CN219572286U - Temperature guarantee system for developing solution production - Google Patents
Temperature guarantee system for developing solution production Download PDFInfo
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- CN219572286U CN219572286U CN202320727960.2U CN202320727960U CN219572286U CN 219572286 U CN219572286 U CN 219572286U CN 202320727960 U CN202320727960 U CN 202320727960U CN 219572286 U CN219572286 U CN 219572286U
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Abstract
The utility model relates to a temperature guarantee system for developing solution production. The device comprises a plate heat exchanger, a first water storage tank and a second water storage tank, wherein a primary side pipeline of the plate heat exchanger is connected to a heat source boiler, and a secondary side pipeline of the plate heat exchanger is connected to a bottom interface of the first water storage tank; the water distribution pipeline is connected with the water inlet of the second water storage tank, the water inlet of the water pump is connected with the water distribution pipeline, and the water outlet of the water pump is connected with the water collection pipeline; the water outlet of the backwater transfer tank is connected to the water inlet of the water supply transfer tank through a return pipeline; the water inlet of the water return transfer tank is connected with a water return pipeline, and the water outlet of the water supply transfer tank is connected with a plurality of water supply pipelines. The utility model has reasonable structural design and improves the process temperature consistency of a plurality of mixing tanks in large-scale production.
Description
Technical Field
The utility model belongs to the technical field of developing solution production equipment, and particularly relates to a temperature guarantee system for developing solution production.
Background
The developing solution is a chemical solvent commonly used in the electronic industry, is an important wet electronic chemical, and is also one of key raw materials in the manufacturing process of semiconductors, display panels and solar cells. The production process of the developing solution comprises mixing and filling, wherein the mixing refers to weighing and uniformly mixing the components of the developing solution according to the mass ratio, and the filling refers to subpackaging and filling the developing solution product which is qualified after mixing into packaging bottles and packaging barrels.
The mixing production of the developing solution is generally required to be carried out within a certain temperature range, the components of the developing solution are mixed more uniformly at a specific process temperature, the added components such as the active agent can ensure the process activity, and the temperature control of the mixing process generally forms a key element for producing the developing solution product.
The conventional temperature guarantee system is usually an electric heating temperature control device arranged on a mixing tank, and in the large-scale production process of the developing solution, the mode of independently arranging the temperature control devices for a plurality of mixing tanks is generally difficult to ensure the mixing process temperature conditions of the mixing tanks, namely, the process temperature conditions of different mixing tanks in the process of mixing and producing the developing solution in the same batch are difficult to ensure, so that the uniformity of the product quality is influenced. Therefore, a temperature guarantee system adapting to the large-scale production process needs to be developed and designed, and the process temperature consistency of a plurality of mixing tanks during large-scale production of the developing solution is improved.
Disclosure of Invention
The utility model provides a temperature guarantee system for developing solution production, which is reasonable in structural design and capable of improving process temperature consistency of a plurality of mixing tanks in large-scale production, in order to solve the technical problems in the prior art.
The utility model adopts the technical proposal for solving the technical problems in the prior art that: the temperature guaranteeing system for developing solution production comprises a plate heat exchanger, a first water storage tank and a second water storage tank, wherein a primary side pipeline of the plate heat exchanger is connected to a heat source boiler, and a secondary side pipeline of the plate heat exchanger is connected to a bottom interface of the first water storage tank; the water distribution pipeline is connected with the water inlet of the second water storage tank through a water inlet pipe, and the water outlet of the water pump is connected with the water collection pipeline through a water outlet pipe; the water outlet of the backwater transfer tank is connected to the water inlet of the water supply transfer tank through a water supply pipe, and the water outlet of the backwater transfer tank is connected to the water inlet of the first water storage tank through a return pipeline; the water inlet of the water return transfer tank is connected with a water return pipeline, and the water outlet of the water supply transfer tank is connected with a plurality of water supply pipelines.
Preferably: the water pumps are three, so that a first water pump and a second water pump are formed, the water inlets of the water pumps are respectively connected to the water diversion pipeline through the water inlet pipes, and the water outlets of the water pumps are respectively connected to the water collection pipeline through the water outlet pipes.
Preferably: the water supply connecting pipe comprises a main pipeline and two branch pipelines, wherein the end parts of the main pipeline are connected with the top of the first water storage tank, and the end parts of the two branch pipelines are connected with the water diversion pipeline.
Preferably: the water supply pipeline comprises a first water supply pipeline and a second water supply pipeline, and electromagnetic valves are arranged on the first water supply pipeline and the second water supply pipeline.
Preferably: the first water storage tank is a horizontal water storage tank, and the top of the first water storage tank is provided with an exhaust valve; the second water storage tank is a vertical water storage tank, the water inlet of the second water storage tank is arranged at the middle upper part of the side wall and along the tangential direction, and the water outlet of the second water storage tank is arranged at the lower part of the side wall.
