CN212445206U - Mechanical arm for reducing moving stress and wet processing equipment mounting structure - Google Patents
Mechanical arm for reducing moving stress and wet processing equipment mounting structure Download PDFInfo
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- CN212445206U CN212445206U CN202020033151.8U CN202020033151U CN212445206U CN 212445206 U CN212445206 U CN 212445206U CN 202020033151 U CN202020033151 U CN 202020033151U CN 212445206 U CN212445206 U CN 212445206U
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Abstract
The invention discloses a mounting structure of a mechanical arm and wet processing equipment for reducing moving stress, which comprises an equipment frame, a mounting vertical plate and a mechanical arm, wherein the mounting vertical plate is fixedly mounted on the equipment frame, and the mechanical arm is slidably mounted on the mounting vertical plate; the equipment frame is formed by welding hollow metal square steel, two opposite side walls of the metal square steel are respectively provided with a mounting hole in a penetrating manner, a mounting column is arranged between the mounting holes, and one end of the equipment frame is provided with a threaded hole along the axis direction of the equipment frame; the mounting vertical plate is provided with a fixing hole, a stress dispersion hole, a sliding rail and a rack in a penetrating mode, the sliding rail and the rack are arranged along the length direction of the mounting vertical plate, and the fixing hole corresponds to the threaded hole and is fixed through a mounting bolt. The mounting vertical plate can be completely attached to the equipment frame, and the stress dispersion holes and the stepped fixing holes are formed in the mounting vertical plate, so that the corresponding stress on the mounting vertical plate can be dispersed, and the mounting strength is ensured.
Description
Technical Field
The invention belongs to the technical field of wet process equipment, and particularly relates to a mechanical arm for reducing moving stress and a mounting structure of wet process equipment.
Background
In the component process of semiconductor wet process equipment, wafers need to shuttle back and forth among a wafer carrying section, a cleaning process section, a wafer drying process section and a wafer unloading process section through a mechanical arm, so that wafers or wafer boxes loaded with batch wafers are loaded and unloaded in the designated sections. The mechanical arm module is installed on the equipment frame of wet processing equipment through specific mounting means, and the mechanical arm can experience multiple motion behaviors such as shaking and vibration in the long-time, high-frequency use process, leads to stress concentration, and then produces the dislocation phenomenon of equidirectional not. If the robot arm has a small amount of unexpected phenomena such as deflection, vibration, and shaking during the movement process, which may affect the wafer clamping and transferring process, the surface of the wafer product may be unnecessarily damaged. Therefore, it is very important to find an installation matching method with high stability and reduced deviation caused by movement behaviors in the application of wet equipment engineering.
Disclosure of Invention
Aiming at the problems in the prior art, the invention provides a mounting structure of a mechanical arm and wet equipment for reducing the moving stress.
In order to achieve the purpose, the invention adopts the following technical scheme:
the invention provides a mounting structure of a mechanical arm and wet equipment for reducing moving stress, which comprises an equipment frame, a mounting vertical plate and a mechanical arm, wherein the mounting vertical plate is fixedly mounted on the equipment frame, and the mechanical arm is slidably mounted on the mounting vertical plate;
the equipment frame is formed by welding hollow metal square steel, two opposite side walls of the metal square steel are respectively provided with a mounting hole in a penetrating mode, a mounting column is arranged between the mounting holes and fixedly connected with the equipment frame, and one end of the equipment frame is provided with a threaded hole along the axis direction of the equipment frame;
a fixing hole, a stress dispersion hole, a sliding rail and a rack are arranged on the mounting vertical plate in a penetrating manner, the sliding rail and the rack are arranged along the length direction of the mounting vertical plate, and the fixing hole corresponds to the threaded hole and is fixed through a mounting bolt;
the mechanical arm is fixed on the mounting seat, a sliding block and a sliding motor are fixed on one side of the mounting seat, the sliding block is installed in a matched mode with the sliding track, a gear is installed at the output end of the sliding motor, and the gear is connected with the rack in a meshed mode.
