CN219553592U - Bearing device for wafer storage box - Google Patents

Abstract

The utility model relates to the technical field of bearing devices, and discloses a bearing device for a wafer storage box, which comprises a bearing platform and a fixing piece; the bearing platform is provided with a bearing surface which is used for bearing the wafer storage box; the fixing pieces are arranged on two sides of the bearing platform and are connected to the same side of the bearing platform, and the two fixing pieces are oppositely arranged along the first direction. According to the bearing device for the wafer storage box, provided by the utility model, through the cooperation of the bearing platform and the fixing pieces, the pressure applied by the wafer storage box to the bearing platform is shared by the two fixing pieces in a combined way, and compared with the situation that a single-side clamping surface bears all the pressure, the fixing pieces bear forces on two sides, so that the deformation of the bearing platform is smaller, the stable transportation of the wafer storage box on the surface of the bearing platform is maintained, the alarm rate of a machine is reduced, the long-time downtime of the machine is prevented, and the conveying efficiency of the wafer storage box is improved.

Description

Bearing device for wafer storage box

Technical Field

The utility model relates to the technical field of semiconductors, in particular to a bearing device for a wafer storage box.

Background

The wafer storage box mainly plays a role in placing and conveying wafers in semiconductor production, in order to simplify transportation and reduce the risk of pollution to the wafers as much as possible, a chip manufacturer utilizes the wafer storage box to carry and store the wafers, so that the wafer storage box should reduce collision and shaking as much as possible in the transportation process, the stability of the internal wafers is kept, and the transportation of the wafer storage box needs to depend on a bearing device, and the wafer storage box is transported on a track by utilizing the bearing device.

The existing bearing device is thin and connected with the track, the bearing device can bear the weight of the wafer storage box only by means of one side of the bearing device, when the existing bearing device bears the wafer storage box, if the bearing weight of the bearing device is overlarge, serious deformation is easy to occur to the bearing device with one side of the bearing device, the wafer storage box is caused to fall down, the inside wafer is damaged, and when the bearing device runs on the track at a high speed, the bearing device which is deformed is easy to collide, safety accidents are caused, and the bearing device is easy to deviate, so that a machine is warned, long-time downtime of the machine is caused, and conveying efficiency of the wafer storage box is influenced.

Therefore, the present utility model needs a carrying device for a wafer storage cassette to improve the deformation of the carrying device.

Disclosure of Invention

In order to achieve the above object, the present utility model provides a carrying device for a wafer storage box, including a carrying platform and a fixing member;

the bearing platform is provided with a bearing surface which is used for bearing the wafer storage box;

the fixing pieces are arranged on two sides of the bearing platform and are connected to the same side of the bearing platform, the two fixing pieces are oppositely arranged along a first direction, an assembly bin for accommodating a rail is arranged between the two fixing pieces along the first direction, and the first direction is perpendicular to the bearing surface.

Optionally, the fixing member is provided with at least two through holes along the first direction, and the through holes are used for installing the sliding member and enabling a part of the sliding member to extend into the sliding groove on the track.

Optionally, the fixing piece is cuboid, the long side of fixing piece with one side of loading platform is connected.

Optionally, the bearing platform is provided with an avoidance groove in a penetrating manner along the first direction, and the avoidance groove penetrates to the bearing surface.

Optionally, the avoidance groove penetrates to one side of the bearing platform away from the fixing piece.

Optionally, the projection of dodging the groove along the first direction is the U type, dodge the groove and have be on a parallel with the first symmetry plane of first direction, dodge the groove with first symmetry plane is the central plane and is symmetrical structure, first symmetry plane is located bearing platform length direction's axis.

Optionally, the carrying device for the wafer storage box further comprises a fixing pin, wherein the fixing pin is arranged on the carrying surface and is used for supporting and limiting the wafer storage box.

Optionally, the fixing leg is a cylinder, and an axis of the fixing leg is parallel to the first direction.

Optionally, the number of the fixing feet is at least three, and each fixing foot is arranged around the avoidance groove.

Optionally, the loading platform includes the main loading board of rectangle and two parallel arrangement's curb plate, two the curb plate respectively perpendicular connect in the relative both sides of main loading board, the mounting is located main loading board with the adjacent side of curb plate, the mounting with two the curb plate is connected.

