CN219633489U - Automatic liquid supply cabinet for chip manufacturing related equipment - Google Patents
Automatic liquid supply cabinet for chip manufacturing related equipment Download PDFInfo
- Publication number
- CN219633489U CN219633489U CN202320938335.2U CN202320938335U CN219633489U CN 219633489 U CN219633489 U CN 219633489U CN 202320938335 U CN202320938335 U CN 202320938335U CN 219633489 U CN219633489 U CN 219633489U
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- whole
- cabinet
- cabinet body
- liquid storage
- chip manufacturing
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- 239000007788 liquid Substances 0.000 title claims abstract description 96
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 26
- 238000003860 storage Methods 0.000 claims abstract description 49
- 230000007246 mechanism Effects 0.000 claims abstract description 9
- 238000003466 welding Methods 0.000 claims description 11
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 abstract description 6
- 238000004140 cleaning Methods 0.000 abstract description 5
- 229910052757 nitrogen Inorganic materials 0.000 abstract description 3
- 239000002244 precipitate Substances 0.000 abstract 1
- 238000012545 processing Methods 0.000 description 10
- 238000005498 polishing Methods 0.000 description 6
- 239000003814 drug Substances 0.000 description 5
- 239000007789 gas Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000007517 polishing process Methods 0.000 description 2
- 238000001556 precipitation Methods 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 239000004809 Teflon Substances 0.000 description 1
- 229920006362 Teflon® Polymers 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 229940079593 drug Drugs 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000001376 precipitating effect Effects 0.000 description 1
- 238000003672 processing method Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
Classifications
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/10—Greenhouse gas [GHG] capture, material saving, heat recovery or other energy efficient measures, e.g. motor control, characterised by manufacturing processes, e.g. for rolling metal or metal working
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- Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
Abstract
The utility model discloses an automatic liquid supply cabinet for chip manufacturing related equipment, which relates to the technical field of chip manufacturing and comprises a cabinet body and cabinet doors, wherein the two sides of the cabinet body are symmetrically and rotatably connected with the cabinet doors through hinges, and a supporting and shaking mechanism is arranged in the cabinet body; according to the utility model, the whole rotating shaft is driven to rotate through the rotation of the motor, so that the rotating column on the whole rotating shaft drives the rotating toothed bar to shake left and right, the whole toothed plate shakes left and right on the base, the liquid storage tank meshed with the whole toothed plate shakes left and right on the whole clamping frame, the phenomenon that the cleaning liquid used for cleaning chips or related liquid for chip manufacturing in the whole liquid storage tank precipitates is prevented from influencing the manufacturing of subsequent chips, meanwhile, the liquid in the whole liquid storage tank enters the connecting pipe through pressurized nitrogen, and the control console controls the master control valve, so that automatic liquid supply for related equipment for chip manufacturing is more convenient and quick.
Description
Technical Field
The utility model relates to the technical field of chip manufacturing, in particular to an automatic liquid supply cabinet for related equipment in chip manufacturing.
Background
The chip polishing workshop mainly adopts a double-sided polishing process as a main subsequent processing method for chip processing, and the processing precision and the processing efficiency of precise double-sided polishing have direct relation with the conditions of processing environment, polishing rotating speed, polishing operation mode, polishing pressure, polishing liquid temperature, flow rate and the like, so that an ultra-precise machine tool and a proper polishing process are required for obtaining the chip with the ultra-smooth surface, wherein the whole chip processing machine tool is required to be provided with a relevant liquid supply device to provide relevant assistance for chip manufacturing, wherein the relevant assistance comprises DIW, cleaning liquid, developing liquid, EBR and other liquids;
the existing liquid supply device of the ultra-precise machine tool is lack of precise control, so that the chip is easy to damage in the process of processing, meanwhile, precipitation phenomenon can occur in the process of storing part of chip processing auxiliary liquid, and the centralized processing of the later chip can be influenced;
to this end, we propose an automatic liquid supply cabinet for chip manufacturing related equipment.
