CN219574597U

CN219574597U - Mask plate fixing device and photoetching machine

Info

Publication number: CN219574597U
Application number: CN202320561990.0U
Authority: CN
Inventors: 陈庆生; 高建; 李中秋; 马玉彪
Original assignee: Suzhou Shengtuo Semiconductor Technology Co ltd
Current assignee: Suzhou Shengtuo Semiconductor Technology Co ltd
Priority date: 2023-03-21
Filing date: 2023-03-21
Publication date: 2023-08-22
Anticipated expiration: 2033-03-21

Abstract

The utility model provides a mask fixing device and a photoetching machine, wherein the fixing device comprises a fixing piece, an absorbing piece, a tightening mechanism, a first air channel, a second air channel and an elastic sealing ring, wherein the fixing piece is provided with a through hole, the absorbing piece is installed on the fixing piece in a way of penetrating through the through hole downwards, the tightening mechanism is arranged between the absorbing piece and the fixing piece to apply horizontal and vertical downward force to the absorbing piece, the first air channel is arranged in the fixing piece, the second air channel is arranged in the absorbing piece, the tail end of the first air channel is aligned with the head end of the second air channel, when the absorbing piece is pressed down by the vertical downward force, the head end of the second air channel is contacted with the tail end of the first air channel, so that the first air channel and the second air channel are communicated, the absorbing piece can absorb a mask in vacuum, and when the mask is replaced, the fixing piece and the vacuum air channel are not required to be detached, and the operation is simple and convenient.

Description

Mask plate fixing device and photoetching machine

Technical Field

The utility model relates to a mask fixing device and a photoetching machine.

Background

The existing proximity contact lithography machine is designed with a fixing piece and an absorbing piece as a whole, a vacuum groove is formed in the lower end of the absorbing piece, and a negative pressure device is used for vacuumizing the vacuum groove through a vacuum air pipe so as to absorb a mask. However, this design has the following drawbacks: when the mask plate needs to be replaced, the fixing piece needs to be removed and replaced together, the vacuum air pipe connected with the air passage in the fixing piece needs to be removed, the process is repeated when the mask plate is installed again, the whole replacement process is very complicated, the operation is complex, and errors are easy to occur.

Disclosure of Invention

The utility model provides a mask plate fixing device and a photoetching machine, wherein when a mask plate is replaced, an adsorption piece is detached, the fixing piece and a vacuum air pipe do not need to be detached, and a first air passage and a second air passage are automatically conducted after the adsorption piece is installed in place, so that the operation is simple and convenient.

The utility model is realized by the following technical scheme:

the utility model provides a mask fixing device, including the mounting, the absorbing member, support tight mechanism, first gas circuit, second gas circuit and elastic sealing circle, the mounting has the through-hole, the absorbing member passes the through-hole downwards and installs on the mounting, support tight mechanism setting and be in order to apply horizontal and vertical decurrent power to the absorbing member between absorbing member and mounting, first gas circuit sets up in the mounting, the second gas circuit sets up in the absorbing member, first gas circuit end aligns with second gas circuit head end, when the absorbing member is pushed down by vertical decurrent power, second gas circuit head end contacts with first gas circuit end, thereby make first gas circuit and second gas circuit intercommunication, so that absorbing member can the vacuum adsorption mask. In the utility model, the suction fitting and the fixing piece are detachably arranged, and the suction fitting is tightly propped by the propping mechanism, when the mask plate needs to be replaced, the suction fitting can be detached from the fixing piece by loosening the propping mechanism, in the process, the fixing piece does not need to be detached, the vacuum air pipe connected with the first air passage does not need to be detached, the operation steps are greatly simplified, but the suction fitting and the fixing piece are separately arranged, so that the problem to be solved is solved by connecting the first air passage in the fixing piece and the second air passage in the suction fitting in a simplest and reliable way.