Preferably: and heat preservation layers are arranged outside the first water storage tank, the second water storage tank, the backwater transfer tank and the water supply transfer tank.
Preferably: the plate type heat exchanger is directly fixed on the heat exchanger support, and the first water storage tank is installed and fixed on the heat exchanger support by adopting a supporting rod.
Preferably: still include the base and install the circulation support on the base, water pump, water distribution pipeline, water collecting pipe, return water transfer jar and water supply transfer jar are all installed and are fixed on the circulation support.
The utility model has the advantages and positive effects that:
compared with the existing temperature guarantee system, the temperature guarantee system is a system which is suitable for a mixing production process and can provide temperature guarantee for a plurality of mixing tanks at the same time, and the system provides heat source hot water with consistent temperature for the plurality of mixing tanks at the same time, so that the mixing process temperature formed by the plurality of mixing tanks is relatively uniform, the mixing temperature consistency of the developing liquid production can be improved, and the consistency of product quality is ensured.
The temperature guarantee system is provided with the plate heat exchanger, so that return water in the first water storage tank exchanges heat with the circulating high-temperature water source provided by the heat source boiler, temporary storage of hot water is realized, balance of the hot water is promoted through the arrangement of the second water storage tank, collection of hot water returned by each mixing tank is realized through the arrangement of the return water transfer tank, and the technical effects of receiving the hot water from the second water storage tank and simultaneously supplying the hot water to a plurality of mixing tanks are realized through the arrangement of the water supply transfer tank. The temperature guarantee system is a self-circulation system, can provide stable mixing process temperature guarantee for mixing production of the developing solution, and ensures the production quality of the developing solution product.
Drawings
FIG. 1 is a schematic diagram of the structure of the present utility model;
FIG. 2 is a schematic view of the heat exchanger portion of the present utility model;
FIG. 3 is a schematic view of the structure of the circulation part of the present utility model, from an upper perspective;
fig. 4 is a schematic structural view of the circulation part of the present utility model, a lower view.
In the figure:
1. a plate heat exchanger; 2. a primary side pipeline; 3. a first water storage tank; 4. an exhaust valve; 5. a water supply connecting pipe; 6. a water distribution pipeline; 7. a secondary side pipeline; 8. a return line; 9. a base; 10. a heat exchanger support; 11. a water inlet pipe; 12. a first water supply line; 13. a water return line; 14. a second water supply line; 15. a water pump; 16. a circulation bracket; 17. a backwater transfer tank; 18. a water supply transfer tank; 19. a second water storage tank; 20. a water collecting pipe; 21. a water outlet pipe; 22. a water supply pipe.
Detailed Description
In order to further understand the summary, features and advantages of the present utility model, the following examples are set forth in detail.
Referring to fig. 1 and 2, the temperature assurance system for developing solution production of the present utility model includes a plate heat exchanger 1, a first water storage tank 3 and a second water storage tank 19, a primary side pipe 2 of the plate heat exchanger 1 is connected to a heat source boiler, and a secondary side pipe 7 of the plate heat exchanger 1 is connected to a bottom interface of the first water storage tank 3.
As shown in the figure, the plate heat exchanger 1 also comprises a heat exchanger bracket 10, wherein the plate heat exchanger 1 is directly fixed on the heat exchanger bracket 10, and the first water storage tank 3 is fixedly installed on the heat exchanger bracket 10 by adopting a supporting rod.
The plate heat exchanger 1 is used for heat exchange, hot water provided by a heat source boiler circularly flows on the primary side of the plate heat exchanger 1 under the action of a circulating pump (not shown in the figure), hot water in the first water storage tank 3 flows on the secondary side of the plate heat exchanger 1 under the action of the circulating pump (not shown in the figure), heat exchange occurs in the plate heat exchanger 1, and the temperature of the hot water in the first water storage tank 3 rises.
In this embodiment, the first water storage tank 3 is a horizontal water storage tank, and an exhaust valve 4 is provided at the top of the first water storage tank, and the exhaust valve 4 is used for timely exhausting internal steam when the steam pressure in the upper space in the tank rises to a certain extent.
Referring to fig. 3 and 4, it can be seen that:
still include water diversion pipeline 6, water collection pipe 20 and water pump 15, be equipped with between first water storage tank 3 and water diversion pipeline 6 and send water connecting pipe 5, water collection pipe 20 is connected to the water inlet of second water storage tank 19, and the water inlet of water pump 15 is connected to water diversion pipeline 6 through inlet tube 11, and the delivery port of water pump 15 is connected to water collection pipe 20 through outlet pipe 21.
In this embodiment, the water supply connection pipe 5 includes a main pipe and two branch pipes, the end portions of the main pipe are connected with the top of the first water storage tank 3, and the end portions of the two branch pipes are connected with the water diversion pipe 6.
