CN219239814U - Electroplating clamp and electroplating device - Google Patents
Electroplating clamp and electroplating device Download PDFInfo
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- CN219239814U CN219239814U CN202320322749.2U CN202320322749U CN219239814U CN 219239814 U CN219239814 U CN 219239814U CN 202320322749 U CN202320322749 U CN 202320322749U CN 219239814 U CN219239814 U CN 219239814U
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
- Y02E60/10—Energy storage using batteries
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Abstract
The utility model relates to the technical field of semiconductor electroplating, in particular to an electroplating clamp and an electroplating device. The electroplating clamp mainly comprises a first clamping plate, a second clamping plate, a first clamping piece, a second clamping piece, a first clamping jaw and a second clamping jaw. Wherein, first splint and second splint swing joint. The first clamping piece is connected with the first clamping plate, and the second clamping piece is connected with the second clamping plate. The first clamping piece is provided with a first clamping jaw, the second clamping piece is provided with a second clamping jaw, and the first clamping jaw and the second clamping jaw are jointly used for clamping products. The electroplating clamp is simple in structure, can improve the electroplating process quality, improves the production yield and the production efficiency, and saves the cost.
Description
Technical Field
The utility model relates to the technical field of semiconductor electroplating, in particular to an electroplating clamp and an electroplating device.
Background
Currently, electroplating devices are generally applied in the electroplating industry of semiconductor products (such as silicon wafers), and during the electroplating process, an electroplating clamp is required to clamp the semiconductor products, so that the semiconductor products can be taken out after the electroplating process. Because the silicon wafer is a fragile product, and grid lines on the silicon wafer are thin, high and dense, in order to ensure the photoelectric conversion efficiency of the silicon wafer, the contact area of the electroplating clamp and the silicon wafer is usually designed to be very small. The electroplating clamp in the prior art has larger design width, larger contact area with the silicon wafer and is easy to shield the grid line on the silicon wafer, thereby reducing the quality of the electroplating process.
Therefore, there is a need to design an electroplating fixture and an electroplating device to solve the above technical problems.
Disclosure of Invention
The first object of the present utility model is to provide an electroplating fixture, which has a simple structure, and can improve the quality of an electroplating process and the production yield and the production efficiency.
To achieve the purpose, the utility model adopts the following technical scheme:
the utility model provides an electroplating clamp, comprising:
the first clamping plate is movably connected with the second clamping plate;
the first clamping piece is connected with the first clamping plate, and the second clamping piece is connected with the second clamping plate;
the first clamping jaw is arranged on the first clamping piece;
the second clamping jaw is arranged on the second clamping piece, and the first clamping jaw and the second clamping jaw are jointly used for clamping products.
As an alternative technical scheme of the electroplating clamp, the first clamping pieces and the second clamping pieces are arranged in a plurality, and the first clamping pieces and the second clamping pieces are arranged in one-to-one correspondence.
As an alternative technical scheme of the electroplating clamp, a plurality of first clamping jaws are arranged on each first clamping jaw, a plurality of second clamping jaws are arranged on each second clamping jaw, and the first clamping jaws and the second clamping jaws are arranged in one-to-one correspondence.
As an alternative technical scheme of the electroplating clamp, the electroplating clamp further comprises a connecting shaft, a first connecting part is arranged on the first clamping plate, a second connecting part is arranged on the second clamping plate, and the connecting shaft is arranged between the first connecting part and the second connecting part in a penetrating way; the first clamping plate and/or the second clamping plate can rotate around the connecting shaft.
As an alternative technical scheme of the electroplating clamp, the electroplating clamp further comprises an elastic piece, one end of the elastic piece is connected with the first clamping plate, and the other end of the elastic piece is connected with the second clamping plate.
As an alternative technical scheme of the electroplating clamp, the electroplating clamp further comprises a driving device, the driving device is in driving connection with the first clamping plate and the second clamping plate, and the driving device can drive the first clamping plate and/or the second clamping plate to rotate around the connecting shaft.
