CN219610379U - Double-half-piece electroplating basket clamp - Google Patents

Abstract

The utility model discloses a double-half electroplated flower basket clamp which comprises a left fixing plate and a right fixing plate, wherein a locking piece is fixedly connected to the left side surface of the left fixing plate, a positioning plate is fixedly connected to the surface of the locking piece, a spring is fixedly connected to the left end of the locking piece in a penetrating manner through the left fixing plate, a movable shaft is fixedly connected to the right end of the spring, and the right end of the movable shaft penetrates through the right fixing plate. Through the structure, a plurality of silicon wafers can be effectively and simultaneously loaded, so that the silicon wafers are simultaneously processed, the silicon wafer processing yield is improved, the clamping spring plates are separated by pushing the movable shaft, the silicon wafers can be directly placed in and positioned and clamped through the belt or the sucker, the loading and unloading automation degree of the silicon wafers can be effectively improved, the clamping points between the silicon wafers can be effectively reduced by arranging each four groups of silicon wafers to clamp, the time for checking during loading and unloading is reduced, and the loading and unloading efficiency is improved.

Description

Double-half-piece electroplating basket clamp

Technical Field

The utility model relates to the technical field of basket clamps, in particular to a double-half-piece electroplating basket clamp.

Background

The silicon chip gets into the inserted sheet process after the photoresist stripping, just need to use basket of flowers anchor clamps to fix a position the clamp to the silicon chip at this moment, present basket of flowers anchor clamps can only load centre gripping one silicon chip at a time for the output of overall processing is lower, and the centre gripping mode to the silicon chip at present adopts manual regulation simultaneously, makes the degree of automation of silicon chip when loading and unloading lower, and the pinch point that contacts with the silicon chip when the centre gripping simultaneously is more, need take longer time to proofread, has further reduced the efficiency of silicon chip loading and unloading.

Disclosure of Invention

The utility model provides a double-half-piece electroplating basket clamp, which can effectively and simultaneously load a plurality of silicon wafers, so that the silicon wafers are simultaneously processed, the improvement of the processing yield of the silicon wafers is facilitated, the clamping elastic pieces are separated by pushing a movable shaft, the silicon wafers can be directly put into the clamp through a belt or a sucker for positioning and clamping, the loading and unloading automation degree of the silicon wafers can be effectively improved, the clamping points between the clamp and the silicon wafers can be effectively reduced, the time for calibrating during loading and unloading is facilitated to be reduced, and the loading and unloading efficiency is further improved.

In order to achieve the above purpose, the utility model provides a two half electroplating flower basket anchor clamps, including left fixed plate and right fixed plate, the left side fixed surface of left side fixed plate is fixedly connected with retaining member, the fixed surface of retaining member is connected with the locating plate, the left end of retaining member runs through left fixed plate fixedly connected with spring, the right-hand member fixedly connected with loose axle of spring, the right-hand member of loose axle runs through right fixed plate, fixedly connected with fixed axle between left side fixed plate and the right fixed plate, the equal fixedly connected with centre gripping shell fragment in surface of loose axle and the surface of fixed axle, the centre gripping has the silicon chip between the centre gripping shell fragment. Through setting up left fixed plate and right fixed plate for the effect of conveniently fixing a position loose axle and fixed axle, be for the convenience to retaining member and spring through setting up the locating plate and fix a position the effect of installation and be for the convenience to utilize spring deformation drive loose axle to carry out the effect of controlling the removal, be for the convenience to fix a position the effect of installation to the centre gripping shell fragment through setting up loose axle and fixed axle, be for the convenience to fix a position the effect of pressing from both sides tightly to the silicon chip through setting up the centre gripping shell fragment.

According to the double-half electroplated flower basket clamp, the left side surface of the left fixing plate is fixedly connected with the cathode lead-out plate close to the top edge, and the shape of the cathode lead-out plate is in a step shape. The cathode lead-out plate is arranged to facilitate the connection of the power supply.

According to the double-half-piece electroplating basket clamp, one movable shaft and one fixed shaft are in one group, eight groups are provided, each group is symmetrically arranged in the front-back direction, and each four groups clamp one silicon wafer. The least number of contacts can be effective to provide the most stable clamping of the wafer.

According to the double-half electroplated flower basket clamp, the clamping elastic sheet on the surface of the fixed shaft is contacted with the clamping elastic sheet on the surface of the movable shaft.

The utility model has the beneficial effects that:

1. the method can effectively and simultaneously load a plurality of silicon wafers, so that the plurality of silicon wafers are simultaneously processed, and the method is beneficial to improving the processing yield of the silicon wafers.

2. The clamping elastic sheets are separated by pushing the movable shaft, and then the silicon wafer can be placed in the clamping device for positioning and clamping through the belt or the sucker, so that the loading and unloading automation degree of the silicon wafer can be effectively improved.