Preferably, the sliding track is provided with 2 racks, the two racks are respectively arranged at the heights 1/10 and 9/10 of the installation vertical plate, and the rack is arranged at the height 2/3 of the installation vertical plate.
As a preferred technical scheme, the fixing hole is a stepped hole, and the stress dispersion holes are disposed at the edge of the mounting hole and symmetrically distributed at the upper end and the lower end of the fixing hole.
As a preferred technical scheme, the mounting column is composed of an outer column body and an inner column body, the axes of the outer column body and the inner column body are coincident, the inner column body extends outwards from two ends of the outer column body, the diameter of the inner column body is smaller than that of the outer column body, two ends of the outer column body are provided with groove keyways along the circumferential direction, the groove keyways are arc-shaped, and the inner diameter of the groove keyways is equal to that of the inner column body; the mounting holes comprise a front end mounting hole and a rear end mounting hole, the diameter of the front end mounting hole is equal to that of the inner cylinder, the diameter of the rear end mounting hole is equal to that of the outer cylinder, clamping blocks are arranged at the edges of the front end mounting hole and the rear end mounting hole, the clamping blocks are arc-shaped, the inner diameter of each clamping block is equal to that of the inner cylinder, and the arc length of each clamping block is smaller than that of the groove key groove; the end part of the inner cylinder body at the front end mounting hole is flush with the surface of the equipment frame, a clamping gap is formed between the clamping block at the rear end mounting hole and the groove key groove, a plugging limiting mechanism is arranged at the clamping gap and comprises a plugging ring and a limiting block which are integrally connected, the inner diameter of the plugging ring is equal to the diameter of the inner cylinder body, the outer diameter of the plugging ring is equal to the diameter of the outer cylinder body, the limiting block is matched with the clamping gap, and the plugging ring is welded with the equipment frame.
Preferably, the number of the groove keyways and the number of the clamping blocks are 2, and the groove keyways are symmetrically arranged along the axis of the outer cylinder.
Preferably, the thickness of the engaging block is equal to the depth of the groove key groove, and both end surfaces of the groove key groove and the engaging block are inclined surfaces.
Preferably, the fixing hole is a stepped hole, the diameter of a small hole of the stepped hole is equal to that of the threaded hole, and the diameter of a large hole of the stepped hole is larger than that of the head of the mounting bolt.
As an optimized technical scheme, the mechanical arm comprises a longitudinal lifting mechanism, an opening and closing mechanism, a first clamping arm, a second clamping arm, a first clamping frame and a second clamping frame, wherein the fixed end of the lifting mechanism is installed at the other side of the installation seat, the opening and closing mechanism is installed at the output end of the lifting mechanism, the opening and closing mechanism is connected with the first clamping arm and the second clamping arm and drives the first clamping arm and the second clamping arm to be close to or far away from each other, the first clamping frame is installed on the first clamping arm, the second clamping frame is installed on the second clamping arm, and the first clamping frame and the second clamping frame are used for clamping the wafer box.
As a preferred technical scheme, the longitudinal lifting mechanism is a lifting cylinder, a base of the lifting cylinder is installed on the installation base, an integrated shell is installed at the end part of an output shaft of the lifting cylinder, and the opening and closing mechanism is installed in the integrated shell.
As a preferred technical solution, the opening and closing mechanism includes a first mounting block, a second mounting block, and an interval adjusting block, the first clamping arm is fixedly mounted on the first mounting block, the second clamping arm is fixedly mounted on the second mounting block, a horizontal sliding slot is provided at the bottom of the integrated housing, a horizontal sliding block is respectively provided on the first mounting block and the second mounting block, the horizontal sliding block is fittingly mounted in the horizontal sliding slot, the interval adjusting block is disposed between the first mounting block and the second mounting block, a longitudinal sliding block is provided below the interval adjusting block, the longitudinal sliding block is mounted on a sliding block seat, a longitudinal sliding slot is provided at the lower part of the interval adjusting block, the longitudinal sliding slot is fittingly connected with the longitudinal sliding block, and the width of the interval adjusting block changes with a certain slope along the longitudinal direction, the spacing adjusting block is driven by the adjusting cylinder to move along the length direction of the longitudinal sliding block, rolling wheels are arranged on one sides, close to the spacing adjusting block, of the upper end faces of the first mounting block and the second mounting block, guide blocks are arranged on the first clamping arms and on the second clamping arms and on the two sides of the second mounting block, and telescopic springs are arranged between the guide blocks and the sliding block seats.
