CN219496776U - Multi-mirror adjusting device for measuring equipment and ellipsometry equipment - Google Patents
Multi-mirror adjusting device for measuring equipment and ellipsometry equipment Download PDFInfo
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- CN219496776U CN219496776U CN202320393656.9U CN202320393656U CN219496776U CN 219496776 U CN219496776 U CN 219496776U CN 202320393656 U CN202320393656 U CN 202320393656U CN 219496776 U CN219496776 U CN 219496776U
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Abstract
The utility model relates to a multi-mirror adjusting device for measuring equipment and ellipsometry equipment, wherein the multi-mirror adjusting device for measuring equipment comprises: a reference plate and at least one layer of reference plate outer ring coaxially arranged; a mirror plate normally connected with the reference plate through a plurality of ball screws; mirror two plates which are normally connected with the outer ring of the reference plate of the first layer through a plurality of ball screws; a plurality of plungers extending radially into the outer ring of the reference plate of the first layer and fixedly positionable with the reference plate; when N is more than or equal to 2, the method further comprises the following steps: mirror n+1 plate connected with the outer ring of the reference plate of the nth layer through a plurality of ball screws; and a plurality of plungers extending radially into the outer ring of the reference plate of the N-1 layer and fixedly positioned with the outer ring of the reference plate of the N-1 layer. The outer ring of the reference plate is fixed on the reference plate by an elastic plunger when the two plates of the mirror are adjusted, so that the position of the first plate of the mirror can be prevented from changing when the two plates of the mirror are adjusted.
Description
Technical Field
The utility model relates to a multi-lens adjusting device used in measuring equipment, and belongs to the technical field of optical installation.
Background
In semiconductor measuring devices, especially in precision thin film measuring devices for measuring various thin film parameters and slight changes (such as film thickness, refractive index, stress, etc.) in semiconductor manufacturing processes, advanced non-contact spectrum measuring techniques are generally adopted, and due to high measuring precision, the characteristics of sufficient stability, high precision, small structure, etc. of the whole optical machine are determined, and during the transmission process of the light spot, the offset and intensity of the light spot at different positions need to be observed at all times.
At present, the existing multi-lens installation mode is that one adjusting structure is provided with a corresponding lens, so that the optical-mechanical structure is relatively large, the requirement that two lenses simultaneously rotate by the same angle cannot be met, and time and labor are wasted during adjustment; or two lenses are arranged in one adjusting device, but the adjusting precision can not meet the requirements of angle second level, the production difficulty of equipment is increased, and the competitiveness of optical machine products is not facilitated.
Disclosure of Invention
The technical problems to be solved by the utility model are as follows: an adjusting structure is arranged corresponding to one lens, so that the optical machine structure is relatively large, the requirement that two lenses simultaneously rotate by the same angle cannot be met, and time and labor are wasted during adjustment; or two lenses are arranged in one adjusting device, but the adjusting precision can not meet the requirement of angle second level.
In order to solve the technical problems, the utility model adopts the following technical scheme:
a multi-mirror adjustment apparatus for use in a measurement device, comprising:
a reference plate 11 and a reference plate outer ring 12 coaxially arranged; a mirror plate 13 normally connected to the reference plate 11 by a plurality of ball screws 16; mirror plate 14, which is normally connected to reference plate outer ring 12 by a plurality of ball screws 16; a plurality of plungers extending radially along the outside of the reference plate outer ring 12 and fixably positioned with the reference plate 11;
when N is more than or equal to 2, the method further comprises the following steps: mirror n+1 plate normally connected with the outer ring of the reference plate of the nth layer through a plurality of ball screws 16; and a plurality of plungers extending radially into the outer ring of the reference plate of the N-1 layer and fixedly positioned with the outer ring of the reference plate of the N-1 layer.
Preferably, the plunger is an elastic plunger 15.
Preferably, the reference plate 11 is provided with a V-shaped groove 1103, a conical groove 1101, a plane 1101, and four screw holes 1102, and correspondingly, the reference plate outer ring 12 is provided with a V-shaped groove 1203, a conical groove 1201, a plane 1202, and four screw holes 1202.
Further, a plurality of side screw holes 1204 for mounting the plunger are provided around the outer ring 12 of the reference plate.
Further, the plurality of side screw holes 1204 are uniformly arranged, and the plurality of first screw holes 1102 and the plurality of second screw holes 1202 are also uniformly arranged.
Preferably, the first mirror plate 13 has a first installation position for the optical mirror in the middle, and the second mirror plate has a second installation position for the optical mirror in the middle.