3. Through setting up every four groups and pressing from both sides tight to a silicon chip, can reduce effectively with the pinch point between the silicon chip, be favorable to reducing the time of proofreading when loading and unloading, and then improve the efficiency of loading and unloading.

Additional aspects and advantages of the utility model will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the utility model.

Drawings

The utility model is further described below with reference to the drawings and examples;

FIG. 1 is a front view of a dual half plating basket clamp of the present utility model;

FIG. 2 is a top view of a dual half plating basket clamp according to the present utility model;

FIG. 3 is a right side view of a dual half plating basket clamp according to the present utility model;

fig. 4 is an enlarged view of fig. 2 a in accordance with the present utility model.

Legend description:

1. a left fixing plate; 2. a right fixing plate; 3. a spring; 4. a movable shaft; 5. a fixed shaft; 6. a cathode lead plate; 7. a silicon wafer; 8. clamping the spring plate; 9. a positioning plate; 10. a locking piece.

Detailed Description

Reference will now be made in detail to the present embodiments of the present utility model, examples of which are illustrated in the accompanying drawings, wherein the accompanying drawings are used to supplement the description of the written description so that one can intuitively and intuitively understand each technical feature and overall technical scheme of the present utility model, but not to limit the scope of the present utility model.

Referring to fig. 1 to 4, the double-half plating basket clamp according to the embodiment of the utility model comprises a left fixing plate 1 and a right fixing plate 2, wherein a locking piece 10 is fixedly connected to the left side surface of the left fixing plate 1, a positioning plate 9 is fixedly connected to the surface of the locking piece 10, a spring 3 is fixedly connected to the left end of the locking piece 10, a movable shaft 4 is fixedly connected to the right end of the spring 3, the right end of the movable shaft 4 penetrates through the right fixing plate 2, a fixed shaft 5 is fixedly connected between the left fixing plate 1 and the right fixing plate 2, clamping elastic pieces 8 are fixedly connected to the surfaces of the movable shaft 4 and the fixed shaft 5, a silicon wafer 7 is clamped between the clamping elastic pieces 8, and the clamping elastic pieces 8 on the surface of the fixed shaft 5 are in contact with the clamping elastic pieces 8 on the surface of the movable shaft 4.

The left side surface of the left fixed plate 1 and the position close to the top edge are fixedly connected with a cathode lead-out plate 6, the shape of the cathode lead-out plate 6 is in a ladder shape, one movable shaft 4 and one fixed shaft 5 are in one group, eight groups are all arranged, each group is symmetrically arranged in the front-back direction, and each four groups clamp one silicon wafer 7.

Working principle: when the silicon wafer positioning and clamping device is used, the spring 3 is compressed by pressing the movable shaft 4, so that the clamping elastic piece 8 on the movable shaft 4 and the clamping elastic piece 8 on the fixed shaft 5 are separated, then a silicon wafer can be directly placed between the clamping elastic piece 8 on the movable shaft 4 and the clamping elastic piece 8 on the fixed shaft 5 through a belt or a sucker, the movable shaft 4 is released, the movable shaft 4 is reset under the action of the spring 3, and the clamping elastic piece 8 on the movable shaft 4 is driven to move by utilizing the elastic force generated by the spring 3 to position and clamp the silicon wafer.

The embodiments of the present utility model have been described in detail with reference to the accompanying drawings, but the present utility model is not limited to the above embodiments, and various changes can be made within the knowledge of one of ordinary skill in the art without departing from the spirit of the present utility model.

Claims (4)

1. The utility model provides a two half electroplating flower basket anchor clamps, includes left fixed plate (1) and right fixed plate (2), its characterized in that, the left side fixed surface of left side fixed plate (1) is connected with retaining member (10), the fixed surface of retaining member (10) is connected with locating plate (9), the left end of retaining member (10) runs through left fixed plate (1) fixedly connected with spring (3), the right-hand member fixedly connected with loose axle (4) of spring (3), the right-hand member of loose axle (4) runs through right fixed plate (2), fixedly connected with fixed axle (5) between left side fixed plate (1) and right fixed plate (2), the equal fixedly connected with centre gripping shell fragment (8) of surface of loose axle (4) and fixed axle (5), the centre gripping has silicon chip (7) between centre gripping shell fragment (8).

2. The double half-plate electroplated flower basket fixture according to claim 1, wherein the left side surface of the left fixing plate (1) is fixedly connected with a cathode lead-out plate (6) near the top edge, and the shape of the cathode lead-out plate (6) is in a step shape.

3. The double-half plating basket clamp according to claim 1, wherein one movable shaft (4) and one fixed shaft (5) are arranged in one group, eight groups are arranged symmetrically in front and back, and each four groups clamp one silicon wafer (7).

4. The double-half electroplated flower basket clamp according to claim 1, wherein the clamping spring piece (8) on the surface of the fixed shaft (5) is contacted with the clamping spring piece (8) on the surface of the movable shaft (4).