CN219669103U - Mask lifting jig - Google Patents

Abstract

The utility model relates to the technical field of jigs for mask plates, and discloses a mask plate lifting jig which comprises a supporting beam frame, a lock nut in threaded connection with the supporting beam frame and jaw assemblies which are rotatably arranged on the supporting beam frame through a connecting frame, wherein the jaw assemblies comprise holding parts, the overhanging ends of the supporting beam frame are respectively provided with the holding parts, and people can enable the jaw assemblies to approach each other and clamp the mask plates between each other by holding the holding parts, and the jaw assemblies cannot move upwards under the limit of the lock nut; after the holding part is loosened, the claw assemblies loosen the mask plate and move in the direction away from the mask plate. According to the utility model, 2 persons can easily complete the blanking operation of the mask, and meanwhile, the mask is firmly clamped in the moving process and is not easy to collide so as to be damaged.

Description

Mask lifting jig

Technical Field

The utility model relates to the technical field of jigs for masks, in particular to a jig for lifting a mask.

Background

The mask is an important product used in the semiconductor and flat panel display industries, is mainly used for exposure in the semiconductor and flat panel display industries, plays a role similar to a camera negative film, transfers the graph on the mask onto a substrate, and finally is manufactured into a chip or a screen.

At present, a mask is generally carried and produced by a robot in a factory, but after the production is finished, a person is generally required to manually lift the mask off a production line and manually put the mask into a packaging box, finger-over printing is easily left in the manual blanking process, the surface of a mask material is touched by the hand, the pellicle attached to the layout is easily touched, the pellicle is scrapped, when a large-size mask is particularly lifted, for example, 1220mm multiplied by 1400mm multiplied by 13mm, the weight of the large-size mask is generally more than 50Kg, and the mask is more likely to collide and scrapped due to manual lifting of the person.

Disclosure of Invention

(one) solving the technical problems

Aiming at the defects of the prior art, the utility model provides a mask plate lifting jig, which solves the problem that the mask plate is easy to damage in the process of lifting the mask plate due to the lack of the simple structure and stable function when the mask plate is fed on the existing mask plate production line.

(II) technical scheme

In order to achieve the above purpose, the utility model is realized by the following technical scheme:

the utility model provides a mask lifts version tool, includes support beam frame, threaded connection lock nut on support beam frame and rotates the jack catch subassembly that sets up on support beam frame through the link, the jack catch subassembly is provided with four groups, the jack catch subassembly includes grips the portion, the overhanging end of support beam frame all is provided with grips the portion, personnel through gripping two places grip the portion for the jack catch subassembly is close to each other and presss from both sides the mask between each other, the jack catch subassembly can not upwards move under lock nut's spacing; after the holding part is loosened, the claw assemblies loosen the mask plate and move in the direction away from the mask plate.

Preferably, the support beam frame comprises a plurality of first beams which are longitudinally arranged and second beams which are horizontally arranged, the first beams are fixedly connected with the second beams, and the first beams, the second beams, the claw assemblies and the connecting frame are all made of aluminum alloy materials.

Preferably, the claw assembly comprises a claw rod, a transmission rod frame and a sliding shaft, wherein the claw rod is rotatably connected to the connecting frame, the transmission rod frame is slidably connected with the claw rod, the transmission rod frame is rotatably connected with the connecting frame, the sliding shaft is fixedly connected to one end of the transmission rod frame, and the holding part is arranged at one end, far away from the connecting frame, of the transmission rod frame.

Preferably, one end of the claw rod, which is far away from the transmission rod frame, is provided with a clamping groove, and the bottom of the clamping groove is provided with a backing plate.

Preferably, the clamping groove is arranged on the clamping claw rod, the sliding shaft slides in the chute, and when the sliding shaft slides downwards along the chute, the clamping groove rotates towards the direction close to each other, and an elastic piece is arranged between one side of the clamping claw rod and the inner side wall of the connecting frame.