Compared with the prior art, the invention has the beneficial effects that:
(1) according to the invention, the mounting column is arranged in the equipment framework, and the equipment framework is formed by combining hollow metal square steel and is only provided with 2mm threads, so that the equipment framework is easily damaged by stress generated by movement of a mechanical arm, and the unobservable positioning deviation is caused. According to the invention, the mounting column is embedded into the equipment frame, and the mounting column can provide enough strength and rigidity, so that the mechanical arm is prevented from shaking in the movement process.
(2) The mounting vertical plate can be completely attached to the equipment frame, and the stress dispersion holes and the stepped fixing holes are formed in the mounting vertical plate, so that the corresponding stress on the mounting vertical plate can be dispersed, and the mounting strength is ensured.
(3) According to the invention, the sliding tracks and the racks are arranged, three sections of stable motion tracks for horizontal movement are provided for the movement of the mechanical arm, the distance ratio between the racks and the two sliding tracks is 1:2, the deflection phenomenon of the mechanical arm module in the Z-axis direction in the horizontal movement process is avoided, and the problem of potential rotation torque of the mechanical arm in the movement process is solved.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the drawings without creative efforts.
FIG. 1 is a schematic view of an installation structure of a robot and a wet processing apparatus according to the present invention.
Fig. 2 is a schematic structural view of a mounting post in the mounting structure of the present invention.
Fig. 3 is a schematic structural view of an apparatus frame in the mounting structure of the present invention.
Fig. 4 is a schematic structural view of a snap block in the mounting structure of the present invention.
Fig. 5 is a schematic structural view of a blocking and limiting mechanism in the mounting structure of the present invention.
Fig. 6 is a schematic structural diagram of a mounting vertical plate in the mounting structure of the present invention.
Fig. 7 is a schematic view of the mounting structure of the mounting post and the equipment frame in the mounting structure of the present invention.
Fig. 8 is a schematic structural diagram of a robot arm in the mounting structure of the present invention.
Fig. 9 is a partially enlarged view of a robot arm in the mounting structure of the present invention.
Wherein the reference numerals are specified as follows: the device comprises a device frame 1, a mounting vertical plate 2, a mechanical arm 3, a mounting column 4, an outer column 5, an inner column 6, a groove key groove 7, a threaded hole 8, metal square steel 9, a mounting hole 10, a front end mounting hole 11, a rear end mounting hole 12, a clamping block 13, a blocking limiting mechanism 14, a blocking ring 15, a limiting block 16, a fixing hole 17, a stress dispersion hole 18, a sliding rail 19, a rack 20, a sliding block 21, a lifting cylinder 22, a wafer box 23, a mounting seat 24, an integrated shell 25, a first clamping arm 26, a first clamping frame 27, a second clamping arm 28, a second clamping frame 29, a sliding motor 30, a spacing adjusting block 31, a sliding block seat 32, a longitudinal sliding block 33, a rolling wheel 34, a guide block 35, a telescopic spring 36, a transverse sliding groove 37, a first mounting block 38 and a second mounting block 39.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be obtained by a person skilled in the art without inventive effort based on the embodiments of the present invention, are within the scope of the present invention.
As shown in fig. 1, the present embodiment provides a mounting structure for a robot arm and a wet processing apparatus, which reduces a moving stress, and includes an apparatus frame 1, a mounting vertical plate 2, and a robot arm 3, where the mounting vertical plate 2 is fixedly mounted on the apparatus frame 1, and the robot arm 3 is slidably mounted on the mounting vertical plate 2.