Further, still include elastic sealing ring, the mounting upper end is provided with the recess, and elastic sealing ring sets up in the recess and its up end is higher than the recess up end, and elastic sealing ring is located between first gas circuit end and the second gas circuit head end, and when the adsorption equipment was pushed down by vertical decurrent force, elastic sealing ring was compressed down so that first gas circuit and second gas circuit intercommunication. Set up the elastic sealing ring between first gas circuit and second gas circuit, this elastic sealing ring upper end face exceeds the mounting, when the absorbing member does not install in place, first gas circuit and second gas circuit can't communicate, but support tight mechanism still to exert decurrent power to the absorbing member when the level supports tight absorbing member, so can make absorbing member compress elastic sealing ring downwards until first gas circuit and second gas circuit switch on, so need not other means can realize switching on, elastic sealing ring also can avoid gas leakage better, and for the scheme that does not set up elastic sealing ring, the surface smoothness precision of mounting and absorbing member at the processing messenger can be lower, thereby processing cost has been reduced.

Further, support tight mechanism including but the tight piece of support of horizontal telescopic ground setting on the mounting, set up at the first inclined plane of supporting tight piece outer terminal surface, set up at the second inclined plane of adsorbing the piece lateral part and drive the first actuating mechanism who supports tight piece action, first inclined plane matches with the second inclined plane to but the tight piece of horizontal direction supports when making to support tight piece and stretches out, also can apply vertical decurrent force to the adsorbing piece, provides the power of two directions through the cooperation of first inclined plane and second inclined plane, simple structure is reasonable.

Further, first gas circuit includes first horizontal segment and with first horizontal segment intercommunication and the first vertical section of upwards extending, the second gas circuit includes the vertical second vertical section of arranging, with the vertical second horizontal segment of section intercommunication, with the vertical third section of section intercommunication of second, the adsorption equipment bottom is provided with the adsorption groove, the vertical section of third and adsorption groove intercommunication, and the design of first gas circuit and second gas circuit can realize switching on when the adsorption equipment is installed in place automatically, can be convenient for process again.

Further, the mask comprises a plurality of adsorbing parts, and the size of the adsorbing groove on each adsorbing part corresponds to the mask with different sizes. When the mask plates with different sizes need to be replaced, the adsorption parts with corresponding sizes can be replaced, and the adsorption parts with different sizes can be mounted and communicated with the first air passage of the fixing part through adjusting the abutting mechanism, so that the operation is simple and convenient.

Further, the fixing device further comprises a first locating pin arranged between the fixing piece and the adsorbing piece, so that the adsorbing piece is located more accurately during installation.

Further, the device also comprises a supporting frame, the fixing piece is arranged on the supporting frame, and a second locating pin is arranged between the fixing piece and the supporting frame, so that the installation and locating precision of the fixing piece is higher.

The utility model is also realized by the following technical scheme:

a lithographic apparatus comprising a reticle fixture as claimed in any one of the preceding claims.

Drawings

The utility model is described in further detail below with reference to the accompanying drawings.

Fig. 1 is a schematic structural view of the present utility model.

Fig. 2 is a schematic view of the structure of the present utility model with the support frame removed.

Fig. 3 is a schematic view of another structure of the present utility model with the support frame removed.

FIG. 4 is a schematic cross-sectional view of the present utility model with a 6 inch reticle mounted (with the support frame removed).

FIG. 5 is a schematic cross-sectional view of the present utility model with the support frame removed when an 8-inch reticle is mounted.

Fig. 6 is a schematic structural view of the fixing member of the present utility model.

FIG. 7 is a schematic diagram of the suction attachment for an 8 inch reticle of the present utility model.

FIG. 8 is a schematic diagram of a 6 inch reticle corresponding suction member of the present utility model.

Wherein, 1, a supporting frame; 2. a fixing member; 21. a through hole; 22. a first positioning pin; 23. a second positioning pin; 24. a fixing plate; 25. a groove; 3. an absorbing member; 31. an adsorption tank; 4. a tightening mechanism; 41. a tightening block; 42. a first inclined surface; 43. a second inclined surface; 44. a first driving mechanism; 51. a first horizontal segment; 52. a first vertical section; 53. a vertical connection section; 54. a wood plug; 61. a second vertical section; 62. a second horizontal segment; 63. a third vertical section; 7. an elastic sealing ring; 8. and (3) a mask.

