CN219514310U - Circuit manufacturing device of electrostatic chuck - Google Patents
Circuit manufacturing device of electrostatic chuck Download PDFInfo
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- CN219514310U CN219514310U CN202223548246.1U CN202223548246U CN219514310U CN 219514310 U CN219514310 U CN 219514310U CN 202223548246 U CN202223548246 U CN 202223548246U CN 219514310 U CN219514310 U CN 219514310U
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- electrostatic chuck
- bearing surface
- flexible device
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- circuit
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Abstract
The utility model discloses a circuit manufacturing device of an electrostatic chuck, which is used for manufacturing a circuit on the electrostatic chuck, wherein the electrostatic chuck is provided with a bearing surface for attaching the circuit, and the bearing surface is a curved surface; the circuit manufacturing device comprises a rack and a driving mechanism, wherein the rack is provided with: the flexible device is provided with a profiling curved surface which is matched with the shape of the bearing surface, and the profiling curved surface is provided with a groove for containing liquid conductive substances; wherein the driving mechanism is configured to drive at least one of the electrostatic chuck and the flexible device to move to a pressing state and to maintain the pressing state for a set time; in the propping state, the flexible device is elastically deformed, and the profiling curved surface of the flexible device is propped against the bearing surface. The circuit manufacturing device of the electrostatic chuck can process the electrostatic chuck with a complex curved surface.
Description
Technical Field
The utility model relates to the technical field of electrostatic chuck processing, in particular to a circuit manufacturing device of an electrostatic chuck.
Background
The present electrostatic chuck processing is mainly performed on a planar shape, for example, the utility model patent of publication No. CN104465478B discloses a processing method of an electrostatic chuck, in which a metal layer with a pattern is formed on one of the planes of the dielectric layer 2 by physical vapor deposition, and the metal layer is called an electrode layer 3 (made of noble metal, such as silver) to implement planar electrostatic chuck processing.
The existing curved electrostatic chuck cannot be produced in large scale, one of the reasons is that the circuit of the curved electrostatic chuck is difficult to manufacture, and the yield is extremely low. The conventional curved electrostatic chuck mostly adopts a screen printing mode to carry out circuit printing, and the printing mode cannot realize circuit printing with small size and large curvature (for example, the printing mode is suitable for VR glasses, intelligent watches and the like).
Disclosure of Invention
The utility model provides a circuit manufacturing device of an electrostatic chuck, which can realize the circuit manufacturing of a curved electrostatic chuck.
The utility model provides a circuit manufacturing device of an electrostatic chuck, which is used for manufacturing a circuit on the electrostatic chuck, wherein the electrostatic chuck is provided with a bearing surface for attaching the circuit, and the bearing surface is a curved surface; the circuit manufacturing device comprises a rack and a driving mechanism, wherein the rack is provided with: the flexible device is provided with a profiling curved surface which is matched with the shape of the bearing surface, and the profiling curved surface is provided with a groove for containing liquid conductive substances; wherein the driving mechanism is configured to drive at least one of the electrostatic chuck and the flexible device to move to a pressing state and to maintain the pressing state for a set time; in the propping state, the flexible device is elastically deformed, and the profiling curved surface of the flexible device is propped against the bearing surface.
Through adopting above-mentioned technical scheme, firstly, can effectively solve the circuit printing problem of the concave curved surface electrostatic chuck of different sizes and camber that screen printing can not process, successfully shift the circuit of design to curved surface electrostatic chuck. Second, the problem of contamination of the medicament by etching of the conventional circuit board is effectively avoided. Third, the cost of the processing equipment is reduced, because the etching process requires a lot of equipment to complete the relevant production and processing, the equipment of the scheme is simple and has low cost. Fourth, the processing cost is reduced, the complex process steps and agents of the etching process are not adopted in the scheme, and the production cost is reduced.
According to a further scheme, conductive slurry is arranged in the groove, and when the flexible device is pressed against the curved sucker, the conductive slurry is attached to the bearing surface.
By adopting the technical scheme, the circuit is printed on the bearing surface by the flexible device and the curved sucker in a propping way, so that the circuit printing of the curved sucker is realized, the process is simple and reliable, and the cost is low.
Further, a coating is arranged between the groove and the conductive paste, and the coating is used for facilitating the conductive paste to be separated from the groove when the flexible device is separated from the curved sucker.
By adopting the technical scheme, the conductive paste can be effectively transferred from the flexible device to the surface of the curved sucker, and the production efficiency and the product quality are improved.