As an alternative solution of the plating jig, the driving device includes a cylinder, an electric cylinder, or a motor.
As an alternative solution of the plating jig, the plating jig further includes a first conductive sheet and a second conductive sheet, the first conductive sheet being detachably disposed between the first clamping plate and the first clamping plate; the second conductive sheet is detachably arranged between the second clamping plate and the second clamping piece.
A second object of the present utility model is to provide an electroplating apparatus, which can improve the quality of the electroplating process of the product, improve the processing efficiency and the production yield of the product, and save the cost.
To achieve the purpose, the utility model adopts the following technical scheme:
the utility model provides an electroplating device, which comprises the electroplating clamp.
As an alternative technical scheme of the electroplating device, the electroplating device comprises a fixed shaft, one of the first clamping plate and the second clamping plate is provided with a connecting hole, and the connecting hole is sleeved on the fixed shaft.
The beneficial effects of the utility model at least comprise:
the utility model provides an electroplating clamp which mainly comprises a first clamping plate, a second clamping plate, a first clamping piece, a second clamping piece, a first clamping jaw and a second clamping jaw. Wherein, first splint and second splint swing joint. The first clamping piece is connected with the first clamping plate, and the second clamping piece is connected with the second clamping plate. The first clamping piece is provided with a first clamping jaw, the second clamping piece is provided with a second clamping jaw, and the first clamping jaw and the second clamping jaw are jointly used for clamping products. Through the arrangement of the first clamping jaw and the second clamping jaw, the contact between the electroplating clamp and the product is optimized from the 'surface contact' in the traditional technology to the 'point contact' in the utility model, so that the contact area between the electroplating clamp and the product is reduced, the problem that the electroplating clamp shields the silicon wafer grid line is avoided, and the electroplating process quality of the product is improved.
The utility model also provides an electroplating device which can improve the electroplating process quality of the product, improve the processing efficiency and the production yield of the product and save the cost.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present utility model, the following description will briefly explain the drawings needed in the description of the embodiments of the present utility model, and it is obvious that the drawings in the following description are only some embodiments of the present utility model, and other drawings may be obtained according to the contents of the embodiments of the present utility model and these drawings without inventive effort for those skilled in the art.
FIG. 1 is a schematic view of an electroplating fixture according to an embodiment of the present utility model;
fig. 2 is an exploded view of an electroplating jig according to an embodiment of the present utility model.
Reference numerals
10. A product;
100. a first clamping plate; 110. a first connection portion; 120. a connection hole; 200. a second clamping plate; 210. a second connecting portion; 220. a connecting shaft; 300. a first clip; 310. a first jaw; 400. a second clip; 410. a second jaw; 500. an elastic member; 600. a first conductive sheet; 700. and a second conductive sheet.
Detailed Description
In order to make the technical problems solved, the technical scheme adopted and the technical effects achieved by the utility model more clear, the technical scheme of the utility model is further described below by a specific embodiment in combination with the attached drawings.
In the description of the present utility model, unless explicitly stated and limited otherwise, the terms "connected," "connected," and "fixed" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally formed; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communicated with the inside of two elements or the interaction relationship of the two elements. The specific meaning of the above terms in the present utility model will be understood in specific cases by those of ordinary skill in the art.
In the present utility model, unless expressly stated or limited otherwise, a first feature "above" or "below" a second feature may include both the first and second features being in direct contact, as well as the first and second features not being in direct contact but being in contact with each other through additional features therebetween. Moreover, a first feature being "above," "over" and "on" a second feature includes the first feature being directly above and obliquely above the second feature, or simply indicating that the first feature is higher in level than the second feature. The first feature being "under", "below" and "beneath" the second feature includes the first feature being directly under and obliquely below the second feature, or simply means that the first feature is less level than the second feature.