Disclosure of Invention
The utility model aims to provide an automatic liquid supply cabinet for chip manufacturing related equipment, which is used for solving the problems that the traditional chip processing liquid supply device is complicated in liquid supply adjustment and easy to precipitate when storing liquid.
In order to achieve the above purpose, the present utility model provides the following technical solutions:
the automatic liquid supply cabinet for the chip manufacturing related equipment comprises a cabinet body and cabinet doors, wherein the two sides of the cabinet body are symmetrically and rotatably connected with the cabinet doors through hinges, and a supporting and shaking mechanism is arranged in the cabinet body;
the supporting and shaking mechanism comprises a clamping frame, a threaded rod, a knob, a first arc clamping plate, rubber blocks and a second arc clamping plate, wherein the clamping frame is fixed on the inner walls of the two sides of the cabinet body through bolts, the threaded rod is symmetrically arranged on one side of the clamping frame, the knob is fixed on one end of the threaded rod through spot welding, the other end of the threaded rod penetrates through one side of the clamping frame and is movably connected with the first arc clamping plate through a bearing, the second arc clamping plate is symmetrically and movably connected with the inner wall of one side of the clamping frame through the bearing, and the rubber blocks are symmetrically fixed on the opposite surfaces of the first arc clamping plate and the second arc clamping plate through adhesion;
the threaded rod is in threaded connection with the clamping frame, the liquid storage tank is installed to the opposite face of first arc splint and second arc splint, the both sides inner wall of the cabinet body just is located the top of clamping frame and is fixed with the curb plate through spot welding.
Further, the bottom inner wall of the cabinet body is fixed with the base through spot welding, and is located the top sliding connection of base and has the pinion rack, the top of base is fixed with the mount through spot welding, and is located one side of mount and rotate through the bearing and be connected with the rotation rack, the bottom and the pinion rack meshing of rotation rack are connected.
Further, the motor is fixed with through the bolt to the inner wall of one side of the cabinet body, and is located the output of motor and be fixed with the pivot through spot welding, one end of pivot passes through one side inner wall swing joint of bearing and the cabinet body, and is located the outer wall cover of pivot and establish and be fixed with the swivel post, the arc wall has been seted up to the outer wall of swivel post, the top one side and the arc wall looks joint of rotating the rack, and rotate rack and arc wall and be sliding connection.
Further, the bottom of the liquid storage tank is fixedly provided with a toothed sleeve through a bolt, one side of the toothed sleeve is meshed with the toothed plate, one side of the side plate is provided with an air duct, the outer wall of the air duct is symmetrically communicated with an air outlet branch pipe, and the outer wall of the air outlet branch pipe is provided with an air outlet valve.
Further, one end of the air duct is communicated with the top of the liquid storage tank, a connecting pipe is communicated with one side of the top of the liquid storage tank, one end of the connecting pipe extends into the liquid storage tank, a main control valve is arranged at the other end of the connecting pipe, a liquid outlet pipe is communicated with one side of the main control valve, a liquid guide pipe is arranged at one side of the cabinet body, one end of the liquid outlet pipe extends into the liquid guide pipe, and a control console is fixed on the inner wall of the top of the cabinet body through bolts.
Compared with the prior art, the utility model has the beneficial effects that:
according to the utility model, the whole rotating shaft is driven to rotate through the rotation of the motor, so that the rotating column on the whole rotating shaft drives the rotating toothed bar to shake left and right, the whole toothed plate shakes left and right on the base, the liquid storage tank meshed with the whole toothed plate shakes left and right on the whole clamping frame, the phenomenon that the cleaning liquid used for cleaning chips or related liquid used for manufacturing chips in the whole liquid storage tank is precipitated is prevented from influencing the manufacturing of subsequent chips, meanwhile, the liquid in the whole liquid storage tank enters the connecting pipe through pressurized nitrogen, and the master control valve is controlled through the control console, so that a worker can obtain the liquid in the required liquid storage tank, and the automatic liquid supply for related equipment for manufacturing chips is more convenient and quick.