Detailed Description

As shown in fig. 1 to 8, the reticle fixing device is used in a lithography machine and comprises a support frame 1, a fixing piece 2, two absorbing pieces 3, two abutting mechanisms 4, a first air passage, a second air passage, an elastic sealing ring 7 and a first positioning pin 22. The fixing piece 2 is arranged on the supporting frame 1, and a second positioning pin 23 is arranged between the fixing piece 2 and the supporting frame 1. The fixing member 2 has a through hole 21, and the edge of the through hole 21 extends inward to form a fixing plate 24, and the adsorbing member 3 is mounted on the fixing member 2 to pass downward through the through hole 21, more specifically, opposite sides of the adsorbing member 3 are fixed to the fixing plate 24 by bolts. The first positioning pin 22 is arranged on the fixing plate 24 and extends upwards, and the absorption part 3 is provided with a corresponding positioning hole for the first positioning pin 22 to penetrate, so that the positioning precision of the absorption part 3 is ensured. The two abutting mechanisms 4 are respectively arranged between the other two sides of the absorbing piece 3 and the fixing piece 2 to apply horizontal and vertical downward force to the absorbing piece 3, the absorbing piece 3 is further fixed by the horizontal force, and the absorbing piece 3 is pressed downwards by the vertical downward force. The first gas circuit is arranged in the fixed part 2, the second gas circuit is arranged in the absorbing part 3, the upper end of the fixed plate 24 is provided with a groove 25, the elastic sealing ring 7 is arranged in the groove 25, the upper end face is higher than the upper end face of the groove 25, the elastic sealing ring 7 is positioned between the tail end of the first gas circuit and the head end of the second gas circuit, when the absorbing part 3 is not installed in place, the elastic sealing ring 7 is higher than the groove 25, the first gas circuit and the second gas circuit are blocked by the elastic sealing ring 7 from being communicated, when the absorbing part 3 is pressed down by vertical downward force, the absorbing part 3 also presses down the elastic sealing ring 7, the elastic sealing ring 7 is compressed to enable the first gas circuit and the second gas circuit to be communicated, the head end of the first gas circuit is connected with an external negative pressure device through a vacuum gas pipe, and after the first gas circuit and the second gas circuit are communicated, the absorbing part 3 can be vacuumized, so that the mask 8 is absorbed.

In another embodiment, the elastic sealing ring 7 is not required, so long as the flatness accuracy of the contact surface of the fixing member 2 and the adsorbing member 3 is ensured, the head end of the second air path is in contact communication with the tail end of the first air path when the adsorbing member is pressed down by a vertical downward force.

In this embodiment, the first air path includes a first horizontal section 51, a first vertical section 52 which communicates with the first horizontal section 51 and extends upward, and a vertical connection section 53 which communicates with the first horizontal section 51 and extends downward to form the fixing member 2, wherein an inlet of the first horizontal section 51 is formed at a side of the fixing member 2, and a wooden plug 54 is provided at the inlet section to seal the inlet, and the vertical connection section 53 is connected with the negative pressure device through a vacuum air pipe. The second air path comprises a second vertical section 61 which is vertically arranged, a second horizontal section 62 which is communicated with the second vertical section 61, and a third vertical section 63 which is communicated with the second horizontal section 62, wherein an inlet of the second horizontal section 62 is arranged on the side edge of the adsorbing member 3, and the inlet section is also provided with a wooden plug 54 for sealing the adsorbing member. The elastic sealing groove is arranged between the first vertical section 52 and the second vertical section 61, the bottom of the adsorbing piece 3 is provided with an adsorbing groove 31, and the third vertical section 63 is communicated with the adsorbing groove 31. Wherein, negative pressure device, vacuum trachea and be connected with first gas circuit all are prior art.

The dimensions of the two suction members 3 are the same, but the suction grooves 31 of the two suction members 3 are different in size to correspond to different sized reticles, in this embodiment, 6-inch and 8-inch reticles, respectively.

