CN219519651U - Appearance detection device of chip - Google Patents

Appearance detection device of chip Download PDF

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Publication number
CN219519651U
CN219519651U CN202320680058.XU CN202320680058U CN219519651U CN 219519651 U CN219519651 U CN 219519651U CN 202320680058 U CN202320680058 U CN 202320680058U CN 219519651 U CN219519651 U CN 219519651U
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China
Prior art keywords
module
assembly
detection
trays
sorting
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CN202320680058.XU
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Chinese (zh)
Inventor
方海峰
诸庆
柯海挺
项旭帅
王建涛
金焱立
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Ningbo Sunny Instruments Co Ltd
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Ningbo Sunny Instruments Co Ltd
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    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50Manufacturing or production processes characterised by the final manufactured product

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Abstract

The utility model provides an appearance detection device of a chip, which is characterized in that: the chip sorting device comprises a feeding module, a detecting module, a sorting module and a discharging module which are sequentially arranged along the circulation route of the chip; the feeding module is used for synchronously conveying a plurality of trays for storing chips to be detected to a detection position; the detection module is used for detecting chips in the plurality of trays; the sorting module is used for adjusting the detected chips to a tray corresponding to the detection result of the chips; the blanking module is used for conveying the sorted plurality of trays to corresponding bins; the appearance detection device of the chip further comprises a circulation module, wherein the circulation module is used for conveying the plurality of trays conveyed by the feeding module to positions corresponding to the detection module and the sorting module in sequence so as to finish corresponding detection and sorting work. Therefore, the appearance of the chip can be detected at multiple stations at the same time, and the materials are sorted according to the detection result.

