CN113510567A - Turning method of high-flatness annular large-caliber reflecting mirror - Google Patents
Turning method of high-flatness annular large-caliber reflecting mirror Download PDFInfo
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- CN113510567A CN113510567A CN202110496719.9A CN202110496719A CN113510567A CN 113510567 A CN113510567 A CN 113510567A CN 202110496719 A CN202110496719 A CN 202110496719A CN 113510567 A CN113510567 A CN 113510567A
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- reflector
- reflective mirror
- flatness
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B13/00—Machines or devices designed for grinding or polishing optical surfaces on lenses or surfaces of similar shape on other work; Accessories therefor
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B13/00—Machines or devices designed for grinding or polishing optical surfaces on lenses or surfaces of similar shape on other work; Accessories therefor
- B24B13/005—Blocking means, chucks or the like; Alignment devices
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Abstract
The invention relates to a turning method of a high-flatness annular large-caliber reflector, which comprises the steps of S1, mounting a switching jig; s2, roughly machining a first surface of the reflector; s3, finely machining the second surface of the reflector; s4, compensating and processing the second surface of the reflector; s5, finely machining the first surface of the reflector; s6, compensating and processing the first surface of the reflector; and S7, removing the reflector and cleaning. Through the clamping and the design of the switching jig, the two surfaces of the reflector can be machined, the corresponding precision is ensured, and the phenomenon of uneven stress in the machining process can be solved; aiming at the high-precision machining requirement of optical parts, on the basis of the existing precision machining equipment, the ultra-precision machining higher than the self-precision of a machine tool can be realized by improving the structure of a tool jig, optimizing the process, carrying out specific compensation and the like.
Description
Technical Field
The invention relates to the processing and production of precision instrument parts, in particular to a turning method of a high-flatness annular large-caliber reflecting mirror.
Background
In the optics, the plane mirror is the only optical element capable of forming perfect images, the concentricity of the light beams is not changed, after the light beams are reflected by the plane mirror, the divergent concentric light beams are still divergent concentric light beams, and the convergent concentric light beams are still convergent concentric light beams.
Currently, for the processing of optical parts with high flatness requirements, a grinding and polishing mode after grinding is usually selected. However, due to the characteristics of large part size and soft material, the method is affected by untimely chip removal and the self precision of the equipment during machining, and the actual machining precision cannot meet the design requirement (the flatness requirement is 0.3 um). Grinding by manpower or grinding and polishing equipment can meet the requirements of mirror surfaces, but the efficiency is low.
With the development of science and technology, optical parts put higher demands on processing precision. The realization of higher machining precision not only relies on the precision of lathe self, and the factor that needs control is still many, say for example frock tool assembly accumulative error etc.. Therefore, for many factors, several factors having the largest influence need to be analyzed and solved, and for the error which exists really but cannot be eliminated, final processing compensation needs to be performed to realize ultra-precision processing.
Disclosure of Invention
The invention provides a turning method of a high-flatness annular large-caliber reflecting mirror, aiming at the problems in the prior art.
The technical scheme provided by the invention for solving the problems is as follows: a turning method of a high-flatness annular large-caliber reflecting mirror comprises the following steps,
s1, mounting a switching jig, and mounting the switching jig on a machine tool spindle;
s2, roughly machining the first surface of the reflector, installing the reflector on the switching jig, and roughly machining the first surface of the reflector;
s3, finish machining the second surface of the reflector, namely, mounting the reflector on the switching jig in a turnover mode, positioning by taking the first surface as a reference, and finish machining the second surface of the reflector;
s4, compensating and processing the second surface of the reflector, taking down the reflector, detecting the flatness by using a roundness meter, reinstalling the reflector on the switching jig by using the first surface as a reference, and performing compensation processing according to the detection result and the rule summarized by multiple tests in advance;
s5, finish machining the first surface of the reflector, overturning the reflector again and mounting the reflector on the adapter jig, positioning by taking the second surface as a reference, rounding the reflector, and finish machining the first surface of the reflector;
s6, compensating and processing the first surface of the reflector, taking down the reflector, detecting the flatness by using a roundness meter, then reinstalling the reflector on the switching jig by taking the second surface as a reference, and performing compensation processing according to the detection result and the rule summarized by multiple tests in advance to reach the required flatness;
and S7, removing the reflector and cleaning.
