CN219586232U - Automatic calibration draft tube - Google Patents
Automatic calibration draft tube Download PDFInfo
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- CN219586232U CN219586232U CN202223574188.XU CN202223574188U CN219586232U CN 219586232 U CN219586232 U CN 219586232U CN 202223574188 U CN202223574188 U CN 202223574188U CN 219586232 U CN219586232 U CN 219586232U
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- guide cylinder
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- cylinder cover
- hole
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E30/00—Energy generation of nuclear origin
- Y02E30/30—Nuclear fission reactors
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Abstract
The present utility model provides an automatically calibrated draft tube comprising: and the observation hole is arranged along the circumference of the guide cylinder cover plate, an included angle device is formed between the observation hole and an observation window on the furnace cover in the overlook direction and the center of a thermal field, and the observation hole is arranged at the position for observing the guide cylinder from the observation window. The guide cylinder has the beneficial effects that the guide cylinder is simple in structure and low in processing cost; by arranging the observation holes in the observable visual field range of the observation window on the guide cylinder cover plate, the position of the guide cylinder can be intuitively observed, and meanwhile, the distance from the guide cylinder cover plate to the large cover plate can be intuitively seen; the weight sensors are arranged in cooperation with the mounting holes, and the influence of abnormal deformation of the guide cylinder is eliminated through the plurality of weight sensors arranged on the guide cylinder cover plate; the air sealing ring is prevented from being damaged by the guide cylinder, the guide cylinder can be lowered to 0 position, and the stability in the furnace is further improved.
Description
Technical Field
The utility model belongs to the field of solar czochralski silicon single crystal manufacture and czochralski semiconductor silicon single crystal manufacture, and particularly relates to an automatic calibration guide cylinder.
Background
At present, the guide cylinder is one of important thermal field pieces for pulling single crystals, plays an important role in axial temperature gradient and air flow in a furnace, and mainly comprises a guide cylinder supporting cover plate, an outer guide, a protecting ring and the like, and is positioned at 0 position in the processes of temperature stabilization, crystal guiding, shouldering, shoulder turning, equal diameter and ending, wherein the 0 position is used for guiding the lower edge of the guide cylinder cover plate to be just contacted with the upper edge of a large cover plate. The draft tube is in 0 position and can guarantee that the air current flows according to the settlement direction, can effectively control air current and in-furnace axial temperature gradient, and the calibration of draft tube 0 position can effectively solve thermal field stability, and the calibration draft tube 0 position is through whether the relative position skew takes place for observation draft tube lifting lever and draft tube cover plate to judge, because receive light influence in the actual operation process, the angle influences, personnel's operating skill influences, thermal field does not drop to 0 position, thermal field is unstable in the stove, thermal field drops to 0 position and continues to descend and damage the graphite spare, even causes the risk that can't pull the crystal, above method has the error great to the calibration of draft tube 0 position to have certain risk.
Disclosure of Invention
The utility model aims to solve the problem of providing an automatic calibration guide cylinder, which is particularly suitable for calibrating the guide cylinder in a Czochralski single crystal thermal field structure.
In order to solve the technical problems, the utility model adopts the following technical scheme: an auto-calibrating pod comprising: and the observation hole is arranged along the circumference of the guide cylinder cover plate, an included angle device is formed between the observation hole and an observation window on the furnace cover in the overlook direction and the center of a thermal field, and the observation hole is arranged at the position for observing the guide cylinder from the observation window.
Further, an included angle formed by connecting lines of the circle center of the observation hole, the circle center of the thermal field and the central point of the observation window in the overlooking direction is 35-45 degrees.
Further, the diameter of the observation hole is 1-2mm.
Further, at least one mounting hole is provided along the circumference of the guide cylinder cover plate, the mounting hole is provided for mounting a pressure sensor, and the pressure sensor is provided at one end of the sensor rod.
Further, the mounting hole and the observation hole are arranged in a staggered mode.
Further, one end of the sensor rod, provided with the pressure sensor, extends out of the lower end face of the guide cylinder cover plate.
Further, one end of the sensor rod, provided with the pressure sensor, extends out of the lower end face of the guide cylinder cover plate by 1-2mm.
Further, 4 mounting holes are uniformly formed along the circumferential direction of the guide cylinder cover plate.
Further, each mounting hole is arranged in a staggered manner with the observation hole.
Further, the sensor rod extends out of the lower end face of the guide cylinder cover plate by 1-2mm.
