CN210640808U - Radio frequency power source device with matcher - Google Patents
Radio frequency power source device with matcher Download PDFInfo
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- CN210640808U CN210640808U CN201921568241.0U CN201921568241U CN210640808U CN 210640808 U CN210640808 U CN 210640808U CN 201921568241 U CN201921568241 U CN 201921568241U CN 210640808 U CN210640808 U CN 210640808U
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Abstract
The embodiment of the application provides a radio frequency power source device with a matcher, and relates to the technical field of radio frequency. The radio frequency power source device with the matcher comprises a radio frequency source and the matcher, wherein the matcher is used for loading a radio frequency signal sent by the radio frequency source to a load terminal; the matcher comprises an input end, an output end, a first variable capacitor, an inductor, a first stepping motor, a second variable capacitor and a second stepping motor. The radio frequency power source device with the matcher matches load impedance to standard impedance of the radio frequency power source device with the matcher so as to improve energy transmission efficiency of radio frequency signals and reduce the possibility that the radio frequency power source is burnt.
Description
Technical Field
The application relates to the technical field of radio frequency, in particular to a radio frequency power source device with a matcher.
Background
The rf power source is a power source capable of generating a sine wave of a fixed rf frequency (e.g., 2-30MHz) with a certain power, and is used in many industrial applications, particularly in thawing, heating, drying, plasma surface treatment processes, and the like.
In the prior art, when the rf power source technology is applied to the above industrial fields, the impedance of the terminal device (such as a thawing chamber, a heating chamber, a plasma chamber, etc.) is not a standard impedance: if the radio frequency power source is directly used, the radio frequency signal sent by the radio frequency power source is reflected back, and the power of the radio frequency signal received by the terminal equipment is very low; if the signal power of the rf power source is increased, although the rf signal power received by the terminal device may be increased, the rf power source may be overloaded and burned.
SUMMERY OF THE UTILITY MODEL
An object of the embodiments of the present application is to provide a radio frequency power source device with a matcher, which matches load impedance to a standard impedance of the radio frequency power source device with the matcher, so as to achieve the technical effects of improving energy transmission efficiency of radio frequency signals and reducing the possibility that a radio frequency power source is burnt.
The embodiment of the application provides a radio frequency power source device provided with a matcher, which comprises a radio frequency source and the matcher, wherein the matcher is used for loading a radio frequency signal sent by the radio frequency source to a load terminal; the matcher comprises an input end, an output end, a first variable capacitor, an inductor, a first stepping motor, a second variable capacitor and a second stepping motor, wherein the input end is connected with the radio frequency source, and the output end is connected with the load terminal; the input end, the first variable capacitor, the inductor and the output end are connected in series, and the input end is grounded after passing through the second variable capacitor; the first stepping motor is connected with the first variable capacitor through a driving structure and used for adjusting the capacitance value of the first variable capacitor, and the second stepping motor is connected with the second variable capacitor through a driving structure and used for adjusting the capacitance value of the second variable capacitor so as to match the impedance of the load terminal to the standard impedance.
In the implementation process, the radio frequency power source device provided with the matcher comprises a radio frequency source and the matcher, wherein the matcher comprises a first variable capacitor, a second variable capacitor and an inductor, the first variable capacitor, the second variable capacitor and the inductor form an impedance adjusting circuit, and capacitance values of the first variable capacitor and the second variable capacitor are respectively adjusted through a first stepping motor and a second stepping motor; the first variable capacitor is used as a tuning capacitor to adjust the imaginary part of the impedance, the second variable capacitor is used as a load capacitor to adjust the real part of the impedance, and therefore the impedance of a load terminal is matched with the standard impedance, the reflection coefficient of the radio-frequency signal is reduced, the energy transmission efficiency of the radio-frequency signal is improved, and the possibility that the radio-frequency power source is burnt is reduced.
Further, the radio frequency source includes a frequency generator, a gain adjuster, a multi-stage amplifier, a filter, and an output end, the frequency generator, the gain adjuster, the multi-stage amplifier, the filter, and the output end are connected in series, and the output end is configured to send a radio frequency signal to an input end of the matcher.
In the implementation process, the frequency generator is used for generating an initial radio frequency signal, the initial radio frequency signal passes through the gain adjuster and the multistage amplifier, then the initial radio frequency signal is filtered by the filter to obtain a radio frequency signal with stable frequency and proper gain, and finally the radio frequency signal is sent to the matcher by the output end for further adjustment and matching.
