CN219534470U - Chip crater analytical instrument - Google Patents

Chip crater analytical instrument Download PDF

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Publication number
CN219534470U
CN219534470U CN202320414838.XU CN202320414838U CN219534470U CN 219534470 U CN219534470 U CN 219534470U CN 202320414838 U CN202320414838 U CN 202320414838U CN 219534470 U CN219534470 U CN 219534470U
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CN
China
Prior art keywords
chip
groove
fixedly connected
electric telescopic
corrosion
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CN202320414838.XU
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Chinese (zh)
Inventor
刘臻
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Hefei Juyue Detection Technology Co ltd
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Hefei Juyue Detection Technology Co ltd
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    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/10Greenhouse gas [GHG] capture, material saving, heat recovery or other energy efficient measures, e.g. motor control, characterised by manufacturing processes, e.g. for rolling metal or metal working

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  • Testing Resistance To Weather, Investigating Materials By Mechanical Methods (AREA)

Abstract

The utility model provides a chip pit analysis instrument applied to the field of chip pit tests, which comprises an instrument support, wherein a chip inlet is formed in the top end of the instrument support, a roll shaft is fixedly connected to the inner wall of the instrument support, and the purposes that a first electric telescopic rod is moved to the position right below the chip inlet through a chute, the first electric telescopic rod is turned over and then opened to extend to the position corresponding to the chip inlet, a chip clamp on the first electric telescopic rod is clamped at the moment, an electric sliding rail is opened to enable the first rotary shaft to move left to the position right above a corrosion groove, then the first electric telescopic rod is moved to soak the chip placing clamp groove, the chip clamp position is moved to return to the clean water groove after the chip is separated from a substrate, and then the third rotary shaft is turned over to the drying box for drying are achieved, so that the purposes of automatic corrosion process in the whole process and potential safety hazards caused by manual operation and corrosion liquid are effectively avoided.

