CN219675804U - Bearing device and detection equipment - Google Patents

Abstract

The utility model discloses a bearing device and detection equipment, which comprises a base, a bearing disc, a lifting adsorption mechanism and a clamping mechanism, wherein the lifting adsorption mechanism is arranged on the base; the lifting adsorption assembly comprises a sucker and a mandril, and the sucker and the mandril can simultaneously lift and move to transfer the piece to be tested from the upper part of the bearing surface to the bearing surface; the clamping mechanism is used for clamping the edge position of the to-be-tested piece on the bearing surface. The sucker and the ejector rod can simultaneously transfer the large-size to-be-measured piece from the manipulator to the bearing surface, so that the to-be-measured piece can be more stably placed on the bearing surface, and deformation of the to-be-measured piece in the placing process can be avoided; and be provided with fixture around the loading end of loading end, fixture can be used for the border position of centre gripping piece that awaits measuring, and the absorption of loading end and fixture's centre gripping form dual safety guarantee for the piece that awaits measuring of jumbo size can be leveled and fixed and detect on the loading end, and then can improve the degree of accuracy that awaits measuring piece defect detected.

Description

Bearing device and detection equipment

Technical Field

The utility model relates to the technical field of tool clamps, in particular to a bearing device and detection equipment.

Background

In the two-dimensional pattern defect detection of a substrate, the substrate needs to be supported and fixed through a bearing device, and a bearing disc in the bearing device is used as a key component to play a role in supporting and fixing the substrate to be detected. The existing bearing device is only suitable for supporting and fixing medium and small substrates, and for larger-size substrates, the existing basic bearing mechanism cannot achieve good fixing of the substrates due to the fact that the large-size substrates warp and the like, and defect detection of the substrates is affected.

Disclosure of Invention

The bearing device and the detection equipment provided by the utility model are used for solving the problem that a large-size substrate cannot be well fixed.

In one embodiment, a carrier is provided, comprising:

the base is used for being arranged on the detection platform;

the bearing plate is arranged on the base and provided with a bearing surface facing away from the base, and the bearing surface is provided with a first mounting hole and a second mounting hole;

the lifting adsorption mechanism comprises a lifting adsorption assembly and a lifting driving assembly, the lifting adsorption assembly comprises a sucker and a push rod, the sucker is movably arranged in the first mounting hole and used for adsorbing a piece to be detected, the push rod is movably arranged in the second mounting hole and used for supporting the piece to be detected; the lifting driving assembly is connected to the detection platform or the bearing plate, is connected with the lifting adsorption assembly and is used for driving the sucker and the ejector rod to move up and down simultaneously so as to transfer a piece to be detected onto the bearing surface from the upper part of the bearing surface; and

the clamping mechanism is connected to the detection platform or the bearing plate and used for clamping the edge position of the piece to be detected on the bearing surface.

In an embodiment, the lifting adsorption assembly further comprises a mounting frame, wherein the mounting frame is located on one side, opposite to the bearing surface, of the bearing disc, and the sucker and the ejector rod are arranged on the mounting frame.

In an embodiment, the lifting adsorption assembly further comprises an elastic piece, the elastic piece surrounds the periphery of the ejector rod, one end of the elastic piece is connected with the mounting frame, the other end of the elastic piece is in elastic butt joint with the bearing disc, the elastic piece is used for driving the lifting adsorption mechanism to move downwards, and the lifting driving assembly is used for driving the lifting adsorption mechanism to move upwards.

In one embodiment, the suction disc is arranged in the middle of the mounting frame, one ejector rod is correspondingly provided with one elastic piece, and two sides of the suction disc are respectively provided with one ejector rod and one elastic piece; two sides of the first mounting hole are respectively provided with a second mounting hole.

In an embodiment, the lifting driving assembly comprises a lifting driving member and a top plate, wherein the lifting driving member is used for being arranged on the detection platform, the lifting driving member is connected with the top plate, and the lifting driving member is used for driving the lifting adsorption assembly to lift through the top plate.