Further, the first variable capacitor is a variable vacuum capacitor, and the second variable capacitor is a variable air capacitor.
In the implementation process, the second variable capacitor is an air capacitor and is used as a load capacitor in a matching system to adjust the real part of impedance; the first variable capacitor is a vacuum capacitor which has the characteristics of high withstand voltage, large power capacity and the like and is used as a tuning capacitor for adjusting the imaginary part of impedance.
Furthermore, the device also comprises a driver and a power sampler, wherein the power sampler is respectively connected with the output end of the radio frequency source and the input end of the matcher and is used for acquiring the reflection coefficient of the radio frequency signal sent by the radio frequency source; the driver is connected with the power sampler and used for driving the first stepping motor and the second stepping motor so as to match the impedance of the load terminal to standard impedance according to the reflection coefficient.
In the implementation process, the power sampler is used for sampling the radio frequency signal, acquiring the reflection coefficient of the radio frequency signal sent by the radio frequency source, and sending the reflection coefficient information to the driver; since the reflection coefficient is related to the impedance matching condition, the driver drives the first stepping motor and the second stepping motor according to the reflection coefficient, the capacitance values of the first variable capacitor and the second variable capacitor are adjusted, and when the reflection coefficient is reduced to the lowest value, the impedance of the load terminal is matched to the standard impedance at the moment. By the mode, the technical effects of automatic adjustment and impedance matching are achieved.
Further, the device further comprises a display screen, and the display screen is used for displaying the capacitance value of the first variable capacitor, the capacitance value of the second variable capacitor and the impedance information of the load terminal.
In the implementation process, the display screen is connected with the controller of the radio frequency power source, and can display the capacitance value of the first variable capacitor, the capacitance value of the second variable capacitor and the impedance information of the load terminal in real time, wherein the impedance information is a Smith chart; therefore, the radio frequency power source device provided with the matcher can be monitored and managed by workers conveniently, and the reliability and the safety of the radio frequency power source device provided with the matcher are further improved.
Furthermore, the device also comprises a first adjusting key and a second adjusting key, wherein the first adjusting key is connected with the first stepping motor, and the second adjusting key is connected with the second stepping motor.
In the implementation process, the first adjusting key position and the second adjusting key position have a manual adjusting function, and when the automatic adjusting function of the radio frequency power source device provided with the matcher fails or other conditions occur, a worker can ensure the normal operation of the radio frequency power source device provided with the matcher in a manual adjusting mode.
Further, the device further comprises an overload alarm, wherein the overload alarm is connected with the input end of the matcher and is used for monitoring the state information of the radio-frequency signal, the state information comprises the current, the voltage and the reflection coefficient of the radio-frequency signal, and when one of the current, the voltage and the reflection coefficient of the radio-frequency signal exceeds a preset value, the alarm is given.
In the implementation process, the overload alarm can monitor the running condition of the radio frequency power source device provided with the matcher in real time, and can give an alarm when one of current, voltage and reflection coefficient exceeds a limit value, so that the radio frequency power source device provided with the matcher is better protected, the radio frequency power source device provided with the matcher is prevented from being burnt due to overload, and the reliability and the safety are further improved.
Further, the device also comprises a heat dissipation system, wherein the heat dissipation system is used for dissipating heat for the radio frequency source and the matcher.
In the implementation process, the heat dissipation system dissipates heat of other devices of the radio frequency power source device provided with the matcher, so that the radio frequency power source device provided with the matcher is better protected, the radio frequency power source device provided with the matcher is prevented from being overheated, and the reliability and the safety are further improved.
Furthermore, the heat dissipation system is air-cooled heat dissipation or liquid-cooled heat dissipation.
In the implementation process, the heat dissipation system can be air-cooled heat dissipation or liquid-cooled heat dissipation, or both; the air-cooled heat dissipation comprises a heat dissipation fan, the heat dissipation fan can be packaged in the radio frequency power source device provided with the matcher, and all devices in the device are dissipated through air circulation; the liquid cooling heat dissipation includes power pump and cooling tube, is equipped with the coolant liquid in the cooling tube, utilizes the coolant liquid circulation in the power pump messenger cooling tube to dispel the heat for each inside device of device.