In the description of the present embodiment, the terms "upper", "lower", "left", "right", and the like are orientation or positional relationships based on those shown in the drawings, merely for convenience of description and simplicity of operation, and do not indicate or imply that the apparatus or elements referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as limiting the utility model. Furthermore, the terms "first," "second," and the like, are used merely for distinguishing between descriptions and not for distinguishing between them.
As shown in fig. 1-2, the present embodiment provides an electroplating fixture, which can reduce the contact area with the product 10, improve the quality of the electroplating process, and improve the production yield and the production efficiency on the premise of ensuring the stability of clamping the product 10.
Specifically, the plating jig in the present embodiment includes a first clamping plate 100, a second clamping plate 200, a first clamping piece 300, a second clamping piece 400, a first clamping jaw 310, and a second clamping jaw 410. Wherein the first clamping plate 100 and the second clamping plate 200 are movably connected. The first clamping piece 300 is connected with the first clamping plate 100, and the second clamping piece 400 is connected with the second clamping plate 200. First jaw 300 is provided with first jaw 310 and second jaw 400 is provided with second jaw 410, first jaw 310 and second jaw 410 being used together to grip product 10.
Alternatively, the product 10 in this embodiment may be a silicon wafer, a PCB circuit board, a ceramic semiconductor, or the like. This embodiment will be described using the product 10 as a silicon wafer.
Based on the above design, the first clip 300 and the second clip 400 in the present embodiment are each provided in plurality, and the first clip 300 and the second clip 400 are provided in one-to-one correspondence. Each first clamping piece 300 is provided with a plurality of first clamping jaws 310, each second clamping piece 400 is provided with a plurality of second clamping jaws 410, and the first clamping jaws 310 and the second clamping jaws 410 are arranged in a one-to-one correspondence. Illustratively, the first clamping pieces 300 and the second clamping pieces 400 in the present embodiment are five, six first clamping jaws 310 are disposed on each first clamping piece 300, six second clamping jaws 410 are disposed on each second clamping piece 400, and the clamping of the product 10 is achieved through the first clamping jaws 310 and the second clamping jaws 410.
Of course, in some alternative embodiments, the first clip 300 and the second clip 400 may be provided in other numbers, such as 6, 7, 8, etc.; the first clamping jaw 310 on each first clamping piece 300 and the second clamping jaw 410 on each second clamping piece 400 may be arranged in other numbers, such as 7, 8, 9, 10, etc., which are not described in detail in this embodiment.
Compared with the prior art, in the present embodiment, through the arrangement of the first clamping jaw 310 and the second clamping jaw 410, the clamping points of the electroplating clamp are fewer, for example, can be set to 6 clamping points, so that the contact between the electroplating clamp and the product 10 is optimized from the 'surface contact' in the conventional technology to the 'point contact' in the present embodiment, the contact area between the electroplating clamp and the product 10 is reduced, the problem that the electroplating clamp shields the silicon wafer grid line is avoided, and the electroplating process quality of the product 10 is improved.
Alternatively, the first clamping piece 300 and the first clamping plate 100 in the present embodiment are detachably connected by using bolts, and the second clamping piece 400 and the second clamping plate 200 are detachably connected by using bolts. The first clamping jaw 310 is integrally formed with the first clamping jaw 300, and the second clamping jaw 410 is integrally formed with the second clamping jaw 400.
As shown in fig. 1-2, the electroplating fixture further includes a connecting shaft 220, the first clamping plate 100 is provided with a first connecting portion 110, the second clamping plate 200 is provided with a second connecting portion 210, and the connecting shaft 220 is arranged between the first connecting portion 110 and the second connecting portion 210 in a penetrating manner; the first clamping plate 100 and/or the second clamping plate 200 can rotate about the connecting shaft 220 to facilitate the opening and closing action of the first clamping plate 100 and the second clamping plate 200, and facilitate the clamping or unclamping of the product 10 by the first clamping jaw 310 and the second clamping jaw 410.