In one embodiment, the lifting adsorption mechanism comprises a plurality of lifting adsorption assemblies and one lifting driving assembly, the top plate is connected with all the lifting adsorption assemblies, and one lifting driving assembly is used for driving the lifting adsorption assemblies to lift simultaneously.

In an embodiment, the fixture includes a clamping lift driving member and a clamping member, the clamping lift driving member is connected with the bearing plate, the clamping member is connected with the clamping lift driving member, the clamping member has a clamping surface, the clamping surface coincides with the projection of the edge position of the bearing surface in the lifting direction, and the clamping lift driving member is used for driving the lifting of the clamping member.

In one embodiment, the bearing surface comprises a plurality of sub bearing surfaces, the sub bearing surfaces are arranged at intervals, and an avoidance space for the avoidance manipulator to clamp the workpiece to be measured is arranged between the sub bearing surfaces.

In one embodiment, each of the sub-bearing surfaces is provided with the first mounting hole and the second mounting hole; and/or each sub-bearing surface is correspondingly provided with the clamping mechanism.

In one embodiment, the bearing surface is square, and the clamping mechanism is arranged on at least two opposite sides of the bearing surface.

In an embodiment, a detection device is provided, including testing platform, detector and foretell bears the device, bear the device install in testing platform, the detector is located bear the top of device, the detector is used for detecting the piece that awaits measuring on the device bears.

According to the bearing device and the detection equipment, as the lifting sucking disc and the lifting ejector rod are arranged in the bearing surface of the bearing disc, the sucking disc and the ejector rod can simultaneously transfer a large-size to-be-detected piece from the manipulator to the bearing surface, so that the to-be-detected piece can be placed on the bearing surface more stably, and deformation of the to-be-detected piece in the placing process can be avoided; and be provided with fixture around the loading end of loading end, fixture can be used for the border position of centre gripping piece that awaits measuring, and the absorption of loading end and fixture's centre gripping form dual safety guarantee for the piece that awaits measuring of jumbo size can be leveled and fixed and detect on the loading end, and then can improve the degree of accuracy that awaits measuring piece defect detected.

Drawings

FIG. 1 is a schematic view of a carrying device according to an embodiment;

FIG. 2 is a schematic view of an exploded view of a carrier in one embodiment;

FIG. 3 is a side view of a carrier in one embodiment;

FIG. 4 is a top view of a carrier in one embodiment;

FIG. 5 is a schematic diagram of a lifting/lowering mechanism (lifting/lowering module) according to an embodiment;

FIG. 6 is a top view of a lift drive assembly (PIN module) in one embodiment;

FIG. 7 is a side view of a lift drive assembly (PIN module) in one embodiment;

wherein the reference numerals are as follows:

1-a base;

2-bearing plate, 21-bearing surface, 22-gap space, 211-first mounting hole, 212-second mounting hole;

3-lifting adsorption mechanism, 31-lifting adsorption component, 311-sucker, 312-ejector rod, 313-mounting rack, 314-elastic piece, 32-lifting driving component, 321-lifting driving piece and 322-top plate;

4-clamping mechanism, 41-clamping driving piece, 42-clamping piece.

Detailed Description

The utility model will be described in further detail below with reference to the drawings by means of specific embodiments. Wherein like elements in different embodiments are numbered alike in association. In the following embodiments, numerous specific details are set forth in order to provide a better understanding of the present utility model. However, one skilled in the art will readily recognize that some of the features may be omitted, or replaced by other elements, materials, or methods in different situations. In some instances, related operations of the present utility model have not been shown or described in the specification in order to avoid obscuring the core portions of the present utility model, and may be unnecessary to persons skilled in the art from a detailed description of the related operations, which may be presented in the description and general knowledge of one skilled in the art.

Furthermore, the described features, operations, or characteristics of the description may be combined in any suitable manner in various embodiments. Also, various steps or acts in the method descriptions may be interchanged or modified in a manner apparent to those of ordinary skill in the art. Thus, the various orders in the description and drawings are for clarity of description of only certain embodiments, and are not meant to be required orders unless otherwise indicated.