Drawings
FIG. 1 is a schematic diagram of the overall structure of an automatic liquid supply cabinet for chip manufacturing related equipment according to the present utility model;
FIG. 2 is a schematic view of an automatic liquid supply cabinet unfolding structure for chip manufacturing related equipment according to the present utility model;
FIG. 3 is a schematic top view of a supporting and shaking mechanism according to the present utility model;
FIG. 4 is a schematic top view of the connection structure of the base and the toothed plate of the present utility model;
fig. 5 is an enlarged schematic view of the structure at a in the present utility model.
In the figure: 1. a cabinet body; 2. a cabinet door; 3. a catheter; 4. a console; 5. a base; 6. a side plate; 7. supporting a shaking mechanism; 701. a clamping frame; 702. a threaded rod; 703. a knob; 704. a first arc splint; 705. a rubber block; 706. a second arc splint; 8. a liquid storage tank; 9. an air duct; 10. an outlet branch pipe; 11. an air outlet valve; 12. a toothed plate; 13. a fixing frame; 14. a motor; 15. a rotating shaft; 16. a rotating column; 17. an arc-shaped groove; 18. rotating the toothed bar; 19. a tooth sleeve; 20. a connecting pipe; 21. a main control valve; 22. and a liquid outlet pipe.
Detailed Description
The following description of the embodiments of the present utility model will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present utility model, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.
Referring to fig. 1-5, the present utility model provides a technical solution:
example 1:
according to the utility model, two or more storage tanks are placed in the cabinet body 1, and gas is introduced into the storage tanks, so that inert gas nitrogen is adopted, the gas is prevented from reacting with relevant liquid in the storage tanks 8, the liquid required by chip manufacture in the whole storage tanks 8 is pressed by using air pressure, meanwhile, the whole storage tanks 8 are arranged in the cabinet body 1, so that later centralized management and operation are facilitated, a mechanism for driving the whole storage tanks 8 to shake is also arranged in the whole cabinet body 1, and phenomena such as precipitation and the like are avoided from being caused when the liquid in the storage tanks 8 is not used for a long time;
in specific operation, as shown in fig. 1-2, the whole cabinet body 1 adopts a double door design, meanwhile, a window is formed in the top of the cabinet door 2, numerical value changes of related equipment on a console 4 in the cabinet body 1 can be directly observed through the window, a liquid guide pipe 3 is formed in the side part of the whole cabinet body 1, the whole liquid guide pipe 3 is responsible for protecting a liquid outlet pipe 22 extending out of the cabinet body 1, the liquid outlet pipe 22 is prevented from being damaged outside the cabinet body 1, the whole liquid guide pipe 3 is made of PU materials, and the materials are softer and durable;
one side of the whole cabinet body 1 is communicated with an air duct 9, the whole air duct 9 is arranged between the side plate 6 and the inner wall of the cabinet body 1, as shown in fig. 3, two air outlet branch pipes 10 extend out of the whole air duct 9, and the whole air outlet branch pipes 10 are communicated with a liquid storage tank 8 in the cabinet body 1;
in order to facilitate the whole control console 4 to control the two liquid storage tanks 8 in the cabinet body 1 independently, the whole air outlet branch pipe 10 is provided with an air outlet valve 11, a connecting pipe 20 is arranged at the top of the liquid storage tank 8, the whole connecting pipe 20 extends to the bottom of the liquid storage tank 8, the whole air outlet branch pipe 10 is arranged at the top of the liquid storage tank 8, the two liquid storage tanks 8 in the cabinet body 1 are provided with the connecting pipes 20, and the two connecting pipes 20 are connected with a single main control valve 21, as shown in fig. 5, the whole main control valve 21 adopts a Teflon liquid medicine valve, the attractive appearance is strong in corrosion resistance, and a connecting port for adding medicine is also arranged on the whole liquid storage tank 8 for automatic medicine adding in the later period of the whole liquid storage tank 8;
