CN219609478U

CN219609478U - Radio frequency power supply and radio frequency device with sweep frequency matching function

Info

Publication number: CN219609478U
Application number: CN202320781046.6U
Authority: CN
Inventors: 杨洋; 刘玲
Original assignee: Yanxing Technology Shanghai Co ltd
Current assignee: Yanxing Technology Shanghai Co ltd
Priority date: 2023-04-11
Filing date: 2023-04-11
Publication date: 2023-08-29
Anticipated expiration: 2033-04-11

Abstract

The utility model provides a radio frequency power supply and a radio frequency device with a sweep frequency matching function, which comprise a DDS sweep frequency source module, a radio frequency amplifying module, a data acquisition and processing unit and a directional coupling unit; the DDS sweep frequency source module provides radio frequency input signals with different frequencies for the radio frequency amplifying module; the directional coupling unit monitors different output powers of the radio frequency amplifying module and uploads the output powers to the data acquisition and processing unit; the data acquisition and processing unit confirms the optimal frequency corresponding to the optimal output power according to the sweep frequency algorithm, adjusts the DDS sweep frequency source module to output the radio frequency input signal of the optimal frequency, achieves the minimum reverse power of the radio frequency amplification module, and rapidly achieves impedance matching.

Description

Radio frequency power supply and radio frequency device with sweep frequency matching function

Technical Field

The utility model relates to the field, in particular to a radio frequency power supply with a sweep frequency matching function and a radio frequency device.

Background

The radio frequency power supply is one of core parts in the processes of etching, photoetching, vacuum coating and the like in the field of semiconductor processing, and is mainly used for generating high-frequency high-voltage electric field excitation plasma so as to be further used for the process steps of plasma chemical vapor deposition, wafer etching, cleaning, high-energy laser generation and the like. The radio frequency power supply differs from the general dc and ac power supplies in that it is capable of generating a higher frequency current signal to provide ionization for a wider range of materials. However, the radio frequency has the unique characteristic that under the condition that the load impedance of the output end is not matched, the output radio frequency current can reflect back to the transmitting end, so that energy cannot be input into an ionization field, and meanwhile, the reflected current can enter a radio frequency power generation system, so that heat is increased sharply, and equipment is burned.

Therefore, the primary problem to be solved by the rf power supply is impedance matching at the load end. In the prior art, a closed-loop control algorithm (for example, a PID algorithm) is required to drive a motor to rotate a vacuum capacitor in an impedance matcher, so that the impedance in the impedance matcher is changed, and the detected reflected power of a load end is minimized, namely, the impedance automatic matching task is completed. However, the range over which an automatic impedance matcher can match is limited, and perfect impedance matching is generally not achieved. Furthermore, the overall process of impedance auto-matching takes 3-4 seconds, which takes a long time.

Disclosure of Invention

The utility model aims to provide a radio frequency power supply and a radio frequency device with a sweep frequency matching function, so that the radio frequency power supply can reach an optimal matching state more quickly.

The utility model provides a radio frequency power supply with a sweep frequency matching function, which comprises a DDS sweep frequency source module, a radio frequency amplifying module, a data acquisition and processing unit and a directional coupling unit;

the DDS sweep frequency source module provides radio frequency input signals with different frequencies for the radio frequency amplifying module;

the directional coupling unit monitors different output powers of the radio frequency amplifying module and uploads the output powers to the data acquisition and processing unit;

and the data acquisition and processing unit confirms the optimal frequency corresponding to the optimal output power according to a frequency sweep algorithm, and adjusts the DDS frequency sweep source module to output a radio frequency input signal of the optimal frequency.

Further, the data acquisition and processing unit is further connected with the radio frequency amplification module, and the data acquisition and processing unit controls the on-off of the radio frequency amplification module according to the reflected power.

Further, the data acquisition and processing unit comprises an FPGA processor.

Further, the directional coupling unit comprises a double directional coupler.

Further, the radio frequency amplifying module further comprises a water cooling unit, wherein the water cooling unit is arranged in the radio frequency amplifying module.

The utility model also provides a radio frequency device with the sweep frequency matching function, which comprises a shell and a power supply interface;

the radio frequency power supply with the sweep frequency matching function is arranged in the shell, and any surface of the shell is provided with the power supply interface.

Further, any surface of the shell is also provided with a communication interface.

Furthermore, any surface of the shell is also provided with a man-machine interaction interface.