The abutting mechanism 4 comprises an abutting block 41 which is horizontally arranged on the fixing piece 2 in a telescopic manner, a first inclined surface 42 which is arranged on the outer end surface of the abutting block 41, a second inclined surface 43 which is arranged on the side part of the adsorbing piece 3, and a first driving mechanism 44 which drives the abutting block 41 to act, wherein the first inclined surface 42 is matched with the second inclined surface 43, so that the abutting block 41 can horizontally abut against the adsorbing piece 3 when extending out, and can apply vertical downward force to the adsorbing piece 3, and the first driving mechanism 44 is an air cylinder in the embodiment. When the reticles 8 with different sizes need to be replaced, the first driving mechanism 44 acts to retract the abutting blocks 41, so that the existing absorbing member 3 can be detached, the fixing member 2 does not need to be detached together as in the prior art, the detachment step is greatly simplified, and errors are less prone to occurring. The adsorbing pieces 3 with different sizes are provided with second air channels, the sizes of the adsorbing pieces 3 corresponding to the mask plates 8 with different sizes are the same, the vacuum grooves at the lower ends of the adsorbing pieces 3 are different corresponding to the different mask plates 8, each adsorbing piece 3 is provided with the second air channel communicated with the vacuum grooves, and the elastic sealing rings 7 can be compressed after the different adsorbing pieces 3 are installed in place so that the first air channels are communicated with the second air channels, so that the mask plates 8 are simpler and more convenient to replace.

The foregoing description is only illustrative of the preferred embodiments of the present utility model and is not to be construed as limiting the scope of the utility model, i.e., the utility model is not to be limited to the details of the claims and the description, but rather is to cover all modifications which are within the scope of the utility model.

Claims

1. A reticle fixation device, characterized in that: including mounting, adsorption equipment, support tight mechanism, first gas circuit, second gas circuit and elastic sealing circle, the mounting has the through-hole, the adsorption equipment passes the through-hole ground downwards and installs on the mounting, support tight mechanism setting between adsorption equipment and mounting in order to apply level and vertical decurrent power to the adsorption equipment, first gas circuit sets up in the mounting, the second gas circuit sets up in the adsorption equipment, first gas circuit end aligns with second gas circuit head end, when the adsorption equipment is pushed down by vertical decurrent power, second gas circuit head end and first gas circuit end contact, thereby make first gas circuit and second gas circuit intercommunication, so that the adsorption equipment can the vacuum adsorption mask.

2. A reticle fixation device according to claim 1, wherein: still include elastic sealing ring, the mounting upper end is provided with the recess, and elastic sealing ring sets up in the recess and its up end is higher than the recess up end, and elastic sealing ring is located between first gas circuit end and the second gas circuit head end, and when the adsorption equipment was pushed down by vertical decurrent force, elastic sealing ring was compressed down so that first gas circuit and second gas circuit intercommunication.

3. A reticle fixation device according to claim 1, wherein: the propping mechanism comprises a propping block which can be horizontally and telescopically arranged on the fixing piece, a first inclined plane which is arranged on the outer end surface of the propping block, a second inclined plane which is arranged on the side part of the adsorption piece and a first driving mechanism which drives the propping block to act, wherein the first inclined plane is matched with the second inclined plane, so that the propping block can horizontally prop against the adsorption piece when extending out, and vertical downward force can be applied to the adsorption piece.

4. A reticle fixation according to claim 1, 2 or 3, wherein: the first gas circuit comprises a first horizontal section and a first vertical section which is communicated with the first horizontal section and extends upwards, the second gas circuit comprises a second vertical section which is vertically arranged, a second horizontal section which is communicated with the second vertical section, and a third vertical section which is communicated with the second horizontal section, an adsorption groove is formed in the bottom of the adsorption piece, and the third vertical section is communicated with the adsorption groove.

5. A reticle fixation according to claim 1, 2 or 3, wherein: comprises a plurality of absorption parts, wherein the size of the absorption groove on each absorption part corresponds to the mask plates with different sizes.

6. A reticle fixation according to claim 1, 2 or 3, wherein: the fixing piece is provided with a first locating pin.

7. A reticle fixation according to claim 1, 2 or 3, wherein: still include braced frame, the mounting sets up on braced frame, is provided with the second locating pin between mounting and the braced frame.

8. A lithographic apparatus, characterized in that: a reticle fixture comprising any one of claims 1-7.