CN219675897U - Gas sensor based on flexible substrate - Google Patents
Gas sensor based on flexible substrate Download PDFInfo
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- CN219675897U CN219675897U CN202321217794.8U CN202321217794U CN219675897U CN 219675897 U CN219675897 U CN 219675897U CN 202321217794 U CN202321217794 U CN 202321217794U CN 219675897 U CN219675897 U CN 219675897U
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- 239000000758 substrate Substances 0.000 title claims abstract description 45
- 239000007789 gas Substances 0.000 claims abstract description 137
- 239000000463 material Substances 0.000 claims description 5
- 230000002093 peripheral effect Effects 0.000 claims description 3
- 239000012528 membrane Substances 0.000 claims 2
- 230000008859 change Effects 0.000 abstract description 11
- 238000001514 detection method Methods 0.000 abstract description 9
- 230000009286 beneficial effect Effects 0.000 abstract description 3
- 230000000694 effects Effects 0.000 description 5
- 238000010897 surface acoustic wave method Methods 0.000 description 5
- 230000010354 integration Effects 0.000 description 4
- 239000013078 crystal Substances 0.000 description 3
- 239000012495 reaction gas Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000004075 alteration Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
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- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
Abstract
The utility model discloses a gas sensor based on a flexible substrate, which comprises a substrate, wherein the upper end of the substrate is provided with a first groove, a lower electrode is fixedly connected in the first groove, the upper end of the lower electrode is fixedly connected with an upper electrode through a gas-sensitive film, the lower end of the upper electrode is provided with a second groove, and the second groove is fixedly connected with a gas-sensitive film. The beneficial effects are that: the substrate is a flexible substrate, so that the substrate has the advantages of high dielectric property, high dimensional stability and the like, the gas-sensitive film between the lower electrode and the upper electrode arranged on the substrate can adsorb specific gas in air, the gas components in air are calculated through the change of conductivity, and the content of the components in the air can be detected by the arranged plurality of gas-sensitive films for adsorbing different gases, so that the detection of the gas sensor is more sensitive.
Description
Technical Field
The utility model relates to the technical field of gas sensors, in particular to a flexible substrate-based gas sensor.
Background
The gas sensor is a sensor for detecting the concentration and composition of gas, which plays an important role in environmental protection and safety supervision, so the following requirements are imposed on the gas sensor: the gas concentration detection device can detect the allowable concentration of alarm gas and the gas concentration of other standard values, can stably work for a long time, has good repeatability, high response speed, small influence caused by coexisting substances and the like.
According to a gas sensor disclosed in Chinese patent publication No. CN215727852U, the utility model provides a gas sensor, which comprises a substrate, a device layer, a conductive column and a gas sensing module; a circuit is arranged on the first surface of the substrate; the device layer and the conductive posts are both positioned on the first surface of the substrate, and the device layer and the conductive posts are both electrically connected with the circuit; the height of the conductive column is greater than the thickness of the device layer; the gas-sensitive module is located at one side of the conductive column far away from the substrate, the gas-sensitive module is electrically connected with the conductive column, and the gas-sensitive module is used for detecting the performance of gas. The gas sensor provided by the embodiment of the utility model can reduce the volume of the gas sensor and improve the integration level of the gas sensor.
According to the above patent, the integration level of the gas sensor is improved by reducing the volume of the gas sensor, but the contact area between the gas sensor and the air is reduced while the volume of the gas sensor is reduced, so that the monitoring sensitivity of the gas sensor to the air is affected to a certain extent.
For the problems in the related art, no effective solution has been proposed at present.
Disclosure of Invention
The utility model aims to provide a gas sensor based on a flexible substrate, so as to solve the problems in the background technology.
In order to achieve the above purpose, the present utility model provides the following technical solutions:
the utility model provides a gas sensor based on flexible substrate, includes the substrate, recess one has been seted up to the upper end of substrate, fixedly connected with bottom electrode in the recess one, the upper end of bottom electrode is through gas-sensitive film fixedly connected with top electrode, recess two has been seted up to the lower extreme of top electrode, just fixedly connected with gas-sensitive film in the recess two.
Further, the gas-sensitive film is an electrically conductive gas-sensitive material, and is used for selectively adsorbing gas in air.
Further, the lower electrode, the gas-sensitive film and the upper electrode are arranged in a sandwich structure.
Further, the lower electrode, the gas-sensitive film and the upper electrode are provided with a plurality of groups and are all arranged on the substrate at intervals.
Further, the gas-sensitive films selectively adsorb different gases respectively, and are used for detecting different components in the air.