The numbering of the components itself, e.g. "first", "second", etc., is used herein merely to distinguish between the described objects and does not have any sequential or technical meaning. The term "coupled" as used herein includes both direct and indirect coupling (coupling), unless otherwise indicated.

In one embodiment, a carrier is provided, where the basic carrier is a part of a defect detecting device, and is used to fix a large-sized to-be-detected piece (substrate) at a preset position for visual detection by a detector. For example, the dimension of the large-dimension to-be-measured piece can be 510mm length by 515mm width, 500um to 2000um thickness and 3mm warping.

The bearing device of the embodiment is mainly used for fixing the large-size to-be-detected piece on the bearing surface, so that the large-size to-be-detected piece can detect two-dimensional graphic defects. The bearing device firstly adopts the lifting sucker and the ejector rod to connect the piece to be detected from the manipulator, and stably places the piece to be detected on the bearing disc through downward movement, the piece to be detected is firmly adsorbed by the downward movement in-process sucker, the edge of the piece to be detected plate is fixed through the clamping mechanism after the piece to be detected is placed on the bearing disc, the large-size piece to be detected can stably move downward in the process of being placed on the bearing disc, and the large-size piece to be detected can be flatly fixed on the bearing disc, so that the defect detection accuracy of the large-size piece to be detected is improved.

Referring to fig. 1 to 7, in the present embodiment, the carrying device mainly includes a base 1, a carrying tray 2, a lifting and sucking mechanism 3 and a clamping mechanism 4.

The base 1 is used for setting up on testing platform, and base 1 can be rotatory base, and base 1 rotates with testing platform through rotating-structure such as pivot, bearing to be connected, and base 1 can rotate relative testing platform, plays rotatory support's effect. The base 1 also can include upper end and lower extreme, and the upper end and the lower extreme of base 1 are rotated through rotation structures such as pivot, bearing and are connected, and the lower extreme of base 1 passes through modes such as screw fixation, joint are fixed on testing platform, and the upper end of base 1 can rotate lower extreme relatively, also can form rotatory support.

The rotation angle of the base 1 may be set as desired, such as setting the base 1 to be rotatable by 360 ° or setting the base 1 to be rotatable by 90 ° or 180 °.

The base 1 may be a flat disk structure having a function of rotating support, and the occupation space of the base 1 can be reduced.

The bearing plate 2 is arranged on the base 1, and the middle position of the lower surface of the bearing plate 2 can be fixedly connected with the upper end of the base 1 in a screw connection, clamping connection or welding mode. The carrying tray 2 has a carrying surface 21 facing away from the base 1, that is, the upper surface of the carrying tray 2 is the carrying surface 21, the size and shape of the carrying surface 21 are adapted to the area of the large-size part to be measured, and the large-size part to be measured can be just placed on the carrying surface 21. The large-sized test piece is generally square in structure, and may be, for example, large-sized square glass. The bearing surface 21 has a corresponding square structure.

The carrying tray 2 may be a double-layer structure, the carrying tray 2 includes an upper layer and a lower layer, the upper layer and the lower layer may be fixed together by side plates, and a space for accommodating other parts is provided between the upper layer and the lower layer. The lower layer of the bearing plate 2 is fixedly connected with the base 1, and the bearing surface 21 is positioned on the upper surface of the upper layer of the base 1.

The bearing surface 21 is provided with a first mounting hole 211 and a second mounting hole 212, and the first mounting hole 211 and the second mounting hole 212 penetrate the bearing plate 2 along the thickness direction (up-down direction) of the bearing plate 2. The first mounting hole 211 and the second mounting hole 212 are used for avoiding the lifting adsorption mechanism 3 to pass through the bearing plate 2 from the lower side of the bearing plate 2 so as to realize adsorption and support of the to-be-detected piece.

The lifting and sucking mechanism 3 comprises a lifting and sucking component 31 and a lifting and sucking component 32, wherein the lifting and sucking component 31 is used for transferring a piece to be detected to the bearing surface 21 in a lifting manner through the bearing disc 2, and the lifting and sucking component 32 is used for driving the lifting and sucking component 31 to lift or the lifting and sucking component 31 is only used for driving the lifting and sucking component 31 to lift.