More specifically, in step S1, the transferring jig includes a first transferring surface contacting with the spindle of the machine tool and a second transferring surface contacting with the reflective mirror, and a parallelism between the first transferring surface and the second transferring surface is less than 0.5 μm.
More specifically, the method for installing the reflective mirror in step S2 includes fixing the reflective mirror by a back-hanging screw, dispensing at a position where the reflective mirror contacts the adapter, and loosening the screw after the glue solution is dried.
More specifically, in step S2, the first surface of the mirror may be roughened to the point of exposure to light.
Further specifically, the method for installing the reflector in step S3 includes selecting a pressing plate larger than the central hole of the reflector and smaller than the diameter of the reflector, covering the central hole of the reflector with the pressing plate, fixing the periphery of the pressing plate with a fixing bolt, rounding, installing a positioning bolt between the pressing plate and the adapter jig, locating the positioning bolt on the axis of the reflector, and finally loosening the fixing bolt.
More specifically, the marking is performed when the mirror is removed in the above steps S4 and S6, and the mirror is attached based on the marking when the mirror is reattached.
More specifically, the method for installing the reflective mirror in step S5 includes fixing the reflective mirror by a back-hanging screw, dispensing at a position where the reflective mirror contacts the adapter, and loosening the screw after the glue solution is dried.
More specifically, the method for summarizing the rule through multiple tests in steps S4 and S6 is to adjust the compensation machining value in the axial direction according to the flatness measurement result and the measurement surface profile trend of the roundness measuring instrument.
More specifically, the compensation processing range is as follows: (0.5-1) x roundness measuring apparatus.
More specifically, the flatness required after the compensation process in steps S4 and S6 is less than or equal to 0.3 μm.
The invention has the beneficial effects that: through the clamping and the design of the switching jig, the two surfaces of the reflector can be machined, the corresponding precision is ensured, and the phenomenon of uneven stress in the machining process can be solved; aiming at the high-precision machining requirement of optical parts, on the basis of the existing precision machining equipment, the ultra-precision machining higher than the self-precision of a machine tool can be realized by improving the structure of a tool jig, optimizing the process, carrying out specific compensation and the like.
Drawings
FIG. 1 is a process flow diagram of the present invention;
FIG. 2 is a schematic view of a clamping structure of the reflector of the present invention with a first surface as a reference;
fig. 3 is a schematic view of a clamping structure of the reflector of the present invention with reference to the second surface.
In the figure: 1. a machine tool spindle; 2. transferring the jig; 3. a reflective mirror; 4. pressing a plate; 21. a first transfer surface; 22. a second transfer surface; 31. a first side; 32. a second face; 41. a fixing hole; 42. positioning holes; 43. and (6) positioning the bolt.
Detailed Description
The technical solutions of the present invention will be described clearly and completely with reference to the accompanying drawings, and it should be understood that the described embodiments are some, but not all embodiments of the present invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplicity of description, but do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
In the description of the present invention, it should be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meanings of the above terms in the present invention can be understood in specific cases to those skilled in the art. In addition, the technical features involved in the different embodiments of the present invention described below may be combined with each other as long as they do not conflict with each other.
As shown in fig. 1-3, a turning method for a ring-shaped large-caliber reflective mirror with high flatness comprises the steps of,
and S1, mounting the switching jig (2).
Firstly, after the switching jig (2) is machined by a common lathe, the switching jig is fixedly arranged on a machine tool spindle (1) through a hexagon screw.