As shown in fig. 2, the mounting column 4 is composed of an outer column 5 and an inner column 6, the axes of which coincide with each other, and is made of a steel material with high strength, the inner column 6 extends outwards from two ends of the outer column 5, the diameter of the inner column 6 is smaller than that of the outer column 5, and one end of the inner column 6 is provided with a threaded hole 8. The two ends of the outer cylinder 5 are provided with two groove key grooves 7 along the circumferential direction, the two groove key grooves 7 are symmetrical along the axis of the outer cylinder 5, the inner diameter of each groove key groove 7 is equal to the diameter of the inner cylinder 6, and the end surfaces of the two sides of each groove key groove 7 are inclined surfaces.
As shown in fig. 3 and 4, the equipment frame 1 is formed by welding hollow metal square steels 9, mounting holes 10 are provided at mounting points of the mounting columns 4 on the metal square steels 9, and the mounting holes 10 penetrate through two opposite side walls of the metal square steels 9. The mounting holes 10 include a front mounting hole 11 and a rear mounting hole 12. Wherein, the diameter of the front end mounting hole 11 is equal to the diameter of the inner column 6, and the diameter of the rear end mounting hole 12 is equal to the diameter of the outer column 5. The edge of the front end mounting hole 11 and the edge of the rear end mounting hole 12 of the equipment frame 1 are provided with the clamping blocks 13, the clamping blocks 13 are arc-shaped, the clamping blocks 13 are used for being matched with the groove key grooves 7, the end surfaces of the two sides of the groove key grooves 7 are inclined surfaces, the arc length of the clamping blocks 13 is smaller than that of the groove key grooves 7, the inner diameter of each clamping block 13 is equal to the diameter of the groove key groove 7, and the width of each clamping block 13 is equal to the depth of the groove key groove 7.
As shown in fig. 5, the plugging limiting mechanism 14 is made of high-strength steel and includes a plugging ring 15 and a limiting block 16 which are integrally formed, the inner diameter of the plugging ring 15 is equal to the diameter of the inner cylinder 6, the outer diameter of the plugging ring 15 is equal to the diameter of the outer cylinder 5, the limiting block 16 is matched with a clamping gap, and the clamping gap is a gap formed between the clamping block 13 and the groove key groove 7.
As shown in fig. 6, the vertical mounting plate 2 is used for mounting the robot arm 3, and the robot arm 3 can slide in the longitudinal direction of the vertical mounting plate 2. The mounting vertical plate 2 is a straight rectangular plate and is made of a heavy aluminum plate, a fixing hole 17 is formed in the mounting vertical plate 2, the fixing hole 17 is a stepped hole, the diameter of a small hole of the stepped hole is equal to that of a threaded hole 8, and the diameter of a large hole is larger than that of the head of a mounting bolt. Each mounting vertical plate 2 is provided with 2 rows and 3 columns of fixing holes 17. In order to disperse the stress, a stress dispersion hole 18 is provided in the mounting vertical plate 2. Stress dispersion holes 18 are symmetrically formed at the upper end and the lower end of the edge of the fixing hole 17, and since the engagement force between the mounting bolt and the equipment frame 1 is concentrated on the fixing hole 17 and the mounting bolt, the stress dispersion holes 18 are symmetrically formed at the edge of the fixing hole 17 to disperse the stress. One side of the mounting vertical plate 2 is provided with a sliding rail 19 and a rack 20 along the length direction, the sliding rail 19 is provided with 2 bars which are respectively arranged at the height 1/10 and 9/10 of the mounting vertical plate 2, and the rack 20 is arranged at the position 2/3 of the mounting vertical plate 2. Through the arrangement of the sliding rails 19 and the racks 20, three sections of stable motion tracks for horizontal movement are provided for the movement of the mechanical arm 3, the space ratio between the racks 20 and the two sliding rails 19 is 1:2, the phenomenon that a mechanical arm 3 module deflects in the Z-axis direction in the horizontal movement process is avoided, and the problem that potential rotation torque exists in the movement process of the mechanical arm 3 is solved.