Further, the device also comprises a power supply, and the power supply is used for supplying power to the radio frequency source and the matcher.
In the implementation process, the power supply supplies power to other devices of the radio frequency power source device provided with the matcher so as to ensure the normal operation of the radio frequency power source device provided with the matcher.
Additional features and advantages of the disclosure will be set forth in the description which follows, or in part may be learned by the practice of the above-described techniques of the disclosure, or may be learned by practice of the disclosure.
In order to make the aforementioned objects, features and advantages of the present application more comprehensible, preferred embodiments accompanied with figures are described in detail below.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings that are required to be used in the embodiments of the present application will be briefly described below, it should be understood that the following drawings only illustrate some embodiments of the present application and therefore should not be considered as limiting the scope, and that those skilled in the art can also obtain other related drawings based on the drawings without inventive efforts.
Fig. 1 is a schematic structural diagram of a radio frequency power source apparatus provided with a matcher according to an embodiment of the present disclosure;
fig. 2 is a schematic structural diagram of an rf source according to an embodiment of the present application.
Detailed Description
The technical solutions in the embodiments of the present application will be described below with reference to the drawings in the embodiments of the present application.
It should be noted that: like reference numbers and letters refer to like items in the following figures, and thus, once an item is defined in one figure, it need not be further defined and explained in subsequent figures. Meanwhile, in the description of the present application, the terms "first", "second", and the like are used only for distinguishing the description, and are not to be construed as indicating or implying relative importance.
The radio frequency power source device provided with the matcher can be applied to the technical fields of unfreezing, heating, drying, plasma surface treatment processes and the like; the load impedance is matched with the standard impedance of the radio frequency power source device provided with the matcher, so that the energy transmission efficiency of radio frequency signals is improved, and the possibility that the radio frequency power source is burnt can be reduced.
Referring to fig. 1, fig. 1 is a schematic structural diagram of a radio frequency power source apparatus provided with a matcher according to an embodiment of the present disclosure. The rf power source apparatus with a matcher includes an rf source 110 and a matcher 120, wherein the matcher is connected to a load terminal 130.
The rf source 110 is a device that generates a sine wave with a fixed frequency and a certain power, and can generate rf signals with a frequency in the range of 2MHz to 30 MHz. The frequency source 110 is a point frequency source, and can generate a certain frequency in a range of 2MHz-30MHz, that is, a fixed frequency can be generated in this frequency range according to requirements, for example, 13.56MHz, 27.12MHz, and the like.
Optionally, the rf signal frequency of the rf source 110 is 13.56 MHz.
Illustratively, the matcher 120 includes an input 121, an output 122, a first variable capacitor 123, an inductor 124, a first stepper motor 125, a drive structure 126, a second variable capacitor 127, a drive structure 128, and a second stepper motor 129. Wherein the input terminal 121 is connected to the rf source 110, and is configured to receive the rf signal transmitted by the rf source 110; the input end 121, the first variable capacitor 123, the inductor 124 and the output end 122 are connected in series, and the input end 121 is grounded after passing through the second variable capacitor 127; the first variable capacitor 123, the second variable capacitor 127 and the inductor 124 form an impedance adjusting circuit for adjusting impedance in the circuit; the first stepping motor 125 is connected with the first variable capacitor 123 through a driving structure 126 for adjusting the capacitance value of the first variable capacitor 123, and the second stepping motor 129 is connected with the second variable capacitor 127 through a driving structure 128 for adjusting the capacitance value of the second variable capacitor 127, so as to match the impedance of the load terminal to a standard impedance; the output terminal 122 is connected to the load terminal 130, and is used for applying the rf signal to the load terminal 130, so that the load terminal 130 can operate normally.
Illustratively, in the impedance adjusting circuit composed of the first variable capacitor 123, the second variable capacitor 127 and the inductor 124, the first variable capacitor 123 is used as a tuning capacitor to adjust the imaginary part of the impedance, and the second variable capacitor 127 is used as a load capacitor to adjust the real part of the impedance.
Illustratively, the driving structure 126 and the driving structure 128 may be a gear drive or a belt drive. It should be understood that a gear drive or belt drive is exemplary only and not limiting; other driving means may be used for the driving structure 126 in case of meeting the installation requirements of the equipment.