And then, processing two end faces of the switching jig (2) on the machine tool, wherein the two end faces comprise a first switching face (21) in contact with the main shaft (1) of the machine tool and a second switching face (22) in contact with the reflective mirror (3), and the parallelism of the first switching face (21) and the second switching face (22) is required to be ensured to be less than 0.5 mu m.
And S2, roughly machining the first surface (31) of the reflector (3).
Firstly, the reflector (3) is required to be installed on the switching jig (2), the installation method comprises the steps of arranging a blind hole with threads on a second surface (32) of the reflector (3), installing the reflector (3) on the switching jig (2) through a screw (a screw is hung on the reverse side of the reflector), dispensing at the position where the reflector (3) is in contact with the switching jig (2) after the reflector is fixed, placing for a period of time, and loosening the screw after glue solution is dried, so that the reflector is not thrown out in the rotary machining process, and the reflector (3) is prevented from deforming due to uneven stress.
And then, roughly machining the first surface (31) of the reflector (3) by using a machine tool, wherein the machining process can be finished by using the machined first surface (31) as a rough reference, and entering the next step.
And S3, finishing the second surface (32) of the reflector (3).
Firstly, loosening the screw of the step S2 to take down the reflector (3), and mounting the reflector (3) by taking the first surface (31) as a rough reference, namely, the first surface (31) is contacted with the spindle (1) of the machine tool, wherein the mounting method comprises the steps of selecting a pressure plate (4) which is larger than the central hole of the reflector (3) and smaller than the diameter of the reflector (3) (the diameter of the pressure plate is slightly larger than the diameter of the central hole of the reflector), wherein the pressure plate (4) comprises a positioning hole (42) positioned at the center of the pressure plate (4) and fixing holes (41) uniformly distributed around the positioning hole (42), covering the central hole of the reflector (3) by the pressure plate (4), matching the fixing holes with the fixing holes (41) through fixing bolts to fix the periphery of the pressure plate (4), and rounding the reflector (3).
Afterwards, install positioning bolt (43) between clamp plate (4) and switching tool (2), positioning bolt (43) pass reflector (3) centre bore and lie in the axis of reflector (3) simultaneously, loosen fixing bolt at last, guarantee reflector (3) add man-hour processing can't throw away, the purpose of doing so is to guarantee that reflector (3) atress is even, can not lead to the deformation because of the atress is uneven.
And finally, performing finish machining on the second surface (32) of the reflector (3) by using a machine tool, wherein the material removal amount is controlled to be 0.01-0.02 mm.
And S4, compensating and processing the second surface (32) of the reflective mirror (3).
Firstly, marking the installation position of a reflector (3) on a switching jig (2), taking down the reflector (3) after marking is finished, detecting the planeness by using a roundness meter, recording the measurement result and determining a compensation value required for compensation processing by combining the rule summarized by a plurality of times of tests in advance;
and then, the reflector (3) is remounted on the switching jig (2) according to the marked position by taking the first surface (31) as a reference surface, and the mounting method is the mounting method of the step S3.
Finally, compensation machining is carried out in the axial direction by a machine tool, and the flatness of the second surface (32) is ensured to be less than or equal to 0.3 mu m.
And S5, finishing the first surface (31) of the reflective mirror (3).
Firstly, the reflective mirror (3) is taken down and turned over, the reflective mirror (3) is arranged on the switching jig (2) by taking the second surface (32) as a reference for positioning, the mounting method comprises the steps of arranging the reflective mirror (3) on the switching jig (2) through screws (suspending the screws on the reverse side), after fixation, dispensing is carried out at the position where the reflective mirror (3) is in contact with the switching jig (2), the reflective mirror is placed for a period of time, after glue liquid is dried, the screws are unscrewed, and the reflective mirror is ensured not to be thrown out in the rotating processing process.
Then, the reflector (3) is rounded.
And finally, performing finish machining on the first surface (31) of the reflective mirror (3) by using a machine tool, measuring the total height of the reflective mirror (3) by using a machine tool dial gauge before performing finish machining, calculating the allowance, and determining the fractional cutter machining. And (4) after the last cut is finished, determining the residual amount by utilizing the measurement of a machine tool dial indicator after each time of processing is finished.