The installation process of the mechanical arm 3 and the equipment frame 1 of the wet processing equipment mainly comprises two main steps:
(1) mounting the mounting column 4 with the equipment frame 1; the erection column 4 sets up between two mounting holes 10 and is fixed with equipment frame 1, the length direction of erection column 4 along its axis runs through and is provided with screw hole 8, the tip of cylinder 6 flushes with equipment frame 1's surface in front end mounting hole 11 department, form the block clearance between 12 department block 13 of rear end mounting hole and the groove key ditch 7, stopper 16 of shutoff stop gear 14 sets up in the block clearance, shutoff ring 15 and equipment frame 1 welded connection, with the firm fixed of erection column 4 and equipment frame 1, the tip of cylinder 6 flushes with equipment frame 1's surface in 11 department of front end mounting hole. The schematic structure after installation is shown in fig. 7.
(2) Mounting the vertical mounting plate 2 and the equipment frame 1; the fixing hole 17 on the mounting vertical plate 2 is overlapped with the axis of the threaded hole 8 of the inner column 6 and is fixed through a mounting bolt, and the head of the mounting bolt is screwed into the large hole of the fixing hole 17.
As shown in fig. 8 and 9, the robot arm 3 is fixed on the mounting seat 24, a sliding block 21 and a sliding motor 30 are fixed on one side of the mounting seat 24, the sliding block 21 is installed in cooperation with the sliding rail 19, and a gear is installed at an output end of the sliding motor 30 and is meshed with the rack 20. The mechanical arm 3 comprises a longitudinal lifting mechanism, an opening and closing mechanism, a first clamping arm 26, a second clamping arm 28, a first clamping frame 27 and a second clamping frame 29, wherein the fixed end of the lifting mechanism is installed on the installation base 24, and the opening and closing mechanism is installed at the output end of the lifting mechanism. In this embodiment, the longitudinal lifting mechanism is a lifting cylinder 22, a base of the lifting cylinder 22 is mounted on a mounting base 24, an integrated housing 25 is mounted at an end portion of an output shaft of the lifting cylinder 22, and the opening and closing mechanism is mounted in the integrated housing 25.
The opening and closing mechanism is connected with the first clamping arm 26 and the second clamping arm 28 and drives the first clamping arm 26 and the second clamping arm 28 to approach or depart from each other, the first clamping frame 27 is arranged on the first clamping arm 26, and the second clamping frame 29 is arranged on the second clamping arm 28. The opening and closing mechanism comprises a first mounting block 38, a second mounting block 39 and an interval adjusting block 31, a first clamping arm 26 is fixedly mounted on the first mounting block 38, a second clamping arm 28 is fixedly mounted on the second mounting block 39, a transverse sliding groove 37 is formed in the bottom of the integrated shell 25, transverse sliding blocks are respectively arranged on the first mounting block 38 and the second mounting block 39 and are mounted in the transverse sliding groove 37 in a matched mode, the interval adjusting block 31 is arranged between the first mounting block 38 and the second mounting block 39, and rolling wheels 34 are arranged on one sides, close to the interval adjusting block 31, of the upper end faces of the first mounting block 38 and the second mounting block 39. The lower part of the interval adjusting block 31 is provided with a longitudinal sliding block 33, the longitudinal sliding block 33 is installed on the sliding block seat 32, the lower part of the interval adjusting block 31 is provided with a longitudinal sliding groove, the longitudinal sliding groove is connected with the longitudinal sliding block 33 in a matching mode, the width of the interval adjusting block 31 changes along the longitudinal direction with a certain slope, the whole interval adjusting block is trapezoidal, and the interval adjusting block 31 moves along the length direction of the longitudinal sliding block 33 under the driving of an adjusting cylinder. The guide blocks 35 are provided on the first clamp arm 26 on both sides of the first mounting block 38 and the second clamp arm 28 on both sides of the second mounting block 39, and the extension springs 36 are provided between the guide blocks 35 and the slider holder 32.