Preferably, the notches of the first 1103 and the second 1203 are aligned to form a continuous V-shaped groove.
Preferably, the reference plate 11 is circular, and the reference plate outer ring 12 is circular, and the reference plate outer ring are assembled in a clearance mode.
Preferably, the ball head jackscrew 16 adjusts the inclination of the mirror first plate 13 at the V-shaped groove I, the conical groove I and the plane I through the jackscrew hole, and the fixing screw 17 fixes the mirror first plate 13 through the screw hole; the ball head jackscrew 16 adjusts the inclination of the mirror two plate 14 at the V-shaped groove II, the conical groove II and the plane II through the jackscrew hole, and the fixing screw 17 fixes the mirror two plate 14 through the screw hole.
An ellipsometry apparatus comprising the lens adjustment device described above.
Compared with the existing measuring equipment (such as a beam expanding device), the device has the following beneficial effects:
firstly, the installation and adjustment angle can meet the second-level requirement;
second, a plurality of lenses can be stacked according to this structure;
thirdly, the structure is compact, the internal space of the equipment is saved, and the structural design and the processing difficulty are simplified.
In a word, this device has compact structure, and convenient operation, gradient adjustment is convenient, advantages such as easy processing have improved economic benefits and dress and have transferred the reliability to batch production.
Drawings
Fig. 1 is a schematic outline view of a multi-mirror adjustment device used in a measuring apparatus of the present utility model.
Fig. 2 is a plan view of the reference plate.
Fig. 3 is a plan view of the outer ring of the reference plate.
Fig. 4 is a plan view of a mirror plate.
Fig. 5 is a plan view of the mirror plate.
Fig. 6 is a schematic view of the appearance of a multi-mirror adjustment device (with component reference numbers) for use in a measuring apparatus of the present utility model.
FIG. 7 is a schematic diagram of the mating structure of the first mirror plate and the second mirror plate.
In the figure:
the device comprises a reference plate 1 piece, a reference plate outer ring 1 piece, a mirror 14 two plate 1 piece, an elastic plunger 4 piece, a ball head jackscrew 8 piece (4 jackscrew holes are respectively arranged in fig. 4 and 5 and used for assembling 8 ball head jackscrews), a fixed screw 8 piece (4 screw holes are respectively arranged in fig. 4 and 5 and used for assembling 8 fixed jackscrews), and a hollowed weight reducing piece (18);
1101 conical grooves one 2 pieces, 1102 screw holes one 4 pieces, 1103V-shaped grooves one 1 piece;
1201 conical groove two pieces, 1202 screw hole two pieces, 1203V-shaped groove two pieces, 1 piece.
Detailed Description
The utility model will be further described with reference to the drawings and specific examples.
Embodiment one:
referring to fig. 1-5, a multi-mirror adjustment apparatus for use in a measurement device, comprising: a reference plate 11 and a reference plate outer ring 12 coaxially arranged; a mirror plate 13 normally connected to the reference plate 11 by a plurality of ball screws 16; mirror plate 14, which is normally connected to reference plate outer ring 12 by a plurality of ball screws 16; a plurality of elastic plungers 15 radially extending into the outside of the reference plate outer ring 12 and fixably positioned with the reference plate 11.
In this embodiment, referring to fig. 2 and 3, the reference plate 11 is provided with a V-shaped groove 1103, a conical groove 1101, a plane one and a screw hole 1102, and correspondingly, the reference plate outer ring 12 is provided with a V-shaped groove 1203, a conical groove 1201, a plane two and a screw hole 1202.
Wherein the ball head jackscrew 16 is placed around the V-shaped groove, the conical groove, the plane and the like and is used for adjusting the inclination of the mirror plate and fixing the mirror plate together with the screw;
referring to fig. 4 to 5, in combination with fig. 6, the ball head jackscrew 16 adjusts the inclination of the mirror plate 13 through the jackscrew hole in the V-shaped groove, the conical groove, the plane, etc., and the fixing screw 17 fixes the mirror plate 13 through the corresponding screw hole; note that fig. 4 and 5 are plan views, in which the locations of the marked 16 and 17 are also locations of the top wire holes and the fixing screw holes, i.e., the installation locations of the ball head top wire 16 and the fixing screw 17.
With continued reference to fig. 7, the ball-head jackscrew 16 adjusts the inclination of the mirror second plate 14 through the jackscrew hole at the V-shaped groove two, the conical groove two and the plane two, and the fixing screw 17 fixes the mirror second plate 14 through the corresponding screw hole.