Alternatively, the first variable capacitor 123 is a variable vacuum capacitor, the variable vacuum capacitor is a capacitor using vacuum as a medium, and the electrode set of the variable vacuum capacitor is a set of concentric cylindrical electrodes formed by using a high-conductivity oxygen-free copper tape and extending through a whole set of high-precision dies, and the concentric cylindrical electrodes are sealed in a vacuum container, thereby forming the capacitor with adjustable capacitance. Therefore, the performance is stable and reliable, and phenomena such as arcing, corona and the like are not easy to generate. The first variable capacitance may be a glass insulated housing vacuum capacitor, e.g., a variable glass vacuum Capacitor (CKBB); or may be a ceramic insulated housing vacuum capacitor, such as a variable ceramic vacuum Capacitor (CKTB) or a water cooled variable ceramic vacuum Capacitor (CKTBs). Generally, a vacuum capacitor has the advantages of large rated voltage, large rated current, wide regulation range, small loss and the like.
Illustratively, the first stepper motor 125 adjusts the capacitance value of the variable vacuum capacitor by adjusting a structural parameter, such as a relative distance, etc., between the respective concentric cylindrical electrodes of the variable vacuum capacitor.
Optionally, the second variable capacitor 127 is a variable air capacitor, which is a capacitor with air as a medium, and the capacitance of the capacitor can be adjusted within a certain range, and when the relative effective area between the pole pieces or the distance between the pole pieces is changed, the capacitance value of the capacitor is changed correspondingly; generally, an air capacitor consists of two sets of pole pieces insulated from each other: a group of fixed pole pieces is called a stator, a group of movable pole pieces is called a rotor, and air is used as a medium between the rotor and the stator; when the movable plate of the air medium variable capacitor is rotated to make it be completely screwed into the space between the fixed plates, its capacitance is maximum; on the contrary, when the moving plate is completely screwed out of the space between the fixed plates, the capacitance is minimum.
Illustratively, the second stepper motor 129 adjusts the capacitance value of the variable air capacitor by adjusting the relative effective area or inter-plate distance between the pole pieces of the variable air capacitor.
In a possible embodiment, the rf power source apparatus provided with the matcher further includes a driver and a power sampler. The power sampler is connected to the output terminal of the rf source 110 and the input terminal of the matcher 120, and the driver is connected to the power sampler, the first stepping motor 125, and the second stepping motor 129.
Illustratively, the power sampler may measure the power of the radio frequency signal and convert it into an electrical signal. The power sampler comprises a signal processor, a passive diode radio frequency sensor, a directional half-wave diode detection circuit and a coaxial transmission line; when the power sampler works, the detection circuit is coupled with the coaxial transmission line through a medium, and samples forward and reflected power according to the direction of a sensor arranged beside the transmission line; the signal processor converts the forward and reflected power into an electrical signal containing power information, and then sends the electrical signal containing power information to the driver.
Illustratively, the driver comprises a single chip microcomputer which can calculate and process electric signals and send control instructions to control the operation of related devices. After the driver receives the electric signal containing power information sent by the power sampler, the forward power and the reflected power of the radio frequency power source device provided with the matcher at the moment and the impedance information of the load terminal 130 are calculated, and the matching values of the first variable capacitor 123 and the second variable capacitor 127 are calculated according to a preset adjustment formula; the driving signal is sent to drive the first stepping motor 125 and the second stepping motor 129 to operate, so as to adjust the capacitance values of the first variable capacitor 123 and the second variable capacitor 127 to the matching value. Through driver and power sampler, the radio frequency power source device who is equipped with the matcher can realize the technological effect of automatic matching load impedance to reduce the human cost.
In a possible embodiment, the rf power source apparatus provided with the matcher further includes an overload alarm. The overload alarm is respectively connected to the input end of the matcher 120 and the output end of the radio frequency source 110, and is configured to monitor state information of the radio frequency signal, and alarm when one of a current, a voltage, and a reflection coefficient of the radio frequency signal exceeds a preset value.
Illustratively, the overload alarm comprises a detector and a buzzer, wherein the detector is respectively connected with the input end of the matcher 120 and the output end of the radio frequency source 110, and the buzzer is connected with the detector; the detector can collect the state information of the radio frequency signal, and the state information comprises current, voltage and reflection coefficient. Through setting up the overload alarm, can protect the radio frequency power source device who is equipped with the matcher better, prevent that the radio frequency power source device who is equipped with the matcher from being burnt out because of overloading, further promote reliability and security.