In the utility model, after the bearing platform and the fixing parts are assembled on the track, the wafer storage box is horizontally placed on the surface of the bearing surface, at the moment, the wafer storage box applies gravity to the bearing platform, the gravity is borne by the two fixing parts in a combined way, the pressure borne by the bearing platform is shared, compared with the pressure borne by the single-side clamping surface, the fixing parts bear two sides, so that the deformation of the bearing platform is smaller, the stable transportation of the wafer storage box on the surface of the bearing platform is kept, the alarm rate of the machine is reduced, the long-time downtime of the machine is prevented, the conveying efficiency of the wafer storage box is improved, in addition, the fixing parts on two sides have more joint surfaces for the track compared with the single-side clamping surface, the gap between the bearing platform and the track is reduced, and the safety is improved.

Drawings

In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings that are required in the embodiments or the description of the prior art will be briefly described, it being obvious that the drawings in the following description are only some embodiments of the utility model, and that other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.

FIG. 1 is a schematic view of a conventional wafer cassette carrier;

FIG. 2 is a schematic view of a carrying device of the wafer cassette of the present utility model;

FIG. 3 is a view showing a state of use of the carrying device of the wafer cassette of the present utility model;

FIG. 4 is a side view of a carrier of the wafer storage cassette of the present utility model;

fig. 5 is a front view of the carrier of the wafer cassette of the present utility model.

In fig. 1-4, 1-load-bearing platform, 101-load-bearing surface, 102-main load-bearing plate, 103-side plate, 2-fixing piece, 3-sliding piece, 4-fixing foot, 5-load-bearing device body, 501-single side clamping surface, 6-single side bolt, 7-track, 701-sliding groove, 8-wafer storage box, 9-avoidance groove, 901-first symmetrical surface, a-first direction.

Detailed Description

The following description of the embodiments of the present utility model will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present utility model, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.

In the utility model, the outer diameter and the inner diameter correspond to the diameter size for a circular structure, the inner diameter refers to the diameter of an inscribed circle of the circular structure for a non-circular structure, and the outer diameter refers to the diameter of an circumscribed circle of the circular structure; the axial direction corresponds to the direction in which the axis is located for a cylindrical rod-like structure, and corresponds to the length direction of the rod-like structure for a non-cylindrical channel;

in the present utility model, "proximal" and "distal" are relative orientations, relative positions, directions of elements or actions with respect to each other from the perspective of an operator using the product, although "proximal" and "distal" are not limiting, in this embodiment, "proximal" and "distal" are the respective ends of the respective parts in the height direction of the absorbent member;

in the present utility model, the terms "upper", "lower", "top", "bottom", "vertical", "horizontal", "lateral", "longitudinal", and the like indicate an azimuth or a positional relationship based on the azimuth or the positional relationship shown in the drawings. These terms are only used to better describe the present utility model and its embodiments and are not intended to limit the scope of the indicated devices, elements or components to the particular orientations or to configure and operate in the particular orientations.

Referring to fig. 1, the conventional carrying device includes a carrying device body 5, the carrying device body 5 has a single-side clamping surface 501 thereon, the single-side clamping surface 501 is configured to be connected with a track 7, a sliding groove 701 is disposed around the track 7, a single-side bolt 6 is disposed on a surface of the single-side clamping surface 501, when the carrying device body 5 is mounted on the track 7, the single-side bolt 6 passes through the single-side clamping surface 501 and is clamped in the sliding groove 701 for connection between the carrying device body 5 and the track 7, so when the carrying device body 5 carries a wafer storage box 8, only the single-side clamping surface 501 is provided on an abutting surface of the carrying device body 5 and the track 7, and the wafer storage box 8 is borne by the single-side clamping surface 501 due to the weight of the wafer storage box 8.