Description

Chip crater analytical instrument
Technical Field
The utility model relates to the field of chip pit tests, in particular to a chip pit analysis instrument.
Background
In the flip-chip technology, the connection between the gold bump of the chip and the substrate is the most basic guarantee of packaging, and is also an important ring. In order to monitor the connection point of the chip and the substrate, it is necessary to perform a pit experiment in the quality inspection project. After wirebonding or flip-chip bonding is completed, the product is soaked into strong acid or alkali solution to separate the chip from the substrate, the chip naturally separates the substrate without external force interference, and then the bonding pad of the chip is observed, and whether the current technological parameters need to be adjusted is confirmed by checking whether the bonding pad is damaged or not and the phenomenon of the pit.
The traditional corrosion is purely manual operation at present, the used strong acid or strong alkali also has certain potential safety hazard, and the manual operation experience of each person is different, if the corrosion effect is poor, the experimental result is unstable.
Therefore, the chip pit analysis instrument with the automatic corrosion device is provided, the potential safety hazard problem caused by corrosion liquid can be effectively avoided, and the problem of unstable experimental results caused by inaccurate manual operation is solved.
Disclosure of Invention
Compared with the prior art, the chip pit analysis instrument provided by the utility model has the advantages that the problem that the experiment result is unstable due to insufficient precision of manual operation caused by potential safety hazards is solved, a chip inlet is formed in the top end of an instrument support, a roll shaft is fixedly connected to the inner wall of the instrument support, two groups of material taking structures are arranged on the outer wall of the roll shaft, each material taking structure comprises a first rotating shaft and a second rotating shaft which are sleeved on the roll shaft, a fourth rotating shaft and a third rotating shaft are respectively sleeved on the first rotating shaft and the second rotating shaft, a first electric telescopic rod and a second electric telescopic rod are respectively and fixedly connected to the outer wall of the fourth rotating shaft, a chip clamp is symmetrically and fixedly connected to the inner wall of each of the first electric telescopic rod and the inner wall of the second electric telescopic rod, a corrosion groove is formed under each first electric telescopic rod, a clear water groove is fixedly connected to the upper part of the instrument support, a drying box is fixedly connected to the upper part of each of the instrument support, a sealing cover is slidably connected to the top end of each corrosion groove, the corrosion groove is filled with corrosion liquid, clear water is filled in each clear water groove is filled in each corrosion groove, and a water exchanging port is formed in each corrosion groove and the left end of each corrosion groove.
When the chip is subjected to the pit inspection, the chip needs to be corroded and separated from the substrate, whether a pit phenomenon exists in a bonding pad or not is conveniently observed at the back, at the moment, the first electric telescopic rod is moved to the position right below the chip inlet through the chute, the first electric telescopic rod is turned over for one hundred eighty degrees and then is opened to extend to the position corresponding to the chip inlet, at the moment, the chip is clamped on a chip clamp on the first electric telescopic rod placed at the chip inlet, the electric sliding rail is opened to enable the first rotary shaft to move left to the position right above the corrosion groove, then the first electric telescopic rod is moved to place the chip on the clamp groove, the heating pipe is opened to heat the corrosion liquid, the temperature sensor senses the temperature of the corrosion liquid in the corrosion groove, after the set temperature is reached, the temperature sensor automatically stops heating, after the chip is separated from the substrate, the second rotary shaft is moved to enable the second electric telescopic rod to return to the position of the chip clamp and to be cleaned in the clean water groove, and then the chip is turned over to the drying box through the third rotary shaft, so that the purpose of preventing the potential safety hazards caused by manual operation in the whole process is effectively achieved.
Further, the vent has been seted up to stoving incasement wall, and fixedly connected with drying apparatus in the vent, through setting up vent and drying apparatus, is convenient for weather the water stain on the chip fast to improve work efficiency.
Further, the inside bottom fixedly connected with of corrosion tank presss from both sides the groove, presss from both sides the centre gripping in groove and has the chip, and corrosion tank inner wall fixedly connected with heating pipe, corrosion tank outer wall fixedly connected with time temperature-sensing ware is convenient for pick up the chip centre gripping through setting up the clamp groove, and through setting up heating pipe and temperature-sensing ware, the accurate temperature of control corrosive liquid of being convenient for to it is more stable to reach experimental result.
Further, instrument support left end fixedly connected with protective housing is provided with the generator in the protective housing, through setting up the generator, the drive of the electronic slide rail in the back and pivot of being convenient for control to reach the effect of orderly accomplishing every link operation.
Further, instrument support lateral wall fixedly connected with controller, and the controller passes through wire and generator electric connection, through setting up the controller, the machine operation of the different links of control of being convenient for.
Further, the spout has been seted up to the roller outer wall, and equal fixedly connected with electronic slide rail of first pivot and second pivot inner wall, and electronic slide rail and spout sliding connection are through being provided with the spout, are convenient for remove fourth pivot and third pivot to pick up the transposition purpose to the chip.
Compared with the prior art, the utility model has the advantages that:
(1) When the chip is subjected to the pit inspection, the chip needs to be corroded and separated from the substrate, whether a pit phenomenon exists in a bonding pad or not is conveniently observed at the back, at the moment, the first electric telescopic rod is moved to the position right below the chip inlet through the chute, the first electric telescopic rod is turned over for one hundred eighty degrees and then is opened to extend to the position corresponding to the chip inlet, at the moment, the chip is clamped on a chip clamp on the first electric telescopic rod placed at the chip inlet, the electric sliding rail is opened to enable the first rotary shaft to move left to the position right above the corrosion groove, then the first electric telescopic rod is moved to place the chip on the clamp groove, the heating pipe is opened to heat the corrosion liquid, the temperature sensor senses the temperature of the corrosion liquid in the corrosion groove, after the set temperature is reached, the temperature sensor automatically stops heating, after the chip is separated from the substrate, the second rotary shaft is moved to enable the second electric telescopic rod to return to the position of the chip clamp and to be cleaned in the clean water groove, and then the chip is turned over to the drying box through the third rotary shaft, so that the purpose of preventing the potential safety hazards caused by manual operation in the whole process is effectively achieved.
