CN2195085Y - Enclosed frame moving gantry for high precision three-coordinates measuring machine - Google Patents
Enclosed frame moving gantry for high precision three-coordinates measuring machine Download PDFInfo
- Publication number
- CN2195085Y CN2195085Y CN 94240134 CN94240134U CN2195085Y CN 2195085 Y CN2195085 Y CN 2195085Y CN 94240134 CN94240134 CN 94240134 CN 94240134 U CN94240134 U CN 94240134U CN 2195085 Y CN2195085 Y CN 2195085Y
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- CN
- China
- Prior art keywords
- air bearing
- gantry
- measuring machine
- high precision
- utility
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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- A Measuring Device Byusing Mechanical Method (AREA)
Abstract
The utility model relates to an enclosed frame moving gantry for a high precision three-coordinates measuring machine, comprising a gantry frame (1), an X-direction working table (4) and an X-direction grating (9), and an X-direction main air bearing (5) and an X-direction guiding air bearing (6) are installed on the working face and the side guiding rail of the X-direction working table. The utility model is characterized in that an X-direction main air bearing (7) is installed under the working table (4), and a Y beam (2) is connected with the gantry frame (1) through six spherical-face rocking pairs. The utility model has the advantages of high precision, simple structure and low cost.
Description
It is the measuring apparatus of feature with the mechanical means that the utility model relates to a kind of, more specifically to a kind of measuring apparatus by each point coordinate of measurement.
The applicant proposes closed frame activity gantry of a kind of three coordinate measuring machine in No. 91221758 patents, its closed frame is by crossbeam, left and right pillar and tie rod connection form, closed frame is supported to air-float guide rail to the X that guide rail and X form to air bearing (comprise be positioned on the worktable workplace master to the guiding air bearing of air bearing and worktable side) by X, at X to the center configuration grating.This device has been realized X to centre-driven, and minimizing gantry is moved and rocked stochastic error and the Abbe error that causes, and gantry rigidity strengthens, and is simple in structure, and precision reaches external like product grade or slightly high.
The precision of three coordinate measuring machine by X, Y, the reference precision of three directions of Z decides, mobile gantry measuring machine Y, Z two benchmark float over X on air-float guide rail, therefore X is X is determining a measuring accuracy from complete machine to reference precision to the air-float guide rail precision, X is made up of to air bearing to guide rail and X X to air-float guide rail, existing closed frame mobile gantry, its X master presses the open type static pressure guide rail layout to air bearing, be X to the master place X to make progress on the workplace guide rail to air bearing, air bearing air film rigidity is low, X is low to reference precision, and the Y beam is the Y benchmark is the ingredient of gantry frame, be a primary structure member, Y beam distortion Y reference precision reduces, and gantry frame is formed by four assemblies connections, faying face is many, machined surface is many, and connector is many, and the framework internal stress is big, the distortion of Y beam, this is the existing low main cause of closed frame mobile gantry measuring machine precision.
The purpose of this utility model provides a kind of high accuracy three coordinate measuring machine sealing, the framework mobile gantry, and it can remedy the above-mentioned deficiency at existing gantry.
The utility model have gantry frame, X to worktable and X to grating, X on workplace on the worktable and side guide, be equipped with X to main to air bearing and X to the guiding air bearing, it is characterized in that being equipped with on the workplace guide rail under the worktable X to leading to air bearing, and shake to pay by 6 spheres and on gantry frame, connect the Y beam, wherein two is the main supporting of Y beam, two spheres shake to be paid the clamping of Y beam, and two spheres shake to pay the Y beam is fixed in addition.
The utility model and existing mobile gantry compare, and its measuring accuracy improves 1～2 μ M, and simple in structure, cost is low.
Further specify the utility model below by embodiment and accompanying drawing.
Accompanying drawing 1 is the structural representation of an embodiment of the utility model.
Accompanying drawing 2 is that its B is to local structure for amplifying synoptic diagram.
Accompanying drawing 3 is that its A is to local structure for amplifying synoptic diagram.