Referring to fig. 2 to 5, in this embodiment, a carrying device for a wafer storage box is provided, including a carrying platform 1 and a fixing member 2, the carrying platform 1 has a carrying surface 101, the carrying surface 101 is used for carrying a wafer storage box 8, when the wafer storage box 8 is carried on the carrying surface 101, the bottom of the wafer storage box 6 is parallel to the carrying surface 101, the fixing member 2 is provided with two fixing members and is connected to the same side of the carrying platform 1, the two fixing members 2 are oppositely arranged along a first direction a, an assembly bin for accommodating a rail 7 is provided between the two fixing members 2 along the first direction a, the first direction a is perpendicular to the carrying surface 101, the fixing member 2 is a cuboid, the long side of the fixing member 2 is connected with one side of the carrying platform 1, and the long side of the fixing member 2 is the same as one side of the carrying platform 1, where the long side is the side of the fixing member 2 is parallel to the side of the length direction of the fixing member 2. Further, in this embodiment, the fixing piece 2 is a plate structure, the fixing piece 2 is perpendicular to the side surface of the carrying platform 1 and is fixedly connected with the side surface of the carrying platform 1, two opposite surfaces of the fixing piece 2 along the first direction a are respectively attached to the top and the bottom of the track 7, when the track 7 is assembled between the two fixing pieces 2, the top and the bottom of the track 7 are parallel to the two opposite surfaces of the fixing pieces 2 along the first direction a, the height of the assembly bin is set to a set height, and the set height can be adaptively adjusted according to the requirement of the use working condition. The setting of setting for can hold the placing and the operation of conventional track 7 in this space in two mounting 2, the four sides of track 7 all are equipped with sliding tray 701, mounting 2 runs through along first direction a and has seted up three through-hole, the through-hole is used for installing slider 3 and makes the part of slider 3 stretch to in the sliding tray 701 on the track 7 for slider 3 can reciprocate along sliding tray 701, slider 3 is used for the connection installation of mounting 2 and track 7. Optionally, the sliding member 3 is a p-type nut, which is a well-known part, and is not described herein in detail, the p-type nut is screwed in the through hole, one end of the p-type nut extends into the sliding groove 701, the end of the p-type nut can slide along the sliding groove 701, and the two fixing members 2 are attached to the top and the bottom of the track 7, so that the bearing platform 1 is located on one side of the track 7 along the first direction a and can move along the track 7.

In other alternative embodiments, two or more through holes may be formed, and the number of the connection between the sliding member 3 and the sliding groove 701 is correspondingly increased, so that the connection is more stable, which is not described herein.

In this embodiment, the carrying platform 1 includes a rectangular main carrying plate 102 and two parallel side plates 103, the two side plates 103 are respectively and perpendicularly connected to two opposite sides of the main carrying plate 102, the fixing member 2 is located on adjacent sides of the main carrying plate 102 and the side plates 103, the fixing member 2 is connected with two side plates 103, one fixing member 2 is connected to a top of a side of the main carrying plate 102, which is far away from the avoidance groove 9, along a first direction a, and the other fixing member 2 is connected to a bottom of a side of the side plate 103, which is far away from the avoidance groove 9, along a first direction a.

In other alternative embodiments, a connecting plate may be disposed between two sides of the side plates 103 away from the avoidance groove 9, and two ends of the connecting plate are connected between two sides of the side plates 103, so as to strengthen two sides of the side plates 103, and improve the connection area between the bearing platform 1 and the fixing element 2, and increase stability, which is not described herein again.

In other alternative embodiments, for the better adaptation different grade type wafer storage box 8 of load-bearing platform 1, load-bearing platform 1 is followed first direction a link up and has been seted up dodge groove 9, dodge groove 9 link up to bearing surface 101, dodge groove 9 link up to load-bearing platform 1 keeps away from one side of mounting 2, dodge groove 9 follows the projection of first direction a is the U type, dodge groove 9 has and is parallel to first direction a's first symmetry plane 901, dodge groove 9 with first symmetry plane 901 is the central plane symmetrical structure, first symmetry plane 901 is located the axis of load-bearing platform 1 length direction is located in order to keep the atress equilibrium of load-bearing platform 1 surface, increase load-bearing platform 1's stability, dodge groove 9 is used for holding the bellied wafer storage box 8 in bottom, makes the arch of wafer storage box 8 bottom can pass dodge groove 9, improves the appearance 1 and for the different load-bearing platform 1 and take the symmetrical structure as the center plane, the first symmetry plane 901 is located the long limit side of load-bearing platform 1, so that the load-bearing platform 1 is placed in the load-bearing platform 8 is better, and the storage box 8 is placed in the load-bearing platform 1 is lighter, the relative to the load-bearing platform 8 is lighter, the storage box 8 is placed in the process.