The lifting adsorption assembly 31 is a lifting module, the lifting adsorption assembly 31 comprises a sucker 311 and a mandril 312, the sucker 311 and the mandril 312 are relatively fixedly arranged, and the sucker 311 and the mandril 312 ascend and descend simultaneously. The suction cup 311 is movably arranged in the first mounting hole 211, and the suction cup 311 can ascend and descend in the first mounting hole 211; the jack 312 is movably disposed in the second mounting hole 212, and the jack 312 can be raised and lowered in the second mounting hole 212. The aperture of the first mounting hole 211 is matched with the sucker 311, the aperture of the second mounting hole 212 is matched with the ejector rod 312, the maximum outer diameter of the sucker 311 is larger than that of the ejector rod 312, and correspondingly, the aperture of the first mounting hole 211 is larger than that of the second mounting hole 212.

The sucking disc 311 and the ejector rod 312 can be lifted to protrude from the bearing surface 21 at the same time, so that the sucking disc 311 can be used for sucking a piece to be detected above the bearing surface 21, and the end part of the ejector rod 312 can support the piece to be detected above the bearing surface 21; the suction cup 311 and the ejector rod 312 can also be lowered simultaneously to be flush with the bearing surface 21 or lower than the bearing surface 21 so that the suction cup 311 and the ejector rod 312 can transfer the part to be measured onto the bearing surface 21 of the bearing disk 2. The upper ends of the sucking disc 311 and the ejector rod 312 are flush, so that the sucking disc 311 and the ejector rod 312 can simultaneously contact the workpiece to be measured, and the workpiece to be measured is always maintained in a horizontal plane state in the transferring process of the workpiece to be measured, so that the transferring stability of the workpiece to be measured is improved.

The upper end of the sucker 311 is provided with a suction nozzle, and the sucker 311 can be connected with a negative pressure source through a pipeline, so that the suction nozzle of the sucker 311 can generate vacuum negative pressure to adsorb and fix a piece to be detected on the bearing surface 21. The suction nozzle of the suction cup 311 can be of a horn-shaped silica gel structure with large warpage, so that the adsorption contact area between the suction cup 311 and a piece to be detected can be increased, and the adsorption stability is improved.

For large-size to-be-tested pieces, the bearing surface 21 is provided with a plurality of first mounting holes 211 and a plurality of second mounting holes 212, and the plurality of first mounting holes 211 and the plurality of second mounting holes 212 can be uniformly distributed on the bearing surface 21 in an array manner; the lifting adsorption assembly 31 that corresponds includes a plurality of lifting adsorption assemblies 31, and a plurality of sucking discs 311 and a plurality of ejector pins 312 adsorb and support the piece that awaits measuring simultaneously for the piece that awaits measuring can be evenly adsorbed and by even support, can guarantee that the large-scale piece that awaits measuring can be transferred to bearing surface 21 with the horizontally, can avoid the large-scale piece that awaits measuring to take place to warp at the transfer in-process.

The lifting and sucking assembly 31 may further comprise a mounting frame 313, wherein the mounting frame 313 is located on a side of the carrier plate 2 facing away from the carrying surface 2, i.e. the mounting frame 313 is located on an underside of the carrier plate 2. The suction cup 311 and the ejector rod 312 are arranged on the mounting frame 313, and the suction cup 311 is arranged upwards, namely, the suction direction of the suction cup 311 is the vertical direction. The suction cup 311 and the ejector rod 312 are vertically fixed on the mounting frame 313, and the suction cup 311, the ejector rod 312 and the mounting frame 313 are fixed into a whole, so that the suction cup 311, the ejector rod 312 and the mounting frame 313 can ascend and descend simultaneously.

In other embodiments, the lifting adsorption assembly 31 may only include the suction cup 311 and the ejector rod 312, where the ejector rod 312 has an H-shaped structure, and the suction cup 311 is mounted on the H-shaped ejector rod 312, so that the suction cup 311 and the ejector rod 312 can be mounted relatively and fixedly.

