CN219637339U - Air inlet pipeline module - Google Patents
Air inlet pipeline module Download PDFInfo
- Publication number
- CN219637339U CN219637339U CN202320924924.5U CN202320924924U CN219637339U CN 219637339 U CN219637339 U CN 219637339U CN 202320924924 U CN202320924924 U CN 202320924924U CN 219637339 U CN219637339 U CN 219637339U
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- CN
- China
- Prior art keywords
- way valve
- pipeline
- module
- carrier gas
- mixing
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 239000012159 carrier gas Substances 0.000 claims abstract description 33
- 238000010926 purge Methods 0.000 claims abstract description 32
- 239000007789 gas Substances 0.000 description 15
- 238000004140 cleaning Methods 0.000 description 5
- 239000011248 coating agent Substances 0.000 description 4
- 238000000576 coating method Methods 0.000 description 4
- 239000002243 precursor Substances 0.000 description 4
- 238000010586 diagram Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000003466 welding Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000007664 blowing Methods 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 231100000331 toxic Toxicity 0.000 description 1
- 230000002588 toxic effect Effects 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Abstract
The utility model provides an air inlet pipeline module, which comprises a module main body, a first three-way valve, a second three-way valve and a two-way valve, wherein the first three-way valve is arranged on the module main body; wherein the two-way valve is communicated with the first three-way valve and the second three-way valve; the module is characterized in that a purging pipeline, a carrier gas pipeline, a first mixing pipeline and a second mixing pipeline are arranged in the module main body, wherein the carrier gas pipeline is communicated with the first mixing pipeline through a first three-way valve, the purging pipeline is communicated to the second mixing pipeline through a second three-way valve, and the first mixing pipeline and the second mixing pipeline are suitable for being communicated with an external source bottle. By the scheme of the utility model, the compactness of the pipeline layout is improved, and the space occupied by the pipeline layout is reduced.
Description
Technical Field
The utility model relates to the technical field of air inlet systems, in particular to an air inlet pipeline module for ALD/CVD.
Background
When vapor deposition equipment such as ALD or CVD is used for coating film, a plurality of precursor sources are often used, and in order to transport the sources to a coating chamber, the coating chamber is generally realized through a specific gas path system formed by welding combination of valves and pipelines, but the gas paths are generally more complicated, the coating is required to be completed through a plurality of welding procedures, more equipment space is occupied, the post-maintenance is more complicated, and the pipelines are required to be cleaned and purged after the precursor sources are generally transported due to toxic or inflammable characteristics, and the conventional pipeline system has a complicated structure due to a longer distance, so that the cleaning efficiency is lower.
Disclosure of Invention
Accordingly, the present utility model is directed to an air inlet pipeline module, which solves the problems of complicated pipeline and large structure in the existing ALD or CVD equipment, and solves the problem of low cleaning efficiency caused by too long pipeline during cleaning.
The utility model adopts the following scheme: the utility model provides an air inlet pipeline module, which comprises a module main body, a first three-way valve, a second three-way valve and a two-way valve, wherein the first three-way valve is arranged on the module main body; wherein the two-way valve is communicated with the first three-way valve and the second three-way valve; the module is characterized in that a purging pipeline, a carrier gas pipeline, a first mixing pipeline and a second mixing pipeline are arranged in the module main body, wherein the carrier gas pipeline is communicated with the first mixing pipeline through a first three-way valve, the purging pipeline is communicated to the second mixing pipeline through a second three-way valve, and the first mixing pipeline and the second mixing pipeline are suitable for being communicated with an external source bottle.
Further, the air inlet channel of the first three-way valve is communicated with the carrier gas pipeline through a carrier gas branch.
Further, a first bypass line and a second bypass line are provided between the first three-way valve and the two-way valve, and the first bypass line is communicated with the second bypass line to communicate the first three-way valve with the two-way valve.
Further, a third bypass pipeline and a fourth bypass pipeline are arranged between the second three-way valve and the two-way valve, and the third bypass pipeline is communicated with the fourth bypass pipeline so as to communicate the second three-way valve with the two-way valve.
Further, the first three-way valve, the second three-way valve and the two-way valve are arranged on the module main body, and the two-way valve is arranged between the first three-way valve and the second three-way valve.
Further, the carrier gas pipeline and the two ends of the purging pipeline extend outwards and are provided with expansion joints.
Further, the first mixing pipeline and the second mixing pipeline are provided with source bottle connectors suitable for being connected with external source bottles.
Further, the air inlet channel of the second three-way valve is communicated with the purging pipeline through a purging branch.
