CN111188817B - Wet processing equipment mechanical arm mounting framework and mounting method thereof - Google Patents
Wet processing equipment mechanical arm mounting framework and mounting method thereof Download PDFInfo
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- CN111188817B CN111188817B CN202010017630.5A CN202010017630A CN111188817B CN 111188817 B CN111188817 B CN 111188817B CN 202010017630 A CN202010017630 A CN 202010017630A CN 111188817 B CN111188817 B CN 111188817B
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- 238000000034 method Methods 0.000 title claims abstract description 18
- 229910000831 Steel Inorganic materials 0.000 claims abstract description 31
- 239000010959 steel Substances 0.000 claims abstract description 31
- 239000002184 metal Substances 0.000 claims abstract description 29
- 238000003466 welding Methods 0.000 claims abstract description 7
- 238000009434 installation Methods 0.000 claims description 18
- 239000006185 dispersion Substances 0.000 claims description 13
- 238000004519 manufacturing process Methods 0.000 claims description 5
- 230000007246 mechanism Effects 0.000 claims description 5
- 230000008569 process Effects 0.000 abstract description 9
- 238000010586 diagram Methods 0.000 description 5
- 230000009471 action Effects 0.000 description 2
- 238000010276 construction Methods 0.000 description 2
- 238000011900 installation process Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 208000036829 Device dislocation Diseases 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
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Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16B—DEVICES FOR FASTENING OR SECURING CONSTRUCTIONAL ELEMENTS OR MACHINE PARTS TOGETHER, e.g. NAILS, BOLTS, CIRCLIPS, CLAMPS, CLIPS OR WEDGES; JOINTS OR JOINTING
- F16B1/00—Devices for securing together, or preventing relative movement between, constructional elements or machine parts
- F16B1/02—Means for securing elements of mechanisms after operation
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J11/00—Manipulators not otherwise provided for
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J11/00—Manipulators not otherwise provided for
- B25J11/0095—Manipulators transporting wafers
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Robotics (AREA)
- General Engineering & Computer Science (AREA)
- Manipulator (AREA)
Abstract
The invention discloses a mounting framework of a mechanical arm of wet processing equipment and a mounting method thereof, wherein the mounting framework comprises an equipment frame, a mounting vertical plate, a mounting column and a mounting bolt, the equipment frame is formed by welding hollow metal square steel, a mounting hole is formed in the mounting point position of the metal square steel on the mounting column, the mounting hole penetrates through two opposite side walls of the metal square steel, the mounting column is arranged between the two mounting holes and fixed with the metal square steel, a threaded hole penetrates through one end of the mounting column along the length direction of the central axis of the mounting column, a fixing hole is formed in the mounting vertical plate corresponding to the mounting point position, and when the mounting vertical plate is correspondingly mounted with the equipment frame, the fixing hole is overlapped with the axis of the threaded hole and fixed through the mounting bolt. According to the invention, the mounting column is embedded into the equipment frame, and the mounting column can provide enough strength and rigidity, so that the mechanical arm is prevented from shaking in the movement process.
Description
Technical Field
The invention belongs to the technical field of wet process equipment, and particularly relates to a mounting framework of a mechanical arm of wet process equipment and a mounting method thereof.
Background
The semiconductor wet process equipment is continuously moved at high speed in a wafer loading/unloading area, a cleaning process area and a wafer drying area through a specific mechanical arm device, and the equipment is required to be effectively arranged on a framework of the wet process equipment according to the arrangement of the mechanical arm so as to carry out the arrangement of related modules. In the conventional installation process, the mechanical arms on the wet equipment may have potential equipment deformation danger and device dislocation and offset possibility problems due to the staggered actions in the horizontal movement, vertical lifting movement, action process of clamping a wafer cassette/wafer and high-speed movement process.
Disclosure of Invention
Aiming at the problems in the prior art, the invention provides the mounting framework for the mechanical arm of the wet processing equipment, which can provide enough strong and rigid support for the mechanical arm and avoid the problem of phase dislocation caused by direct mounting of the mounting plate and the equipment framework. In addition, the invention also provides a method for mounting the mounting framework of the mechanical arm of the wet processing equipment.