Due to the adoption of the technical scheme, the method has the following beneficial effects:
the guide cylinder has simple structure and low processing cost; by arranging the observation holes in the observable visual field range of the observation window on the guide cylinder cover plate, the position of the guide cylinder can be intuitively observed, and meanwhile, the distance from the guide cylinder cover plate to the large cover plate can be intuitively seen; the weight sensors are arranged in cooperation with the mounting holes, and the influence of abnormal deformation of the guide cylinder is eliminated through the plurality of weight sensors arranged on the guide cylinder cover plate; the air sealing ring is prevented from being damaged by the guide cylinder, the guide cylinder can be lowered to 0 position, and the stability in the furnace is further improved.
Drawings
FIG. 1 is a top view of a pod cover plate according to a first embodiment of the utility model;
FIG. 2 is a top view of a pod cover plate according to a second embodiment of the utility model;
FIG. 3 is a top view of a pod cover plate according to a third embodiment of the utility model.
In the figure:
1. viewing hole 2, mounting hole
Detailed Description
The utility model is further illustrated by the following examples and figures:
in the thermal field mechanism based on the conventional Czochralski single crystal, the guide cylinder should be at 0 position in the processes of temperature stabilization, seeding, shouldering, shoulder turning, constant diameter and ending, when the guide cylinder does not descend to 0 position, the thermal field in the furnace is unstable, if the guide cylinder descends to 0 position, the graphite part is damaged, even the risk of incapability of pulling crystal is caused, so that the guide cylinder needs to be accurately descended to 0 position, and the stability of the thermal field structure is ensured.
In a first embodiment of the present utility model, as shown in fig. 1, an auto-calibrating guide cylinder includes: the observation holes 1 circumferentially arranged along the guide cylinder cover plate in the overlook direction form an included angle with the observation window on the furnace cover relative to the center of a thermal field, the guide cylinder cover plate is circumferentially arranged at the outer edge of the upper end of the guide cylinder in a specific setting process, the large cover plate is arranged below the guide cylinder cover plate, and when the guide cylinder is positioned at the 0 position, the lower end face of the guide cylinder cover plate is attached to the upper end face of the large cover plate; in the production process, the positions and the working processes of the guide cylinder, the crucible and the like can be observed through the observation window on the furnace cover, and the observation window is arranged on one side of the thermal field structure, so that the observation window is affected by the visual field range, the opening position of the observation hole 1 on the guide cylinder cover plate is required to be in the observable visual field range of the observation window, in the embodiment, the observation hole 1 and the observation window form an included angle with respect to the center of the thermal field in the overlooking direction, and the observation hole 1 is arranged in the observable visual field range of the observation window, so that an operator can observe the position of the guide cylinder through the observation window and the observation hole 1 on the guide cylinder cover plate.
In this embodiment, the diameter of the observation hole is 1-2mm, the connection line between the center of the observation hole 1 and the center of the thermal field in the top view direction forms an included angle of 35-45 ° with the connection line between the center of the observation window and the center of the thermal field, preferably, the connection line between the center of the observation hole 1 and the center of the thermal field can be taken, and the included angle formed by the connection line between the center of the observation window and the center of the thermal field is 40 °; by arranging the observation hole 1 on the guide cylinder cover plate positioned at one side of the observation window, whether the guide cylinder descends to just contact with the large cover plate can be intuitively observed. And in the range of the included angle, the distance from the guide cylinder cover plate to the large cover plate can be intuitively seen, and the process is simple to operate, more intuitive and capable of accurately descending to the 0 position of the guide cylinder. It is conceivable that the diameter of the observation aperture 1 can be adapted to the actual situation.
In a second embodiment of the present utility model, as shown in fig. 2, an auto-calibration guide cylinder includes: the observation hole 1 is circumferentially arranged along the guide cylinder cover plate in the overlook direction, the observation hole 1 and an observation window on the furnace cover form an included angle with respect to the center of a thermal field, the guide cylinder cover plate is circumferentially arranged at the outer edge of the upper end of the guide cylinder in a specific setting process, the large cover plate is arranged below the guide cylinder cover plate, and when the guide cylinder is in a 0 position, the lower end face of the guide cylinder cover plate is attached to the upper end face of the large cover plate; in the production process, the positions and the working processes of the guide cylinder, the crucible and the like can be observed through the observation window on the furnace cover, and the observation window is arranged on one side of the thermal field structure, so that the observation window is affected by the visual field range, the opening position of the observation hole 1 on the guide cylinder cover plate is required to be in the observable visual field range of the observation window, in the embodiment, the observation hole 1 and the observation window form an included angle with respect to the center of the thermal field in the overlooking direction, and the observation hole 1 is arranged in the observable visual field range of the observation window, so that an operator can observe the position of the guide cylinder through the observation window and the observation hole 1 on the guide cylinder cover plate.
In this embodiment, the diameter of the observation hole 1 is 1-2mm, the connection line between the center of the observation hole 1 and the center of the thermal field in the top view direction, the included angle formed by the connection line between the center of the observation window and the center of the thermal field is 35-45 °, preferably, the connection line between the center of the observation hole 1 and the center of the thermal field can be taken, and the included angle formed by the connection line between the center of the observation window and the center of the thermal field is 40 °; by arranging the observation hole 1 on the guide cylinder cover plate positioned at one side of the observation window, whether the guide cylinder descends to just contact with the large cover plate can be intuitively observed. And in the range of the included angle, the distance from the guide cylinder cover plate to the large cover plate can be intuitively seen, and the process is simple to operate, more intuitive and capable of accurately descending to the 0 position of the guide cylinder. It is conceivable that the diameter of the observation aperture 1 can be adapted to the actual situation.
At least one mounting hole 2 is further formed in the circumference of the guide cylinder cover plate, a pressure sensor is mounted through the mounting hole 2, the guide cylinder master is monitored to descend to the 0 position through the pressure sensor, and the double insurance effect is achieved through the cooperation of the setting of the observation hole 1.
As shown in fig. 2, in the present embodiment, there is provided a mounting hole 2, the mounting hole 2 being provided on a side close to the observation window, the mounting hole 2 having a diameter of 1-2mm; it is conceivable that the diameter of the mounting hole 2 may be adapted to the actual situation. The mounting hole 2 and the observation hole 1 are arranged in a staggered manner, in order to realize the mounting of the sensor, the sensor is arranged at one end of a sensor rod, and in the mounting process, one end of the sensor rod, provided with the pressure sensor, extends out of the lower end face 1-2mm of the guide cylinder cover plate and is not shown in the sensor rod diagram; it is conceivable that the sensor rod is screwed with the mounting hole 2, and can also be fixed by a fastener; in the process of calibrating the position of the guide cylinder, when the sensor changes, the sensor immediately stops descending, wherein the sensor is at the 0 position of the guide cylinder; in the process, the 0-position of the guide cylinder is automatically calibrated according to the change condition of the weight sensor in the descending process of the guide cylinder, so that the experience skills of operators are reduced, and the difficulty in calibrating the 0-position of the guide cylinder is reduced.
In a third embodiment of the present utility model, as shown in fig. 3, an auto-calibrating guide cylinder includes: the observation hole 1 is circumferentially arranged along the guide cylinder cover plate in the overlook direction, the observation hole 1 and an observation window on the furnace cover form an included angle with respect to the center of a thermal field, the guide cylinder cover plate is circumferentially arranged at the outer edge of the upper end of the guide cylinder in a specific setting process, the large cover plate is arranged below the guide cylinder cover plate, and when the guide cylinder is in a 0 position, the lower end face of the guide cylinder cover plate is attached to the upper end face of the large cover plate; in the production process, the positions and the working processes of the guide cylinder, the crucible and the like can be observed through the observation window on the furnace cover, and the observation window is arranged on one side of the thermal field structure, so that the influence of the visual field range is received, the position of the observation hole 1 on the guide cylinder cover plate is required to be in the observable visual field range of the observation window, in the embodiment, the observation hole 1 and the observation window form an included angle with respect to the center of the thermal field in the overlooking direction, and the observation hole 1 is arranged in the observable visual field range of the observation window, so that an operator can observe the position of the guide cylinder through the observation window and the observation hole 1 on the guide cylinder cover plate.
In this embodiment, the diameter of the observation hole 1 is 1-2mm, the connection line between the center of the observation hole 1 and the center of the thermal field in the top view direction, the included angle formed by the connection line between the center of the observation window and the center of the thermal field is 35-45 °, preferably, the connection line between the center of the observation hole 1 and the center of the thermal field can be taken, and the included angle formed by the connection line between the center of the observation window and the center of the thermal field is 40 °; by arranging the observation hole 1 on the guide cylinder cover plate positioned at one side of the observation window, whether the guide cylinder descends to just contact with the large cover plate can be intuitively observed. And in the range of the included angle, the distance from the guide cylinder cover plate to the large cover plate can be intuitively seen, and the process is simple to operate, more intuitive and capable of accurately descending to the 0 position of the guide cylinder. It is conceivable that the diameter of the observation aperture 1 can be adapted to the actual situation.
At least one mounting hole 2 is further formed in the circumference of the guide cylinder cover plate, a pressure sensor is mounted through the mounting hole 2, the guide cylinder master is monitored to descend to the 0 position through the pressure sensor, and the double insurance effect is achieved through the cooperation of the setting of the observation hole 1.
In this embodiment, as shown in fig. 3, considering that the guide cylinder cover plate may be deformed, 4 mounting holes 2 are provided, and 4 mounting holes 2 are uniformly arranged along the circumferential direction of the guide cylinder cover plate to eliminate the influence caused by deformation of the guide cylinder cover plate, wherein the diameter of the mounting hole 2 is 1-2mm; it is conceivable that the diameter of the mounting hole 2 may be adapted to the actual situation. The mounting hole 2 and the observation hole 1 are arranged in a staggered manner, in order to realize the mounting of the sensor, the sensor is arranged at one end of the sensor rod, and in the mounting process, one end of the sensor rod provided with the pressure sensor extends out of the lower end face 1-2mm of the guide cylinder cover plate, and the sensor rod is conceivable to be in threaded connection with the mounting hole 2 and can be fixed through a fastener; in the process of calibrating the position of the guide cylinder, when the sensor changes, the sensor immediately stops descending, and the position of the guide cylinder is the 0 position. Through evenly setting up 4 holes on the draft tube apron angulation, when the draft tube abnormal deformation, stop the decline draft tube immediately when one weight in 4 sensors changes, realized the calibration of draft tube 0 position.
The foregoing describes the embodiments of the present utility model in detail, but the description is only a preferred embodiment of the present utility model and should not be construed as limiting the scope of the utility model. All equivalent changes and modifications within the scope of the present utility model are intended to be covered by the present utility model.
Claims (8)
1. An auto-calibrating draft tube, comprising: the observation hole is arranged along the circumference of the guide cylinder cover plate, an included angle is formed between the observation hole and an observation window on the furnace cover in the overlook direction and the center of a thermal field, and the observation hole is arranged at a position for observing the guide cylinder from the observation window;
an included angle formed by connecting lines of the circle center of the observation hole, the circle center of the thermal field and the central point of the observation window in the overlooking direction is 35-45 degrees;
at least one mounting hole is formed in the circumference of the guide cylinder cover plate, the mounting hole is formed in a mounting pressure sensor, and the pressure sensor is arranged at one end of the sensor rod.
2. An auto-calibrating pod according to claim 1, wherein: the diameter of the observation hole is 1-2mm.
3. An auto-calibrating pod according to claim 1, wherein: the mounting holes and the observation holes are arranged in a staggered mode.
4. A self-calibrating draft tube according to claim 1 or 3 wherein: and one end of the sensor rod, provided with the pressure sensor, extends out of the lower end face of the guide cylinder cover plate.
5. A self-calibrating draft tube according to claim 1 or 3 wherein: one end of the sensor rod, which is provided with the pressure sensor, extends out of the lower end face of the guide cylinder cover plate by 1-2mm.
6. An auto-calibrating pod according to claim 1, wherein: and 4 mounting holes are uniformly formed along the circumferential direction of the guide cylinder cover plate.
7. An auto-calibrating pod according to claim 6, wherein: each mounting hole is staggered with the observation holes.
8. An auto-calibrating pod according to claim 6, wherein: the sensor rod extends out of the lower end face of the guide cylinder cover plate by 1-2mm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202223574188.XU CN219586232U (en) | 2022-12-28 | 2022-12-28 | Automatic calibration draft tube |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202223574188.XU CN219586232U (en) | 2022-12-28 | 2022-12-28 | Automatic calibration draft tube |
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| Publication Number | Publication Date |
|---|---|
| CN219586232U true CN219586232U (en) | 2023-08-25 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202223574188.XU Active CN219586232U (en) | 2022-12-28 | 2022-12-28 | Automatic calibration draft tube |
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| CN (1) | CN219586232U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117248266A (en) * | 2023-11-20 | 2023-12-19 | 苏州晨晖智能设备有限公司 | Automatic leveling device for outer guide cylinder of single crystal furnace |
-
2022
- 2022-12-28 CN CN202223574188.XU patent/CN219586232U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117248266A (en) * | 2023-11-20 | 2023-12-19 | 苏州晨晖智能设备有限公司 | Automatic leveling device for outer guide cylinder of single crystal furnace |
| CN117248266B (en) * | 2023-11-20 | 2024-01-26 | 苏州晨晖智能设备有限公司 | Automatic leveling device for outer guide cylinder of single crystal furnace |
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