Further, the gas-sensitive film is in heavy doping contact with the upper electrode and the lower electrode so as to form ohmic contact.
Further, the lower electrode and the upper electrode have a conductive function, and the gas-sensitive film is connected with a peripheral circuit.
Compared with the prior art, the utility model has the following beneficial effects:
(1) The substrate is a flexible substrate, so that the substrate has the advantages of high dielectric property, high dimensional stability and the like, the gas-sensitive film between the lower electrode and the upper electrode arranged on the substrate can adsorb specific gas in air, the gas components in the air are calculated through the change of conductivity, and the content of the components in the air can be detected by the arranged plurality of gas-sensitive films for adsorbing different gases, so that the detection of the gas sensor is more sensitive.
(2) The method has the advantages that the gas-sensitive film selectively absorbing certain gas is coated on the lower electrode, the surface acoustic wave frequency of the piezoelectric crystal is shifted according to the change of the conductivity of the gas-sensitive film after absorbing specific gas, the accurate change value of the concentration of the reaction gas can be obtained by measuring the change of the frequency of the surface acoustic wave, so that the concentration of the gas is measured, the set gas-sensitive film is a plurality of gas-sensitive films selectively absorbing different gases, the components in the air can be detected, the detection effect is more accurate, and the gas-sensitive film is in heavy doping contact with the lower electrode to form low-resistance ohmic contact, so that the input and output of current are facilitated.
(3) The lower electrode, the gas-sensitive film and the upper electrode are of a sandwich structure, the periphery of the gas-sensitive film is not blocked, the contact surface between the gas-sensitive film and air is increased, the lower electrode, the gas-sensitive film and the upper electrode are arranged at intervals, the gas-sensitive film is made of materials for adsorbing different gases, the integration level of the gas-sensitive sensor can be increased, the air circulation in the gas-sensitive sensor is not influenced, and the detection effect of the gas-sensitive sensor is better.
Drawings
In order to more clearly illustrate the embodiments of the present utility model or the technical solutions in the prior art, the drawings that are needed in the embodiments will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present utility model, and other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.
FIG. 1 is a schematic diagram of a flexible substrate-based gas sensor structure according to an embodiment of the present utility model;
fig. 2 is a schematic diagram of a layout structure of a flexible substrate-based gas sensor according to an embodiment of the present utility model.
Reference numerals:
1. a substrate; 2. a groove I; 3. a lower electrode; 4. a gas sensitive film; 5. an upper electrode; 6. and a groove II.
Detailed Description
The utility model is further described below with reference to the accompanying drawings and detailed description:
embodiment one:
referring to fig. 1-2, a flexible substrate-based gas sensor according to an embodiment of the present utility model includes a substrate 1, a first groove 2 is formed at an upper end of the substrate 1, a lower electrode 3 is fixedly connected in the first groove 2, an upper electrode 5 is fixedly connected to an upper end of the lower electrode 3 through a gas-sensitive film 4, a second groove 6 is formed at a lower end of the upper electrode 5, and a gas-sensitive film 4 is fixedly connected in the second groove 6.
Through the scheme, the substrate 1 is a flexible substrate, so that the substrate 1 has the advantages of high dielectric property, high dimensional stability and the like, the gas-sensitive film 4 between the lower electrode 3 and the upper electrode 5 arranged on the substrate 1 can adsorb specific gases in air through the gas-sensitive film 4, the gas components in the air are calculated through the change of conductivity, and the arranged plurality of gas-sensitive films 4 for adsorbing different gases can detect the content of the components in the air, so that the detection of the gas-sensitive sensor is more sensitive.
Embodiment two:
referring to fig. 1-2, the gas-sensitive film 4 is made of conductive gas-sensitive material, the gas-sensitive film 4 is used for selectively adsorbing gas in air, several groups of the gas-sensitive films 4 are respectively used for selectively adsorbing different gases and detecting different components in air, and the gas-sensitive film 4 is in heavy doped contact with the upper electrode 5 and the lower electrode 3 so as to form ohmic contact.
According to the scheme, the gas-sensitive film 4 selectively adsorbing a certain gas is coated on the lower electrode 3, so that the surface acoustic wave frequency of the piezoelectric crystal is shifted according to the change of the conductivity of the gas-sensitive film 4 after adsorbing a specific gas, an accurate change value of the concentration of the reaction gas can be obtained by measuring the change of the frequency of the surface acoustic wave, the concentration of the gas is measured, the set gas-sensitive film 4 is a plurality of gas-sensitive films 4 selectively adsorbing different gases, components in the air can be detected, the detection effect is more accurate, and the gas-sensitive film 4 is in heavy doping contact with the lower electrode 3 so as to form low-resistance ohmic contact, thereby being beneficial to the input and output of current.