The mechanical arm 3 moves along the sliding track 19 under the driving of the sliding cylinder 30, when the mechanical arm moves right above the wafer box 23 and needs to clamp the wafer box 23, the adjusting cylinder drives the distance adjusting block 31 to move along the length direction of the longitudinal sliding block 33, and because the distance adjusting block 31 is trapezoidal, in the moving process of the distance adjusting block 31, the first mounting block 38 and the second mounting block 39 move towards two sides, and the distance between the first clamping arm 26 and the second clamping arm 28 is increased. When the first clamping frame 27 and the second clamping frame 29 are located right above the wafer box 23, the lifting cylinder 22 acts to make the matching positions of the first clamping frame 27 and the second clamping frame 29 and the support lugs descend to the position below the clamping position of the wafer box 23. The adjusting cylinder drives the spacing adjusting block 31 to move, under the elastic force of the extension spring 36, the first clamping arm 26 and the second clamping arm 28 are folded, the lifting cylinder 22 acts to drive the first clamping frame 27 and the second clamping frame 29 to move upwards, the wafer box 23 is lifted up, and the wafer box is conveyed to the process area of the wet processing equipment.
Although the present invention has been described in detail with respect to the above embodiments, it will be understood by those skilled in the art that modifications or improvements based on the disclosure of the present invention may be made without departing from the spirit and scope of the invention, and these modifications and improvements are within the spirit and scope of the invention.
Claims (10)
1. A mounting structure of a mechanical arm and wet processing equipment for reducing moving stress is characterized by comprising an equipment frame, a mounting vertical plate and the mechanical arm, wherein the mounting vertical plate is fixedly mounted on the equipment frame, and the mechanical arm is slidably mounted on the mounting vertical plate;
the equipment frame is formed by welding hollow metal square steel, two opposite side walls of the metal square steel are respectively provided with a mounting hole in a penetrating mode, a mounting column is arranged between the mounting holes and fixedly connected with the equipment frame, and one end of the equipment frame is provided with a threaded hole along the axis direction of the equipment frame;
a fixing hole, a stress dispersion hole, a sliding rail and a rack are arranged on the mounting vertical plate in a penetrating manner, the sliding rail and the rack are arranged along the length direction of the mounting vertical plate, and the fixing hole corresponds to the threaded hole and is fixed through a mounting bolt;
the mechanical arm is fixed on the mounting seat, a sliding block and a sliding motor are fixed on one side of the mounting seat, the sliding block is installed in a matched mode with the sliding track, a gear is installed at the output end of the sliding motor, and the gear is connected with the rack in a meshed mode.
2. The robot and wet processing apparatus mounting structure for reducing movement stress of claim 1, wherein the sliding track is provided with 2 racks respectively disposed at the mounting riser heights 1/10 and 9/10, and the rack is disposed at the mounting riser height 2/3.
3. The mounting structure for a robot arm and a wet processing apparatus with reduced moving stress of claim 1, wherein the stress dispersing holes are disposed at the edge of the mounting hole and symmetrically distributed at the upper and lower ends of the fixing hole.
4. A robot and wet processing apparatus mounting structure for reducing moving stress as claimed in claim 1, wherein the mounting post is composed of an outer cylinder and an inner cylinder whose axes are coincident, the inner cylinder extends outward from both ends of the outer cylinder, the diameter of the inner cylinder is smaller than that of the outer cylinder, both ends of the outer cylinder are provided with a groove along a circumferential direction, the groove is arc-shaped, and the inner diameter of the groove is equal to that of the inner cylinder; the mounting holes comprise a front end mounting hole and a rear end mounting hole, the diameter of the front end mounting hole is equal to that of the inner cylinder, the diameter of the rear end mounting hole is equal to that of the outer cylinder, clamping blocks are arranged at the edges of the front end mounting hole and the rear end mounting hole, the clamping blocks are arc-shaped, the inner diameter of each clamping block is equal to that of the inner cylinder, and the arc length of each clamping block is smaller than that of the groove key groove; the end part of the inner cylinder body at the front end mounting hole is flush with the surface of the equipment frame, a clamping gap is formed between the clamping block at the rear end mounting hole and the groove key groove, a plugging limiting mechanism is arranged at the clamping gap and comprises a plugging ring and a limiting block which are integrally connected, the inner diameter of the plugging ring is equal to the diameter of the inner cylinder body, the outer diameter of the plugging ring is equal to the diameter of the outer cylinder body, the limiting block is matched with the clamping gap, and the plugging ring is welded with the equipment frame.
