CN219621299U - Cooling device for single crystal furnace and single crystal furnace - Google Patents
Cooling device for single crystal furnace and single crystal furnace Download PDFInfo
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- CN219621299U CN219621299U CN202321255418.8U CN202321255418U CN219621299U CN 219621299 U CN219621299 U CN 219621299U CN 202321255418 U CN202321255418 U CN 202321255418U CN 219621299 U CN219621299 U CN 219621299U
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
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Abstract
The utility model relates to the technical field of photovoltaics, in particular to a cooling device for a single crystal furnace and the single crystal furnace, wherein the cooling device comprises: the water cooling screen comprises a barrel body with openings at the upper end and the lower end and a water inlet and outlet structure arranged at the opening at the upper end of the barrel body, wherein the barrel body comprises an inner side wall, an outer side wall and a cooling flow path formed between the inner side wall and the outer side wall, and the cooling flow path is communicated with the water inlet and outlet structure; the heat transfer element is arranged at the upper end of the cylinder body, and extends upwards from the edge of the opening at the upper end of the cylinder body, and the middle part of the heat transfer element is provided with a through hole for the crystal bar to pass through. The cooling screen cooling state is changed to the cooling-free state in the equal diameter pulling process of the crystal bar, the problems of high pulling speed of the crystal bar and high temperature fluctuation in the furnace caused by rapid change of the ambient temperature of the crystal bar are avoided, the equal diameter pulling speed and the temperature in the furnace are stabilized, the pulling speed and the crystallization rate of the crystal bar in equal diameter are greatly improved, and the productivity is improved.
Description
Technical Field
The utility model relates to the technical field of photovoltaics, in particular to a cooling device for a single crystal furnace and the single crystal furnace.
Background
A single crystal furnace is an apparatus in which polycrystalline materials such as polycrystalline silicon are melted by a graphite heater or the like in an inert gas atmosphere, and then a single crystal ingot is grown by pulling up by a Czochralski method. In the process of upward movement of the crystal bar, cooling is required, so that the crystal bar is fixedly formed.
The existing cooling mode is to arrange a water cooling screen in the single crystal furnace, and to introduce cooling liquid into the water cooling screen, and when the crystal bar moves upwards through the water cooling screen, the water cooling screen cools the crystal bar. However, after the crystal bar passes through the water cooling screen, the crystal bar can be immediately converted into a non-cooling state, so that the isomorphous pulling speed of the crystal bar can be rapidly reduced, the temperature control system in the furnace can be used for reducing the temperature, the crystal growth is changed, the pulling speed of the crystal in the isodiametric process is fluctuated, the temperature is fluctuated, and the failure of the crystal growth is easily caused.
Disclosure of Invention
Based on the above, the utility model provides a cooling device for a single crystal furnace and the single crystal furnace, so as to solve the problem that crystals are easy to grow and fail due to larger pulling speed and temperature fluctuation after crystal bars pass through a water cooling screen in a constant diameter mode.
In one aspect, the present utility model provides a cooling apparatus for a single crystal furnace, comprising:
the water cooling screen comprises a barrel body with openings at the upper end and the lower end and a water inlet and outlet structure arranged at the opening at the upper end of the barrel body, wherein the barrel body comprises an inner side wall, an outer side wall and a cooling flow path formed between the inner side wall and the outer side wall, and the cooling flow path is communicated with the water inlet and outlet structure;
the heat transfer element is arranged at the upper end of the cylinder body, and extends upwards from the edge of the opening at the upper end of the cylinder body, and the middle part of the heat transfer element is provided with a through hole for the crystal bar to pass through.
In one embodiment, the heat transfer element has a first side wall facing the ingot and a second side wall facing an inner wall of the single crystal furnace;
the first sidewall is provided with a heat transfer structure that increases its surface area.
In one embodiment, the heat transfer structure comprises a plurality of first grooves and/or first protrusions formed in the first side wall.
In one embodiment, the second side wall is formed with a plurality of second grooves and/or second protrusions.