In order to achieve the purpose, the invention adopts the following technical scheme:
the invention provides a mounting framework for a mechanical arm of wet processing equipment, which comprises an equipment frame, a mounting vertical plate, a mounting column and a mounting bolt, wherein the equipment frame is formed by welding hollow metal square steel, the mounting point of the metal square steel on the mounting column is provided with a mounting hole, the mounting hole penetrates through two opposite side walls of the metal square steel, the mounting column is arranged between the two mounting holes and is fixed with the metal square steel, one end of the mounting column is provided with a threaded hole along the length direction of the axis of the mounting column, the mounting vertical plate is provided with a fixing hole at the corresponding mounting point, and when the mounting vertical plate is correspondingly mounted with the equipment frame, the fixing hole is overlapped with the axis of the threaded hole and is fixed through the mounting bolt.
As a preferred technical scheme, the mounting column is composed of an outer column body and an inner column body, the axes of the outer column body and the inner column body are coincident, the inner column body extends outwards from two ends of the outer column body, the diameter of the inner column body is smaller than that of the outer column body, two ends of the outer column body are provided with groove keyways along the circumferential direction, the groove keyways are arc-shaped, and the inner diameter of the groove keyways is equal to that of the inner column body; the mounting holes comprise a front end mounting hole and a rear end mounting hole, the diameter of the front end mounting hole is equal to that of the inner cylinder, the diameter of the rear end mounting hole is equal to that of the outer cylinder, clamping blocks are arranged at the edges of the front end mounting hole and the rear end mounting hole, the clamping blocks are arc-shaped, the inner diameter of each clamping block is equal to that of the inner cylinder, and the arc length of each clamping block is smaller than that of the groove key groove; the end part of the inner cylinder body at the front end mounting hole is flush with the surface of the equipment frame, a clamping gap is formed between the clamping block at the rear end mounting hole and the groove key groove, a plugging limiting mechanism is arranged at the clamping gap and comprises a plugging ring and a limiting block which are integrally connected, the inner diameter of the plugging ring is equal to the diameter of the inner cylinder body, the outer diameter of the plugging ring is equal to the diameter of the outer cylinder body, the limiting block is matched with the clamping gap, and the plugging ring is welded with the equipment frame.
Preferably, the number of the groove keyways and the number of the clamping blocks are 2, and the groove keyways are symmetrically arranged along the axis of the outer cylinder.
Preferably, the thickness of the engaging block is equal to the depth of the groove.
Preferably, both end surfaces of the groove key groove and the engaging block are inclined surfaces.
Preferably, the fixing hole is a stepped hole, the diameter of a small hole of the stepped hole is equal to that of the threaded hole, and the diameter of a large hole of the stepped hole is larger than that of the head of the mounting bolt.
As a preferred technical scheme, stress dispersion holes are uniformly distributed on the mounting vertical plate.
As a preferred technical scheme, a plurality of mounting vertical plates are arranged on the equipment frame in parallel along the horizontal direction, and each mounting vertical plate is provided with 2 rows and 3 columns of fixing holes.
In a second aspect of the present invention, there is provided a method for mounting a robot arm of a wet processing apparatus, for manufacturing the above-mentioned mounting frame for a robot arm of a wet processing apparatus, including the following steps:
step one, manufacturing an installation column;
step two, before the metal square steel of the equipment frame is formed, mounting holes are formed in the two opposite side walls of the metal square steel, on which the mounting columns need to be fixed, in advance;
step three, correspondingly installing the installation column and the installation hole, fixedly connecting the installation column and the metal square steel, and sequentially welding the side walls to form complete metal square steel;
fourthly, arranging a fixing hole and a stress dispersion hole on the mounting vertical plate at the corresponding mounting position, wherein the edge of the fixing hole is symmetrically provided with the stress dispersion hole;
and step five, fixing the fixing hole and the threaded hole through a mounting bolt.