Referring to fig. 7,V, the notches of the first 1103 and second 1203 notches are aligned to form a continuous V-shaped notch.
The first V-groove 1103 and the second V-groove 1203 adopt the positioning method of the V-grooves, so that a certain positioning deviation can be allowed when the first V-groove and the second V-groove cooperate with the ball head jackscrew 16, and the requirement of assembly precision can be reduced.
The outer ring of the reference plate is fixed to the reference plate 11 by an elastic plunger 15 when adjusting the mirror plate 14, so that the position of the mirror plate 13 can be prevented from being changed when adjusting the mirror plate 14.
In this embodiment, referring to fig. 3 and 6, a plurality of side screw holes 1204 for mounting the plunger are provided around the outer ring 12 of the reference plate.
Preferably, the plurality of side screw holes 1204 are uniformly arranged, and the plurality of first screw holes 1102 and the plurality of second screw holes 1202 are also uniformly arranged. As shown in fig. 2 and 3.
In this embodiment, the first mirror plate 13 has a first installation position for the optical mirror, and the second mirror plate has a second installation position for the optical mirror. The first and second optical mirrors are not shown in the drawings, but do not affect the understanding of the present solution.
Referring to fig. 1 and 6, the multi-mirror adjustment device used in the measuring apparatus further includes a base as a basis for the entire device.
In this embodiment, referring to fig. 7, the reference plate 11 is circular, and the reference plate outer ring 12 is circular, and the reference plate outer ring are assembled with a gap therebetween.
In this embodiment, referring to fig. 6, the ball head jackscrew 16 adjusts the inclination of the mirror plate 13 around the V-groove one, the conical groove one, and the plane one through the jackscrew hole, and the fixing screw 17 fixes the mirror plate 13 through the screw hole; the ball head jackscrew 16 adjusts the inclination of the mirror two plate 14 at the V-shaped groove II, the conical groove II and the plane II through the jackscrew hole, and the fixing screw 17 fixes the mirror two plate 14 through the screw hole.
When the multi-mirror adjusting device for the measuring equipment is used, the multi-mirror adjusting device is operated according to the following steps:
s1, adjusting the inclination angle of a lens on a mirror first plate 13 relative to a reference plate 11 by using a ball head jackscrew 16 and a fixed screw 17 and fixing the lens on the fixed mirror first plate 13, wherein the ball head jackscrew 16 is arranged in a corresponding screw hole on the mirror first plate 13 and can be aligned with a V-shaped groove, a conical groove and a plane on the reference plate;
s2, screw holes are reserved on the side face of the outer ring of the reference plate 11, and 4 elastic plungers 15 are arranged to fix the elastic plungers on the reference plate 11;
s3, adjusting the inclination angle of the lens on the second mirror plate 14 relative to the outer ring of the reference plate and fixing the second mirror plate 14 by using a ball head jackscrew 16 and a screw, wherein the ball head jackscrew 16 is arranged in a corresponding screw hole on the second mirror plate 14 and can be aligned with a V-shaped groove, a conical groove and a plane on the reference plate;
s4, glue is dispensed at the gap between the reference plate and the outer ring of the reference plate by using AB glue, so that the reference plate 11 and the outer ring 12 of the reference plate are further fastened, and the influence on the angles of the first mirror plate 13 and the second mirror plate 14 during further fastening can be avoided.
When the first mirror plate and the second mirror plate in the multi-mirror adjusting device are adjusted relative to the reference plate and the outer ring of the reference plate, the movement of the first mirror plate and the second mirror plate cannot be mutually adjusted so as to influence the position between the lenses, and the multi-mirror adjusting device is firm and reliable in structure, small in occupied space and particularly suitable for equipment with compact space.
An ellipsometry apparatus comprising the lens adjustment device described above.
Embodiment two:
as an extension of the first embodiment, the multi-mirror adjustment device used in the measurement device further comprises: mirror n+1 plate normally connected with the outer ring of the reference plate of the nth layer through a plurality of ball screws 16; and a plurality of plungers extending radially into the outer ring of the reference plate of the N-1 layer and fixedly positioned with the outer ring of the reference plate of the N-1 layer. It should be noted that, the drawings only show the case corresponding to the first embodiment, that is, the case where n=1, and in the case of the first embodiment, there is only one layer of the outer ring of the reference plate, but in fact, those skilled in the art should understand that this scheme may be extended, that is, the outer ring of the reference plate may be disposed in the same structure as the outer ring of the reference plate immediately adjacent to the outer ring of the reference plate, so as to extend the multi-mirror adjustment device of the present utility model to the case where a plurality of lenses are stacked.