In this embodiment, preferably, the suction cup 311 is located at a middle position of the mounting frame 313, and the suction cup 311 may be vertically mounted at the middle position of the mounting frame 313 through a mounting structure such as a mounting column. Two sides of the sucker 311 are respectively provided with a mandril 312, and the two mandrils 312 are symmetrically distributed relative to the sucker 311, so that two mandrils 312 are arranged beside the sucker 311 during adsorption to support a piece to be detected in an auxiliary manner, the adsorption stability of the sucker 311 can be improved, and meanwhile, the support stability of the mandril 312 can be improved. Correspondingly, two sides of the first mounting hole 211 are respectively provided with a second mounting hole 212, so that a sucker 311 and two ejector rods 312 on one lifting adsorption assembly 31 can be correspondingly inserted into the first mounting hole 211 and the second mounting hole 212.

In other embodiments, only one suction cup 311 and one push rod 312 may be disposed on one lifting and sucking assembly 31, and multiple lifting and sucking assemblies 31 are disposed side by side, so that the suction cup 311 and the push rod 312 are alternately disposed, and stable suction and stable support of the lifting and sucking assemblies 31 can be achieved.

In this embodiment, the lifting adsorption assembly 31 may further include an elastic member 314, where the elastic member 314 is disposed on the mounting frame 313. The elastic member 314 may be a straight spring, the elastic member 314 is sleeved on the circumferential side of the ejector rod 312, the elastic member 314 with a spiral structure surrounds the circumferential side of the ejector rod 312, one end (lower end) of the elastic member 314 is fixedly connected with the mounting frame 313, and the other end (upper end) of the elastic member 314 is elastically abutted against the lower surface of the bearing disc 2. When the lifting and sucking assembly 31 is lifted up as a whole, the elastic member 314 is in a compressed state, and when the lifting and sucking assembly 31 loses the lifting thrust, the elastic member 314 drives the whole lifting and sucking assembly 31 to descend under the elastic force of the elastic member 314.

Wherein, a lifting adsorption assembly 31 is provided with two ejector rods 312 and two elastic members 314, and the circumference side of one ejector rod 312 is correspondingly sleeved with one elastic member 314. The two ejector rods 312 and the two elastic members 314 are arranged, so that the stability of the support of the ejector rods 312 and the stability of the descending driving of the elastic members 314 are improved.

In this embodiment, the lifting driving component 32 is used to drive the lifting adsorption component 31 to lift, that is, to drive the sucking disc 311 and the ejector rod 312 to lift simultaneously. When the lifting driving assembly 32 releases the lifting driving of the lifting absorbing assembly 31, the elastic member 314 is used for driving the lifting absorbing assembly 31 to descend, that is, for driving the sucking disc 311 and the ejector rod 312 to descend simultaneously.

In other embodiments, the lifting and sucking assembly 31 may not be provided with the elastic member 314, the lifting and sucking assembly 31 is connected to the lifting and sucking assembly 32, and the lifting and sucking assembly 32 is used for driving the lifting and sucking assembly 31 to lift and descend, so that the lifting and sucking assembly 31 can transfer the workpiece to be tested onto the bearing surface 21.

In this embodiment, the lifting driving component 32 is a PIN module, the lifting driving component 32 includes a lifting driving member 321 and a top plate 322, the lifting driving member 321 is used for being disposed on a detection platform, the lifting driving member 321 is connected with the top plate 322, and the lifting driving member 321 is used for driving the lifting adsorption component 31 to lift through the top plate 322. The lifting driving member 321 may be an air cylinder, and the top plate 322 is disposed parallel to the carrying tray 2, that is, the top plate 322 is disposed horizontally. The mounting bracket 313 and the two ejector rods 312 form an H-shaped structure, the ejector rods 312 form two vertical bars of the H-shaped structure, the upper ends of the ejector rods 312 are used for supporting the to-be-tested pieces, and the lower ends of the ejector rods 312 are used for being in contact with the top plate 322. After the lifting driving member 321 drives the top plate 322 to lift, the top plate 322 will contact with the lower end of the ejector rod 312, the top plate 322 will continuously lift to drive the lifting adsorption assembly 31 to lift, when the lifting driving member 321 drives the top plate 322 to descend, the top plate 322 will lose the lifting driving force to the lifting adsorption assembly 31, and the elastic member 314 will drive the lifting adsorption assembly 31 to descend.