(2) Through setting up vent and drying apparatus, be convenient for weather the water stain on the chip fast to improve work efficiency.
(3) The chip clamping device has the advantages that the chip clamping device is convenient to pick up the chip through the clamping groove, and the temperature of the corrosive liquid is convenient to accurately control through the heating pipe and the temperature sensor, so that the experimental result is more stable.
(4) Through setting up the generator, the drive of the electronic slide rail in the back and pivot of being convenient for control to reach the effect of orderly accomplishing every link operation.
(5) By arranging the controller, the machine operation of different links can be conveniently controlled.
(6) Through being provided with the spout, be convenient for remove fourth pivot and third pivot to pick up the transposition purpose to the chip.
Drawings
FIG. 1 is an axial view of a corrosion apparatus of the present utility model;
FIG. 2 is a front cross-sectional view of the corrosion apparatus of the present utility model;
FIG. 3 is an enlarged view of FIG. 2A in accordance with the present utility model;
fig. 4 is an enlarged view of a portion of a chip clip of the present utility model.
The reference numerals in the figures illustrate:
1. an instrument holder; 2. a chip inlet; 3. a first rotating shaft; 4. a roll shaft; 5. a fourth rotating shaft; 6. a first electric telescopic rod; 7. a second rotating shaft; 8. a second electric telescopic rod; 9. a drying box; 10. a corrosion groove; 11. a clamping groove; 12. a chip clamp; 13. a third rotating shaft; 14. a chip; 15. a clean water tank; 16. a protective box; 17. a generator; 18. sealing cover 19, heating pipe.
Detailed Description
The embodiments of the present utility model will be described in detail and fully with reference to the accompanying drawings, and it is intended that all other embodiments of the utility model, which are apparent to one skilled in the art without the inventive faculty, are included in the scope of the present utility model.
Example 1:
the utility model provides a chip pit analysis instrument, please refer to fig. 1-4, which comprises an instrument support 1, wherein a chip inlet 2 is formed in the top end of the instrument support 1, a roll shaft 4 is fixedly connected to the inner wall of the instrument support 1, two groups of material taking structures are arranged on the outer wall of the roll shaft 4, each material taking structure comprises a first rotating shaft 3 and a second rotating shaft 7 which are sleeved on the roll shaft 4, a fourth rotating shaft 5 and a third rotating shaft 13 are sleeved on the first rotating shaft 3 and the second rotating shaft 7 respectively, the outer walls of the fourth rotating shaft 5 and the third rotating shaft 13 are fixedly connected with a first electric telescopic rod 6 and a second electric telescopic rod 8 respectively, chip clamps 12 are symmetrically and fixedly connected to the inner walls of the first electric telescopic rod 6 and the second electric telescopic rod 8, a corrosion groove 10 is arranged under the first electric telescopic rod 6, the corrosion groove 10 is fixedly arranged on the ground, a drying box 9 is fixedly connected under the second electric telescopic rod 8, a sealing cover 18 is slidingly connected to the top end of the corrosion groove 10, a clear water gap is filled in the corrosion groove 15, and a clear water exchanging groove 15 is formed between the corrosion groove 10 and the left end of the clean water gap is formed.
When the chip 14 can be detected by the bullet hole, the chip 14 needs to be corroded and separated from the base plate, whether the bullet hole phenomenon exists in the bonding pad or not is convenient to observe at the back, at the moment, the first electric telescopic rod 6 is moved to the position right below the chip inlet 2 through the sliding groove, the first electric telescopic rod 6 is opened to extend to the position corresponding to the chip inlet 2 after the first electric telescopic rod 6 is overturned for one hundred eighty degrees, at the moment, the chip 14 is placed on the chip clamp 12 on the first electric telescopic rod 6 from the chip inlet 2, the first rotating shaft 3 is moved to the right above the corrosion groove 10 through opening the electric sliding rail, then the chip 14 is placed on the clamp groove 11 through moving the first electric telescopic rod 6, the heating pipe 19 is opened for heating the corrosion liquid, the temperature sensor senses the temperature of the corrosion liquid in the corrosion groove 10, the heating is automatically stopped after the set temperature is reached, the chip 14 is separated from the base plate, the second rotating shaft 7 is moved so that the second electric telescopic rod 8 returns to the position of the chip 14 to the position of the clean water groove 15, the chip 14 is placed in the clean water groove 15 for cleaning, and then the rotating shaft 13 is overturned through the third rotating shaft 9, the full-drying process is effectively performed, and the hidden danger of drying is avoided.
Referring to fig. 1-2 and 4, the left end of the instrument support 1 is fixedly connected with a protection box 16, a generator 17 is arranged in the protection box 16, a controller is fixedly connected with the side wall of the instrument support 1, the controller is electrically connected with the generator 17 through a wire, a chute is formed in the outer wall of the roll shaft 4, electric sliding rails are fixedly connected with the inner walls of the first rotating shaft 3 and the second rotating shaft 7, the electric sliding rails are in sliding connection with the chute, and the generator 17 and the controller are arranged to facilitate control of driving of the electric sliding rails and the rotating shafts at the back, so that the effect of orderly completing operation of each link is achieved.
In which the same or corresponding parts as those in embodiment 1 are denoted by the corresponding reference numerals as those in embodiment 1, only the points of distinction from embodiment 1 will be described below for the sake of brevity. This embodiment 2 is different from embodiment 1 in that:
example 2:
the utility model provides a chip pit analyzer, referring to fig. 1-4, a ventilation opening is formed in the inner wall of a drying box 9, a dryer is fixedly connected in the ventilation opening, a clamping groove 11 is fixedly connected to the bottom end in an etching groove 10, a chip 14 is clamped on the clamping groove 11, a heating pipe 19 is fixedly connected to the inner wall of the etching groove 10, and a time temperature sensor is fixedly connected to the outer wall of the etching groove 10.
The scheme can be realized by placing the chip 14 on the clamping groove 11 in the corrosion groove 10 for soaking and corrosion, closing the sealing cover 18, enabling the corrosion groove 10 to be in a sealing state, simultaneously opening the heating pipe 19 to heat the corrosion liquid of the corrosion groove, automatically heating the corrosion liquid after heating to a set temperature, opening the sealing cover 18 to take out the chip 14 after being separated from the substrate body after soaking, placing the chip 14 in the clean water groove 15 for cleaning, then placing the chip 14 in the drying box 9 for drying by rotating, and facilitating the later inspection of the damage phenomenon of the pits on the bonding pads.
The foregoing is merely illustrative of the best modes of carrying out the utility model in connection with the actual requirements, and the scope of the utility model is not limited thereto.