In other alternative embodiments, the avoidance groove 9 may be formed in the bearing surface 101 along the first direction a, and the avoidance groove 9 may not penetrate through the bearing platform 1, the avoidance groove 9 may have a depth along the first direction a, and the depth of the avoidance groove 9 may be adapted to the protruding size of the bottom of the wafer storage box 8, so that the bearing platform 1 is a continuous whole, and the bearing capacity of the bearing platform 1 is improved.

In other alternative embodiments, the appearance of the fixing member 2 includes, but is not limited to, a cuboid, the fixing member 2 is used for connecting the carrying platform 1 and is provided with an assembly bin for accommodating the rail 7, and since the carrying platform 1 is connected with the rail 7 through the fixing member 2, the fixing member 2 is a stress point between the carrying platform 1 and the rail 7, the fixing member 2 bears the pressure from the wafer storage box 8 to the carrying platform 1, so that the fixing member 2 is a cuboid and better fits with the rail 7, the carrying capacity of the fixing member 2 is increased, and the deformation of the carrying platform 1 after the wafer storage box 8 is placed is reduced; or, mounting 2 can be the lantern ring structure, the inside rectangular assembly storehouse that has of mounting 2 of lantern ring structure, on the mounting 2 overcoat and the track 7 of lantern ring structure when using for mounting 2 parcel is lived track 7, increases the contact surface of mounting 2 and track 7, further reduces the deformation that back load-bearing platform 1 takes place of wafer storage box 8 placement.

Referring to fig. 4, after assembling the carrying platform 1 and the fixing members 2 with the track 7, the wafer storage box 8 is horizontally placed on the surface of the carrying surface 101, at this time, the wafer storage box 8 applies gravity to the carrying platform 1, the gravity is borne by the two fixing members 2 in a combined manner, the pressure borne by the carrying platform 1 is shared along the first direction a, compared with the pressure borne by the carrying device body 5 borne by the single-side clamping surface 501, the fixing members 2 are stressed on two sides, so that the deformation of the carrying platform 1 is smaller, the stable transportation of the wafer storage box 8 on the surface of the carrying platform 1 is maintained, thereby reducing the alarm rate of a machine, preventing the long-time downtime of the machine, improving the transportation efficiency of the wafer storage box 8, and in addition, the fixing members 2 on two sides have more bonding surfaces to the track 7, reducing the gap between the carrying platform 1 and the track 7, and improving the safety.

Referring to fig. 3 and 4, in this embodiment, the carrying device for a wafer storage box further includes a fixing leg 4, the fixing leg 4 is disposed on the surface of the carrying surface 101, the fixing leg 4 is a cylinder, the axis of the fixing leg 4 is parallel to the first direction a, the number of the fixing legs 4 is three, the fixing legs 4 are used for supporting and limiting the wafer storage box 8, each fixing leg 4 surrounds the avoidance groove 9, the three fixing legs 4 are in a triangle shape, a clamping groove is disposed at a corresponding position at the bottom of the wafer storage box 8, when the wafer storage box 8 is disposed at the top of the fixing leg 4, the fixing leg 4 is clamped in the clamping groove, the fixing leg 4 is used for supporting and limiting the wafer storage box 8, and when the carrying surface 101 carries the wafer storage box 8, the center of gravity of the wafer storage box 8 is consistent with the center of the triangle inscribed wafer, so that the wafer storage box 8 is in the corresponding position of the fixing leg 4 on the surface of the fixing leg 4, and the wafer storage box 4 can be kept stably and stably carried on the fixed platform 7 when the wafer storage box 4 is kept stably and stably moved on the fixing platform 4.

In other alternative embodiments, the fixing pins 4 may have more than three numbers, and may be adapted to the clamping grooves at the bottom of the wafer storage cassette 8 of different types, which will not be described herein.