And S6, compensating and processing the first surface (31) of the reflective mirror (3).
Firstly, marking the installation position of a reflector (3) on a switching jig (2), taking down the reflector (3) after marking is finished, detecting the planeness by using a roundness meter, recording the measurement result and determining a compensation value required for compensation processing by combining the rule summarized by a plurality of times of tests in advance;
and then, re-mounting the reflector (3) on the switching jig (2) according to the marked position by taking the second surface (32) as a reference surface, wherein the mounting method is the mounting method of the step S5.
Finally, compensation machining is carried out in the axial direction by a machine tool to ensure that the flatness of the first face (31) is less than or equal to 0.3 [ mu ] m.
And S7, taking down the reflector (3) and cleaning, and cleaning residual glue and other impurities to finish the whole processing process.
After the processing is finished, two end faces of the reflector (3) need to be detected, a final detection report is issued to indicate whether the reflector (3) is qualified, and finally the reflector (3) can be packaged and sold.
Because the requirement of the reflective mirror (3) on the flatness is high, a plurality of factors can interfere the result, such as the ambient temperature, the accumulated installation error, the deformation of a tool fixture and the like, and therefore the compensation of the product in the processing process becomes more important.
The following describes a method for compensating for the rules of multiple test summaries in advance: and (3) trial machining is carried out on the product under the same environment and the same machining equipment, the measurement is carried out through a roundness measuring instrument, and the machine tool program is adjusted to carry out compensation machining in the Z direction (namely the axial direction of the reflector) according to the flatness measuring result and the measured surface type trend of the roundness measuring instrument. Due to the radius turning, the measured values cannot be directly input for compensation. Meanwhile, factors influencing the precision turning are various, and the compensation cannot be directly carried out according to half of the measured value. Therefore, on the premise of ensuring stable environment of the processing and measuring area, multiple experiments are needed, and after a compensation value is obtained, batch processing is carried out. An exact compensation value cannot be provided here, since this compensation value is used to compensate for deviations that are present but cannot be eliminated, and different process measurement devices are not identical. After multiple verification tests, the suggested compensation machining value is between (0.5-1) multiplied by the measurement result of a roundness measuring instrument.
In summary, for the processing of ultra-precise optical components, the self-test of the components on a machine tool and the measurement of a disassembled roundness meter have deviation or even are completely opposite, obviously, the detection result of a professional measuring instrument is used as the standard, and the difference between the two results lies in whether uneven stress exists or not, so that a tool jig or a reflector (3) generates micro-change, and the accumulated error of assembly is also formed. First, to the atress uneven, when the frock tool design, adopt the mode of lock screw pressure in the middle of clamp plate (4) and the point is sticky, make reflector (3) atress all around even. Secondly, regarding the accumulated assembly error, the surfaces of the adapter jig (2) contacting with the parts are attached as much as possible during assembly, and the marks are marked before disassembly, so that the advantage is that the machining position before compensation is restored as much as possible during compensation machining after detection. Thirdly, specific compensation processing is carried out aiming at influencing factors which exist practically and cannot be eliminated under the constant temperature and humidity processing environment.
Aiming at the high-precision machining requirement of optical parts, on the basis of the existing precision machining equipment, the ultra-precision machining higher than the self-precision of a machine tool can be realized by improving the structure of a tool jig, optimizing the process, carrying out specific compensation and the like.
It is to be emphasized that: the above embodiments are only preferred embodiments of the present invention, and are not intended to limit the present invention in any way, and all simple modifications, equivalent changes and modifications made to the above embodiments according to the technical spirit of the present invention are within the scope of the technical solution of the present invention.