In one embodiment, the heat transfer element is provided with a notch.
In one embodiment, the heat transfer element is a hollow structure.
In one embodiment, the heat transfer element is made of a thermally conductive material.
In one embodiment, the heat transfer element has an inner diameter that is the same as the inner diameter of the upper end of the cylinder and an outer diameter that is the same as the outer diameter of the upper end of the cylinder.
In one embodiment, the inner side wall and/or the outer side wall of the cylinder is one or a combination of two of a polygonal cylinder and a polygonal table.
On the other hand, the utility model also provides a single crystal furnace, which comprises a furnace body and the cooling device in any embodiment, wherein the cooling device is arranged in a furnace chamber of the furnace body, and the distance between the upper end of the heat transfer element and the upper end of the cylinder body is more than two thirds of the distance between the upper end of the cylinder body and a furnace mouth of the furnace body.
The beneficial effects are that: according to the cooling device provided by the utility model, the heat transfer element is arranged at the upper end of the cylinder body, so that the crystal bar passes through the through hole of the heat transfer element after passing through the water-cooling screen cylinder body, at the moment, the heat transfer element can absorb the heat of the crystal bar and transfer the heat to the water-cooling screen cylinder body contacted with the heat transfer element based on the heat conductivity of the heat transfer element, the water-cooling screen cools the crystal bar, that is, the heat transfer element can cool the crystal bar, so that the crystal bar can still be cooled after passing through the water-cooling screen cylinder body, and the rapid change of the ambient temperature of the crystal bar after passing through the water-cooling screen is avoided, so that the constant-diameter pulling speed can be stabilized.
The heat transfer element is arranged at the upper end of the water-cooling screen cylinder body, so that the stable transition from the cooling state of the water-cooling screen to the cooling state of the heat transfer element to the non-cooling state in the equal diameter pulling process of the crystal bar can be realized, the problems of larger crystal bar pulling speed and furnace temperature fluctuation caused by rapid change of the crystal bar environment temperature are avoided, the equal diameter pulling speed and the furnace temperature are stable, the pulling speed and the crystallization rate of the crystal bar in equal diameter are greatly improved, and the productivity is improved.
Drawings
FIG. 1 is a schematic diagram of a cooling apparatus for a single crystal furnace according to an embodiment;
FIG. 2 is a top view of FIG. 1;
FIG. 3 is a cross-sectional view of A-A of FIG. 1;
FIG. 4 is a schematic diagram of the structure of a water cooling screen according to one embodiment;
FIG. 5 is a partial cross-sectional view of a heat transfer element in one embodiment.
Reference numerals in the drawings of the specification include: 1-water cooling screen, 101-barrel, 1011-inside wall, 1012-outside wall, 1013-cooling flow path, 1014-spiral isolation bar, 102-water inlet and outlet structure, 1021-water inlet pipe, 1022-water outlet pipe, 2-heat transfer element, 201-first side wall, 202-second side wall, 203-notch, 204-dodge port, 3-heat transfer structure, 301-first groove, 302-first protrusion, 401-second protrusion, 402-second groove.
Detailed Description
The present utility model will be described in further detail with reference to the drawings and examples, in order to make the objects, technical solutions and advantages of the present utility model more apparent. It should be understood that the specific embodiments described herein are for purposes of illustration only and are not intended to limit the scope of the utility model.
It should be noted that the illustrations provided in the present embodiment are merely schematic illustrations of the basic idea of the present utility model.
The structures, proportions, sizes, etc. shown in the drawings attached hereto are for illustration purposes only and should not be construed as limiting the utility model to the extent that it can be practiced, since modifications, changes in the proportions, or otherwise, used in the practice of the utility model, are particularly adapted to the specific details of construction and the use of the utility model, without departing from the spirit or essential characteristics thereof, which fall within the scope of the utility model as defined by the appended claims.