The hot water in the first water storage tank 3 is conveyed to the diversion pipeline 6 through the water conveying connecting pipe 5, and under the action of the water pump 15, the hot water in the diversion pipeline 6 is conveyed to the water collecting pipeline 20 through the water inlet pipe 11 and the water outlet pipe 21, and the hot water in the water collecting pipeline 20 is conveyed to the second water storage tank 19.
In this embodiment, three water pumps 15 are provided to form a dual-purpose pump, the water inlets of each water pump 15 are respectively connected to the water diversion pipeline 6 through the water inlet pipe 11, and the water outlets of each water pump 15 are respectively connected to the water collection pipeline 20 through the water outlet pipe 21. The function of arranging three water pumps 15 with two standby is to improve the operation reliability of the temperature guarantee system, when the water pump 15 fails, the current water pump 15 is controlled to stop and simultaneously start the other water pump 15, the system is guaranteed to be always in a normal running state, stable hot water supply of mixed production is guaranteed, and the process temperature condition of mixed production is guaranteed.
The water supply device further comprises a backwater transfer tank 17 and a water supply transfer tank 18, wherein the water outlet of the second water storage tank 19 is connected to the water inlet of the water supply transfer tank 18 through a water supply pipe 22, and the water outlet of the backwater transfer tank 17 is connected to the water inlet of the first water storage tank 3 through a return pipeline 8.
The second water storage tank 19 is used for temporarily storing hot water and promoting hot water to be uniform, hot water in the second water storage tank 19 is conveyed to the water supply transfer tank 18 through the water conveying pipe 22, the water supply transfer tank 18 is used for uniformly supplying the hot water outwards, the return water transfer tank 17 is used for receiving return water, and the return water is conveyed to the first water storage tank 3 through the return pipeline 8.
In this embodiment, the second water storage tank 19 is a vertical water storage tank, the water inlet of which is disposed at the middle upper portion of the sidewall and the water outlet of which is disposed at the lower portion of the sidewall along the tangential direction. Since the hot water flowing along the water collecting pipe 20 into the second water storage tank 19 is injected into the second water storage tank 19 from the tangential direction, the hot water flows in a ring shape in the second water storage tank 19, and thus it is possible to promote the hot water to become uniform in temperature in the second water storage tank 19.
A water return pipeline 13 is connected to the water inlet of the water return transfer tank 17, and a plurality of water supply pipelines are connected to the water outlet of the water supply transfer tank 18. Wherein, the return water pipeline 13 is connected with the return water mouth of the temperature control pipeline of a plurality of mixing tanks, and each water supply pipeline is connected with the water inlets of the temperature control pipelines of a plurality of mixing tanks, so as to form temperature guarantee water circulation. In this embodiment, the water supply pipeline includes first water supply pipeline 12 and second water supply pipeline 14, all is equipped with the solenoid valve on first water supply pipeline 12 and second water supply pipeline 14, can control the break-make between water supply pipeline and the blending jar temperature control pipeline through the break-make of control each solenoid valve, controls the break-make of temperature guarantee hydrologic cycle promptly. It is conceivable that the number of water supply lines may be adapted according to how many mixing tanks are in-situ.
In this embodiment, as shown in the figure, the water pump device further comprises a base 9 and a circulating bracket 16 arranged on the base 9, and each water pump 15, the water diversion pipeline 6, the water collecting pipeline 20, the backwater transfer tank 17 and the water supply transfer tank 18 are all arranged and fixed on the circulating bracket 16.
In this embodiment, the heat insulation layers are arranged outside the first water storage tank 3, the second water storage tank 19, the backwater transfer tank 17 and the water supply transfer tank 18, so that the heat of the water source dissipated into the surrounding environment is reduced by arranging the heat insulation layers, and the overall energy consumption is reduced.
The working process comprises the following steps:
starting a water pump 15, wherein a water source in the temperature guarantee system forms water circulation between the system and each mixing tank, specifically, a water source flowing out of a first water storage tank 3 enters a water distribution pipeline 6 through a water supply connecting pipe 5, a water source in the water distribution pipeline 6 enters a water collecting pipeline 20 through a water inlet pipe 11 and a water outlet pipe 21, a water source in the water collecting pipeline 20 enters a second water storage tank 19, a water source in the second water storage tank 19 enters a water supply transfer tank 18 through a water supply pipe 22, the water source in the water supply transfer tank 18 is conveyed to temperature control pipelines of a plurality of mixing tanks through each water supply pipeline, the water source reflowed by the temperature control pipelines is converged to a backwater transfer tank 17 through a backwater return pipeline 13, and backwater in the backwater transfer tank 17 is reflowed to the first water storage tank 3 through a backwater return pipeline 8 to form water circulation;
starting a circulating pump between the plate heat exchanger 1 and the heat source boiler, and establishing hot water circulation between the plate heat exchanger 1 and the heat source boiler; through the heat exchange effect of the plate heat exchanger, the water source temperature in the temperature assurance system is gradually increased, deionized water (deionized water is the main component of developing solution) in the mixing tank exchanges heat with hot water provided by the temperature assurance system through a temperature control pipeline on the tank body, the temperature condition of the deionized water in the mixing tank is read through a temperature sensor configured by each mixing tank, and when the temperature reaches the mixing process temperature, other components of the developing solution are added into the mixing tank for stirring and mixing.