the whole total control valve 21 is connected with two liquid outlet pipes 22, meanwhile, the two liquid outlet pipes 22 are respectively communicated with two liquid storage tanks 8 in the cabinet body 1, the whole liquid outlet pipe 22 extends out of a liquid guide pipe 3 at one side of the cabinet body 1 and is connected with an external chip processing device, the effect of liquid supply is realized, a tooth sleeve 19 is fixed at the bottom of the whole liquid storage tank 8 through a bolt, and when the tooth sleeve 19 is installed, the tooth pattern on the whole tooth sleeve 19 is in meshed connection with the tooth pattern of a tooth plate 12 on a base 5 at the bottom of the cabinet body 1, so that the whole liquid storage tank 8 can be conveniently driven to shake left and right by the action movement of the whole tooth plate 12 in later period;
example 2:
when the liquid storage tank 8 in the whole cabinet body 1 is installed, the tooth sleeve 19 is additionally arranged at the bottom of the whole tank body, so that the gravity center of the whole liquid storage tank 8 is unstable, and at the moment, the whole liquid storage tank 8 needs to be fixed by externally installing the supporting and shaking mechanism 7;
in specific operation, as shown in fig. 3, a clamping frame 701 is fixed on the inner wall of the whole cabinet body 1 through spot welding, the whole liquid storage tank 8 is stored between the clamping frames 701, a second arc clamping plate 706 is movably connected to the inner wall of one side of the whole clamping frame 701 through a bearing, when the liquid storage tank 8 is installed, a knob 703 positioned on one side of the clamping frame 701 is rotated firstly, the rotation of the whole knob 703 drives a threaded rod 702 to rotate, a first arc clamping plate 704 movably connected with one end of the whole threaded rod 702 approaches to the second arc clamping plate 706, at the moment, a worker puts the liquid storage tank 8 with the bottom connected between the first arc clamping plate 704 and the second arc clamping plate 706, and continuously rotates the knob 703 until a rubber block 705 on the whole first arc clamping plate 704 clamps the whole liquid storage tank 8, and the installation of the whole liquid storage tank 8 is completed;
the whole first arc clamping plate 704 and the second arc clamping plate 706 are movably arranged, so that the toothed plate 12 at the bottom of the later period conveniently drives the whole liquid storage tank 8 to shake left and right in the cabinet body 1, and the related liquid medicine in the whole liquid storage tank 8 is prevented from precipitating;
when the whole liquid storage tank 8 is required to shake, at this moment, the motor 14 at one side of the cabinet body 1 is started through the control console 4, the whole motor 14 drives the whole rotating shaft 15 to rotate, the whole base 5 is provided with the fixing frame 13, the whole fixing frame 13 is rotationally connected with the rotating toothed bar 18, the whole rotating toothed bar 18 is shown in figure 1, the bottom of the whole rotating toothed bar is provided with an arc-shaped block with a tooth trace, the top of the whole rotating toothed bar is clamped with the arc-shaped groove 17 on the rotating column 16, the whole rotating column 16 is arranged on the rotating shaft 15, after the motor 14 drives the whole rotating shaft 15 to rotate, the arc-shaped groove 17 on the whole rotating column 16 continuously rotates, so that the whole rotating toothed bar 18 is driven to shake left and right, the whole toothed plate 12 is connected with the sliding groove on the base 5, and dislocation is prevented when the whole toothed plate 12 moves, and the whole liquid storage tank 8 is prevented from being influenced;
the whole cabinet body 1 is arranged, so that the later whole chip is convenient to manufacture, and meanwhile, a control console 4 on the whole cabinet body 1 is convenient for staff to control the use of liquid medicines in the whole liquid storage tank 8, so that the manufacturing rate of the chip is greatly improved.
Although embodiments of the present utility model have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made therein without departing from the principles and spirit of the utility model, the scope of which is defined in the appended claims and their equivalents.