References in this specification to orientations or positional relationships as "upper", "lower", "left", "right", "intermediate", "longitudinal", "transverse", "horizontal", "inner", "outer", "radial", "circumferential", etc., are based on the orientation or positional relationships shown in the drawings, are also for convenience of description only, and do not indicate or imply that the devices or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore are not to be construed as limiting the utility model. Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
At present, in order to realize rapid drawing and forming of a crystal bar, a water cooling screen is usually arranged in a single crystal furnace for cooling the crystal bar, so that the drawing speed is improved. However, when the head of the crystal bar passes through the water cooling screen in the equal diameter pulling process of the crystal bar, the crystal bar is immediately changed into a non-cooling state from the cooling state of the water cooling screen, the ambient temperature of the crystal bar is changed drastically, the equal diameter pulling speed is reduced drastically, the temperature control system in the furnace is cooled, the crystal growth is changed, the pulling speed is fluctuated when the crystal is equal in diameter, and the temperature is fluctuated, so that the failure of the crystal growth is easily caused.
In order to overcome the problems, the embodiment provides a cooling device for a single crystal furnace, which solves the problem that crystals are easy to grow and fail due to larger pulling speed and temperature fluctuation after crystal bars pass through a water cooling screen in a constant diameter manner, greatly improves the pulling speed and the crystallization rate, and improves the productivity of the single crystal furnace.
Specifically, the cooling device for a single crystal furnace provided by at least one embodiment of the present utility model includes:
the water cooling screen comprises a barrel body with openings at the upper end and the lower end and a water inlet and outlet structure arranged at the opening at the upper end of the barrel body, wherein the barrel body comprises an inner side wall, an outer side wall and a cooling flow path formed between the inner side wall and the outer side wall, and the cooling flow path is communicated with the water inlet and outlet structure;
the heat transfer element is arranged at the upper end of the cylinder body and extends upwards from the edge of the opening at the upper end of the cylinder body, and the middle part of the heat transfer element is provided with a through hole for the crystal bar to pass through.
According to the cooling device provided by the embodiment, the heat transfer element is arranged at the upper end of the cylinder body of the water cooling screen, so that the crystal bar passes through the through hole of the heat transfer element after passing through the water cooling screen, in the process, the heat transfer element can absorb the heat of the crystal bar and conduct the heat to the water cooling screen cylinder body in contact with the heat transfer element based on the heat conductivity of the heat transfer element, so that the crystal bar can be cooled, the crystal bar can still be cooled again by the heat transfer element after passing through the water cooling screen, the rapid change of the ambient temperature of the crystal bar after passing through the water cooling screen is avoided, and the equal-diameter pulling speed can be stabilized.
According to the embodiment, the heat transfer element is arranged at the upper end of the water cooling screen, so that stable transition from the cooling state of the water cooling screen to the cooling state of the heat transfer element to the non-cooling state in the equal diameter pulling process of the crystal bar can be realized, the problems of large crystal bar pulling speed and furnace temperature fluctuation caused by rapid change of the environment temperature of the crystal bar are avoided, the equal diameter pulling speed and the furnace temperature are stable, the pulling speed and the crystallization rate of the crystal bar in equal diameter are greatly improved, and the productivity is improved.
The cooling device for a single crystal furnace and the single crystal furnace provided by the embodiment of the utility model are described in detail below with reference to the accompanying drawings.
Fig. 1 is a schematic structural diagram of a cooling apparatus for a single crystal furnace according to at least one embodiment of the present utility model. As shown in fig. 1, the cooling device includes a water cooling screen 1 and a heat transfer member 2.
Specifically, the water-cooled screen 1 includes a cylinder 101 and a water inlet and outlet structure 102. Referring to fig. 3 and 4, cylinder 101 includes an inner side wall 1011, an outer side wall 1012, and a cooling flow path 1013 formed between inner side wall 1011 and outer side wall 1012. Illustratively, referring to fig. 4, the wall of the cylinder 101 is configured as a cavity structure, and the side walls located on the inner side and the outer side of the cavity structure are respectively the inner side wall 1011 and the outer side wall 1012 of the cylinder 101. The cooling flow channels 1013 are provided in the cavity structure, for example, referring to fig. 4, in which spiral separator blocks 1014 are spirally provided, the spiral separator blocks 1014 forming spiral-up cooling flow channels 1013 inside the cylinder 101. Of course, in other embodiments, the cooling flow path 1013 may also be formed from a spiral tube built into the wall of the barrel 101.