Description

Appearance detection device of chip
Technical Field
The utility model relates to an appearance detection device of a chip, which can detect multiple stations simultaneously and sort materials according to detection results.
Background
Along with the increasing requirements of people on the pixels and the quality of the camera module, the detection of the appearance defects of the chip is also more and more strict. In addition, the number of lenses in a single lens is also increasing, and the ever-increasing output requirement of the market and the high quality requirement of shipment all put high demands on the detection process of chip products.
At present, the problems of low manual detection efficiency, poor detection effect of part of original equipment and the like still exist in the industry, so automatic detection equipment needs to be developed to replace the traditional manual detection so as to meet the requirements of high quality and high productivity of products.
Disclosure of Invention
The utility model aims to provide an appearance detection device for chips, which can detect multiple stations simultaneously and sort materials according to detection results. In order to achieve the above purpose, one aspect of the present utility model is that an appearance detection device for a chip includes a feeding module, a detection module, a sorting module, and a discharging module sequentially arranged along a circulation route of the chip; the feeding module is used for synchronously conveying a plurality of trays for storing the chips to be detected to detection positions corresponding to the detection modules; the detection module is used for detecting the chips in the plurality of trays; the sorting module is used for adjusting the detected chips to the trays corresponding to the detection results of the chips in the plurality of trays; the blanking module is used for conveying the plurality of trays sorted by the sorting module to corresponding bins; the appearance detection device of the chip further comprises a circulation module, wherein the circulation module is used for conveying the plurality of trays conveyed by the feeding module to positions corresponding to the detection module and the sorting module in order to finish corresponding detection and sorting work.
According to the technical scheme, the modular combination is easy to install and maintain, and a plurality of modules are matched with one another to finish automatic feeding, detection and sorting, so that the multi-station simultaneous detection can be realized, the detection efficiency is improved, and the detection quality is ensured.
In a preferred mode, the feeding module comprises a material tray fixing assembly, a material tray lifting assembly and a feeding clamping claw assembly; the tray fixing assembly is used for fixing a tray to be detected in the plurality of trays and conveying the tray to a position corresponding to the tray lifting assembly, and the tray lifting assembly lifts the tray to a preset position along a direction approximately perpendicular to the tray; the feeding gripper assembly is used for grabbing the material tray and conveying the material tray to the circulation module, the feeding gripper assembly comprises a feeding gripper unit, a feeding guide rail unit and a gripper driving unit, the feeding gripper unit is used for grabbing the material tray, and the gripper driving unit is used for driving the feeding gripper unit to approach/depart from the chip in the material tray along the feeding guide rail unit.
According to the technical scheme, multi-station simultaneous feeding can be realized through the feeding module, and the feeding efficiency is improved.
In a preferred mode, the circulation module is provided with a detection circulation assembly, a cache circulation assembly and a sorting circulation assembly; the detection circulation assembly is used for conveying the plurality of trays conveyed by the feeding module to positions corresponding to the detection module; the buffer circulation assembly is used for buffering the plurality of trays after detection in the detection circulation assembly, and then conveying the plurality of trays to the sorting circulation assembly; the sorting flow assembly transports the plurality of trays to the sorting module.
According to the technical scheme, materials can be efficiently conveyed among other modules through the circulation module.
In a preferred mode, the detection module is provided with an optical detection assembly, an optical movement module and a fan assembly; the optical detection assembly comprises an illumination unit, an imaging unit and an optical driving unit, wherein the illumination unit comprises a plurality of light sources and is used for illuminating the chip to be detected, the imaging unit is used for acquiring an appearance image of the chip to be detected and transmitting an appearance image signal to an external control system for analysis and detection, and the optical driving unit is used for adjusting the distance between the imaging unit and the chip to be detected; the optical movement module is used for driving the optical detection assembly to perform corresponding movement, and the fan assembly is used for cleaning the outer surface of the chip to be detected.
According to the technical scheme, the detection module is used for carrying out imaging analysis on the appearance of the chip, so that whether the appearance of the chip has flaws or not can be automatically judged, and the detection efficiency is improved.
