, the two sides of the photomask substrate material are clamped horizontally, and displacement of the clamp plate 7 in the vertical direction in the clamping process is avoided, and the heights of two sides of the photomask substrate material are different.

As shown in fig. 1, 2 and 4, the surface of the clamping and fixing frame 4 is provided with a plurality of limiting guide rails 5, the plurality of limiting guide rails 5 are uniformly distributed on the surface of the clamping and fixing frame 4, the surface of the limiting guide rails 5 is provided with a plurality of limiting slide blocks 6, the plurality of limiting slide blocks 6 are uniformly distributed on one side surface of the clamping plate 7, and the limiting slide blocks 6 slide and limit along the plurality of limiting guide rails 5, so that the stability of the clamping plate 7 during moving is improved.

As shown in fig. 1, fig. 3 and fig. 4, the clamping fixing frame 4 is fixedly connected with the second electro-hydraulic push rod 13, the second electro-hydraulic push rod 13 is fixedly connected with the clamping plate 7, two second electro-hydraulic push rods 13 are arranged on the surface of the clamping fixing frame 4, two clamping plates 7 are symmetrically distributed on two sides of the clamping fixing frame 4, the upper surface of the placing plate 9 is fixedly connected with the second protection plate 10, one side of the second protection plate 10 is attached to the surface of the first protection plate 8, the second electro-hydraulic push rod 13 is contracted to drive the two clamping plates 7 to be close to each other, the photomask substrate material is clamped and fixed, and the photomask substrate material is protected through the second protection plate 10 and the first protection plate 8.

The application method and the working principle of the device are as follows: when carrying out photomask base plate material loading, promote splint 7 outside slip through extension electrohydraulic push rod 3, splint 7 drive and remove slider 14 and slide along spout 11 when splint 7 outwards remove, slide along spout 11 through removing slider 14, carry out spacingly to the horizontal migration of splint 7, remove slider 14 simultaneously and slide along gag lever post 12 surface, remove the horizontal direction of slider 14 through gag lever post 12 and carry out spacingly again to the horizontal migration direction of splint 7, improve splint 7's stability, release splint 7 material loading, take place the motion interference with the rubber coating mechanism on upper portion when avoiding the material loading.

Then, place photomask base plate material on No. two guard plates 10 surfaces, through shrink No. two electrohydraulic push rods 13, drive two splint 7 and be close to each other, it is fixed that the photomask base plate material is pressed from both sides tightly, splint 7 when relative movement, splint 7 drive spacing slider 6 slide along spacing guide 5 surface, spacing slider 6 is spacing through spacing guide 5, stability when improving splint 7 clamp and press from both sides tight removal, be convenient for carry out horizontal clamp to photomask base plate material both sides, avoid the splint 7 of one side to press from both sides the displacement of the vertical direction of appearance in the tight in-process, result in the difference in height of photomask base plate material both sides.

The present utility model is not limited to the above-mentioned embodiments, and any equivalent embodiments which can be changed or modified by the technical content disclosed above can be applied to other fields, but any simple modification, equivalent changes and modification made to the above-mentioned embodiments according to the technical substance of the present utility model without departing from the technical content of the present utility model still belong to the protection scope of the technical solution of the present utility model.

Claims

1. The utility model provides a rubber coating clamping device, includes mounting panel (1), mounting panel (1) and fixed plate (2) fixed connection, fixed plate (2) and electrohydraulic push rod (3) fixed connection, electrohydraulic push rod (3) and centre gripping mount (4) fixed connection, its characterized in that: clamping fixing frame (4) and removal slider (14) fixed connection, remove slider (14) and spout (11) sliding connection, clamping fixing frame (4) and spacing guide (5) fixed connection, spacing guide (5) and spacing slider (6) sliding connection, spacing slider (6) and splint (7) fixed connection, splint (7) and No. one guard plate (8) fixed connection, no. one guard plate (8) and place board (9) fixed connection.

2. A glue gripping device according to claim 1, characterised in that: the sliding groove (11) is fixedly connected with the limiting rod (12), and the movable sliding block (14) is in sliding connection with the limiting rod (12).

3. A glue gripping device according to claim 1, characterised in that: the clamping and fixing frame (4) surface is provided with a plurality of limit guide rails (5), and a plurality of limit guide rails (5) are uniformly distributed on the clamping and fixing frame (4) surface.

4. A glue gripping device according to claim 1, characterised in that: the surface of the limiting guide rail (5) is provided with a plurality of limiting sliding blocks (6), and the limiting sliding blocks (6) are uniformly distributed on the surface of one side of the clamping plate (7).

5. A glue gripping device according to claim 1, characterised in that: the clamping fixing frame (4) is fixedly connected with the second electro-hydraulic push rod (13), and the second electro-hydraulic push rod (13) is fixedly connected with the clamping plate (7).

6. A glue gripping device according to claim 1, characterised in that: the clamping and fixing frame (4) surface is provided with two No. two electrohydraulic push rods (13), and the clamping and fixing frame (4) surface is provided with two clamping plates (7), two clamping plates (7) symmetric distribution are in clamping and fixing frame (4) both sides.

7. A glue gripping device according to claim 1, characterised in that: the upper surface of the placing plate (9) is fixedly connected with a second protection plate (10), and one side of the second protection plate (10) is attached to the surface of a first protection plate (8).