Referring to fig. 4, in the present embodiment, the water inlet and outlet structure 102 includes a water inlet pipe 1021 and a water outlet pipe 1022, wherein the lower end of the water inlet pipe 1021 goes deep into the bottom of the cooling flow path 1013, and the lower end of the water outlet pipe 1022 is connected to the top of the cooling flow path 1013. In this way, when the cooling water circulates, the cooling water is introduced into the bottom of the cooling flow path 1013 through the water inlet pipe 1021, then the cooling water rises to the water outlet pipe 1022 along the cooling flow path 1013, and finally the cooling water is discharged from the water outlet pipe 1022, thereby completing the circulation of the cooling water in the water cooling screen 1.
In one example, the inner side wall 1011 and/or the outer side wall 1012 of the cylinder 101 are one or a combination of two of a polygonal cylinder and a polygonal mesa, for example, referring to fig. 1 and 4, in this example, the upper portions of the inner side wall 1011 and the outer side wall 1012 of the cylinder 101 are both polygonal cylinders, and the lower portions of the inner side wall 1011 and the outer side wall 1012 of the cylinder 101 are both polygonal mesas. In this way, the cross section of the spliced cylinder 101 is polygonal, and compared with a cylinder with a circular cross section, the circular cross section should be polygonal inscribed circle in order to ensure that the crystal rod can pass smoothly, so that the heat dissipation area of the spliced cylinder 101 with a polygonal cross section is larger than that of the cylinder 101 with a circular cross section, and the heat dissipation efficiency can be further increased. In addition, in this example, since the inner side wall 1011 and the outer side wall 1012 of the cylinder 101 are formed by splicing with each other in a regular planar structure, the cleaning of the side wall of the cylinder 101 is actually cleaning a plurality of planes, which is more convenient to operate and has higher cleaning efficiency than the cleaning of the arc-shaped side wall of the cylinder 101 with a circular cross section.
More specifically, referring to fig. 1 and 2, the polygon formed by the cross section of the cylinder 101 is a regular polygon, that is, each internal angle of the polygon is equal, and the internal angle is an obtuse angle, so that cleaning of the edges of the cylinder 101 is more convenient. For example, in one example, the interior angle of the polygon is 170 degrees and the number of sides of the polygon is 36.
In an example, the inner side wall 1011 and the outer side wall 1012 of the cylinder 101 are both subjected to blackening treatment and coated with a high temperature resistant coating, wherein blackening treatment refers to immersing the cylinder 101 in a chemical solution with strong oxidizing property, such as aqueous solution of sodium hydroxide and sodium nitrite, to form a layer of black iron oxide film on the surface of the cylinder 101 for a certain time, so that the inner side wall and the outer side wall of the cylinder have wear-resistant and rust-resistant properties, and the high temperature resistant coating is used for increasing the high temperature resistance of the inner side wall 1011 and the outer side wall 1012 of the cylinder 101, for example, the high temperature resistant coating can be formed by coating the inner side wall 1011 and the outer side wall 1012 of the cylinder 101 with the existing high temperature resistant coating.
Referring to fig. 1, in the present embodiment, a heat transfer member 2 is disposed at an upper end of a cylinder 101, and is formed by extending upward from an edge of an upper opening of the cylinder, a through hole through which a crystal ingot can pass is formed in a middle portion of the heat transfer member 2, and the heat transfer member 2 is in contact with the cylinder 101 so that heat conduction can be performed between the heat transfer member and the cylinder 101.