Compared with the prior art, the invention has the following beneficial effects:
(1) according to the invention, the mounting column is arranged in the equipment framework, and the equipment framework is formed by combining hollow metal square steel and is only provided with 2mm threads, so that the equipment framework is easily damaged by stress generated by movement of a mechanical arm, and the unobservable positioning deviation is caused. According to the invention, the mounting column is embedded into the equipment frame, and the mounting column can provide enough strength and rigidity, so that the mechanical arm is prevented from shaking in the movement process.
(2) The mounting vertical plate can be completely attached to the equipment frame, and the stress dispersion holes and the stepped fixing holes are formed in the mounting vertical plate, so that the corresponding stress on the mounting vertical plate can be dispersed, and the mounting strength is ensured.
(3) According to the invention, the installation column is provided with the groove key groove which can lock the clamping block on the equipment frame and block the deflection stress generated by the motion behavior, and the deflection generated by shaking of the mechanical arm device module can be automatically reset after the installation vertical plate is locked.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the drawings without creative efforts.
FIG. 1 is a schematic structural diagram of a mounting column in a mounting framework of a mechanical arm of a wet processing device.
FIG. 2 is a schematic structural diagram of an apparatus frame in a robot mounting frame of a wet processing apparatus according to the present invention.
Fig. 3 is a schematic structural diagram of a clamping block in a mechanical arm mounting framework of the wet processing equipment.
Fig. 4 is a schematic structural diagram of a blocking and limiting mechanism in a mechanical arm mounting framework of the wet processing equipment.
Fig. 5 is a schematic structural diagram of a mounting vertical plate in a mounting framework of a mechanical arm of the wet processing equipment.
FIG. 6 is a schematic view of an assembly structure of a mounting column in a mounting frame of a robot arm of a wet processing apparatus according to the present invention.
FIG. 7 is a schematic view of the mounting structure of the mounting frame of the robot arm of the wet processing equipment.
Wherein the reference numerals are specified as follows: the device comprises a mounting column 1, an outer column 11, an inner column 12, a threaded hole 13, a groove key groove 14, an equipment frame 2, metal square steel 21, a mounting hole 22, a front end mounting hole 23, a rear end mounting hole 24, a clamping block 25, a plugging limiting mechanism 3, a plugging ring 31, a limiting block 32, a mounting vertical plate 4, a fixing hole 41, a stress dispersion hole 42 and a mechanical arm 5.
Detailed Description
In the description of the present invention, it is to be understood that the terms "longitudinal", "lateral", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", and the like, indicate orientations or positional relationships based on those shown in the drawings, and are used merely for convenience of description and for simplicity of description, and do not indicate or imply that the referenced devices or elements must have a particular orientation, be constructed in a particular orientation, and be operated, and thus, are not to be construed as limiting the present invention.
The embodiment provides a wet processing equipment robotic arm installation skeleton, including equipment frame 2, installation riser 4, erection column 1, construction bolt, wherein, 1 gomphosis of erection column is installed in equipment frame 2, and erection riser 4 passes through construction bolt and 1 fixed connection of erection column to firm fixing is on equipment frame 2. The following is described in detail with reference to the accompanying drawings:
as shown in fig. 1, the mounting column 1 is composed of an outer column body 11 and an inner column body 12, the axes of which are coincident, and is made of a steel material with high strength, the inner column body 12 extends outwards from two ends of the outer column body 11, the diameter of the inner column body 12 is smaller than that of the outer column body 11, and one end of the inner column body 12 is provided with a threaded hole 13. Two groove keyways 14 are arranged at two ends of the outer cylinder 11 along the circumferential direction, the two groove keyways 14 are arranged symmetrically along the axis of the outer cylinder 11, the inner diameter of each groove keyway 14 is equal to the diameter of the inner cylinder 12, and the end surfaces at two sides of each groove keyway 14 are inclined surfaces.