Claims (8)
1. A temperature guarantee system for developing solution production is characterized in that: the device comprises a plate heat exchanger (1), a first water storage tank (3) and a second water storage tank (19), wherein a primary side pipeline (2) of the plate heat exchanger (1) is connected to a heat source boiler, and a secondary side pipeline (7) of the plate heat exchanger (1) is connected to a bottom interface of the first water storage tank (3); the water distribution pipeline (6), the water collection pipeline (20) and the water pump (15) are further included, a water delivery connecting pipe (5) is arranged between the first water storage tank (3) and the water distribution pipeline (6), the water collection pipeline (20) is connected to a water inlet of the second water storage tank (19), the water inlet of the water pump (15) is connected to the water distribution pipeline (6) through the water inlet pipe (11), and a water outlet of the water pump (15) is connected to the water collection pipeline (20) through the water outlet pipe (21); the water supply device further comprises a backwater transfer tank (17) and a water supply transfer tank (18), wherein the water outlet of the second water storage tank (19) is connected to the water inlet of the water supply transfer tank (18) through a water supply pipe (22), and the water outlet of the backwater transfer tank (17) is connected to the water inlet of the first water storage tank (3) through a return pipeline (8); a water return pipeline (13) is connected to the water inlet of the water return transfer tank (17), and a plurality of water supply pipelines are connected to the water outlet of the water supply transfer tank (18).
2. The developer solution production temperature assurance system according to claim 1, wherein: the water pumps (15) are arranged in three to form a double-standby mode, the water inlets of the water pumps (15) are respectively connected to the water diversion pipeline (6) through the water inlet pipe (11), and the water outlets of the water pumps (15) are respectively connected to the water collecting pipeline (20) through the water outlet pipe (21).
3. The developer solution production temperature assurance system according to claim 2, characterized in that: the water supply connecting pipe (5) comprises a main pipeline and two branch pipelines, the end parts of the main pipeline are connected with the top of the first water storage tank (3), and the end parts of the two branch pipelines are connected with the water distribution pipeline (6).
4. A temperature assurance system for developing solution production as set forth in claim 3, wherein: the water supply pipeline comprises a first water supply pipeline (12) and a second water supply pipeline (14), and electromagnetic valves are arranged on the first water supply pipeline (12) and the second water supply pipeline (14).
5. The developer solution production temperature assurance system according to claim 4, wherein: the first water storage tank (3) is a horizontal water storage tank, and the top of the first water storage tank is provided with an exhaust valve (4); the second water storage tank (19) is a vertical water storage tank, the water inlet of the second water storage tank is arranged at the middle upper part of the side wall, and the water outlet of the second water storage tank (19) is arranged at the lower part of the side wall along the tangential direction.
6. The developer solution production temperature assurance system according to claim 5, wherein: and heat preservation layers are arranged outside the first water storage tank (3), the second water storage tank (19), the backwater transfer tank (17) and the water supply transfer tank (18).
7. The developer solution production temperature assurance system according to claim 6, wherein: the heat exchanger comprises a heat exchanger support (10), wherein the plate heat exchanger (1) is directly fixed on the heat exchanger support (10), and the first water storage tank (3) is installed and fixed on the heat exchanger support (10) by adopting a supporting rod.
8. The developer solution production temperature assurance system according to claim 7, wherein: the water pump is characterized by further comprising a base (9) and a circulating bracket (16) arranged on the base (9), wherein the water pump (15), the water diversion pipeline (6), the water collecting pipeline (20), the backwater transfer tank (17) and the water supply transfer tank (18) are all arranged and fixed on the circulating bracket (16).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202320727960.2U CN219572286U (en) | 2023-04-05 | 2023-04-05 | Temperature guarantee system for developing solution production |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202320727960.2U CN219572286U (en) | 2023-04-05 | 2023-04-05 | Temperature guarantee system for developing solution production |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN219572286U true CN219572286U (en) | 2023-08-22 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202320727960.2U Active CN219572286U (en) | 2023-04-05 | 2023-04-05 | Temperature guarantee system for developing solution production |
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| Country | Link |
|---|---|
| CN (1) | CN219572286U (en) |
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2023
- 2023-04-05 CN CN202320727960.2U patent/CN219572286U/en active Active
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