Further, when the flexible device is pressed against the curved sucker, the flexible device deforms so that the conductive paste is attached to the bearing surface under a certain pressure.
By adopting the technical scheme, a certain pressure of the conductive paste can be applied, so that the conductive paste is tightly attached to the bearing surface, and the conductive paste is firmly attached to the bearing surface.
Further, the flexible device comprises a flexible body, the groove is formed in the flexible body, and the flexible body is pressed against the bearing surface so that the conductive paste is attached to the bearing surface under a certain pressure.
Through adopting above-mentioned technical scheme, the slot sets up on the flexible body, makes the flexible body fully laminate with the loading surface with certain pressure through the deformation of flexible body when flexible body and loading surface support the pressure to with the conductive paste body in the slot applied pressure on the loading surface, promoted the fastness that conductive paste body laminated.
Further, the conductive paste is silver paste.
By adopting the technical scheme, the silver paste with high universality is adopted, the cost is low, and the universality is strong.
In a further scheme, the bearing surface is a concave curved surface.
Further, the bearing surface is a convex curved surface.
By adopting the technical scheme, the bearing surface can be concave and convex, so that the adsorption of the concave or convex curved surface screen is realized, and the applicability is stronger.
Further, the heating device is connected with the curved sucker and used for heating the curved sucker.
Through adopting above-mentioned technical scheme, can be through being fixed in the bearing surface of curved surface sucking disc with conductive paste to curved surface sucking disc heating on, increased conductive paste's the fastness of adhesion.
Further, the heating device is uniformly arranged in the curved sucker to ensure that the temperature of the bearing surface is uniform.
By adopting the technical scheme, the temperature uniformity and consistency of different areas of the bearing surface can be improved, and the stability and consistency of the adhesion of the conductive paste are improved.
In summary, the utility model has at least one of the following beneficial technical effects:
1. the circuit manufacturing device of the electrostatic chuck can realize circuit processing of the curved electrostatic chuck, and improves the printing quality and efficiency of the curved electrostatic chuck circuit.
2. The circuit manufacturing device of the electrostatic chuck reduces the cost and improves the quality of the electrostatic chuck.
3. The circuit manufacturing device of the electrostatic chuck reduces the pollution to the environment, saves energy and reduces consumption.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present utility model, the following brief description of the drawings of the embodiments will make it apparent that the drawings in the following description relate only to some embodiments of the present utility model and are not limiting of the present utility model.
Fig. 1 is a schematic diagram of an embodiment of a circuit fabrication apparatus of an electrostatic chuck according to the present utility model.
Figure 2 is a partial cross-sectional view of the curved suction cup of the present utility model prior to being pressed against a flexible device.
Fig. 3 is a partial cross-sectional view of the press-fit state of the curved sucker and the flexible device of the present utility model.
Fig. 4 is a schematic structural view of the curved sucker and the flexible device in a separated state.
Figure 5 is a top view of the curved suction cup of the present utility model.
Fig. 6 is a top view of the flexible device of the present utility model.
Fig. 7 is a top view of a flexible device of the present utility model with a trench filled with conductive paste.
Reference numerals:
1. a frame; 2. a curved surface sucker; 21. a bearing surface; 3. a flexible device; 31. profiling curved surfaces; 32. a groove; 4. a driving mechanism; 5. and (3) conducting slurry.
Detailed Description
For the purpose of making the objects, technical solutions and advantages of the embodiments of the present utility model more apparent, the present utility model will be described in further detail with reference to the accompanying drawings. The components of the embodiments of the present utility model generally described and illustrated in the figures herein may be arranged and designed in a wide variety of different configurations. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.
It should be noted that: like reference numerals and letters denote like items in the following figures, and thus once an item is defined in one figure, no further definition or explanation thereof is necessary in the following figures.
Unless defined otherwise, technical or scientific terms used in this patent document should be given the ordinary meaning as understood by one of ordinary skill in the art to which this utility model belongs. The terms "first," "second," and the like in the description and in the claims, do not denote any order, quantity, or importance, but rather are used to distinguish one element from another. Likewise, the terms "a," "an," or "the" and similar terms do not denote a limitation of quantity, but rather denote the presence of at least one. The words "curved surface screen fitting tool includes" or "curved surface screen fitting tool contains" and the like mean that the elements or objects appearing in front of "curved surface screen fitting tool includes" or "curved surface screen fitting tool contains" are covered by the elements or objects listed in back of "curved surface screen fitting tool includes" or "curved surface screen fitting tool contains" and equivalents thereof, and do not exclude other elements or objects. "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. are used merely to denote relative positional relationships, which may be changed accordingly when the absolute position of the object being described is changed, merely to facilitate description of the present utility model and to simplify description, and not to indicate or imply that the apparatus or elements being referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus should not be construed as limiting the utility model.