Claims (10)
1. A turning method of a high-flatness annular large-caliber reflecting mirror is characterized by comprising the following steps,
s1, mounting the switching jig (2), and mounting the switching jig (2) on the machine tool spindle (1);
s2, roughly machining the first surface (31) of the reflective mirror (3), installing the reflective mirror (3) on the switching jig (2), and roughly machining the first surface (31) of the reflective mirror (3);
s3, finish machining the second surface (32) of the reflective mirror (3), mounting the reflective mirror (3) on the switching jig (2) in a turnover mode, positioning by taking the first surface (31) as a reference, and finish machining the second surface (32) of the reflective mirror (3);
s4, compensating and processing the second surface (32) of the reflective mirror (3), taking down the reflective mirror (3), detecting the flatness by using a roundness measuring instrument, then reinstalling the reflective mirror (3) on the switching jig (2) by using the first surface (31) as a reference, and performing compensation processing according to the detection result and the rule summarized by multiple tests in advance;
s5, finely machining the first surface (31) of the reflective mirror (3), overturning the reflective mirror (3) to be mounted on the switching jig (2) again, positioning by taking the second surface (32) as a reference, rounding the reflective mirror (3), and finely machining the first surface (31) of the reflective mirror (3);
s6, compensating and processing the first surface (31) of the reflective mirror (3), taking down the reflective mirror (3), detecting the flatness by using a roundness meter, then re-installing the reflective mirror (3) on the switching jig (2) by using the second surface (32) as a reference, and compensating and processing according to the detection result and the rule summarized by multiple tests in advance to reach the required flatness;
and S7, removing the reflector (3) and cleaning.
2. The method for turning the ring-shaped large-aperture reflector with high flatness according to claim 1, wherein the transferring jig (2) in step S1 includes a first transferring surface (21) contacting with the spindle (1) of the machine tool, and a second transferring surface (22) contacting with the reflector (3), and the parallelism between the first transferring surface (21) and the second transferring surface (22) is less than 0.5 μm.
3. The method for turning the ring-type large-aperture reflector with high flatness according to claim 1, wherein the method for installing the reflector (3) in the step S2 is that the reflector (3) is fixed by a back-side screw hanging method, then glue is dispensed at a position where the reflector (3) contacts the adapting jig (2), and the screw is unscrewed after the glue solution is dried.
4. The method for turning the annular high aperture reflector according to claim 1, wherein the first surface (31) of the reflector (3) is rough machined to a visible light in the step S2.
5. The turning method of the ring-type large-aperture reflector with high flatness according to claim 1, characterized in that the method for installing the reflector in step S3 is to select a pressing plate (4) which is larger than the central hole of the reflector (3) and smaller than the diameter of the reflector (3), the pressing plate (4) covers the central hole of the reflector (3) and fixes the periphery of the pressing plate (4) through a fixing bolt for rounding, then a positioning bolt (43) is installed between the pressing plate (4) and the adapter jig (2), the positioning bolt (43) is located on the axis of the reflector (3), and finally the fixing bolt at the periphery is loosened.
6. The method for turning a highly planar ring-type large-aperture mirror as claimed in claim 1, wherein the mirror (3) is marked when removed in steps S4 and S6, and is mounted according to the mark when the mirror (3) is re-mounted.
7. The method for turning the ring-type large-aperture reflector with high flatness according to claim 1, wherein the method for installing the reflector in step S5 is to fix the reflector (3) by back-hanging screws, dispense the adhesive at the position where the reflector (3) contacts the adapter jig (2), and loosen the screws after the adhesive is dried.
8. The method for turning the ring-type large aperture reflector with high flatness of claim 1, wherein the method for summarizing the rules through multiple tests in steps S4 and S6 is to adjust the compensation processing value in the axial direction according to the flatness measurement result and the measurement surface profile trend of the roundness measuring instrument.
9. The method for turning the annular high-aperture reflector with high flatness of the claim 8 is characterized in that the compensation processing range is as follows: (0.5-1) x roundness measuring apparatus.
10. The method for turning the ring-type mirror with large aperture according to claim 1, wherein the flatness required after the compensation process in steps S4 and S6 is less than or equal to 0.3 μm.
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