Wherein the heat transfer member 2 extends upward from the rim of the upper end opening of the cylinder 101, it is understood that the upper end of the heat transfer member 2 extends upward beyond the upper end of the cylinder 101. Illustratively, referring to fig. 1, in the present embodiment, the heat transfer member 2 is fixedly disposed directly on the edge of the upper end of the cylinder 101, so that the heat transfer member 2 is entirely located above the cylinder 101, and the heat transfer member 2 forms a portion of the water-cooled screen 1 where the edge of the upper end of the cylinder 101 extends upward. Based on this, after the crystal bar passes through water-cooling screen 1, the crystal bar can get into in the through-hole of heat transfer piece 2, continues to provide the cooling for the crystal bar through heat transfer piece 2, avoids the crystal bar to break away from the cooling of water-cooling screen 1 and gets into the no cooling state immediately after, can realize the steady transition of crystal bar, stabilizes crystal bar pull rate and in-furnace temperature.
Wherein the heat transfer element 2 is in contact with the water cooling screen 1, preferably in surface contact with the water cooling screen 1. For example, referring to fig. 1, in the present embodiment, the lower surface of the heat transfer member 2 abuts on the upper surface of the rim of the upper end opening of the cylinder 101 so that surface contact is formed therebetween to ensure good heat conduction therebetween.
Further, in the present embodiment, the heat transfer element 2 and the cylinder 101 are connected and fixed by a welding process, so that not only the connection stability of the heat transfer element 2 and the cylinder 101, but also good heat conduction therebetween can be ensured.
In one example, the heat transfer member 2 is made of a heat conductive material, such as copper, aluminum, copper-aluminum alloy, or the like, to ensure good heat transfer performance of the heat transfer member 2.
In an example, the heat transfer member 2 may be provided in a cylindrical shape, a conical shape, a truncated cone shape, or a combination thereof. For example, referring to fig. 1, in the present embodiment, the shape of the heat transfer member 2 is preferably cylindrical, and the heat transfer member 2 of this structure is simple in structure and easy to install.
Wherein, the diameter of the through hole in the middle part of the heat transfer element 2 is at least larger than the diameter of the crystal bar to be pulled, so that the crystal bar can smoothly pass through the heat transfer element 2. For example, referring to fig. 1, in the present embodiment, the inner diameter of the heat transfer member 2 is the same as the inner diameter of the upper end of the cylinder 101, and the outer diameter of the heat transfer member 2 is the same as the outer diameter of the upper end of the cylinder 101. Therefore, the heat transfer element 2 can form the extension part of the cylinder 101 of the water cooling screen 1, the middle through hole of the heat transfer element 2 can not interfere with the stretching of the crystal bar, and the outer side of the heat transfer element 2 can not interfere with the installation and positioning of the water cooling screen 1, so that the adaptability is strong.
Referring to fig. 1, in an example, a notch 203 is provided on the heat transfer element to facilitate manual observation or image recording of the growth condition of the ingot by a worker, and specifically, two diametrically opposite notches 203 may be provided, and the height of the notch 203 may be equal to or less than the height of the heat transfer element 2.
Referring to fig. 2, corresponding to the arrangement of the water inlet pipe 1021 and the water outlet pipe 1022 on the cylinder 101, in this embodiment, two sides of the heat transfer element 2 are provided with a avoiding opening 204, and the water inlet pipe 1021 and the water outlet pipe 1022 are respectively located in the avoiding openings 204 on two sides of the heat transfer element 2, so that structural interference between the heat transfer element 2 and the water inlet pipe and the water outlet pipe can be avoided through the arrangement of the avoiding openings 204.
Referring to fig. 1, in the present embodiment, the heat transfer element 2 has a first sidewall 201 for facing the crystal ingot and a second sidewall 202 for facing the inner wall of the single crystal furnace, for example, corresponding to the above-mentioned cylindrical heat transfer element 2, the first sidewall 201 is the inner wall of the heat transfer element 2, and the second sidewall 202 is the outer wall of the heat transfer element 2.