In the description of the present utility model, it should be noted that, unless explicitly specified and limited otherwise, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be either fixedly connected, detachably connected, or integrally connected, for example; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present utility model will be understood in specific cases by those of ordinary skill in the art.
Some embodiments of the present utility model are described in detail below with reference to the accompanying drawings. Features of the embodiments described below may be combined with each other without conflict.
Description of the examples:
referring to fig. 1, a schematic structural diagram of an embodiment of a circuit manufacturing device of an electrostatic chuck is shown, which includes a frame 1 and a driving mechanism 4 fixedly connected with the frame 1, a curved chuck 2 is fixed above the frame 1, a flexible device 3 is linked with the driving mechanism 4, and the driving mechanism 4 drives the flexible device 3 to move close to or away from the curved chuck 2. The driving mechanism 4 is a hydraulic cylinder, an air cylinder or an electric push rod, and the driving mechanism 4 can be arranged in a plurality according to the requirement. The flexible means 3 is made of an elastic material so that the flexible means 3 can deform when pressed against the curved suction cup 2.
Referring to fig. 2, a partial cross-sectional view of the curved sucker 2 is shown before it is pressed against the flexible device 3. The curved sucker 2 is concave, and the concave is a bearing surface 21. The flexible device 3 is an outer convex profiling curved surface 31 which is adapted to the shape of the surface to be processed, and a non-closed groove 32 is arranged on the profiling curved surface 31. The flexible device 3 of this embodiment is made of silicone, and the grooves 32 are provided in the silicone. In another embodiment, the curved sucker 2 is arranged in a convex curved surface shape, the convex surface is a bearing surface 21, and the flexible device 3 is an inner concave profiling curved surface 31 which is matched with the shape of the surface to be processed.
Referring to fig. 3, a partial cross-sectional view of the press-fit state of the curved sucker 2 and the flexible device 3 is shown. The groove 32 is provided with the conductive paste 5, and when the flexible device 3 is pressed against the curved sucker 2, the flexible device 3 deforms to enable the conductive paste 5 to be attached to the bearing surface 21 under a certain pressure. A coating is also provided between the grooves 32 and the conductive paste 5 to facilitate attachment of the conductive paste 5 to the bearing surface 21 out of the grooves 32 when the flexible device 3 is separated from the curved suction cup 2. The conductive paste 5 in this embodiment is silver paste. The flexible device 3 moves from bottom to top to be pressed with the curved sucker 2, and in the pressing process, the flexible device 3 deforms along with the shape of the curved sucker 2, and after contacting, the circuit pattern is transferred to the bearing surface 21 of the curved sucker 2.
Referring to fig. 4, a structure of the curved sucker 2 and the flexible device 3 in a separated state is shown. After the flexible device 3 leaves the curved surface sucker 2, the shape of the profiling curved surface 31 is restored by elastic reset, the conductive paste 5 in the groove 32 is completely separated from the groove 32, and silver paste or other conductive materials required by a transfer circuit are uniformly poured into the groove 32 of the profiling jig again for repeated processing.
Referring to fig. 5, a top view of the curved sucker 2 is shown. The bearing surface 21 of the curved sucker 2 in this embodiment is circular, and can be designed into different shapes according to the needs in practical application. A heating device is uniformly arranged in the curved sucker 2, and the bearing surface 21 can keep a required stable uniform temperature after the heating device works.
Referring to fig. 6, a top view of the flexible device 3 is shown. The grooves 32 of the flexible device 3 are distributed over the contoured surface 31 of the flexible device 3. When the flexible device 3 is processed and manufactured, a silica gel mold of the flexible device 3 can be processed through numerical control, and the flexible device 3 of the silica gel material can be processed through the silica gel mold. The flexible device 3 is designed with different shapes according to different products, and the flexible device also comprises a vacuum pipeline and a vacuum air hole when the design is needed. The flexible device 3 is convenient to fix with the frame 1, and is also connected with a fixing seat, the flexible device 3 is fixed on the fixing seat, and the fixing seat is fixedly connected with the frame 1.