Claims (6)

1. The utility model provides a chip pit analysis instrument, includes instrument support (1), its characterized in that, chip entry (2) have been seted up on instrument support (1) top, instrument support (1) inner wall fixedly connected with roller (4), roller (4) outer wall is provided with two sets of material taking structure, material taking structure is including first pivot (3) and second pivot (7) of cover on roller (4), first pivot (3) and second pivot (7) are overlapped respectively and are equipped with fourth pivot (5) and third pivot (13), fourth pivot (5) and third pivot (13) outer wall fixedly connected with first electric telescopic handle (6) and second electric telescopic handle (8) respectively, equal symmetry fixedly connected with chip clamp (12) of first electric telescopic handle (6) and second electric telescopic handle (8) inner wall, be equipped with corrosion groove (10) under second electric telescopic handle (8) fixedly connected with clear water groove (15) directly under, be located in corrosion groove (15) top (10) of support (1), corrosion groove (10) are filled with in the dry-off seal top (18), and the left ends of the corrosion groove (10) and the clean water groove (15) are provided with water exchanging ports.
2. The chip pit analysis instrument according to claim 1, wherein a vent is provided in the inner wall of the drying box (9), and a dryer is fixedly connected in the vent.
3. The chip pit analysis instrument according to claim 1, wherein the bottom end inside the corrosion groove (10) is fixedly connected with a clamping groove (11), a chip (14) is clamped on the clamping groove (11), a heating pipe (19) is fixedly connected to the inner wall of the corrosion groove (10), and a time temperature sensor is fixedly connected to the outer wall of the corrosion groove (10).
4. The chip pit analysis instrument according to claim 1, wherein the left end of the instrument support (1) is connected with a protection box (16), and a generator (17) is arranged in the protection box (16).
5. The chip pit analysis instrument according to claim 4, wherein the side wall of the instrument holder (1) is fixedly connected with a controller, and the controller is electrically connected with the generator (17) through a wire.
6. The chip pit analysis instrument according to claim 5, wherein the outer wall of the roller shaft (4) is provided with a sliding groove, the inner walls of the first rotating shaft (3) and the second rotating shaft (7) are fixedly connected with electric sliding rails, and the electric sliding rails are in sliding connection with the sliding groove.
CN202320414838.XU 2023-03-08 2023-03-08 Chip crater analytical instrument Active CN219534470U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202320414838.XU CN219534470U (en) 2023-03-08 2023-03-08 Chip crater analytical instrument

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202320414838.XU CN219534470U (en) 2023-03-08 2023-03-08 Chip crater analytical instrument

Publications (1)

Publication Number Publication Date
CN219534470U true CN219534470U (en) 2023-08-15

Family

ID=87628526

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202320414838.XU Active CN219534470U (en) 2023-03-08 2023-03-08 Chip crater analytical instrument

Country Status (1)

Country Link
CN (1) CN219534470U (en)

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