The beneficial effects are that:
according to the scheme, a plurality of single air channels are integrated into one air channel module, so that the structure is compact to the greatest extent, the transportation distance of a precursor source is reduced, and the equipment space is saved; meanwhile, the contact surface of the source and the pipeline is reduced, so that the cleaning is facilitated, and the residue in the pipeline is reduced; the heat control design of the later-stage pipeline is facilitated; the modular design can be processed in batches, so that the production cost is reduced.
Drawings
FIG. 1 is a schematic view of an air intake pipe module according to an embodiment of the present utility model;
FIG. 2 is a schematic diagram illustrating an internal layout of an intake manifold module according to an embodiment of the present utility model;
FIG. 3 is a schematic diagram illustrating an embodiment of an intake manifold module;
icon: the module body 1, the carrier gas pipeline 11, the carrier gas branch 111, the purge pipeline 12, the purge branch 121, the first mixing pipeline 13, the second mixing pipeline 14, the first bypass pipeline 15, the second bypass pipeline 16, the third bypass pipeline 17, the fourth bypass pipeline 18, the first three-way valve 2, the second three-way valve 3, the two-way valve 4, the source bottle 5, the source bottle connector 6, the cavity 7 and the expansion connector 8.
Detailed Description
Examples
As shown in fig. 1 to 3, the present embodiment provides an intake pipe module including a module body 1, and further including a first three-way valve 2, a second three-way valve 3, and a two-way valve 4; wherein the two-way valve 4 communicates the first three-way valve 2 with the second three-way valve 3; a purge pipeline 12, a carrier gas pipeline 11, a first mixing pipeline 13 and a second mixing pipeline 14 are arranged in the module main body 1, wherein the carrier gas pipeline 11 is communicated with the first mixing pipeline 13 through the first three-way valve 2, the purge pipeline 12 is communicated with the second mixing pipeline 14 through the second three-way valve 3, and the first mixing pipeline 13 and the second mixing pipeline 14 are suitable for being communicated with an external source bottle 5.
Specifically, in this embodiment, the module body 1 is not specifically limited in shape, and a purge pipe 12 and a carrier gas pipe 11 are provided in the module body, where an outlet end of the purge pipe 12 is connected to the cavity 7, and is used for blowing gas into the cavity 7. The carrier gas is used for gas intake, and the gas is introduced into the source bottle 5 through the first mixing pipeline 13, mixed with the substances in the source bottle 5, and then led out into the purge pipeline 12 through the second mixing pipeline 14. Further, extension joints 8 are provided at both ends of the carrier gas line 11 and the purge line 12 to be outwardly extended, so that external pipes can be connected or the same gas inlet line module can be connected.
In this embodiment, as shown in fig. 2, the first three-way valve 2 and the second three-way valve 3 are products of the prior art, and each have three channels, here, one air inlet channel and two air outlet channels, and the two-way valve 4 is also a product of the prior art, which has one air inlet channel and one air outlet channel. Here, the first three-way valve 2, the second three-way valve 3 and the two-way valve 4 are arranged on the module body 1, and the two-way valve 4 is disposed between the first three-way valve 2 and the second three-way valve 3, so that the three valves are more compact, and the length of the communication pipeline can be reduced. Specifically, a first bypass line 15 and a second bypass line 16 are provided between one of the outlet channels of the first three-way valve 2 and the two-way valve 4, the first bypass line 15 communicating with the second bypass line 16 to communicate the first three-way valve 2 with the two-way valve 4. A third bypass line 17 and a fourth bypass line 18 are provided between the second three-way valve 3 and the two-way valve 4, the third bypass line 17 communicating with the fourth bypass line 18 to communicate the second three-way valve 3 with the two-way valve 4.
In this embodiment, the air inlet channel of the first three-way valve 2 is communicated with the carrier gas pipeline 11 through a carrier gas branch 111, and the air inlet channel of the second three-way valve 3 is communicated with the purge pipeline 12 through a purge branch 121. Here, due to the modular design, the distance between the carrier gas line 11 and the purge line 12 and the first and second three-way valves 2 and 3 is very short, so that the distance between the carrier gas branch 111 and the purge branch 121 is short, and the gas circulation path can be shortened.
In this embodiment, as shown in fig. 2, the first mixing pipe 13 is connected to another air outlet channel of the first three-way valve 2, so that air can be conducted into the external source bottle 5, and after the air in the external source bottle 5 is fully mixed with the material in the source bottle 5, the air is conducted into the third three-way valve through the second mixing pipe 14. Here, the first mixing pipe 13 and the second mixing pipe 14 are provided with a source bottle connector 6 adapted to be connected to an external source bottle 5, so as to be connected to the source bottle 5.