As shown in fig. 2 and 3, the equipment frame 2 is formed by welding hollow metal square steels 21, mounting holes 22 are provided at mounting points of the mounting columns 1 on the metal square steels 21, and the mounting holes 22 are provided through two opposite side walls of the metal square steels 21. The mounting holes 22 include a front mounting hole 23 and a rear mounting hole 24. Wherein, the diameter of the front end mounting hole 23 is equal to the diameter of the inner cylinder 12, and the diameter of the rear end mounting hole 24 is equal to the diameter of the outer cylinder 11. The edge of the front end mounting hole 23 and the edge of the rear end mounting hole 24 of the device frame 2 are provided with clamping blocks 25, the clamping blocks 25 are arc-shaped, the clamping blocks 25 are used for being matched with the groove keyways 14, the end surfaces of the two sides of the groove keyways 14 are inclined surfaces, the arc length of the clamping blocks 25 is smaller than that of the groove keyways 14, the inner diameter of the clamping blocks 25 is equal to the diameter of the groove keyways 14, and the width of the clamping blocks 25 is equal to the depth of the groove keyways 14.
As shown in fig. 4, the plugging limiting mechanism 3 is made of high-strength steel and includes a plugging ring 31 and a limiting block 32 which are integrally formed, the inner diameter of the plugging ring 31 is equal to the diameter of the inner cylinder, the outer diameter of the plugging ring 31 is equal to the diameter of the outer cylinder 11, the limiting block 32 is matched with a clamping gap, and the clamping gap is a gap formed between the clamping block 25 and the groove key groove 14.
As shown in fig. 5, the mounting vertical plate 4 is used for mounting the robot arm 5, and the robot arm 5 can slide in the longitudinal direction of the mounting vertical plate 4. The mounting vertical plate 4 is a straight rectangular plate, a fixing hole 41 is formed in the mounting vertical plate 4, the fixing hole 41 is a step-shaped hole, the diameter of a small hole of the step-shaped hole is equal to that of the threaded hole 13, and the diameter of a large hole of the step-shaped hole is larger than that of the head of the mounting bolt. Each mounting upright plate 4 is provided with 2 rows and 3 columns of fixing holes 41. In order to disperse the stress, a stress dispersion hole 42 is provided in the mounting vertical plate 4. Stress dispersion holes 42 are symmetrically formed at the edge of the fixing hole 41, and since the engagement force of the mounting bolt with the apparatus frame 1 is concentrated on the fixing hole 41 and the mounting bolt, the stress dispersion holes 42 are symmetrically formed at the edge of the fixing hole to disperse the stress.
The installation process of the mechanical arm 5 and the equipment frame 2 of the wet processing equipment mainly comprises two main steps:
(1) mounting the mounting column 1 and the equipment frame 2; the erection column 1 sets up between two mounting holes 22 and is fixed with equipment frame 2, the length direction of erection column 1 along its axis runs through and is provided with screw hole 13, the tip of cylinder 12 flushes with equipment frame 2's surface in front end mounting hole 23 department, form the block clearance between block 25 and the ditch groove key 14 in rear end mounting hole 24 department, the stopper 32 of shutoff stop gear 3 sets up in the block clearance, shutoff ring 31 and equipment frame 2 welded connection, with the firm fixed of erection column 1 and equipment frame 2, the tip of cylinder 12 flushes with equipment frame 2's surface in front end mounting hole 23 department. The mounting structure of the mounting post 1 and the equipment frame 2 is shown in fig. 6.
(2) Mounting the vertical mounting plate 4 and the equipment frame 2; the fixing hole 41 on the mounting vertical plate 4 is superposed with the axis of the threaded hole 13 of the inner column 12 and is fixed by a mounting bolt, and the head of the mounting bolt is screwed into the large hole of the fixing hole 41. The mounting structure is shown in fig. 7.
The embodiment also provides an installation method of the installation framework of the mechanical arm of the wet processing equipment, which comprises the following steps:
step one, manufacturing an installation column 1;
step two, before the metal square steel 21 of the equipment frame 2 is formed, mounting holes 22 are formed in the two opposite side walls of the metal square steel 21, on which the mounting column 1 needs to be fixed, in advance;
step three, correspondingly installing the installation column 1 with the installation hole 22 and fixedly connecting the installation column with the metal square steel 21, and then sequentially welding the side walls to form the complete metal square steel 21;
fourthly, arranging a fixing hole 41 and a stress dispersion hole 42 on the mounting vertical plate 4 at the corresponding mounting position, and symmetrically arranging the stress dispersion hole 42 on the edge of the mounting hole 22;
and step five, fixing the fixing hole 41 and the threaded hole 13 through a mounting bolt.