In a preferred mode, the sorting module is provided with an OK motion assembly, an NG motion assembly, an upper shooting optical assembly, a lower shooting optical assembly and a sorting driving unit; dividing the detected chip into an OK material without flaws and an NG material with flaws, wherein the upper shooting optical assembly is used for positioning the OK material and the NG material; the OK motion component and the NG motion component respectively extract the OK material and the NG material, and sort the OK material and the NG material into different trays of the plurality of trays under the drive of the sorting driving unit; the lower shooting optical component is used for performing flying shooting positioning on the extracted OK material or NG material.
According to the technical scheme, the sorting module can sort the chips into the corresponding trays according to the detection results of the chips, so that efficient sorting operation is realized.
In a preferred mode, the blanking module is provided with a blanking component, an OK bin and an NG bin; after the discharging component receives the plurality of trays from the circulation module, the trays for storing the OK materials in the plurality of trays are conveyed to an OK bin, and the trays for storing the NG materials are conveyed to an NG bin.
According to the technical scheme, automatic blanking operation can be realized through the blanking module, and the equipment efficiency is improved.
Drawings
In order to more clearly illustrate the present utility model, the following description and the accompanying drawings of the present utility model will be given. It should be apparent that the figures in the following description merely illustrate certain aspects of some exemplary embodiments of the present utility model, and that other figures may be obtained from these figures by one of ordinary skill in the art without undue effort.
Fig. 1 is a general schematic diagram of a position detection device of a chip.
Fig. 2 is a general schematic of a loading module.
Fig. 3 is a schematic diagram of a feeding mechanism.
Figure 4 is a schematic view of a lift assembly.
Fig. 5 is a schematic view of a feed gripper assembly.
Fig. 6 is a schematic diagram of the detection module as a whole.
Fig. 7 is a schematic diagram of an optical system of the detection module.
Fig. 8 is a general schematic of a sorting module.
Fig. 9 is a schematic diagram of an OK motion component.
Fig. 10 is a schematic diagram of an upper beat optical assembly.
Fig. 11 is a schematic view of the lower-beat optical assembly.
Fig. 12 is a general schematic diagram of the blanking module.
Fig. 13 is a general schematic of a flow module.
FIG. 14 is a schematic diagram of a detection flow component.
FIG. 15 is a schematic diagram of a cache stream component.
Fig. 16 is a schematic view of a sort flow assembly.
Description of the drawings:
100. appearance detection device of chip
1. Feeding module
111. Material tray fixing assembly
1111. Feeding adjusting mechanism
1112. Feeding limiting cylinder
1114. First feeding driving motor
1115. Synchronous conveyor belt
112. Tray lifting assembly
1121. Lifting platform
1122. Second feeding driving motor
113. Feeding clamping claw assembly
1131. Feeding gripper unit
1132. Feeding guide rail unit
1133. Third feeding driving motor
2. Detection module
20. Detection cross frame
21. First optical detection assembly
211. Image forming unit
212. Optical drive unit
213. Lighting unit
2131. Combined light source
2132. Lower detection light source
22. Second optical detection assembly
23. Detecting movement module
24. Fan assembly
3. Sorting module
30. Sorting transverse frame
31 OK sport assembly
311. Buffering suction pen
312 OK driving motor
313. Guide rail slide block
314. Magnetic grating reading head
32 NG motion assembly
33. First upper photographing optical assembly
331. First upper shooting and lower adjusting platform
332. First upper photographing imaging unit
333. First upper light source
34. Second upper photographing optical assembly
35. First lower photographing optical assembly
351. First lower photographing imaging unit
352. First lower photographing upper light source
36. Second lower photographing optical assembly
37. Sorting driving unit
371. Linear motor stator
372. Linear motor rotor
4. Blanking module
41 OK stock bin
42 NG stock bin
43. Discharging linear motor
44. Discharging platform
5. Circulation module
51. Detecting circulation assembly
511. Detecting circulation movement module
512. Detection circulation limiting cylinder
513. Detection circulation regulating motor
514. Detection circulation driving motor
515. Detection circulation transmission belt
52. Cache circulation assembly
521. First buffer limiting cylinder
522. Second buffer limiting cylinder
523. First buffer motion module
524. Second buffer motion cylinder
53. Sorting circulation assembly
531 OK sorting station
532 NG sorting station
533. Discharging push rod cylinder
534. Sorting limiting cylinder
6. Working table
61. Table top
Detailed Description
Various exemplary embodiments of the present disclosure are described in detail below with reference to the accompanying drawings. The description of the exemplary embodiments is merely illustrative, and is in no way intended to limit the disclosure, its application, or uses. The present disclosure may be embodied in many different forms and is not limited to the embodiments described herein. These embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the disclosure to those skilled in the art. It should be noted that: the relative arrangement of parts and steps, numerical expressions and values, etc. set forth in these embodiments are to be construed as illustrative only and not as limiting unless otherwise stated.
The use of the terms "comprising" or "including" and the like in this disclosure means that elements preceding the term encompass the elements recited after the term, and does not exclude the possibility of also encompassing other elements.