5. The robot and wet processing apparatus mounting structure for reducing moving stress of claim 4, wherein said groove key groove and said engaging block are provided in 2 number, and said groove key groove is provided symmetrically along the axis of said outer cylinder.
6. The robot and wet processing apparatus mounting structure for reducing movement stress of claim 4, wherein the thickness of said engaging block is equal to the depth of said groove, and both side end faces of said groove and said engaging block are inclined.
7. The robot and wet processing apparatus mounting structure for reducing movement stress of claim 1, wherein the fixing hole is a stepped hole having a small hole diameter equal to a diameter of the threaded hole and a large hole diameter larger than a diameter of the head of the mounting bolt.
8. The mounting structure of a robot arm and a wet processing apparatus for reducing moving stress of claim 1, wherein the robot arm comprises a longitudinal lifting mechanism, an opening and closing mechanism, a first clamping arm, a second clamping arm, a first clamping frame and a second clamping frame, the fixed end of the lifting mechanism is mounted on the other side of the mounting base, the opening and closing mechanism is mounted on the output end of the lifting mechanism, the opening and closing mechanism is connected with the first clamping arm and the second clamping arm and drives the first clamping arm and the second clamping arm to move closer or farther, the first clamping frame is mounted on the first clamping arm, the second clamping frame is mounted on the second clamping arm, and the first clamping frame and the second clamping frame are used for clamping the wafer cassette.
9. The mounting structure for a robot arm and wet processing equipment to reduce moving stress of claim 8, wherein the longitudinal lifting mechanism is a lifting cylinder, a base of the lifting cylinder is mounted on the mounting base, an integrated housing is mounted at an end of an output shaft of the lifting cylinder, and the opening and closing mechanism is mounted in the integrated housing.
10. The mounting structure of a robot arm and a wet processing device for reducing moving stress according to claim 9, wherein the opening and closing mechanism comprises a first mounting block, a second mounting block, and an interval adjusting block, the first clamping arm is fixedly mounted on the first mounting block, the second clamping arm is fixedly mounted on the second mounting block, the bottom of the integrated housing is provided with a transverse sliding slot, the first mounting block and the second mounting block are respectively provided with a transverse sliding block, the transverse sliding block is fittingly mounted in the transverse sliding slot, the interval adjusting block is arranged between the first mounting block and the second mounting block, a longitudinal sliding block is arranged below the interval adjusting block, the longitudinal sliding block is mounted on a sliding block seat, the lower part of the interval adjusting block is provided with a longitudinal sliding slot, and the longitudinal sliding slot is fittingly connected with the longitudinal sliding block, the width of interval regulating block vertically is certain slope change, the interval regulating block is followed under adjusting cylinder's drive the length direction of vertical slider removes, first installation piece the up end of second installation piece is close to one side of interval regulating block is provided with the wheel that rolls, first installation piece both sides on the first centre gripping arm second installation piece both sides be provided with the guide block on the second centre gripping arm, the guide block with be provided with expanding spring between the slider seat.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202020033151.8U CN212445206U (en) | 2020-01-08 | 2020-01-08 | Mechanical arm for reducing moving stress and wet processing equipment mounting structure |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202020033151.8U CN212445206U (en) | 2020-01-08 | 2020-01-08 | Mechanical arm for reducing moving stress and wet processing equipment mounting structure |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117740222A (en) * | 2024-02-21 | 2024-03-22 | 贵州大学 | Wood-like beam prestress testing device |
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2020
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117740222A (en) * | 2024-02-21 | 2024-03-22 | 贵州大学 | Wood-like beam prestress testing device |
| CN117740222B (en) * | 2024-02-21 | 2024-04-26 | 贵州大学 | Wood-like beam prestress testing device |
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