Compared with the prior art, the utility model has at least the following beneficial effects:

according to the utility model, the DDS sweep frequency source module is used for providing radio frequency input signals with different frequencies for the radio frequency amplification module, the directional coupling unit is used for monitoring the output power of radio frequency amplification and uploading the value of the output power to the data acquisition and processing unit, and the data acquisition and processing unit is used for adjusting the DDS sweep frequency source module to provide radio frequency input signals with different frequencies for the radio frequency amplification module according to the output power, so that the reverse power of the radio frequency amplification module is adjusted to be minimum, and the impedance matching is realized rapidly.

Furthermore, the calculation of the radio frequency output power is realized through the FPGA processor, and the reverse power value is confirmed according to the sweep frequency algorithm, so that the size of the radio frequency input signal output by the DDS sweep frequency source is adjusted, and the accuracy of impedance matching is improved.

Drawings

Fig. 1 is a schematic structural diagram of a radio frequency power supply with a frequency sweep matching function according to an embodiment of the present utility model;

FIG. 2 is a rear view of a device with a sweep matching function according to a second embodiment of the present utility model;

FIG. 3 is a front view of a device with a sweep frequency matching function according to a second embodiment of the present utility model;

fig. 4 is a schematic structural diagram of a device with a sweep frequency matching function according to a second embodiment of the present utility model.

Detailed Description

The following description of a radio frequency power supply and radio frequency device with sweep frequency matching function of the present utility model will be presented in conjunction with a schematic diagram illustrating a preferred embodiment of the present utility model, it being understood that one skilled in the art may modify the utility model described herein while still achieving the advantageous effects of the utility model. Accordingly, the following description is to be construed as broadly known to those skilled in the art and not as limiting the utility model.

The utility model is more particularly described by way of example in the following paragraphs with reference to the drawings. The advantages and features of the present utility model will become more apparent from the following description. It should be noted that the drawings are in a very simplified form and are all to a non-precise scale, merely for convenience and clarity in aiding in the description of embodiments of the utility model.

Example 1

The embodiment provides a radio frequency power supply with a sweep frequency matching function, which comprises a DDS sweep frequency source module, a radio frequency amplifying module, a data acquisition and processing unit and a directional coupling unit;

the directional coupling unit monitors the output power of the radio frequency amplifying module and uploads the output power to the data acquisition and processing unit;

Under the electromagnetic effect, the capacitance and the inductance in the circuit show different impedance characteristics according to different frequencies, so that the impedance change of a load can be effectively caused by changing the output frequency of the radio frequency power supply.

The specific impedance matching process is as follows:

the data acquisition and processing unit firstly provides the DDS sweep frequency source module with frequency information of a main frequency band, and the radio frequency amplifier continuously outputs a fixed-frequency high-power radio frequency signal.

In a specific example, the frequencies of the primary frequency band may be 400KHz, 2MHz, 4MHz, 13.56MHz27.12MHz, and 60MHz, but may also be other primary frequency band frequencies.

Further, when the scan matching function is started, the data acquisition and processing unit distributes different frequency information for the DDS frequency sweep source module according to a built-in frequency sweep algorithm of the DDS frequency sweep source module, the directional coupling unit monitors output power of different radio frequency output signals and transmits the value of the output power to the data acquisition and processing unit, and the data acquisition and processing unit searches a frequency point with the minimum reverse power as an optimal output frequency according to the built-in frequency sweep algorithm of the DDS frequency sweep source module and adjusts the DDS frequency sweep source module to output the radio frequency input signal with the optimal frequency so as to achieve optimal impedance matching between a radio frequency power supply and a load end.

Preferably, the directional coupling unit comprises a dual directional coupler for monitoring the forward power and the reverse power of the radio frequency output signal.

In a specific example, according to the built-in frequency sweep algorithm, the frequency size range output by the DDS frequency sweep source module is within + -5% of the frequency of the main frequency band.

The DDS sweep frequency source module is used for providing radio frequency input signals with different frequencies for the radio frequency amplification module, the directional coupling unit is used for monitoring the output power of radio frequency amplification and uploading the value of the output power to the data acquisition and processing unit, and the data acquisition and processing unit is used for adjusting the DDS sweep frequency source module to provide the radio frequency input signals with different frequencies for the radio frequency amplification module according to the output power, so that the reverse power of the radio frequency amplification module is adjusted to be minimum, and impedance matching is realized rapidly.