(III) beneficial effects

The utility model has the following beneficial effects:

this mask lifts version tool is through the portion of gripping, jack catch subassembly and lock nut that sets up to personnel can be through gripping the portion of gripping, make jack catch subassembly be close to each other and press from both sides tight mask, and accomplish the spacing to jack catch subassembly through screwing in lock nut. After that, 2 personnel can easily accomplish the unloading operation to the mask through holding the gripping portion on supporting beam and the jack catch subassembly, and the mask centre gripping is firm in the removal in-process is difficult for taking place the collision so that damage simultaneously.

Drawings

FIG. 1 is a schematic top view of the present utility model;

FIG. 2 is a schematic elevational view of the present utility model;

FIG. 3 is a schematic view of the structure of the present utility model in the working state;

fig. 4 is a schematic view of the jaw assembly of the present utility model.

In the figure: 1. a first cross beam; 2. a second cross beam; 3. a connecting frame; 4. a jaw assembly; 41. a detent lever; 42. a clamping groove; 43. a backing plate; 44. a chute; 45. a slip shaft; 46. a transmission rod frame; 47. a grip portion; 48. an elastic member; 5. locking the screw.

Detailed Description

The following description of the embodiments of the present utility model will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present utility model, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.

Referring to fig. 1, the present utility model provides a technical solution: the utility model provides a mask lifts version tool, including supporting beam frame, lock nut threaded connection on supporting beam frame and rotate the jack catch subassembly 4 that sets up on supporting beam frame through link 3, jack catch subassembly 4 is provided with four groups, jack catch subassembly 4 includes grips 47, the overhanging end of supporting beam frame all is provided with grips 47, personnel is through gripping the grips 47 in two places for jack catch subassembly 4 are close to each other and press from both sides tight mask between each other, jack catch subassembly 4 can not upwards move under lock nut's spacing; after releasing the grip 47, the jaw assemblies 4 release the reticle and both move away from the reticle.

According to the utility model, through the holding part 47, the jaw assembly 4 and the lock nut, a person can enable the jaw assembly 4 to be close to each other and clamp the mask plate by holding the holding part 47, and limit on the jaw assembly 4 is completed by screwing the lock nut. Thereafter, 2 personnel can accomplish the unloading operation to the mask plate easily through holding the portion 47 of gripping on the supporting beam, and the firm difficult collision that takes place of mask plate centre gripping in the removal in-process simultaneously so damages.

In this embodiment, the support beam frame includes a plurality of first crossbeams 1 that vertically arrange and second crossbeam 2 that the horizontal direction arranged, fixed connection between first crossbeam 1 and the second crossbeam 2, and first crossbeam 1 and second crossbeam 2, jack catch subassembly 4, link 3 all adopt aluminum alloy material to make. Referring to fig. 1, the whole jig is made of an aluminum alloy material, so that the weight of the whole jig is effectively reduced, and the extra burden caused by the dead weight of the jig when a person lifts a plate is avoided. In order to improve the connection strength of the whole jig, two first cross beams 1 and two second cross beams 2 larger than the first cross beams can be selected to form a support beam frame of the whole jig.

In this embodiment, the jaw assembly 4 includes a jaw rod 41 rotatably connected to the connecting frame 3, a driving rod frame 46, and a sliding shaft 45 slidably connected to the jaw rod 41, where the driving rod frame 46 is rotatably connected to the connecting frame 3, the sliding shaft 45 is fixedly connected to one end of the driving rod frame 46, and a holding portion 47 is disposed at one end of the driving rod frame 46 away from the connecting frame 3. Referring to fig. 3, by providing the driving lever frame 46 and the sliding shaft 45, the jaw bars 41 can approach each other and clamp the reticle when a person grips the grip portion 47 on the beam and the grip portion 47 on the driving lever frame 46.