In a possible embodiment, the rf power source device provided with the matcher further comprises a temperature alarm.
Illustratively, the temperature alarm comprises a thermometer and a buzzer, and the thermometer is connected with the buzzer. The thermometers are arranged at the radio frequency source 110 and the matcher 120 and used for monitoring the working temperature of the radio frequency source 110 and the matcher 120; when the working temperatures of the radio frequency source 110 and the matcher 120 exceed the preset temperature, it indicates that the radio frequency power source device provided with the matcher fails, runs abnormally and has a risk of burning out; at this time, the buzzer starts to alarm. Through setting up the temperature alarm, can protect the radio frequency power source device that is equipped with the matcher better, prevent that the radio frequency power source device that is equipped with the matcher from being burnt out because of overheated, further promote reliability and security.
Illustratively, the load terminals 130 are terminal devices. The load terminals 130 may be industrial devices, such as radio frequency induction heating devices; a drying device; semiconductor processing equipment; LED and solar photovoltaic industrial equipment; plasma generation equipment in scientific experiments; a medical cosmetic device; normal pressure plasma disinfection cleaning equipment and the like.
In a possible embodiment, the rf power source device provided with the matcher further includes a heat dissipation system, and the heat dissipation system is configured to dissipate heat of the rf source and the matcher. Generally, the heat dissipation system dissipates heat of other devices of the radio frequency power source device provided with the matcher, so that the radio frequency power source device provided with the matcher is better protected, the radio frequency power source device provided with the matcher is prevented from being overheated, and reliability and safety are further improved.
Optionally, the heat dissipation system includes an air-cooled heat dissipation device, the air-cooled heat dissipation device includes a heat dissipation fan, and the heat dissipation fan may be packaged inside the radio frequency power source device provided with the matcher, and dissipates heat for each device inside the device through air circulation.
Optionally, the cooling system includes the liquid cooling heat dissipation, and the liquid cooling heat dissipation includes power pump and cooling tube, is equipped with the coolant liquid in the cooling tube, utilizes the coolant liquid circulation in the power pump messenger cooling tube to dispel the heat for each inside device of device. Specifically, the liquid-cooled heat dissipation device comprises a liquid-cooled block, circulating liquid, a power pump, a pipeline, a liquid tank and a heat exchanger. The liquid cooling block is a metal block with a small pipe left inside, is made of copper or aluminum, is in contact with the device and absorbs the heat of the device. The circulating liquid flows in a circulating pipeline under the action of a power pump, and if the liquid is water, the circulating liquid is a water cooling system which is commonly called. The liquid absorbing the heat of the device flows away from the liquid cooling block on the device, and the new low-temperature circulating liquid continuously absorbs the heat of the device. The pipeline is connected with the power pump, the liquid cooling block and the heat exchanger, and the circulating liquid circularly flows in a closed channel without leaking outside, so that the liquid cooling heat dissipation system normally works. The liquid tank is used for storing circulating liquid, the heat exchanger is a device similar to a radiating fin, the circulating liquid transfers heat to the radiating fin with a large surface area, and a fan on the radiating fin takes away the heat of inflow air.
In a possible embodiment, the radio frequency power source device provided with the matcher further comprises a central controller and a voice recognizer. The central controller is connected with the driver, a plurality of typical impedance matching values can be preset, and a user can call the impedance matching values directly; or the load impedance information is directly input, and after the central controller calculates the impedance matching value, a control signal is sent to the driver to realize automatic matching. The voice recognizer is connected with the central controller, and can control the working operation of the radio frequency power source device provided with the matcher after the central controller recognizes the voice command through a specially defined voice command; such as power on or off commands, etc.
In a possible embodiment, the radio frequency power source apparatus provided with the matcher further includes a display screen, and the display screen is configured to display the capacitance value of the first variable capacitor 123, the capacitance value of the second variable capacitor 127, and the impedance information of the load terminal.
Illustratively, the display screen is connected to the controller of the rf power source, and can display the capacitance value of the first variable capacitor 123, the capacitance value of the second variable capacitor 127, and the impedance information of the load terminal in real time, i.e. the Smith chart; therefore, the radio frequency power source device provided with the matcher can be monitored and managed by workers conveniently, and the reliability and the safety of the radio frequency power source device provided with the matcher are further improved.