Referring to fig. 7, the grooves 32 of the flexible device 3 are coated with a top view of the conductive paste 5. The trench 32 has a certain depth, and the specific depth is determined according to the design requirement of the actual electrostatic chuck, and the trench 32 is filled with conductive paste for processing the curved chuck 2.
The circuit manufacturing device of the electrostatic chuck works in the process and principle that:
in a state that the flexible device 3 and the curved sucker 2 are separated, the conductive paste is uniformly poured into the groove 32 of the flexible device 3. The driving mechanism 4 drives the flexible device 3 to move close to the curved sucker 2, after the flexible device 3 is pressed with the curved sucker 2, the flexible device 3 deforms, and after the set time is reached, the conductive paste in the groove 32 is transferred to the bearing surface 21 of the curved sucker 2 under a certain pressure. The driving mechanism 4 drives the flexible device 3 to be far away from the curved sucker 2, the heating device heats the curved sucker 2, and the conductive paste is firmly attached to the bearing surface 21 of the curved sucker 2.
[ other embodiments ]
The mounting positions of the flexible device 3 and the curved sucker 2 can be interchanged, the flexible device 3 is positioned above, the curved sucker 2 is positioned below, the flexible device 3 is pressed with the curved sucker 2 from top to bottom, and the curved sucker 2 can also be pressed with the flexible device 3 from bottom to top.
The foregoing is merely illustrative of the present utility model, and the present utility model is not limited thereto, and any changes or substitutions easily contemplated by those skilled in the art within the scope of the present utility model should be included in the present utility model. Therefore, the protection scope of the utility model is subject to the protection scope of the claims.
Claims (10)
1. A circuit forming apparatus of an electrostatic chuck for forming a circuit on the electrostatic chuck, the electrostatic chuck having a bearing surface for attaching the circuit thereon, the bearing surface being a curved surface; the circuit manufacturing device comprises a rack and a driving mechanism, and is characterized in that the rack is provided with:
the flexible device is provided with a profiling curved surface which is matched with the shape of the bearing surface, and the profiling curved surface is provided with a groove for containing liquid conductive substances;
wherein the driving mechanism is configured to drive at least one of the electrostatic chuck and the flexible device to move to a pressing state and to maintain the pressing state for a set time;
in the propping state, the flexible device is elastically deformed, and the profiling curved surface of the flexible device is propped against the bearing surface.
2. The device of claim 1, wherein a conductive paste is disposed in the channel, the conductive paste adhering to the bearing surface when the flexible device is pressed against the electrostatic chuck.
3. The circuit fabrication device of an electrostatic chuck of claim 2, wherein a coating is disposed between the trench and the conductive paste, the coating being configured to facilitate removal of the conductive paste from the trench when the flexible device is separated from the electrostatic chuck.
4. The circuit fabrication device of an electrostatic chuck of claim 2, wherein when the flexible device is pressed against the electrostatic chuck, the flexible device deforms to conform the conductive paste to the bearing surface with a pressure.
5. The apparatus of claim 4, wherein the flexible device comprises a flexible body, the groove is disposed on the flexible body, and the flexible body is pressed against the bearing surface to make the conductive paste adhere to the bearing surface under a certain pressure.
6. The circuit fabrication device of an electrostatic chuck according to any one of claims 2-5, wherein the conductive paste is silver paste.
7. The circuit fabrication device of an electrostatic chuck of claim 1, wherein the bearing surface is a concave curved surface.
8. The circuit fabrication device of an electrostatic chuck of claim 1, wherein the bearing surface is a convex curved surface.
9. The circuit fabrication device of an electrostatic chuck of claim 1, further comprising a heating device coupled to the electrostatic chuck and configured to heat the electrostatic chuck.
10. The apparatus of claim 9, wherein the heating means is uniformly disposed within the electrostatic chuck to ensure uniform temperature of the bearing surface.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202223548246.1U CN219514310U (en) | 2022-12-26 | 2022-12-26 | Circuit manufacturing device of electrostatic chuck |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202223548246.1U CN219514310U (en) | 2022-12-26 | 2022-12-26 | Circuit manufacturing device of electrostatic chuck |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN219514310U true CN219514310U (en) | 2023-08-11 |
Family
ID=87532316
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202223548246.1U Active CN219514310U (en) | 2022-12-26 | 2022-12-26 | Circuit manufacturing device of electrostatic chuck |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN219514310U (en) |
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2022
- 2022-12-26 CN CN202223548246.1U patent/CN219514310U/en active Active
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