The utility model have a mobile gantry framework (1), X to worktable (4), X to grating (9); X is housed to leading to air bearing (5) on the last workplace of worktable (4) main guide rail, the side of worktable (4) and below be equipped with respectively X to guiding air bearing (6) and X to leading to air bearing (7), worktable (4), X constitutes X to lead to closed hydrostatic slideway to main to air bearing (7) to leading to air bearing (5) and X, Y beam (2) has been used 6 spheres to shake with connecting of sealing gantry frame (1) and has been paid, wherein 2 is the main supporting (3) of Y beam (2), two spheres shake pays (10) with Y beam (2) clamping, and 2 spheres shake pair (11) gantry frame (1) is fixed.(8) are that X is to the drive point position in the accompanying drawing.
Gantry frame of the present utility model (1) is the one-piece construction of plate welding.
Claims (2)
1, a kind of high accuracy three coordinate measuring machine closed frame mobile gantry, mobile gantry framework [1] is arranged, X is to worktable [4], X is to grating [9], X on workplace on the worktable and side guide, be equipped with X to main to air bearing [5] and X to the air bearing [6] that leads, it is characterized in that below worktable [4], being equipped with X to leading to air bearing [7], and shake to pay to go up by 6 spheres and connect a Y beam [2] at gantry frame [1], wherein two is the main supporting [3] of Y beam [2], two spheres shake pays [10] with Y beam [2] clamping, and it is fixing with Y beam [2] that other two spheres shake pair [11].
2, mobile gantry as claimed in claim 1 is characterized in that described closed frame ［ 1 ］ is the one-piece construction of a plate welding.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 94240134 CN2195085Y (en) | 1994-04-04 | 1994-04-04 | Enclosed frame moving gantry for high precision three-coordinates measuring machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 94240134 CN2195085Y (en) | 1994-04-04 | 1994-04-04 | Enclosed frame moving gantry for high precision three-coordinates measuring machine |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN2195085Y true CN2195085Y (en) | 1995-04-19 |
Family
ID=33847183
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 94240134 Expired - Fee Related CN2195085Y (en) | 1994-04-04 | 1994-04-04 | Enclosed frame moving gantry for high precision three-coordinates measuring machine |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN2195085Y (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100410623C (en) * | 2006-09-30 | 2008-08-13 | 赵政康 | Moving gantry type optical coordinate measuring instrument |
| CN102455249A (en) * | 2010-11-03 | 2012-05-16 | 上海微电子装备有限公司 | Stiffness testing device for gas bearing |
| CN103091188A (en) * | 2013-01-09 | 2013-05-08 | 青岛海迅达精密检测设备有限公司 | Testing machine for rotation of seat and reciprocating abrasion of trundle |
| CN103217505A (en) * | 2012-01-19 | 2013-07-24 | 昆山思拓机器有限公司 | SMT screen plate detection device |
| CN103884304A (en) * | 2014-03-31 | 2014-06-25 | 青岛麦科三维测量设备有限公司 | High-precision scanning type measuring machine with integrated double-dovetail guide rail |
-
1994
- 1994-04-04 CN CN 94240134 patent/CN2195085Y/en not_active Expired - Fee Related
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100410623C (en) * | 2006-09-30 | 2008-08-13 | 赵政康 | Moving gantry type optical coordinate measuring instrument |
| CN102455249A (en) * | 2010-11-03 | 2012-05-16 | 上海微电子装备有限公司 | Stiffness testing device for gas bearing |
| CN102455249B (en) * | 2010-11-03 | 2014-02-19 | 上海微电子装备有限公司 | Stiffness testing device for gas bearing |
| CN103217505A (en) * | 2012-01-19 | 2013-07-24 | 昆山思拓机器有限公司 | SMT screen plate detection device |
| CN103217505B (en) * | 2012-01-19 | 2016-04-27 | 昆山思拓机器有限公司 | SMT screen plate detection device |
| CN103091188A (en) * | 2013-01-09 | 2013-05-08 | 青岛海迅达精密检测设备有限公司 | Testing machine for rotation of seat and reciprocating abrasion of trundle |
| CN103884304A (en) * | 2014-03-31 | 2014-06-25 | 青岛麦科三维测量设备有限公司 | High-precision scanning type measuring machine with integrated double-dovetail guide rail |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C19 | Lapse of patent right due to non-payment of the annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |