CN219581315U

CN219581315U - Degumming and inserting sheet cleaning integrated machine

Info

Publication number: CN219581315U
Application number: CN202320316715.2U
Authority: CN
Inventors: 瞿梦成; 白大伟; 武治军; 曹政民; 王大伟; 万遥; 李瑞鹏; 张昌银; 崔伟
Original assignee: Wuxi Zhonghuan Application Material Co ltd
Current assignee: Wuxi Zhonghuan Application Material Co ltd
Priority date: 2023-02-27
Filing date: 2023-02-27
Publication date: 2023-08-25
Anticipated expiration: 2033-02-27

Abstract

The utility model discloses a degumming and inserting sheet cleaning integrated machine which comprises a degumming groove, an inserting sheet mechanism and a cleaning mechanism which are sequentially arranged, wherein a space exists between the degumming groove and the inserting sheet mechanism, a manual passage is formed by the space rows, and a liquid receiving disc is arranged on the manual passage. According to the utility model, the liquid receiving tray is added on the artificial channel to receive residual liquid, so that the sewage accumulation of equipment can be avoided.

Description

Degumming and inserting sheet cleaning integrated machine

Technical Field

The utility model relates to the field of silicon wafers, in particular to a degumming and inserting sheet cleaning integrated machine.

Background

Because the equipment of the degumming inserting sheet cleaning integrated machine is longer, a plurality of equipment are arranged in parallel, one operator needs to control the plurality of equipment, the equipment needs to bypass from one equipment to the other equipment, and the manual passage is arranged between the degumming groove and the inserting sheet mechanism in order that the operator can shuttle between the different equipment. When the manipulator gets the material from the groove that comes unstuck, puts the inserted sheet mechanism department again, material frame and manipulator can drip the raffinate during, cause the inserted sheet that comes unstuck to wash the inside accumulation sewage of all-in-one, corrode equipment, can skid when operating personnel passes simultaneously, has the security risk.

Disclosure of Invention

The utility model aims to provide a degumming inserting sheet cleaning integrated machine.

The utility model has the innovation point that the liquid receiving disc is added on the artificial channel to receive residual liquid, so that the sewage accumulation of equipment can be avoided.

In order to achieve the above purpose, the technical scheme of the utility model is as follows:

the utility model provides an all-in-one is washd to inserted sheet that comes unstuck, including the groove that comes unstuck and inserted sheet mechanism, wiper mechanism that arrange in proper order, its characterized in that comes unstuck and has the interval between groove and the inserted sheet mechanism, and the interval is listed as forming the manual passage, has arranged one on the manual passage and has connect the liquid dish.

The liquid receiving disc is added on the artificial channel to receive residual liquid, so that the sewage accumulated by the equipment can be avoided.

Preferably, the liquid receiving disc comprises a bracket, a fixed disc on the bracket and a rotating disc hinged with the fixed disc, and a driving device for driving the rotating disc to rotate upwards is arranged on the bracket. The rotating disc can be folded upwards when an operator passes through the manual passage, so that a larger passing space is reserved for the operator; and when the liquid is received, the liquid receiving tray is put down, so that the layout area of the liquid receiving tray is increased.

Preferably, the driving device comprises a servo cylinder hinged on the bracket, a piston rod extends out of the servo cylinder, and the piston rod is hinged with the bottom surface of the rotating disc. When the mechanical arm takes out the material frame degumming groove, the servo cylinder can synchronously put down the rotary disk, and the control is accurate.

Preferably, the fixed disk is obliquely arranged, the fixed disk is provided with a water outlet pipe, and the water outlet pipe is positioned at the lower part of the fixed disk. The water on the rotating disk flows to the fixed disk, and the water on the fixed disk flows out from the water outlet pipe.

Preferably, the back end of the degumming groove is provided with a cache groove, the artificial channel is positioned between the cache groove and the inserting sheet mechanism, a water inlet and an overflow port are arranged on the cache groove, and a supporting rod for limiting the material frame is arranged in the cache groove. The buffer tank can clear up the silicon mud and the raffinate on the silicon chip earlier, influences the inserted sheet process, and the silicon chip can not place in the degummed tank for a long time in addition, and easy oxidation when inserted sheet mechanism breaks down, does not have the buffer tank, can lead to the silicon chip to be detained in the degummed tank.

Preferably, a heating pipe is arranged in the buffer tank. The silicon mud is more easily dissolved when the water temperature is kept at about 30 ℃.

The beneficial effects of the utility model are as follows:

1. according to the utility model, the liquid receiving tray is added on the artificial channel to receive residual liquid, so that the sewage accumulation of equipment can be avoided.

2. According to the utility model, the rotary table can be folded upwards when an operator passes through the manual passage, so that a larger passing space is reserved for the operator; and when the liquid is received, the liquid receiving tray is put down, so that the layout area of the liquid receiving tray is increased.

3. The utility model can clean the sludge on the silicon wafer by adding the buffer tank, and can avoid the silicon wafer from being detained in the degumming tank

Drawings

Fig. 1 is a schematic structural view of the present utility model.

Fig. 2 is a schematic structural view of the liquid receiving tray.

Description of the embodiments

The technical solutions of the embodiments of the present utility model will be clearly and completely described below with reference to the accompanying drawings.

Example 1: as shown in fig. 1 and 2, the degumming and inserting sheet cleaning integrated machine comprises a degumming tank 1, an inserting sheet mechanism 2 and a cleaning mechanism 3 which are sequentially arranged, wherein a space exists between the degumming tank 1 and the inserting sheet mechanism 2, a manual passage 4 is formed by the space, a liquid receiving disc 5 is arranged on the manual passage 4, the liquid receiving disc 5 comprises a support 5.1, a fixed disc 5.2 on the support 5.1 and a rotating disc 5.3 hinged with the fixed disc 5.2, a driving device 5.4 for driving the rotating disc 5.3 to rotate upwards is arranged on the support 5.1, the driving device 5.4 comprises a servo cylinder 5.41 hinged on the support 5.1, a piston rod 5.42 extends out from the servo cylinder 5.41, the piston rod 5.42 is hinged with the bottom surface of the rotating disc 5.3, the fixed disc 5.2 is obliquely arranged, a water outlet pipe 5.31 is arranged on the fixed disc 5.3, and the water outlet pipe 5.31 is positioned at the lower position of the fixed disc 5.3; the back end of the degumming tank 1 is provided with a buffer tank 6, the artificial channel 4 is positioned between the buffer tank 6 and the inserting sheet mechanism 2, a water inlet 6.1 and an overflow port 6.2 are arranged on the buffer tank 6, a supporting rod 6.3 for limiting a material frame is arranged in the buffer tank 6, and a heating pipe 6.4 is arranged in the buffer tank 6.

When the automatic feeding device works, the piston rod 5.42 of the servo cylinder 5.41 is retracted, the rotary disc 5.3 is unfolded, the material frame is carried away, the piston rod 5.42 of the servo cylinder 5.41 is retracted, the rotary disc 5.3 is folded upwards, and workers can pass through the manual passage 4.

The described embodiments are only some, but not all, embodiments of the utility model. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.

Claims

1. The utility model provides an all-in-one is washd to inserted sheet that comes unstuck, including the groove that comes unstuck and inserted sheet mechanism, the wiper mechanism that arrange in proper order, there is the interval between groove that comes unstuck and the inserted sheet mechanism, and the interval is listed as and is formed artifical passageway, its characterized in that has arranged a liquid receiving dish on the artifical passageway.

2. The degumming and inserting sheet cleaning integrated machine according to claim 1, wherein the liquid receiving disc comprises a bracket, a fixed disc on the bracket and a rotating disc hinged with the fixed disc, and a driving device for driving the rotating disc to rotate upwards is arranged on the bracket.

3. The degumming and inserting sheet cleaning integrated machine according to claim 2, wherein the driving device comprises a servo cylinder hinged on the bracket, a piston rod extends out of the servo cylinder, and the piston rod is hinged with the bottom surface of the rotating disc.

4. The degumming and inserting piece cleaning integrated machine according to claim 1, wherein the fixed disc is obliquely arranged, and a water outlet pipe is arranged on the fixed disc and is positioned at the lower part of the fixed disc.

5. The degumming and inserting sheet cleaning integrated machine according to claim 1, wherein a buffer tank is arranged at the rear end of the degumming tank, the artificial channel is positioned between the buffer tank and the inserting sheet mechanism, a water inlet and an overflow port are arranged on the buffer tank, and a supporting rod for limiting a material frame is arranged in the buffer tank.

6. The degumming and inserting piece cleaning integrated machine according to claim 5, wherein a heating pipe is arranged in the buffer tank.