The elevation driving assembly 32 may include a plurality of elevation driving members 321 and a top plate 322, the plurality of elevation driving members 321 being disposed at each side of the top plate 322, the plurality of elevation driving members 321 driving the top plate 322 to be elevated and lowered together; for example, the elevation driving assembly 32 includes two elevation driving members 321 and one top plate 322, and the two elevation driving members 321 are disposed on opposite sides of the top plate 322. Wherein, roof 322 sets up relatively great to make a roof 322 can drive all lift absorption subassembly 31 simultaneously and rise, be favorable to improving the uniformity that a plurality of lift absorption subassemblies 31 rise and descend in step, and then be favorable to stably transferring the piece that awaits measuring.

In other embodiments, a plurality of lift driving assemblies 32 may be provided, where the plurality of lift driving assemblies 32 respectively drive the lifting of a part of one or more lift suction assemblies 31, and the same control of the controller can also achieve the consistency of the synchronous lifting and lowering of the plurality of lift suction assemblies 31, but the effect is slightly worse than the effect of driving all the lift suction assemblies 31 at the same time by one top plate 322 in the present embodiment.

In this embodiment, the clamping mechanism 4 is disposed on the carrier plate 2, and the clamping mechanism 4 may be disposed on a sidewall of the carrier plate 2. The clamping mechanism 4 may also be used for being arranged on the detection platform, the clamping mechanism 4 being located at a lateral position of the carrier plate 2.

The clamping mechanism 4 is used for clamping the edge position of the to-be-tested piece on the bearing surface 21, the clamping mechanism 4 is pressed at the edge position of the to-be-tested piece from top to bottom, and the clamping mechanism 4 and the bearing surface 21 jointly clamp the edge position of the to-be-tested piece to fix the edge position of the to-be-tested piece. The edge position of the piece to be detected is fixed, and deformation such as warping of the large-size piece to be detected can be avoided.

The clamping mechanism 4 comprises a clamping driving member 41 and a clamping member 42, wherein the clamping driving member 41 can be fixedly arranged on the side surface of the bearing disc 2, the clamping member 42 can be a pressing plate or a pressing bar, the clamping member 42 is fixed on the clamping driving member 41, the clamping driving member 41 can be an air cylinder, the air cylinder is vertically arranged, and the clamping driving member 41 is used for driving the clamping member 42 to ascend and descend. The clamping piece 42 has a clamping surface, the lower surface of the clamping piece 42 is a clamping surface, and the clamping surface of the clamping piece 42 extends to a position right above the edge position of the bearing surface 21, that is, the edge positions of the clamping surface and the bearing surface are projected and overlapped in the lifting direction, so that the clamping piece 42 can be pressed at the edge position of the piece to be tested after being lowered.

The clamping surface of the clamping member 42 may be provided with an elastic layer, so that the clamping member 42 can form flexible contact with the workpiece to be tested, and the clamping member 42 is prevented from clamping the workpiece to be tested in the clamping process.

In this embodiment, the loading device comprises the following clamping steps:

the mechanical arm grabs the large-size to-be-detected piece and moves to the position right above the bearing disc 2;

the lifting driving assembly 32 (PIN module) drives the plurality of lifting adsorption assemblies 31 (lifting modules) to synchronously lift, namely, simultaneously drives the plurality of suckers 311 and the plurality of ejector rods 312 to lift to be contacted with the lower surface of the workpiece to be tested;

opening the vacuum adsorption function of the plurality of sucking discs 311, and simultaneously vacuum adsorbing the to-be-detected piece by the plurality of sucking discs 311;

the mechanical arm loosens the piece to be detected and moves to leave the bearing device;

the lifting driving assembly 32 (PIN module) descends, and the elastic pieces 314 in each of the lifting adsorption assemblies 31 (lifting modules) drive the sucking disc 311 and the ejector rod 312 to descend simultaneously, so that the to-be-tested piece is lowered onto the bearing surface 21;

the clamping driving piece 41 in the clamping mechanism 4 drives the clamping piece 42 to descend, the clamping surface of the clamping piece 42 is pressed at the edge position of the piece to be tested, and the piece to be tested is clamped and fixed on the bearing surface 21;

the vacuum adsorption function of the sucker 311 is closed, and the fixation of the piece to be detected is completed.