Although the present invention has been described in detail with respect to the above embodiments, it will be understood by those skilled in the art that modifications or improvements based on the disclosure of the present invention may be made without departing from the spirit and scope of the invention, and these modifications and improvements are within the spirit and scope of the invention.
Claims (9)
1. A mounting framework for a mechanical arm of wet processing equipment is characterized by comprising an equipment frame, a mounting vertical plate, a mounting column and a mounting bolt, wherein the equipment frame is formed by welding hollow metal square steel, the mounting position of the metal square steel on the mounting column is provided with a mounting hole, the mounting hole penetrates through two opposite side walls of the metal square steel, the mounting column is arranged between the two mounting holes and fixed with the metal square steel, the mounting column penetrates through a threaded hole along the length direction of the central axis of the mounting column, the mounting vertical plate is provided with a fixing hole corresponding to the mounting position, and when the mounting vertical plate is correspondingly mounted with the equipment frame, the fixing hole is overlapped with the axis of the threaded hole and fixed through the mounting bolt;
the mounting column consists of an outer column body and an inner column body, the axes of the outer column body and the inner column body are overlapped, the inner column body extends outwards from two ends of the outer column body, the diameter of the inner column body is smaller than that of the outer column body, two ends of the outer column body are provided with groove keyways along the circumferential direction, the groove keyways are arc-shaped, and the inner diameter of the groove keyways is equal to that of the inner column body; the mounting holes comprise a front end mounting hole and a rear end mounting hole, the diameter of the front end mounting hole is equal to that of the inner cylinder, the diameter of the rear end mounting hole is equal to that of the outer cylinder, clamping blocks are arranged at the edges of the front end mounting hole and the rear end mounting hole, the clamping blocks are arc-shaped, the inner diameter of each clamping block is equal to that of the inner cylinder, and the arc length of each clamping block is smaller than that of the groove key groove; the end part of the inner cylinder body at the front end mounting hole is flush with the surface of the equipment frame, a clamping gap is formed between the clamping block at the rear end mounting hole and the groove key groove, a plugging limiting mechanism is arranged at the clamping gap and comprises a plugging ring and a limiting block which are integrally connected, the inner diameter of the plugging ring is equal to the diameter of the inner cylinder body, the outer diameter of the plugging ring is equal to the diameter of the outer cylinder body, the limiting block is matched with the clamping gap, and the plugging ring is welded with the equipment frame.
2. The wet processing equipment mechanical arm mounting framework as recited in claim 1, wherein the number of the groove keyways and the number of the clamping blocks are 2, and the groove keyways are symmetrically arranged along the axis of the outer cylinder.
3. The wet processing apparatus robot mounting skeleton of claim 1, wherein the thickness of the snap block is equal to the depth of the slot keyway.
4. The wet processing equipment manipulator arm mounting frame of claim 1, wherein the groove keyways and the two side end surfaces of the clamping block are inclined surfaces.
5. The wet processing equipment manipulator arm mounting skeleton of claim 1, wherein the fixing hole is a stepped hole, the diameter of the small hole of the stepped hole is equal to the diameter of the threaded hole, and the diameter of the large hole is larger than the diameter of the head of the mounting bolt.
6. The wet processing equipment mechanical arm mounting framework of claim 1, wherein stress dispersion holes are uniformly distributed on the mounting vertical plate.
7. The mounting frame for a robot arm of a wet processing apparatus according to claim 1, wherein a plurality of mounting vertical plates are arranged side by side along a horizontal direction on the apparatus frame, and each mounting vertical plate is provided with 2 rows and 3 columns of the fixing holes.