The utility model has higher structural stability and small occupied space, can meet the miniaturization of equipment, can clamp a plurality of lenses at one time, reduces the production cost of the equipment, and is beneficial to the competitiveness of products in the market.
The foregoing is a preferred embodiment of the present utility model, and various changes and modifications may be made therein by those skilled in the art without departing from the general inventive concept, and such changes and modifications should be considered as falling within the scope of the claimed utility model.
Claims (10)
1. A multi-mirror adjustment device for use in a measuring apparatus, comprising:
a reference plate (11) and at least one layer of reference plate outer ring (12) coaxially arranged;
a mirror-plate (13) normally connected with the reference plate (11) through a plurality of ball head jackscrews (16);
a mirror plate (14) which is normally connected with the outer ring (12) of the reference plate of the first layer through a plurality of ball head jackscrews (16);
a plurality of plungers extending radially into the outer portion of the reference plate outer ring (12) of the first layer and fixably positioned with the reference plate (11);
when N is more than or equal to 2, the method further comprises the following steps:
mirror n+1 plate connected with the outer ring of the reference plate of the nth layer through a plurality of ball head jackscrews (16) in normal direction;
and a plurality of plungers extending radially into the outer ring of the reference plate of the N-1 layer and fixedly positioned with the outer ring of the reference plate of the N-1 layer.
2. A multi-mirror adjustment device for use in a measuring apparatus as claimed in claim 1, characterized in that: the plunger is an elastic plunger (15).
3. A multi-mirror adjustment device for use in a measuring apparatus as claimed in claim 1, characterized in that:
the reference plate (11) is provided with a V-shaped groove I (1103), a conical groove I (1101), a plane I and four screw holes I (1102) which correspond to each other,
the reference plate outer ring (12) is provided with a V-shaped groove II (1203), a conical groove II (1201), a plane II and four screw holes II (1202).
4. A multi-mirror adjustment device for use in a measuring apparatus as claimed in claim 3, characterized in that: and a plurality of side screw holes (1204) for installing the plunger are formed around the outer ring (12) of the datum plate.
5. A multi-mirror adjustment device for use in a measuring apparatus as claimed in claim 4, wherein: the side screw holes (1204) are uniformly arranged, and the first screw holes (1102) and the second screw holes (1202) are also uniformly arranged.
6. A multi-mirror adjustment device for use in a measuring apparatus as claimed in claim 1, characterized in that: the middle of the first mirror plate (13) is provided with a mounting position of the first optical mirror, and the middle of the second mirror plate is provided with a mounting position of the second optical mirror.
7. A multi-mirror adjustment device for use in a measuring apparatus as claimed in claim 3, characterized in that:
the notches of the V-shaped groove I (1103) and the V-shaped groove II (1203) are aligned to form a continuous V-shaped groove.
8. A multi-mirror adjustment device for use in a measuring apparatus as claimed in claim 1, characterized in that: the reference plate (11) is circular, the reference plate outer ring (12) is circular, and the reference plate outer ring are assembled in a clearance mode.
9. A multi-mirror adjustment device for use in a measuring apparatus as claimed in claim 3, characterized in that:
the ball head jackscrew (16) adjusts the inclination of the mirror first plate (13) at the V-shaped groove I, the conical groove I and the plane I through the jackscrew hole, and the fixing screw (17) fixes the mirror first plate (13) through the screw hole;
the ball head jackscrew (16) adjusts the inclination of the mirror two plates (14) at the V-shaped groove II, the conical groove II and the plane II through the jackscrew hole, and the fixing screw (17) fixes the mirror two plates (14) through the screw hole.
10. An ellipsometry apparatus, comprising a multi-mirror adjustment device according to any one of claims 1 to 9.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202320393656.9U CN219496776U (en) | 2023-03-06 | 2023-03-06 | Multi-mirror adjusting device for measuring equipment and ellipsometry equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202320393656.9U CN219496776U (en) | 2023-03-06 | 2023-03-06 | Multi-mirror adjusting device for measuring equipment and ellipsometry equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN219496776U true CN219496776U (en) | 2023-08-08 |
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ID=87480141
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202320393656.9U Active CN219496776U (en) | 2023-03-06 | 2023-03-06 | Multi-mirror adjusting device for measuring equipment and ellipsometry equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN219496776U (en) |
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2023
- 2023-03-06 CN CN202320393656.9U patent/CN219496776U/en active Active
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