Further, the plating jig in this embodiment further includes an elastic member 500, one end of the elastic member 500 is connected to the first clamping plate 100, and the other end of the elastic member 500 is connected to the second clamping plate 200. The provision of the elastic member 500 is advantageous in improving convenience of the opening and closing actions of the first clamping plate 100 and the second clamping plate 200. Specifically, when the first clamping plate 100 and the second clamping plate 200 are driven to approach by external force, the elastic member 500 is compressed, and at this time, the first clamping jaw 310 and the second clamping jaw 410 release the product 10, so that the product 10 is convenient to take and put; when the external force releases the pressing drive of the first clamping plate 100 and the second clamping plate 200, the elastic member 500 is rebounded and in an extended state, and the first clamping jaw 310 and the second clamping jaw 410 can clamp the product 10.
Alternatively, the elastic member 500 in the present embodiment may be provided as a spring. And one end of the elastic member 500 is connected with the first clamping plate 100 by welding, and the other end of the elastic member 500 is also connected with the second clamping plate 200 by welding, so that the stability and reliability of the electroplating clamp are improved. The elastic member 500 is provided to enable the first clamping plate 100 and the second clamping plate 200 to have a certain rebound resilience, so that the product 10 can be prevented from being broken while the product 10 can be clamped by using 6 clamping points, and the cost is saved.
The plating jig in this embodiment further includes a driving device (not shown) in driving connection with both the first clamping plate 100 and the second clamping plate 200, and the driving device can drive the first clamping plate 100 and/or the second clamping plate 200 to rotate about the connecting shaft 220. For example, the drive means may be provided as a cylinder, an electric cylinder or a motor or the like. The first clamping plate 100 and the second clamping plate 200 are automatically driven by the driving device, so that the first clamping plate 100 and the second clamping plate 200 are automatically opened and closed, then feeding and discharging of the product 10 are realized under the assistance of the external mechanical arm, and the actual operation efficiency is improved. It should be noted that, in the present embodiment, the driving manner of the driving device for the first clamping plate 100 and the second clamping plate 200 is the prior art, and the actual working principle of the present embodiment is not specifically described.
As shown in fig. 1-2, in the present embodiment, the plating jig further includes a first conductive sheet 600 and a second conductive sheet 700, the first conductive sheet 600 being detachably disposed between the first clamping plate 100 and the first clamping plate 300; the second conductive sheet 700 is detachably disposed between the second clamping plate 200 and the second clamping plate 400. Alternatively, the first conductive sheet 600 is detachably connected to the first clamping plate 100 and the first clamping plate 300 by bolts, and the second conductive sheet 700 is detachably connected to the second clamping plate 200 and the second clamping plate 400 by bolts. The arrangement of the first conductive sheet 600 and the second conductive sheet 700 can improve the reaction effect of oxygen reduction, so that metal ions in the electrolyte can be quickly electroplated on the surface of the product 10, and the electroplating process efficiency is improved.
The embodiment also provides an electroplating device, which comprises the electroplating clamp. Further, the electroplating device comprises a fixed shaft (not shown in the figure), one of the first clamping plate 100 and the second clamping plate 200 is provided with a connecting hole 120, and the connecting hole 120 is sleeved on the fixed shaft, so that the electroplating clamp can be hung on the fixed shaft, the fixed shaft is convenient to drive the assembly line operation of the electroplating clamp in actual operation, and the operation efficiency is improved.
The electroplating device can improve the electroplating process quality of the product 10, and improve the processing efficiency and the production yield of the product 10. During actual operation, the electroplating device can be used for realizing the productivity of 8000 sheets per hour, which is beneficial to realizing the mass production of the product 10 and saving the cost.