Referring to fig. 1, in an example, a heat transfer structure 3 to increase the surface area of the first sidewall 201 of the heat transfer member 2 is provided on the first sidewall 201, and the heat transfer structure 3 protrudes or is recessed from the first sidewall 201. Thus, the heat transfer structure 3 is arranged on the first side wall 201 in a protruding or recessed manner, so that the surface area of the first side wall 201 can be increased, the heat exchange area between the first side wall 201 of the heat transfer element 2 and the crystal bar can be increased, the heat exchange efficiency between the heat transfer element 2 and the crystal bar can be enhanced, more heat can be taken away in unit time, the temperature of the crystal bar is reduced, and the pulling speed of the crystal bar is improved.
For example, referring to fig. 5, in one example, the heat transfer structure 3 includes a number of first grooves 301 and/or first protrusions 302 formed on the first sidewall 201. In this example, the heat transfer structure 3 comprising several first grooves 301 and/or first protrusions 302 can be understood as having the following three cases: first, the heat transfer structure 3 comprises only a number of first grooves 301; second, the heat transfer structure 3 comprises only a number of first protrusions 302; third, the heat transfer structure 3 comprises a number of first grooves 301 and a number of first protrusions 302.
Referring to fig. 5, in the present example, the first groove 301 is formed by the inward recess of the first sidewall 201 of the heat transfer member 2, for example, the first groove 301 may be a dot-shaped groove body, a bar-shaped groove body, other irregularly-shaped groove body, or a combination thereof formed by the inward recess of the first sidewall 201; the first protrusions 302 are formed to be convex by the first side wall 201 of the heat transfer member 2, and for example, the first protrusions 302 may be dot-shaped protrusions, stripe-shaped protrusions, protrusions of other irregular shapes, or a combination thereof, which are formed to be convex by the first side wall 201. In this way, by providing the first groove 301 and/or the first protrusion 302 on the first sidewall 201, the surface area of the first sidewall 201 can be increased, so as to increase the heat exchange area between the heat transfer element 2 and the crystal ingot, and improve the heat exchange efficiency.
Referring to fig. 5, in one example, the second sidewall 202 has a plurality of second grooves 402 and/or second protrusions 401 formed thereon. For example, in this example, the shapes and arrangement of the second grooves 402 and the second protrusions 401 may be the same as those of the first grooves 301 and the first protrusions 302, and will not be described here. In this example, the arrangement of the second grooves 402 and the second protrusions 401 makes the outer side wall 1012 of the heat transfer element 2 have a concave-convex structure, so that diffuse reflection can be performed when the light in the furnace irradiates on the second side wall 202 of the cylinder 101, heat concentration is avoided, and energy consumption of cooling water is saved.
Referring to fig. 5, in an example, the heat transfer element 2 is in a hollow structure, and the heat transfer element 2 is set to be in a hollow structure, so that the heat conduction capability of the heat transfer element 2 can be reduced, the temperatures of the inside of the water cooling screen 1, the inside of the heat transfer element 2 and the furnace chamber above the heat transfer element 2 are progressively increased, and then the cooling of the crystal rod can be slowly transited, so that the situation that the temperature of the environment where the crystal rod passes through the heat transfer element 2 and enters a non-cooling state is avoided from being changed severely, the stable transition from the cooling state to the non-cooling state of the crystal rod can be realized, the pulling speed and the temperature in the furnace of the crystal rod are stabilized, and the growth of the crystal rod is facilitated.
On the other hand, the embodiment also provides a single crystal furnace, which comprises a furnace body and the cooling device, wherein the cooling device is arranged in the furnace chamber of the furnace body, and the distance between the upper end of the heat transfer element 2 and the upper end of the water cooling screen 1 is more than two thirds of the distance between the upper end of the water cooling screen 1 and the furnace mouth of the furnace body.
Through the design of the heat transfer element 2, most of blank spaces between the furnace mouth of the furnace body and the water cooling screen 1 are filled, the difficult problem that crystals are easy to grow and fail due to large pulling speed and temperature fluctuation after crystal bars pass through the water cooling screen 1 in the equal diameter manner is avoided, the pulling speed and the crystallization rate are greatly improved, and the productivity of the single crystal furnace is improved.