When the defect detection of the part to be detected is completed, the opposite steps can be adopted to transfer the part to be detected to the storage area.

In this embodiment, since the lifting suction cup 311 and the lifting ejector rod 312 are disposed in the bearing surface 21 of the bearing disc 2, the suction cup 311 and the ejector rod 312 can simultaneously transfer a large-size part to be measured from the manipulator to the bearing surface 21, so that the part to be measured can be more stably placed on the bearing surface 21, and deformation of the part to be measured in the placing process can be avoided; and be provided with fixture 4 around the loading face 21 of loading disc, fixture 4 can be used for the border position of centre gripping piece that awaits measuring, and the absorption of loading disc 2 and the centre gripping of fixture 4 form dual safety guarantee for the piece that awaits measuring of jumbo size can be leveled and fixed and detect on loading face 21, and then can improve the degree of accuracy that awaits measuring piece defect detected.

In one embodiment, the bearing surface 21 may include a plurality of sub-bearing surfaces, where the sub-bearing surfaces are spaced apart from each other, and a clearance space 22 is provided between the sub-bearing surfaces for avoiding the movement of the robot. If the bearing surface 21 is divided into a three-section structure, the bearing surface 21 comprises three sub-bearing surfaces, the three sub-bearing surfaces are sequentially arranged at intervals to form two parallel clearance spaces 22, and the clearance spaces 22 at least extend to the side surfaces of the bearing plate 2, so that a manipulator can enter or exit the clearance spaces 22 from the side surfaces of the bearing plate 2, and the workpiece to be tested can be clamped.

Each sub-carrying surface 21 is provided with a first mounting hole 211 and a second mounting hole 212, so that the part to be measured can be stably transferred to a plurality of sub-carrying surfaces 21 which are spaced apart from each other.

In one embodiment, the clamping mechanism 4 may be provided in plurality, and the plurality of clamping mechanisms 4 are respectively provided on different sides of the carrying surface 21. The bearing surface 21 is square, and clamping mechanisms 4 are arranged on at least two opposite sides of the bearing surface 21, and the two symmetrically arranged clamping mechanisms 4 can realize better clamping and fixing of a piece to be detected.

Preferably, a clamping mechanism 4 is respectively arranged on three side surfaces of the bearing surface 21, and the three clamping mechanisms 4 clamp and fix the edge positions of three edges of the piece to be tested at the same time, so that the clamping stability can be improved. Wherein, the clamping mechanism 4 is not arranged on one side surface of the bearing surface 21 so as to avoid the movement of the manipulator.

The bearing surface 21 comprises three sub-bearing surfaces, each sub-bearing surface is correspondingly provided with a clamping mechanism 4, and the part to be tested on each sub-bearing surface can be clamped and fixed, so that the clamping stability is improved.

In other embodiments, the plurality of clamping members 42 may be connected in an extending manner to form an integral structure, for example, three clamping members 42 are connected in an extending manner to form a C-shaped clamping plate, and the C-shaped clamping plate may be driven to ascend and descend through one or more clamping driving members 41 at the same time, so as to achieve clamping and fixing of the edge position of the workpiece to be tested.

In one embodiment, a detection device is provided, the detection device includes a detection platform, a detector, and a carrying device in any of the above embodiments, the carrying device is mounted on the detection platform, the detector is located above the carrying device, and the detector is used for detecting a piece to be detected on the carrying device.

The detection platform is a plane platform, and the bearing device can be fixedly installed and also can be detachably installed and arranged on the detection platform. The detector is an optical detector, the surface image of the detection piece is obtained in a photographing mode, and then the defect of the piece to be detected is found out through a preset algorithm.