8. A method for mounting a manipulator arm mounting framework of a wet processing device, which is used for manufacturing the manipulator arm mounting framework of the wet processing device as claimed in any one of claims 1 to 7, and is characterized by comprising the following steps:
step one, manufacturing an installation column;
step two, before the metal square steel of the equipment frame is formed, mounting holes are formed in the two opposite side walls of the metal square steel, on which the mounting columns need to be fixed, in advance;
step three, correspondingly installing the installation column and the installation hole, fixedly connecting the installation column and the metal square steel, and sequentially welding the side walls to form complete metal square steel;
fourthly, arranging a fixing hole on the mounting vertical plate corresponding to the mounting position;
and step five, fixing the fixing hole and the threaded hole through a mounting bolt.
9. The method for installing a manipulator arm mounting frame of a wet processing apparatus according to claim 8, wherein in the fourth step, when the vertical mounting plate is provided with the fixing holes, the stress dispersion holes are simultaneously provided, and the edges of the fixing holes are symmetrically provided with the stress dispersion holes.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010017630.5A CN111188817B (en) | 2020-01-08 | 2020-01-08 | Wet processing equipment mechanical arm mounting framework and mounting method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010017630.5A CN111188817B (en) | 2020-01-08 | 2020-01-08 | Wet processing equipment mechanical arm mounting framework and mounting method thereof |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN111188817A CN111188817A (en) | 2020-05-22 |
| CN111188817B true CN111188817B (en) | 2021-11-05 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202010017630.5A Active CN111188817B (en) | 2020-01-08 | 2020-01-08 | Wet processing equipment mechanical arm mounting framework and mounting method thereof |
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| CN (1) | CN111188817B (en) |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3871784A (en) * | 1973-03-21 | 1975-03-18 | Horn James Van | Bracket support structure |
| EP1285869B1 (en) * | 2001-08-21 | 2007-06-27 | Itoh Electric Company Limited | Shaft fastening structure and roller unit mounting structure |
| CN202170911U (en) * | 2011-07-08 | 2012-03-21 | 洪跃定 | Joint head |
| CN103148072A (en) * | 2013-03-11 | 2013-06-12 | 苏州市奥杰汽车技术有限公司 | Connecting structure for square tube aluminum profiles |
| CN204868908U (en) * | 2015-07-08 | 2015-12-16 | 聊城大学 | Manipulator frame |
| CN207824864U (en) * | 2017-12-18 | 2018-09-07 | 天津市合众聚生科技有限公司 | A kind of tooling for installation manipulator |
| CN109093608A (en) * | 2018-10-12 | 2018-12-28 | 安徽海思达机器人有限公司 | A kind of box taking machine tool hand |
| CN208892058U (en) * | 2018-06-28 | 2019-05-24 | 厦门弘睦达生活科技有限公司 | A kind of connecting tube for brandreth bedrest |
-
2020
- 2020-01-08 CN CN202010017630.5A patent/CN111188817B/en active Active
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3871784A (en) * | 1973-03-21 | 1975-03-18 | Horn James Van | Bracket support structure |
| EP1285869B1 (en) * | 2001-08-21 | 2007-06-27 | Itoh Electric Company Limited | Shaft fastening structure and roller unit mounting structure |
| CN202170911U (en) * | 2011-07-08 | 2012-03-21 | 洪跃定 | Joint head |
| CN103148072A (en) * | 2013-03-11 | 2013-06-12 | 苏州市奥杰汽车技术有限公司 | Connecting structure for square tube aluminum profiles |
| CN204868908U (en) * | 2015-07-08 | 2015-12-16 | 聊城大学 | Manipulator frame |
| CN207824864U (en) * | 2017-12-18 | 2018-09-07 | 天津市合众聚生科技有限公司 | A kind of tooling for installation manipulator |
| CN208892058U (en) * | 2018-06-28 | 2019-05-24 | 厦门弘睦达生活科技有限公司 | A kind of connecting tube for brandreth bedrest |
| CN109093608A (en) * | 2018-10-12 | 2018-12-28 | 安徽海思达机器人有限公司 | A kind of box taking machine tool hand |
Also Published As
| Publication number | Publication date |
|---|---|
| CN111188817A (en) | 2020-05-22 |
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