All terms (including technical or scientific terms) used in this disclosure have the same meaning as commonly understood by one of ordinary skill in the art to which this disclosure belongs, unless specifically defined otherwise. It will be further understood that terms, such as those defined in commonly used dictionaries, should be interpreted as having a meaning that is consistent with their meaning in the context of the relevant art and will not be interpreted in an idealized or overly formal sense unless expressly so defined herein.
Parameters of, and interrelationships between, components, and control circuitry for, components, specific models of components, etc., which are not described in detail in this section, can be considered as techniques, methods, and apparatus known to one of ordinary skill in the relevant art, but are considered as part of the specification where appropriate.
(general structure)
The overall configuration of the position detection apparatus 100 of the chip will be described below with reference to fig. 1. Fig. 1 is a general schematic diagram of a position detection device of a chip.
Referring to fig. 1, the appearance detection device 100 of the chip includes a workbench 6, and a feeding module 1, a detection module 2, a sorting module 3 and a discharging module 4 sequentially disposed on the workbench 6 along a circulation route of the chip. The feeding module 1 is used for conveying a tray for containing chips to be detected for the detection module 2; the detection module 2 is used for detecting chips in the tray; the sorting module 3 is used for sorting and storing the detected chips in different trays; the blanking module 4 receives the trays sorted by the sorting module 3 and finishes blanking.
In addition, the appearance detection device 100 of the chip further comprises a circulation module 5, which is used for conveying the trays conveyed by the feeding module 1 to positions corresponding to the detection module 2 and the sorting module 3 in order to complete corresponding detection and sorting operations.
It will be appreciated that the feeding module 1, the detecting module 2, the sorting module 3, the discharging module 4 and the circulating module 5 may be disposed on the workbench 6, or may be disposed on a rack or other fixing mechanism, which is not limited herein.
In this embodiment, the workbench 6 has a horizontally arranged table top 61, and the feeding module 1, the detecting module 2, the sorting module 3, the discharging module 4 and the circulating module 5 are all mounted on the table top 61. In practice, the table 61 may be disposed obliquely, and the modules are not limited to being mounted on the same plane, and for example, the modules may be disposed at different levels in a direction perpendicular to the table 61. For simplicity, the description will be given here by taking the example in which each module is provided on a horizontal table 61. For ease of illustration, the direction perpendicular to the table 61 is taken as the vertical direction.
(feeding Module)
Next, the feeding module 1 will be specifically described with reference to fig. 2 to 5. Fig. 2 is a general schematic view of a feeding module, fig. 3 is a schematic view of a feeding mechanism, fig. 4 is a schematic view of a lifting assembly, and fig. 5 is a schematic view of a feeding gripper assembly.
Referring to fig. 2, the feeding module 1 is provided with a feeding transverse frame 10, a first feeding mechanism 11 and a second feeding mechanism 12 which are arranged on the feeding transverse frame 10, wherein the first feeding mechanism 11 and the second feeding mechanism 12 are mirror images and have the same structure, and are respectively used for conveying two paths of trays containing chips to be detected, so that double-station feeding is realized. Of course, the feeding module 1 can be further provided with more feeding mechanisms to simultaneously convey more paths of trays, so that the feeding and detecting efficiency is improved. For simplicity, the first feeding mechanism 1 is illustrated here as an example.
Referring to fig. 2 and 3, the first loading mechanism 11 includes a tray fixing assembly 111, a tray lifting assembly 112, a loading gripper assembly 113, a first loading driving motor 1114, and a timing belt 1115. Illustratively, the tray fixing assembly 111 includes a feeding adjustment mechanism 1111 and a feeding limit cylinder 1112, which are respectively located on both sides of the timing belt 1115. Can adjust the width of corresponding charging tray to charging tray fixed subassembly 111 through material loading adjustment mechanism 1111, after the manual work is carried out the material loading, open the spacing cylinder 1112 of material loading, drive synchronous conveyor belt 1115 through first material loading driving motor 1114 and carry the charging tray to the material loading level that corresponds with charging tray lifting subassembly 112.
Then, the tray lifting assembly 112 lifts the tray upwards in the vertical direction, conveys the tray to a position to be grabbed corresponding to the feeding clamping jaw assembly 113, and then places the tray onto the circulation module 2 through the feeding clamping jaw assembly 113, so that one-time feeding is completed.
Referring to fig. 4, the tray lifting assembly 112 includes a lifting platform 1121, a second loading drive motor 1122. During feeding, the lifting platform 1121 lifts the tray to a feeding level in the vertical direction under the driving of the second feeding driving motor 1122.
Referring to fig. 5, the feeding gripper assembly 113 includes a feeding gripper unit 1131, a feeding guide rail unit 1132, and a third feeding driving motor 1133 as a gripper driving unit. Illustratively, the feeding gripper unit 1131 is a gripper cylinder, and is configured to grip the material taking disc; the feeding rail unit 1132 is disposed in a vertical direction, and is a cross roller rail. In the feeding process, the third feeding driving motor 1133 drives the feeding gripper unit 1131 to approach the chip to be detected along the feeding guide rail unit 1132, and after the feeding gripper unit 1131 grips the material taking disc, the third feeding driving motor 1133 drives the feeding gripper unit 1131 to convey the material taking disc to the circulation module 2 along the feeding guide rail unit 1132, so that one-time feeding is completed.