As shown in fig. 2 and 3, in operation, a certain flow of carrier gas enters the carrier gas pipeline 11, where the other end of the carrier gas pipeline 11 can be plugged; then, the carrier gas enters the first three-way valve 2 through the carrier gas branch 111, at the moment, the door of the first three-way valve 2 is opened, the two-way valve is closed, the carrier gas flows through the first mixing pipeline 13 to enter the source bottle 5, the mixed gas of the forming source and the carrier gas entering the source bottle 5 flows through the second mixing pipeline 14 to enter the second three-way valve 3, the second three-way valve 3 is opened, the mixed gas flows through the purge branch 121 to enter the purge pipeline 12, and the mixed gas and the purge gas in the purge pipeline 12 are mixed again to enter the cavity 7, so that the primary gas transportation is completed; when the gas is transported, the internal flow channel is purged to reduce the residue of the source in the flow channel, specifically, the introduced carrier gas enters the first three-way valve 2 from the carrier gas pipeline 11, the three-way valve is closed, the two-way valve is opened, the carrier gas flows into the first bypass pipeline 15, the second bypass pipeline 16, the third bypass pipeline 17 and the fourth bypass pipeline 18 in sequence, enters the second three-way valve 3, flows through the purge branch 121, enters the purge pipeline 12 and merges with the purge gas, and the cleaning of the flow channel is completed.
According to the embodiment, a plurality of single air channels can be integrated into one air channel module, so that the structure is compact to the greatest extent, the transportation distance of a precursor source is reduced, and the equipment space is saved; meanwhile, the contact surface of the source and the gas path pipeline is reduced, so that the purging is convenient, and the residue in the pipeline is reduced; the heat control design of the later-stage pipeline is facilitated; the modular design can be processed in batches, so that the production cost is reduced.
It should be understood that: the above is only a preferred embodiment of the present utility model, and the protection scope of the present utility model is not limited to the above examples, and all technical solutions belonging to the concept of the present utility model belong to the protection scope of the present utility model.
The description of the drawings in the embodiments above illustrates only certain embodiments of the utility model and should not be taken as limiting the scope, since other related drawings may be made by those of ordinary skill in the art without the benefit of the inventive faculty.
Claims (8)
1. An air inlet pipeline module comprises a module main body and is characterized by further comprising a first three-way valve, a second three-way valve and a two-way valve; wherein the two-way valve is communicated with the first three-way valve and the second three-way valve; the module is characterized in that a purging pipeline, a carrier gas pipeline, a first mixing pipeline and a second mixing pipeline are arranged in the module main body, wherein the carrier gas pipeline is communicated with the first mixing pipeline through a first three-way valve, the purging pipeline is communicated to the second mixing pipeline through a second three-way valve, and the first mixing pipeline and the second mixing pipeline are suitable for being communicated with an external source bottle.
2. The inlet line module of claim 1, wherein the inlet channel of the first three-way valve communicates with the carrier gas line via a carrier gas branch.
3. The intake conduit module of claim 1, wherein a first bypass conduit and a second bypass conduit are disposed between the first three-way valve and the two-way valve, the first bypass conduit communicating with the second bypass conduit to communicate the first three-way valve with the two-way valve.
4. An intake conduit module according to claim 3, wherein a third bypass conduit and a fourth bypass conduit are provided between the second three-way valve and the two-way valve, the third bypass conduit communicating with the fourth bypass conduit to communicate the second three-way valve with the two-way valve.
5. The intake manifold module of claim 4, wherein the first three-way valve, the second three-way valve, and the two-way valve are disposed in an array on the module body, and the two-way valve is disposed between the first three-way valve and the second three-way valve.
6. The inlet line module of claim 1, wherein the carrier gas line and the purge line extend outwardly at both ends and are provided with expansion joints.
7. The intake manifold module of claim 1, wherein the first and second mixing lines are provided with source bottle fittings adapted to connect to an external source bottle.
8. The intake manifold module of claim 1, wherein the intake passage of the second three-way valve communicates with the purge line via a purge bypass.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202320924924.5U CN219637339U (en) | 2023-04-23 | 2023-04-23 | Air inlet pipeline module |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202320924924.5U CN219637339U (en) | 2023-04-23 | 2023-04-23 | Air inlet pipeline module |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN219637339U true CN219637339U (en) | 2023-09-05 |
Family
ID=87807469
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202320924924.5U Active CN219637339U (en) | 2023-04-23 | 2023-04-23 | Air inlet pipeline module |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN219637339U (en) |
-
2023
- 2023-04-23 CN CN202320924924.5U patent/CN219637339U/en active Active
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| GR01 | Patent grant | ||
| GR01 | Patent grant |