Optionally, the display screen is an LED display screen.
In a possible embodiment, the radio frequency power source device provided with a matcher further comprises a first adjusting key connected to the first stepping motor 125 and a second adjusting key connected to the second stepping motor 129.
Illustratively, the first and second adjustment keys may be buttons or knobs, which may control the first and second stepping motors 125 and 129, respectively. Through the first adjusting key position and the second adjusting key position, the capacitance values of the first variable capacitor 123 and the second variable capacitor 127 can be manually adjusted, so that when the automatic adjusting function of the radio frequency power source device provided with the matcher fails or other conditions occur, a worker can ensure the normal operation of the radio frequency power source device provided with the matcher in a manual adjusting mode.
Referring to fig. 2, fig. 2 is a schematic structural diagram of a radio frequency source according to an embodiment of the present disclosure. The radio frequency source comprises a frequency generator 111, a gain adjuster 112, a multi-stage amplifier 113, a filter 114 and an output 115.
Illustratively, the frequency generator 111, the gain adjuster 112, the multi-stage amplifier 113, the filter 114, and the output terminal 115 are connected in series, and the output terminal 115 is used for transmitting the radio frequency signal to the input terminal 121 of the matcher 120.
Illustratively, the frequency generator 111 is a radio frequency generator (rf generator); specifically, the frequency generator 111 may generate a high frequency signal having a frequency of 2MHz to 30 MHz. Alternatively, the frequency generator 111 employs an LC tuned oscillator; in addition, the frequency generator 111 has a good shielding function against signal leakage.
Illustratively, the gain adjuster 112 is a dynamic processor. The gain adjuster 112 can suppress large signals and amplify small signals, thereby playing a role of gain adjustment; specifically, the gain of the gain adjuster 112 changes with the change of the signal, a negative feedback circuit is adopted between the stages of the internal amplifier, and after the input large signal is amplified by the amplifier, the gain of the amplifier stage can be reduced by adopting negative feedback because distortion can be caused at the output end; in order to obtain a better signal-to-noise ratio at the output end of the input small signal, the negative feedback quantity can be weakened through the negative feedback circuit, so that the gain of the amplification stage is improved, and the phenomenon that the low end and the high end of a frequency response curve are reduced is changed.
Alternatively, the gain adjuster 112 may also have another function of adjusting the output power of the rf source 110. Generally, the gain adjuster 112 can adjust the output power of the rf source 110 through a gain cross-over; if the rf source 110 wants to output rf signals with different powers, for example, different power ratings such as 100W, 200W, 500W, etc., it can be implemented by adjusting the gain adjuster 112.
Illustratively, the multi-stage amplifier 113 includes a plurality of single-tube amplification circuits. Specifically, a plurality of single-tube amplification circuits are connected in series to form a multi-stage amplifier 113, and a signal is amplified multiple times, so that a desired amplification factor is obtained.
Illustratively, the filter 114 is a filter circuit composed of a capacitor, an inductor, and a resistor. The filter 114 functions to filter harmonics of frequencies in the frequency source 110, for example, if the radio frequency of the frequency source 110 is 13.56MHz, the filter 114 will filter harmonics of 13.56MHz, such as the second harmonic 27.12, the third harmonic 40.68MHz, etc. Optionally, the filter 114 may effectively filter a frequency point of a specific frequency in the power line or frequencies other than the frequency point, so as to obtain a power signal of the specific frequency, or eliminate a power signal after the specific frequency.
Optionally, the rf source further comprises a controller, which is connected to the frequency generator 111 and the gain adjuster 112, respectively, for controlling the operation parameters of the frequency generator 111 and the gain adjuster 112. Specifically, the controller includes a single chip microcomputer, and can control the control frequency generator 111 and the gain adjuster 112 according to preset parameters.
In the several embodiments provided in the present application, it should be understood that the functional modules in the embodiments of the present application may be integrated together to form an independent part, or each module may exist separately, or two or more modules may be integrated to form an independent part.
The above description is only an example of the present application and is not intended to limit the scope of the present application, and various modifications and changes may be made by those skilled in the art. Any modification, equivalent replacement, improvement and the like made within the spirit and principle of the present application shall be included in the protection scope of the present application. It should be noted that: like reference numbers and letters refer to like items in the following figures, and thus, once an item is defined in one figure, it need not be further defined and explained in subsequent figures.