(detection Module)
Next, the detection module will be specifically described with reference to fig. 6 and 7. Fig. 6 is a schematic diagram of the overall detection module, and fig. 7 is a schematic diagram of the optical system of the detection module.
Referring to fig. 6, the detection module 2 is configured to take a photograph of a chip to be detected and image the chip, and transmit the image to an external control device for analysis and processing, so as to automatically detect the appearance of the chip. The detection module 2 comprises a detection transverse frame 20 fixed on a table 61, a first optical detection assembly 21 and a second optical detection assembly 22 which are arranged on the detection transverse frame 20, a detection motion module 23 and a fan assembly 24.
The first optical detection assembly 21 and the second optical detection assembly 22 have the same structure, so that double-station detection can be realized, namely, chips in two paths of trays are detected simultaneously, and the detection efficiency is improved. Of course, more optical detection assemblies may be provided, and are not described in detail herein. For simplicity, the first optical detection element 21 will be described as an example only.
Referring to fig. 7, the first optical detection assembly 21 includes an illumination unit 213, an imaging unit 211, and an optical driving unit 212. The optical driving unit 212 drives the imaging unit 211 in a vertical direction to move toward/away from the chip to be inspected, so that it is accurately focused to obtain a higher quality image. The imaging unit 211 is typically composed of an industrial CCD and an industrial lens, and is responsible for imaging the chip. Illustratively, the illumination unit 213 includes a combined light source 2131 and a lower detection light source 2132, and uses a plurality of light sources to perform combined lighting, so that the appearance defect of the chip is imaged in the imaging unit 211 more clearly.
The detection motion module 23 is used for driving the first optical detection component 21 and the second optical detection component 22 to translate, for example, along the extending direction of the transverse frame 20 or perpendicular to the extending direction of the transverse frame 20, so as to adjust to the optimal photographing position. Illustratively, the fan assembly 24 is an ion fan, which can remove dust and static electricity, and ensure the clean appearance of the chip.
(sorting Module)
Next, the sorting module 3 will be specifically described with reference to fig. 8 to 11. Fig. 8 is a schematic diagram of the sorting module as a whole, fig. 9 is a schematic diagram of an OK motion assembly, fig. 10 is a schematic diagram of an upper-beat optical assembly, and fig. 11 is a schematic diagram of a lower-beat optical assembly.
Referring to fig. 8 and 9, the sorting module 3 includes a sorting cross frame 30, and OK motion components 31, NG motion components 32, first upper and lower optical components 33, second upper and lower optical components 34, first lower and upper optical components 35, second lower and upper optical components 36, and a sorting drive unit 37 provided to the sorting cross frame 30.
Illustratively, the sorting driving unit 37 is a linear driving motor, and includes a linear motor stator 371 disposed along the extending direction of the sorting cross 30 and a linear motor mover 372 disposed on the OK motion assembly 31 as shown in fig. 9. The OK motion assembly 31 also has a buffer suction pen 311, an OK drive motor 312, a guide rail slider 313, and a magnetic grid reading head 314 shown in fig. 9.
Guide rail slider 313 and the letter sorting guide rail (not shown in the figure) that sets up in letter sorting crossbearer 30 looks adaptation, in the course of the work, linear motor stator 371 drive linear motor active cell 372 and then drive OK motion subassembly 31 along above-mentioned letter sorting guide rail and remove to relevant position, adsorb the chip and carry out the letter sorting action through the five suction nozzles that set up in OK motion subassembly 31. Specifically, the OK motion assembly 31 drives the buffer suction pen 311 to suck chips in the tray along the vertical direction through the OK driving motor 312, and then drives the linear motor rotor 372 to put the chips in another tray under the guidance of the sorting guide rail through the linear motor stator 371, so as to realize material exchange. Note that, the structure and operation of the NG motion component 32 are the same as those of the OK motion component 31, and will not be described here again.
In this embodiment, the sorting module 3 works for double-station, and is used for sorting chips in the two paths of trays, namely the first path of tray and the second path of tray, so as to improve sorting efficiency. The first upper photographing optical assembly 33 and the second upper photographing optical assembly 34 have the same structure, the first lower photographing optical assembly 35 and the second lower photographing optical assembly 36 have the same structure, the first upper photographing optical assembly 33 and the first lower photographing optical assembly 35 are correspondingly arranged with the first path of material tray, and the second upper photographing optical assembly 34 and the second lower photographing optical assembly 36 are correspondingly arranged with the second path of material tray and are respectively used for positioning the chips in the two paths. Of course, more upper and lower optical assemblies may be provided to position more chips, as will not be repeated here.