In this embodiment, the carrying device of any one of the embodiments is adopted, so that the piece to be detected can be stably fixed on the carrying device, the detector can more accurately acquire the real image of the piece to be detected, and the accuracy of detecting the defect of the piece to be detected is improved.

The foregoing description of the utility model has been presented for purposes of illustration and description, and is not intended to be limiting. Several simple deductions, modifications or substitutions may also be made by a person skilled in the art to which the utility model pertains, based on the idea of the utility model.

Claims (11)

1. A load carrying apparatus comprising:

the base is used for being arranged on the detection platform;

the bearing plate is arranged on the base and provided with a bearing surface facing away from the base, and the bearing surface is provided with a first mounting hole and a second mounting hole;

the lifting adsorption mechanism comprises a lifting adsorption assembly and a lifting driving assembly, the lifting adsorption assembly comprises a sucker and a push rod, the sucker is movably arranged in the first mounting hole and used for adsorbing a piece to be detected, the push rod is movably arranged in the second mounting hole and used for supporting the piece to be detected; the lifting driving assembly is connected to the detection platform or the bearing plate, is connected with the lifting adsorption assembly and is used for driving the sucker and the ejector rod to move up and down simultaneously so as to transfer a piece to be detected onto the bearing surface from the upper part of the bearing surface; and

the clamping mechanism is connected to the detection platform or the bearing plate and used for clamping the edge position of the piece to be detected on the bearing surface.

2. The carrier of claim 1, wherein the lifting and sucking assembly further comprises a mounting frame, the mounting frame is located on a side of the carrier plate facing away from the carrying surface, and the suction cup and the ejector rod are disposed on the mounting frame.

3. The carrying device of claim 2, wherein the lifting and adsorbing assembly further comprises an elastic member, the elastic member surrounds the circumference of the ejector rod, one end of the elastic member is connected with the mounting frame, the other end of the elastic member is elastically abutted to the carrying disc, the elastic member is used for driving the lifting and adsorbing mechanism to move downwards, and the lifting and driving assembly is used for driving the lifting and adsorbing mechanism to move upwards.

4. The bearing device according to claim 3, wherein the suction cup is arranged in the middle of the mounting frame, one ejector rod is correspondingly provided with one elastic piece, and two sides of the suction cup are respectively provided with one ejector rod and one elastic piece; two sides of the first mounting hole are respectively provided with a second mounting hole.

5. The carrier of claim 1, wherein the lift drive assembly comprises a lift drive and a top plate, the lift drive being configured to be disposed on the inspection platform, the lift drive being coupled to the top plate, the lift drive being configured to drive the lifting of the lift suction assembly via the top plate.

6. The carrier of claim 5, wherein said lift and suction mechanism comprises a plurality of said lift and suction assemblies and one said lift and suction drive assembly, said top plate being connected to all of said lift and suction assemblies, one said lift and suction drive assembly being adapted to simultaneously drive the lifting of a plurality of said lift and suction assemblies.

7. The carrier of claim 1, wherein the clamping mechanism comprises a clamping lift drive and a clamping member, the clamping lift drive being connected to the carrier plate, the clamping member being connected to the clamping lift drive, the clamping member having a clamping surface that coincides with a projection of an edge position of the carrier surface in a lift direction, the clamping lift drive being for driving the lifting of the clamping member.

8. The carrier of claim 7, wherein the bearing surface comprises a plurality of sub bearing surfaces, the plurality of sub bearing surfaces are spaced apart from each other, and an avoidance space for holding the workpiece to be tested by the avoidance manipulator is provided between the sub bearing surfaces.

9. The carrier of claim 8, wherein each of said sub-carrier surfaces has said first mounting hole and said second mounting hole; and/or each sub-bearing surface is correspondingly provided with the clamping mechanism.

10. The carrier of claim 7, wherein the carrier surface is square and the clamping mechanism is provided on at least two opposite sides of the carrier surface.

11. A test device comprising a test platform, a probe and a carrier according to any one of claims 1 to 10, wherein the carrier is mounted on the test platform, the probe is located above the carrier, and the probe is used for detecting a part to be tested on the carrier.