In other alternative embodiments, in order to adapt the fixing pieces 2 to the tracks 7 with different width types, the bearing platform 1 can be set to be of a telescopic two-section structure along the first direction a, the two sections are connected through a screw rod, and the whole height of the bearing platform 1 can be adjusted through the screw rod so as to adjust the distance between the two fixing pieces 2 along the first direction a, thereby being convenient for the fixing pieces 2 to adapt to the tracks 7 with different width types and improving the practicability; or still, mounting 2 sets up the damping hinge along first direction a, after mounting 2 and track 7 equipment, adjusts damping hinge parcel track 7, further increases mounting 2 and track 7's contact surface, better reduction load-bearing platform 1 receives the deformation that takes place behind the wafer storage box 8.

In summary, in the carrying device for a wafer storage cassette provided by the present utility model, the carrying device has the following advantages: through the cooperation setting of loading platform 1 and mounting 2, the pressure that wafer storage box 8 applyed loading platform 1 is shared by two mounting 2 combinations, compares and bears all pressures in unilateral joint face 501, and mounting 2 is both sides atress for loading platform 1 takes place the deformation less, keeps the stable transportation of wafer storage box 8 at loading platform 1 surface, thereby reduces the alarm rate of board, prevents the long-time downtime of board, improves the conveying efficiency of wafer storage box.

In addition, compared with the unilateral clamping surface 501, the fixing piece 2 on the two sides has more bonding surfaces to the track 7, so that the gap between the bearing platform 1 and the track 7 is reduced, and the safety is improved.

Finally, it should be noted that: the foregoing description is only illustrative of the preferred embodiments of the present utility model, and although the present utility model has been described in detail with reference to the foregoing embodiments, it will be apparent to those skilled in the art that modifications may be made to the embodiments described, or equivalents may be substituted for elements thereof, and any modifications, equivalents, improvements or changes may be made without departing from the spirit and principles of the present utility model.

Claims (10)

1. A carrier for a wafer storage cassette, characterized by: comprises a bearing platform and a fixing piece;

the bearing platform is provided with a bearing surface which is used for bearing the wafer storage box;

the fixing pieces are arranged on two sides of the bearing platform and are connected to the same side of the bearing platform, the two fixing pieces are oppositely arranged along a first direction, an assembly bin for accommodating a rail is arranged between the two fixing pieces along the first direction, and the first direction is perpendicular to the bearing surface.

2. The carrier for wafer cassettes as defined in claim 1, wherein: the fixing piece is provided with at least two through holes in a penetrating mode along a first direction, and the through holes are used for installing the sliding piece and enabling a part of the sliding piece to extend into the sliding groove on the track.

3. A carrier for a wafer storage cassette of claim 2, wherein: the mounting is the cuboid, the long limit side of mounting with one side of loading platform is connected.

4. The carrier for wafer cassettes as defined in claim 1, wherein: the bearing platform is provided with an avoidance groove in a penetrating mode along the first direction, and the avoidance groove penetrates to the bearing surface.

5. The carrier for wafer cassettes as defined in claim 4, wherein: the avoidance groove penetrates through one side, far away from the fixing piece, of the bearing platform.

6. The carrier for wafer cassettes as defined in claim 5, wherein: the projection of dodging the groove along the first direction is the U type, dodge the groove and have and be on a parallel with the first symmetry plane of first direction, dodge the groove with first symmetry plane is the central plane and is symmetrical structure, first symmetry plane is located bearing platform length direction's axis.

7. The carrier for wafer cassettes as defined in claim 4, wherein: the bearing device for the wafer storage box further comprises fixing feet, wherein the fixing feet are arranged on the bearing surface and used for supporting and limiting the wafer storage box.

8. The carrier for wafer cassettes as defined in claim 7, wherein: the fixed foot is a cylinder, and the axis of the fixed foot is parallel to the first direction.

9. The carrier for wafer cassettes as defined in claim 7, wherein: the number of the fixing feet is at least three, and each fixing foot is arranged around the avoidance groove.

10. The carrier for wafer cassettes as defined in claim 1, wherein: the bearing platform comprises a rectangular main bearing plate and two side plates which are arranged in parallel, wherein the two side plates are respectively and vertically connected to two opposite sides of the main bearing plate, the fixing piece is positioned on the adjacent sides of the main bearing plate and the side plates, and the fixing piece is connected with the two side plates.