The chip detected by the detection module 2 is OK material if no flaw exists, and NG material if flaw exists. The first upper photographing optical assembly 33 positions the OK material and the NG material in the first path of material tray, and the second upper photographing optical assembly 34 positions the OK material and the NG material in the second path of material tray, so that coordinates of each OK material and each NG material are obtained, and the OK movement assembly 31 and the NG movement assembly 32 can accurately absorb chips.
After the OK motion component 31 and the NG motion component 32 extract the OK material and the NG material in the two paths of trays, the positions of the OK material and the NG material in the two paths of trays are adjusted under the driving of the sorting driving unit 37. For example, the OK materials in the first path of material trays and the NG materials in the second path of material trays are interchanged, so that the OK materials in the two paths of material trays can be concentrated to the second path of material trays, and the NG materials in the two paths of material trays can be concentrated to the first path of material trays, thereby realizing the sorting function.
After the OK motion component 31 and the NG motion component 32 extract the OK material and the NG material, the first lower-beat optical component 35 and the second lower-beat optical component 36 respectively perform fly-beat positioning on the OK material and the NG material extracted by the corresponding OK motion component 31 and the NG motion component 32, so as to ensure that the chip is accurately placed in another tray.
For simplicity, only the structures of the first upper photographing optical assembly 33 and the first lower photographing optical assembly 35 will be described herein.
Referring to fig. 10, the first upper photographing optical assembly 33 includes a first upper photographing adjustment platform 331, a first upper photographing imaging unit 332, and a first upper photographing light source 333. The first upper photographing and lower adjusting platform 331 is used for adjusting the height of the first upper photographing and lower imaging unit 332 in the vertical direction, so as to make the first upper photographing and lower imaging unit accurately focused to obtain a high-quality image. Referring to fig. 11, the first lower-photographing optical assembly 35 includes a first lower-photographing imaging unit 351, a first lower-photographing light source 352. Illustratively, the first lower imaging unit 351 and the first lower light source 352 are disposed vertically upwards, so that when the OK motion assembly 31 and the NG motion assembly 32 extract OK and NG materials, the first lower optical assembly 35 is convenient for performing the fly-swath positioning on the extracted materials.
(blanking module)
Next, the blanking module 4 will be specifically described with reference to fig. 12. Fig. 12 is a general schematic diagram of the blanking module.
Referring to fig. 12, the blanking module 4 includes at least one OK bin 41 for storing OK materials, at least one NG bin 42 for storing NG materials, and a blanking linear motor 43 and a blanking platform 44. In this embodiment, 4 stacks of trays are loaded at the same time, wherein the product yield is greater than or equal to 80%, 4 OK bins 41 and one NG bin 42 are allocated, and the discharging can be completed after a single loading.
Wherein 4 OK feed bins 41, a NG feed bin 42 are arranged in proper order, and the blanking platform 44 moves along the arrangement direction of 4 OK feed bins 41, a NG feed bin 42 through blanking linear motor 43, connects the feeding dish from sorting module 3 after, distributes OK material, NG material after the letter sorting is accomplished to OK feed bin and NG feed bin respectively to accomplish the unloading work.
(circulation Module)
Next, the circulation module 3 will be specifically described with reference to fig. 13 to 16. Fig. 13 is a general schematic diagram of a circulation module, fig. 14 is a schematic diagram of a detection circulation assembly, fig. 15 is a schematic diagram of a buffer circulation assembly, and fig. 16 is a schematic diagram of a sorting circulation assembly.
Referring to fig. 1 and 13, the transfer module 5 includes a detection transfer module 51, a buffer transfer module 52, and a sorting transfer module 53, which are sequentially arranged in the transfer direction of the chip. The detecting and circulating assembly 51 is located between the feeding module 1 and the detecting module 2, and the buffering and circulating assembly 52 and the sorting and circulating assembly 53 are located between the detecting module 2 and the sorting module 3.
Referring to fig. 14, the detection flow assembly 51 includes a detection flow movement module 511, a detection flow limit cylinder 512, a detection flow adjustment motor 513, a detection flow transmission belt 515, and a detection flow driving motor 514. The tray conveyed by the feeding module 1 is conveyed to the detection flow transmission belt 515, and the detection flow driving motor 514 drives the detection flow transmission belt 515 to convey the tray to the position to be detected. Then, the tray is limited by the detection flow limiting cylinder 512, and then the detection flow movement module 511 drives the tray to translate for upper shooting detection. The detecting and circulating adjusting motor 513 is used for adjusting the distance between two conveying belts in the detecting and circulating conveying belt 515 so as to ensure compatibility with trays of different sizes.