In this embodiment, a clamping groove 42 is provided at one end of the detent lever 41 away from the transmission lever bracket 46, and a backing plate 43 is provided at the bottom of the clamping groove 42. Referring to fig. 3, through the clamping groove 42 that sets up, can be convenient for before pressing from both sides tight mask, realize placing the both sides edge location of mask in clamping groove 42 to can be convenient for personnel grasp portion 47, make jack catch pole 41 further press from both sides tight mask, screw locking screw 5 is twisting this moment, accomplish the spacing to transfer line frame 46, make jack catch pole 41 stable centre gripping mask, and then personnel can begin to lift the version operation.

In this embodiment, the claw rod 41 is provided with a chute 44, the sliding shaft 45 slides in the chute 44, and when the sliding shaft 45 slides down the chute 44, the clamping groove 42 rotates in a direction approaching to each other, and an elastic member 48 is provided between one side of the claw rod 41 and the inner side wall of the connecting frame 3. Referring to fig. 3, through the chute 44 and the sliding shaft 45, when a person grips the transmission rod frame 46 and the grip portion 47 on the first beam 1, the sliding shaft 45 slides in the chute 44 at this time, so that the jaw bar 41 rotates, and the jaw groove is driven to rotate towards the mask plate, so as to clamp the edge of the mask plate, so that the mask plate is lifted later. Through the elastic component 48 that sets up to after the personnel removes the mask version to lower version position through the tool, at this moment, the personnel can unscrew locking screw 5, loosens the portion of gripping 47 that is located on the pawl pole 41, thereby under the elasticity effect of elastic component 48, promotes the pawl pole 41 to the direction rotation of keeping away from the mask version, and then loosens the mask version, thereby has accomplished the operation of automatic loosening tool, need not the manpower and intervenes, convenient and fast.

It is noted that relational terms such as first and second, and the like are used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Moreover, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation. The term "comprising" an element defined by the term "comprising" does not exclude the presence of other identical elements in a process, method, article or apparatus that comprises the element.

Although embodiments of the present utility model have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made therein without departing from the principles and spirit of the utility model, the scope of which is defined in the appended claims and their equivalents.

Claims (5)

1. The utility model provides a mask lifts version tool, its characterized in that includes support beam frame, threaded connection lock nut on support beam frame and rotates the jack catch subassembly that sets up on support beam frame through the link, the jack catch subassembly is provided with four groups, the jack catch subassembly includes grips the portion, the overhanging end of support beam frame all is provided with grips the portion, personnel through gripping two places grip the portion for jack catch subassembly is close to each other and presss from both sides tight mask version each other, the jack catch subassembly can not upwards move about under lock nut's spacing; after the holding part is loosened, the claw assemblies loosen the mask plate and move in the direction away from the mask plate.

2. The mask lifting jig of claim 1, wherein: the support beam frame comprises a plurality of first cross beams which are longitudinally arranged and second cross beams which are horizontally arranged, wherein the first cross beams are fixedly connected with the second cross beams, and the first cross beams, the second cross beams, the claw assemblies and the connecting frame are all made of aluminum alloy materials.

3. The mask lifting jig according to claim 1 or 2, wherein: the claw assembly comprises a claw rod, a transmission rod frame and a sliding shaft, wherein the claw rod is rotationally connected to the connection frame, the transmission rod frame is in sliding connection with the claw rod, the transmission rod frame is rotationally connected with the connection frame, the sliding shaft is fixedly connected to one end of the transmission rod frame, and the holding part is arranged at one end, far away from the connection frame, of the transmission rod frame.

4. A mask lifting jig according to claim 3, wherein: the clamping groove is formed in one end, far away from the transmission rod frame, of the clamping jaw rod, and a base plate is arranged at the bottom of the clamping groove.

5. The mask lifting jig of claim 4, wherein: the clamping groove rotates towards the direction close to each other at the moment when the sliding shaft slides downwards along the chute, and an elastic piece is arranged between one side of the clamping claw rod and the inner side wall of the connecting frame.