It is to be understood that the foregoing is only illustrative of the presently preferred embodiments of the utility model and the technical principles that have been developed. It will be understood by those skilled in the art that the present utility model is not limited to the particular embodiments described herein, but is capable of various obvious changes, rearrangements and substitutions as will now become apparent to those skilled in the art without departing from the scope of the utility model. Therefore, while the utility model has been described in connection with the above embodiments, the utility model is not limited to the embodiments, but may be embodied in many other equivalent forms without departing from the spirit or scope of the utility model, which is set forth in the following claims.
Note that in the description of this specification, a description of reference to the terms "some embodiments," "other embodiments," and the like means that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the utility model. In this specification, schematic representations of the above terms do not necessarily refer to the same embodiments or examples. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.
Claims (10)
1. Electroplating clamp, its characterized in that includes:
the clamping device comprises a first clamping plate (100) and a second clamping plate (200), wherein the first clamping plate (100) is movably connected with the second clamping plate (200);
a first clip (300) and a second clip (400), the first clip (300) being connected to the first clamping plate (100), the second clip (400) being connected to the second clamping plate (200);
-a first clamping jaw (310), said first clamping jaw (300) being provided with said first clamping jaw (310);
-a second jaw (410), said second jaw (400) being provided with said second jaw (410), said first jaw (310) and said second jaw (410) being jointly adapted to grip a product (10).
2. The plating jig according to claim 1, wherein the first clip (300) and the second clip (400) are each provided in plural, and the first clip (300) and the second clip (400) are provided in one-to-one correspondence.
3. The electroplating clamp according to claim 2, wherein a plurality of first clamping jaws (310) are arranged on each first clamping jaw (300), a plurality of second clamping jaws (410) are arranged on each second clamping jaw (400), and the first clamping jaws (310) and the second clamping jaws (410) are arranged in a one-to-one correspondence.
4. The plating jig according to claim 1, further comprising a connection shaft (220), wherein the first clamping plate (100) is provided with a first connection portion (110), the second clamping plate (200) is provided with a second connection portion (210), and the connection shaft (220) is provided between the first connection portion (110) and the second connection portion (210) in a penetrating manner; the first clamping plate (100) and/or the second clamping plate (200) can be rotated about the connecting shaft (220).
5. The plating jig according to claim 4, further comprising an elastic member (500), one end of the elastic member (500) being connected to the first clamping plate (100), and the other end of the elastic member (500) being connected to the second clamping plate (200).
6. The plating jig according to claim 4, further comprising a driving device in driving connection with both the first clamping plate (100) and the second clamping plate (200), the driving device being capable of driving the first clamping plate (100) and/or the second clamping plate (200) to rotate about the connecting shaft (220).
7. The plating jig according to claim 6, wherein the driving means comprises a cylinder, an electric cylinder, or a motor.
8. The plating jig according to any one of claims 1-7, further comprising a first conductive sheet (600) and a second conductive sheet (700), the first conductive sheet (600) being detachably disposed between the first clamping plate (100) and the first clamping plate (300); the second conductive sheet (700) is detachably disposed between the second clamping plate (200) and the second clamping piece (400).
9. Electroplating apparatus, characterized in that it comprises an electroplating clamp according to any one of claims 1 to 8.
10. The electroplating device according to claim 9, wherein the electroplating device comprises a fixed shaft, one of the first clamping plate (100) and the second clamping plate (200) is provided with a connecting hole (120), and the connecting hole (120) is sleeved on the fixed shaft.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202320322749.2U CN219239814U (en) | 2023-02-27 | 2023-02-27 | Electroplating clamp and electroplating device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202320322749.2U CN219239814U (en) | 2023-02-27 | 2023-02-27 | Electroplating clamp and electroplating device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN219239814U true CN219239814U (en) | 2023-06-23 |
Family
ID=86838492
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202320322749.2U Active CN219239814U (en) | 2023-02-27 | 2023-02-27 | Electroplating clamp and electroplating device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN219239814U (en) |
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2023
- 2023-02-27 CN CN202320322749.2U patent/CN219239814U/en active Active
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