Claims (5)
1. The utility model provides an automatic confession liquid cabinet for chip manufacturing related equipment, includes cabinet body (1) and cabinet door (2), the both sides of cabinet body (1) are connected with cabinet door (2) through hinge symmetry rotation, its characterized in that: a supporting and shaking mechanism (7) is arranged in the cabinet body (1);
the supporting and shaking mechanism (7) comprises a clamping frame (701), a threaded rod (702), a knob (703), a first arc clamping plate (704), a rubber block (705) and a second arc clamping plate (706), wherein the clamping frame (701) is fixed on the inner walls of two sides of the cabinet body (1) through bolts, the threaded rod (702) is symmetrically arranged on one side of the clamping frame (701), the knob (703) is fixed at one end of the threaded rod (702) through spot welding, the first arc clamping plate (704) is movably connected with the other end of the threaded rod (702) through one side of the clamping frame (701) through a bearing, the second arc clamping plate (706) is symmetrically and movably connected with the inner wall of one side of the clamping frame (701) through the bearing, and the rubber block (705) is symmetrically fixed on the opposite surfaces of the first arc clamping plate (704) and the second arc clamping plate (706) through adhesion;
the threaded rod (702) is in threaded connection with the clamping frame (701), the liquid storage tank (8) is installed on the opposite surface of the first arc clamping plate (704) and the second arc clamping plate (706), and side plates (6) are fixed on the inner walls of the two sides of the cabinet body (1) and positioned at the top of the clamping frame (701) through spot welding.
2. An automated liquid supply cabinet for chip manufacturing related equipment as defined in claim 1, wherein: the novel cabinet is characterized in that a base (5) is fixed on the inner wall of the bottom of the cabinet body (1) through spot welding, a toothed plate (12) is slidably connected to the top of the base (5), a fixing frame (13) is fixed to the top of the base (5) through spot welding, a rotary toothed bar (18) is rotatably connected to one side of the fixing frame (13) through a bearing, and the bottom of the rotary toothed bar (18) is meshed with the toothed plate (12).
3. An automated liquid supply cabinet for chip manufacturing related equipment as defined in claim 2, wherein: the novel multifunctional electric cabinet is characterized in that a motor (14) is fixed on one side inner wall of the cabinet body (1) through bolts, a rotating shaft (15) is fixed at the output end of the motor (14) through spot welding, one end of the rotating shaft (15) is movably connected with one side inner wall of the cabinet body (1) through a bearing, a rotating column (16) is sleeved and fixed on the outer wall of the rotating shaft (15), an arc-shaped groove (17) is formed in the outer wall of the rotating column (16), one side of the top of a rotating toothed bar (18) is clamped with the arc-shaped groove (17), and the rotating toothed bar (18) is in sliding connection with the arc-shaped groove (17).
4. An automated liquid supply cabinet for chip manufacturing related equipment as defined in claim 3, wherein: the bottom of the liquid storage tank (8) is fixedly provided with a toothed sleeve (19) through a bolt, one side of the toothed sleeve (19) is meshed with a toothed plate (12), one side of the side plate (6) is provided with an air guide pipe (9), the outer wall of the air guide pipe (9) is symmetrically communicated with an air outlet branch pipe (10), and the outer wall of the air outlet branch pipe (10) is provided with an air outlet valve (11).
5. An automated liquid supply cabinet for chip manufacturing related equipment as defined in claim 4, wherein: one end of air duct (9) is linked together with the top of liquid storage pot (8), and is located the top one side intercommunication of liquid storage pot (8) and have connecting pipe (20), in the one end of connecting pipe (20) extends to liquid storage pot (8), and be located the other end of connecting pipe (20) and install total accuse valve (21), one side intercommunication of total accuse valve (21) has drain pipe (22), catheter (3) are installed to one side of cabinet body (1), and in the one end that is located drain pipe (22) extends to catheter (3), the top inner wall of cabinet body (1) is through bolt fastening has control cabinet (4).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202320938335.2U CN219633489U (en) | 2023-04-24 | 2023-04-24 | Automatic liquid supply cabinet for chip manufacturing related equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202320938335.2U CN219633489U (en) | 2023-04-24 | 2023-04-24 | Automatic liquid supply cabinet for chip manufacturing related equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN219633489U true CN219633489U (en) | 2023-09-05 |
Family
ID=87815465
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202320938335.2U Active CN219633489U (en) | 2023-04-24 | 2023-04-24 | Automatic liquid supply cabinet for chip manufacturing related equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN219633489U (en) |
-
2023
- 2023-04-24 CN CN202320938335.2U patent/CN219633489U/en active Active
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