The technical features of the above embodiments may be arbitrarily combined, and all possible combinations of the technical features in the above embodiments are not described for brevity of description, however, as long as there is no contradiction between the combinations of the technical features, they should be considered as the scope of the description.
The above examples illustrate only a few embodiments of the utility model, which are described in detail and are not to be construed as limiting the scope of the utility model. It should be noted that it will be apparent to those skilled in the art that several variations and modifications can be made without departing from the spirit of the utility model, which are all within the scope of the utility model. Accordingly, the scope of protection of the present utility model is to be determined by the appended claims.
Claims (10)
1. A cooling device for single crystal growing furnace, characterized in that, cooling device includes:
the water cooling screen (1) comprises a cylinder body (101) with openings at the upper end and the lower end and a water inlet and outlet structure (102) arranged at the opening at the upper end of the cylinder body (101), wherein the cylinder body (101) comprises an inner side wall (1011), an outer side wall (1012) and a cooling flow path (1013) formed between the inner side wall (1011) and the outer side wall (1012), and the cooling flow path (1013) is communicated with the water inlet and outlet structure (102);
the heat transfer element (2) is arranged at the upper end of the cylinder body (101), and is formed by extending upwards from the edge of the upper end opening of the cylinder body (101), and a through hole for a crystal bar to pass through is formed in the middle of the heat transfer element (2).
2. The cooling apparatus for a single crystal furnace according to claim 1, wherein: the heat transfer element (2) has a first side wall (201) facing the ingot and a second side wall (202) facing the inner wall of the single crystal furnace;
the first side wall (201) is provided with a heat transfer structure (3) which increases its surface area.
3. The cooling apparatus for a single crystal furnace according to claim 2, wherein: the heat transfer structure (3) comprises a number of first grooves (301) and/or first protrusions (302) formed in the first side wall (201).
4. The cooling apparatus for a single crystal furnace according to claim 2, wherein: the second side wall (202) is provided with a plurality of second grooves (402) and/or second protrusions (401).
5. The cooling apparatus for a single crystal furnace according to claim 1, wherein: the heat transfer element (2) is provided with a notch (203).
6. The cooling apparatus for a single crystal furnace according to claim 1, wherein: the heat transfer element (2) is of a hollow structure.
7. The cooling apparatus for a single crystal furnace according to claim 1, wherein: the heat transfer element (2) is made of a heat conductive material.
8. The cooling apparatus for a single crystal furnace according to claim 1, wherein: the inner diameter of the heat transfer element (2) is the same as the inner diameter of the upper end of the cylinder (101), and the outer diameter of the heat transfer element (2) is the same as the outer diameter of the upper end of the cylinder (101).
9. The cooling apparatus for a single crystal furnace according to claim 1, wherein: the inner side wall (1011) and/or the outer side wall (1012) of the cylinder body (101) are/is one or two of a polygonal cylinder surface and a polygonal table surface.
10. The utility model provides a single crystal growing furnace which characterized in that: comprising a furnace body and the cooling device as claimed in any one of claims 1-9, said cooling device being arranged in the furnace chamber of said furnace body, the distance between the upper end of the heat transfer element (2) and the upper end of the cylinder (101) being more than two thirds of the distance between the upper end of said cylinder (101) and the furnace mouth of said furnace body.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321255418.8U CN219621299U (en) | 2023-05-23 | 2023-05-23 | Cooling device for single crystal furnace and single crystal furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321255418.8U CN219621299U (en) | 2023-05-23 | 2023-05-23 | Cooling device for single crystal furnace and single crystal furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN219621299U true CN219621299U (en) | 2023-09-01 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202321255418.8U Active CN219621299U (en) | 2023-05-23 | 2023-05-23 | Cooling device for single crystal furnace and single crystal furnace |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN219621299U (en) |
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2023
- 2023-05-23 CN CN202321255418.8U patent/CN219621299U/en active Active
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