Referring to fig. 15, the buffer circulation assembly 52 includes a first buffer limiting cylinder 521, a second buffer limiting cylinder 522, a first buffer moving module 523, and a second buffer moving cylinder 524. The first buffer motion module 523 and the second buffer motion cylinder 524 can respectively move horizontally along two directions perpendicular to each other. The buffer circulation assembly 52 is used for buffering the trays detected on the detection circulation assembly 51, and reasonably distributing the trays according to different sorting and blanking speeds on the sorting circulation assembly 53.
Specifically, taking a double-station mode of detecting the first path of trays and the second path of trays as an example, the buffer circulation assembly 52 transfers the first path of trays received from the detection circulation assembly 51 to the first buffer limit cylinder 521 through the movement of the first buffer movement module 523 and the second buffer movement cylinder 524, and then lifts the cylinder at the second buffer limit cylinder 522 upwards to receive the second path of trays on the detection circulation assembly 51, so as to complete buffer operation. When the sorting circulation assembly 53 needs a tray, the first buffer limiting cylinder 521 and/or the second buffer limiting cylinder 522 are/is lowered by positioning the first buffer moving module 523 and the second buffer moving cylinder 524 to the required tray position, and the tray conveying work is completed.
Referring to fig. 16, the sort flow assembly 53 includes an OK sort station 531, an NG sort station 532, a blanking push rod cylinder 533, a sort limit cylinder 534. In the working process, the trays of the OK sorting station 531 and the NG sorting station 532 are conveyed to the sorting limiting cylinder 534, and the OK material and the NG material detected by the detection module 2 are adjusted to the corresponding trays by the sorting module 3 to finish sorting work. Then, the tray discharging work is completed by the discharging push rod cylinder 533.
To sum up, taking double-station detection of two paths of trays as an example, the specific test flow of the utility model is as follows:
the first step: the operator places a stack of trays containing chips into the loading module 1, respectively, e.g. 4 loading levels may place 4 stacks of 30 trays each.
And a second step of: the feeding module 1 places the trays on the top of each stack at the position of the detection flow assembly 51, and double-station synchronous feeding is realized.
And a third step of: the detection module 2 detects the chip by detecting the horizontal movement of the movement module 23 and the detection flow assembly 51 along the mutually perpendicular directions.
Fourth step: the detecting and circulating assembly 51 circulates the detected trays to the cache circulating assembly 52, and the cache circulating assembly 52 can place two trays at the same time.
Fifth step: the buffer circulation assembly 52 circulates the trays to the duplex positions of the sorting circulation assembly 53, respectively.
Sixth step: the sorting module 3 horizontally moves in mutually perpendicular directions through the sorting driving unit 37 and the sorting circulation assembly 53 which are linear driving motors, and the OK movement assembly 31 and the NG movement assembly 32 which comprise five suction nozzles exchange OK materials and NG materials of two paths of trays.
Seventh step: the sorting circulation component 53 conveys the trays after sorting to the blanking platform 44, and the blanking platform 44 puts the trays into the corresponding blanking bins through the movement of the blanking linear motor 43 to finish blanking.
Eighth step: the equipment repeats the seven steps, and after the blanking bin is fully filled, the manual blanking is completed.
It can be known that the rest processes are all fully automatic operation except for the feeding of the non-inspected products and the discharging of the inspected products. The utility model can automatically and efficiently detect various defects on the surfaces of various optical sensor chips, and can finish product circulation among all modules on the same side by adopting assembly line circulation and single action, thereby improving the equipment efficiency. The detection station is two or more, and a plurality of cameras detect simultaneously, and the rear end can carry out duplex or more station letter sorting in step.
The utility model adopts an automatic feeding and discharging structure, has the function of feeding and discharging without stopping, and can obviously improve the utilization rate of equipment. All stations adopt compatible designs, are compatible with trays with different sizes such as 65-120mm long, 65-120mm wide and the like, and improve equipment compatibility. The coordinates of each chip are recorded in the mode that the whole tray is shot by an optical system, so that the sorting precision and efficiency of the equipment can be improved. Through the imaging detection of the combination of multiple light sources, the imaging effect is better aiming at the defects of poor detection effect of human eyes and equipment in the current industry, and the detection accuracy is higher. And two optical systems of the same station adopt the same drive, thereby reducing the cost and improving the consistency of equipment.
The utility model adopts a modularized design, greatly shortens the working hours required by installation and debugging, and is beneficial to rapid mass production. The cutting machine is convenient, the product and the size of the material tray are not required to be replaced, and the cutting machine is basically controlled and regulated by a motor, so that the cutting cost and the cutting time are reduced.
It should be understood that the above embodiments are only for explaining the present utility model, the protection scope of the present utility model is not limited thereto, and any person skilled in the art should be able to modify, replace and combine the technical solution and concept according to the present utility model within the scope of the present utility model.