The data acquisition and processing unit is also connected with the radio frequency amplification module, when the reverse power detected by the directional coupling unit exceeds the limit value, the power supply is disconnected to forcibly shut down the radio frequency amplification module, so that the purpose of protection is achieved, the device is prevented from being burnt due to high-power reflection, and the reliability is improved.

The data acquisition and processing unit comprises an FPGA processor (Field-programmable gate array), the FPGA has stronger data processing capability, the FPGA is used for calculating, processing and searching the optimal output frequency, the size of a radio frequency input signal output by the DDS sweep frequency source is adjusted, and the accuracy of impedance matching is improved.

In addition, a water cooling unit is arranged in the radio frequency power supply, and the water cooling unit is arranged in the radio frequency amplifying module. The water cooling unit can use CPU water cooling radiator to radiate heat, but is not limited to CPU water cooling radiator. The heat dissipation unit is arranged, so that the radio frequency amplification module can be dissipated, and the amplification filter is ensured to work in a normal temperature range.

Example two

The embodiment provides a radio frequency device with a sweep frequency matching function, please refer to fig. 2, 3 and 4, which comprises a housing 1, a power supply interface 2 and a communication interface 3;

the housing 1 is mounted and connected by screws 4.

The radio frequency power supply with the sweep frequency matching function is arranged in the shell 1, a power supply interface 2 (namely, a power socket) and a communication interface 3 are arranged on any surface of the shell 1, and the power supply interface 2 and the communication interface 3 are respectively used for power supply and data communication. The power supply interface 2 and the communication interface 3 are arranged, so that power supply to the signal generating device and data communication with external settings are facilitated.

Further, a man-machine interaction interface 5 is further arranged on any surface of the shell 1. The man-machine interaction interface 5 can be realized by touching a display screen, and related personnel can set a sweep algorithm in the DDS sweep source module or query related parameters of the radio frequency output signal through the man-machine interaction interface, for example: impedance value, frequency, voltage and current, etc., but are not limited to the above-described usage.

In summary, in this example, the DDS sweep source module provides radio frequency input signals with different frequencies for the radio frequency amplifying module, the directional coupling unit monitors the output power of the radio frequency amplification and uploads the value of the output power to the data acquisition and processing unit, and the data acquisition and processing unit adjusts the DDS sweep source module according to the output power to provide radio frequency input signals with different frequencies for the radio frequency amplifying module, adjusts the reverse power of the radio frequency amplifying module to be minimum, and rapidly realizes impedance matching. Furthermore, the calculation of the radio frequency output power is realized through the FPGA processor, and the reverse power value is confirmed according to the sweep frequency algorithm, so that the size of the radio frequency input signal output by the DDS sweep frequency source is adjusted, and the accuracy of impedance matching is improved.

It will be apparent to those skilled in the art that various modifications and variations can be made to the present utility model without departing from the spirit or scope of the utility model. Thus, it is intended that the present utility model also include such modifications and alterations insofar as they come within the scope of the appended claims or the equivalents thereof.

Claims

1. The radio frequency power supply with the sweep frequency matching function is characterized by comprising a DDS sweep frequency source module, a radio frequency amplifying module, a data acquisition and processing unit and a directional coupling unit;

2. The radio frequency power supply with the sweep frequency matching function according to claim 1, wherein the data acquisition and processing unit is further connected with the radio frequency amplification module, and the data acquisition and processing unit controls the on-off of the radio frequency amplification module according to the magnitude of the reflected power.

3. The radio frequency power supply with sweep frequency matching function as claimed in claim 1, wherein said data acquisition and processing unit comprises an FPGA processor.

4. The radio frequency power supply with the sweep frequency matching function as claimed in claim 1, wherein the directional coupling unit comprises a dual directional coupler.

5. The radio frequency power supply with the frequency sweep matching function as claimed in claim 1, further comprising a water cooling unit, wherein the water cooling unit is arranged in the radio frequency amplifying module.

6. The radio frequency device with the sweep frequency matching function is characterized by comprising a shell and a power supply interface;

7. The radio frequency device with sweep frequency matching function as claimed in claim 6, wherein a communication interface is further provided on either surface of the housing.

8. The radio frequency device with the frequency sweep matching function according to claim 6, wherein a man-machine interface is further arranged on any surface of the housing.