The above description is only for the specific embodiments of the present application, but the scope of the present application is not limited thereto, and any person skilled in the art can easily conceive of the changes or substitutions within the technical scope of the present application, and shall be covered by the scope of the present application. Therefore, the protection scope of the present application shall be subject to the protection scope of the claims.
It is noted that, herein, relational terms such as first and second, and the like may be used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Also, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising an … …" does not exclude the presence of other identical elements in a process, method, article, or apparatus that comprises the element.
Claims (10)
1. A radio frequency power source device provided with a matcher is characterized by comprising a radio frequency source and the matcher, wherein the matcher is used for loading a radio frequency signal sent by the radio frequency source to a load terminal;
the matcher comprises an input end, an output end, a first variable capacitor, an inductor, a first stepping motor, a second variable capacitor and a second stepping motor, wherein the input end is connected with the radio frequency source, and the output end is connected with the load terminal; the input end, the first variable capacitor, the inductor and the output end are connected in series, and the input end is grounded after passing through the second variable capacitor; the first stepping motor is connected with the first variable capacitor through a driving structure and used for adjusting the capacitance value of the first variable capacitor, and the second stepping motor is connected with the second variable capacitor through a driving structure and used for adjusting the capacitance value of the second variable capacitor so as to match the impedance of the load terminal to the standard impedance.
2. The rf power source apparatus with matching device as claimed in claim 1, wherein the rf source comprises a frequency generator, a gain adjuster, a multi-stage amplifier, a filter, and an output terminal, the frequency generator, the gain adjuster, the multi-stage amplifier, the filter, and the output terminal are connected in series, and the output terminal is used for transmitting rf signals to the input terminal of the matching device.
3. The rf power supply apparatus with matching device as claimed in claim 1, wherein the first variable capacitor is a variable vacuum capacitor, and the second variable capacitor is a variable air capacitor.
4. The rf power source apparatus with matching device as claimed in claim 3, further comprising a driver and a power sampler, wherein the power sampler is connected to the output terminal of the rf source and the input terminal of the matching device respectively, for obtaining the reflection coefficient of the rf signal transmitted by the rf source;
the driver is connected with the power sampler and used for driving the first stepping motor and the second stepping motor so as to match the impedance of the load terminal to standard impedance according to the reflection coefficient.
5. The rf power source apparatus provided with a matcher according to claim 1, further comprising a display screen, wherein the display screen is configured to display the capacitance value of the first variable capacitor, the capacitance value of the second variable capacitor, and impedance information of the load terminal.
6. The rf power source device with matching box as claimed in claim 1, further comprising a first adjusting key and a second adjusting key, wherein the first adjusting key is connected to the first stepping motor, and the second adjusting key is connected to the second stepping motor.
7. The rf power source apparatus with a matcher according to claim 1, further comprising an overload alarm, wherein the overload alarm is connected to an input end of the matcher, and is configured to monitor status information of the rf signal, the status information includes a current, a voltage, and a reflection coefficient of the rf signal, and when one of the current, the voltage, and the reflection coefficient of the rf signal exceeds a preset value, the overload alarm gives an alarm.
8. The rf power source apparatus provided with a matching unit according to claim 1, further comprising a heat dissipation system for dissipating heat from the rf source and the matching unit.
9. The rf power supply apparatus with matching device as claimed in claim 8, wherein the heat dissipation system is air-cooled heat dissipation or liquid-cooled heat dissipation.
10. The rf power source apparatus provided with a matcher according to claim 1, further comprising a power supply for supplying power to the rf source and the matcher.
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| CN201921568241.0U CN210640808U (en) | 2019-09-20 | 2019-09-20 | Radio frequency power source device with matcher |
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| CN201921568241.0U CN210640808U (en) | 2019-09-20 | 2019-09-20 | Radio frequency power source device with matcher |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117220655A (en) * | 2023-09-25 | 2023-12-12 | 常州同惠电子股份有限公司 | Automatic power source matching system and matching method for power equipment |
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2019
- 2019-09-20 CN CN201921568241.0U patent/CN210640808U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117220655A (en) * | 2023-09-25 | 2023-12-12 | 常州同惠电子股份有限公司 | Automatic power source matching system and matching method for power equipment |
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