Claims (6)

1. The utility model provides an outward appearance detection device of chip which characterized in that:
the chip comprises a feeding module, a detection module, a sorting module and a discharging module which are sequentially arranged along a circulation line of the chip;
the feeding module is used for synchronously conveying a plurality of trays for storing the chips to be detected to detection positions corresponding to the detection modules;
the detection module is used for detecting the chips in the plurality of trays;
the sorting module is used for adjusting the detected chips to the trays corresponding to the detection results of the chips in the plurality of trays;
the blanking module is used for conveying the plurality of trays sorted by the sorting module to corresponding bins;
the appearance detection device of the chip further comprises a circulation module, wherein the circulation module is used for conveying the plurality of trays conveyed by the feeding module to positions corresponding to the detection module and the sorting module in order to finish corresponding detection and sorting work.
2. The appearance inspection device of a chip according to claim 1, wherein:
the feeding module comprises a material tray fixing assembly, a material tray lifting assembly and a feeding clamping claw assembly;
the tray fixing assembly is used for fixing a tray to be detected in the plurality of trays and conveying the tray to a position corresponding to the tray lifting assembly, and the tray lifting assembly lifts the tray to a preset position along a direction approximately perpendicular to the tray;
the feeding gripper assembly is used for grabbing the material tray and conveying the material tray to the circulation module, the feeding gripper assembly comprises a feeding gripper unit, a feeding guide rail unit and a gripper driving unit, the feeding gripper unit is used for grabbing the material tray, and the gripper driving unit is used for driving the feeding gripper unit to approach/depart from the chip in the material tray along the feeding guide rail unit.
3. The appearance inspection device of a chip according to claim 1, wherein:
the circulation module is provided with a detection circulation assembly, a cache circulation assembly and a sorting circulation assembly;
the detection circulation assembly is used for conveying the plurality of trays conveyed by the feeding module to positions corresponding to the detection module; the buffer circulation assembly is used for buffering the plurality of trays after detection in the detection circulation assembly, and then conveying the plurality of trays to the sorting circulation assembly; the sorting flow assembly transports the plurality of trays to the sorting module.
4. The appearance inspection device of a chip according to claim 1, wherein:
the detection module is provided with an optical detection assembly, an optical movement module and a fan assembly;
the optical detection assembly comprises an illumination unit, an imaging unit and an optical driving unit, wherein the illumination unit comprises a plurality of light sources and is used for illuminating the chip to be detected, the imaging unit is used for acquiring an appearance image of the chip to be detected and transmitting an appearance image signal to an external control system for analysis and detection, and the optical driving unit is used for adjusting the distance between the imaging unit and the chip to be detected;
the optical movement module is used for driving the optical detection assembly to perform corresponding movement, and the fan assembly is used for cleaning the outer surface of the chip to be detected.
5. The appearance inspection device of a chip according to claim 1, wherein:
the sorting module is provided with an OK motion assembly, an NG motion assembly, an upper photographing optical assembly, a lower photographing optical assembly and a sorting driving unit;
dividing the detected chip into an OK material without flaws and an NG material with flaws, wherein the upper shooting optical assembly is used for positioning the OK material and the NG material;
the OK motion component and the NG motion component respectively extract the OK material and the NG material, and sort the OK material and the NG material into different trays of the plurality of trays under the drive of the sorting driving unit;
the lower shooting optical component is used for performing flying shooting positioning on the extracted OK material or NG material.
6. The appearance inspection device of a chip according to claim 1, wherein:
the blanking module is provided with a blanking component, an OK bin and an NG bin;
after the discharging component receives the plurality of trays from the circulation module, the trays for storing OK materials in the plurality of trays are conveyed to the OK bin, and the trays for storing NG materials are conveyed to the NG bin.
CN202320680058.XU 2023-03-30 2023-03-30 Appearance detection device of chip Active CN219519651U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202320680058.XU CN219519651U (en) 2023-03-30 2023-03-30 Appearance detection device of chip

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202320680058.XU CN219519651U (en) 2023-03-30 2023-03-30 Appearance detection device of chip

Publications (1)

Publication Number Publication Date
CN219519651U true CN219519651U (en) 2023-08-15

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Family Applications (1)

Application Number Title Priority Date Filing Date
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Country Status (1)

Country Link
CN (1) CN219519651U (en)

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