Embodiment III:
referring to fig. 1-2, the lower electrode 3, the gas-sensitive film 4 and the upper electrode 5 are arranged in a sandwich structure, the lower electrode 3, the gas-sensitive film 4 and the upper electrode 5 are arranged in a plurality of groups and are all arranged on the substrate 1 at intervals, and the lower electrode 3 and the upper electrode 5 have a conductive function to connect the gas-sensitive film 4 with a peripheral circuit.
According to the scheme provided by the utility model, the lower electrode 3, the gas-sensitive film 4 and the upper electrode 5 are of the sandwich structure, so that the periphery of the gas-sensitive film 4 is not blocked, the contact surface between the gas-sensitive film 4 and air is increased, the lower electrode 3, the gas-sensitive film 4 and the upper electrode 5 are provided with a plurality of groups at intervals, the gas-sensitive film 4 adopts materials for adsorbing different gases, the integration level of the gas-sensitive sensor can be increased, the air circulation in the gas-sensitive sensor is not influenced, and the detection effect of the gas-sensitive sensor is better.
In order to facilitate understanding of the above technical solutions of the present utility model, the following describes in detail the working principle or operation manner of the present utility model in the actual process.
In practical application, the lower electrode 3 is fixedly connected in the groove I2 on the substrate 1, then a layer of gas-sensitive film 4 is deposited at the upper end of the lower electrode 3, and low-resistance ohmic contact is formed between the gas-sensitive film 4 and the lower electrode 3, so that current input and output are facilitated, then the upper electrode 5 is fixedly connected on the gas-sensitive film 4, and through the conductive effect of the lower electrode 3 and the upper electrode 5, when the gas-sensitive film 4 and the gas to be detected are in contact with each other, the surface acoustic wave frequency of the piezoelectric crystal is caused to drift when the film quality and the conductivity of the gas-sensitive film 4 are changed, and an accurate change value of the concentration of the reaction gas can be obtained through measuring the change of the frequency of the acoustic surface wave, so that the detection of the gas-sensitive sensor is more accurate.
Although embodiments of the present utility model have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made therein without departing from the principles and spirit of the utility model, the scope of which is defined in the appended claims and their equivalents.
Claims (7)
1. The utility model provides a gas sensor based on flexible substrate, its characterized in that, includes substrate (1), recess one (2) have been seted up to the upper end of substrate (1), fixedly connected with bottom electrode (3) in recess one (2), the upper end of bottom electrode (3) is through gas-sensitive film (4) fixedly connected with top electrode (5), recess two (6) have been seted up to the lower extreme of top electrode (5), just fixedly connected with gas-sensitive film (4) in recess two (6).
2. A flexible substrate based gas sensor according to claim 1, characterized in that the gas sensitive film (4) is an electrically conductive gas sensitive material and that the gas sensitive film (4) is adapted to selectively adsorb gases in air.
3. A flexible substrate based gas sensor according to claim 1, characterized in that the lower electrode (3), the gas sensitive film (4) and the upper electrode (5) are arranged in a sandwich structure.
4. A flexible substrate based gas sensor according to claim 1, characterized in that the lower electrode (3), the gas sensitive membrane (4) and the upper electrode (5) are provided in several groups and are all arranged on the substrate (1) at intervals.
5. A flexible substrate based gas sensor according to claim 4, characterized in that several groups of said gas sensitive films (4) selectively adsorb different gases respectively for detecting different components in air.
6. A flexible substrate based gas sensor according to claim 1, characterized in that the gas sensitive film (4) is in heavily doped contact with the upper electrode (5) and the lower electrode (3) in order to form an ohmic contact.
7. A flexible substrate based gas sensor according to claim 1, characterized in that the lower electrode (3) and the upper electrode (5) are electrically conductive, connecting the gas sensitive membrane (4) to a peripheral circuit.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321217794.8U CN219675897U (en) | 2023-05-19 | 2023-05-19 | Gas sensor based on flexible substrate |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321217794.8U CN219675897U (en) | 2023-05-19 | 2023-05-19 | Gas sensor based on flexible substrate |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN219675897U true CN219675897U (en) | 2023-09-12 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202321217794.8U Active CN219675897U (en) | 2023-05-19 | 2023-05-19 | Gas sensor based on flexible substrate |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN219675897U (en) |
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2023
- 2023-05-19 CN CN202321217794.8U patent/CN219675897U/en active Active
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