CN219463108U

CN219463108U - Pretreatment device for preparing tantalum carbide powder

Info

Publication number: CN219463108U
Application number: CN202320115792.1U
Authority: CN
Inventors: 李卫月; 李兆颖; 关春洋
Original assignee: Jiangsu Jixin Semiconductor Silicon Research Institute Co Ltd
Current assignee: Jiangsu Jixin Semiconductor Silicon Research Institute Co Ltd
Priority date: 2023-02-06
Filing date: 2023-02-06
Publication date: 2023-08-04
Anticipated expiration: 2033-02-06

Abstract

The utility model discloses a pretreatment device for preparing tantalum carbide powder, which comprises a first mixing mechanism, a charging mechanism and a compacting mechanism, wherein the first mixing mechanism comprises a first shell, a first cover and a first stirring mechanism, the first shell defines a first accommodating cavity with an open top, and a first discharge valve is arranged at the bottom of the first shell; the first machine cover is arranged at the top of the first machine shell and is provided with a first feeding hopper; the top end of the first stirring mechanism can be rotatably arranged at the center of the first cover; the charging mechanism and the compacting mechanism are arranged below the first mixing mechanism and are used for charging materials into the reaction crucible and compacting the materials; the reaction crucible can reciprocate between the charging mechanism and the compacting mechanism. The utility model can fully mix tantalum powder and carbon powder, improves the mixing uniformity of the tantalum powder and the carbon powder, can split and compact the mixed powder, reduces the cost and improves the efficiency.

Description

Pretreatment device for preparing tantalum carbide powder

Technical Field

The utility model relates to the field of silicon carbide crystal growth, in particular to a pretreatment device for preparing tantalum carbide powder.

Background

When the conductive silicon carbide crystal is prepared by using a Physical Vapor Transport (PVT), a tantalum carbide coating in a growth crucible is an important technical parameter for solving the problem of increased stress at the edge of the crystal and realizing further diameter expansion of the silicon carbide crystal. The common preparation methods of the tantalum carbide coating mainly comprise a Chemical Vapor Deposition (CVD) method and a high-temperature solidification sintering method, wherein the tantalum carbide coating prepared by adopting the high-temperature solidification sintering method needs high-purity superfine tantalum carbide powder with balanced stoichiometric Ta/C ratio. The existing preparation method of the common tantalum carbide powder mainly comprises the following steps: although the methods can prepare tantalum carbide powder by a direct synthesis method, a carbothermal reduction method, a sol-gel method, a mechanical alloying method and the like, the methods have the problems of complex preparation process, high process requirements, poor powder purity, high cost and the like.

At present, a device for preparing high-purity tantalum carbide powder is being studied, which is mainly characterized in that a mixed material of tantalum powder and carbon powder is placed in a reaction crucible in a furnace body, a pressing mechanism for pressing the mixed material to enable the mixed material to be in a pressed state is arranged on the reaction crucible, a gas pipe communicated with the inside and the outside of the reaction crucible is also arranged on the reaction crucible, the pressing mechanism can replace the traditional solidification operation after mixing, and the mixed material is directly compacted and then subjected to sintering, decarbonizing, crushing and other processes, so that the high-purity tantalum carbide powder is obtained. Wherein, the uniformity of the tantalum powder and the tantalum powder is directly related to the speed of the preparation process, and the more uniform the mixture is, the higher the efficiency is. The existing mixing is carried out manually by manpower, the operation is complex, the efficiency is low, and a pretreatment device special for mixing and compacting tantalum powder and carbon powder is urgently needed.

Disclosure of Invention

The present utility model aims to solve at least one of the technical problems existing in the prior art. Therefore, the utility model provides a pretreatment device for preparing tantalum carbide powder, which can fully mix tantalum powder and carbon powder, improve the mixing uniformity of the tantalum powder and the carbon powder, split-charge and compaction of mixed powder, reduce the cost and improve the efficiency.

According to an embodiment of the utility model, a pretreatment device for preparing tantalum carbide powder comprises:

the first mixing mechanism comprises a first shell, a first cover and a first stirring mechanism, the first shell defines a first accommodating cavity with an open top, and a first discharge valve is arranged at the bottom of the first shell; the first machine cover is arranged at the top of the first machine shell, and a first feeding hopper is arranged on the first machine cover; the top end of the first stirring mechanism can be rotatably arranged at the center of the first cover;

the charging mechanism is arranged right below the first discharging valve and is used for charging the reaction crucible;

the compaction mechanism is arranged below the first mixing mechanism and is positioned at one side of the charging mechanism and used for compacting the materials in the reaction crucible after charging;

wherein, the reaction crucible can reciprocate between the charging mechanism and the compacting mechanism.

According to the pretreatment device for preparing tantalum carbide powder, disclosed by the embodiment of the utility model, through the cooperation among the first mixing mechanism, the charging mechanism and the compacting mechanism, the full mixing of tantalum powder and carbon powder can be realized, the mixing uniformity of tantalum powder and carbon powder is improved, the mixed powder can be subpackaged and compacted, the cost is reduced, and the efficiency is improved.

In some embodiments of the utility model, the first stirring mechanism comprises:

the side wall of the main stirring rod is provided with a first helical blade, and the top end of the main stirring rod penetrates through the first cover;

the auxiliary stirring rods are multiple and are uniformly arranged around the main stirring rod; each auxiliary stirring rod is provided with a plurality of stirring parts which are arranged along the axial direction of the auxiliary stirring rod;

the first driving mechanism is arranged above the first cover and used for driving the main stirring rod to rotate;

wherein, all the top of assisting the puddler all with the upper portion of main puddler is connected, main puddler with all assist the puddler is vertical to be arranged.

In some embodiments of the utility model, the charging mechanism comprises:

the storage hopper is arranged below the first shell and right opposite to the first discharge valve, and a discharge valve is arranged at the bottom of the storage hopper;

the charging platform is provided with a first vacuum chuck;

the rotating mechanism is arranged below the charging platform so as to drive the charging platform to rotate;

wherein, first vacuum chuck with the storage hopper eccentric setting.

In some embodiments of the utility model, the loading platform is provided with a first pressure sensor.

In some embodiments of the utility model, the compaction mechanism comprises:

the compaction platform is provided with a third vacuum chuck;

the pressing plate is horizontally arranged right above the third vacuum chuck, and the outer diameter of the pressing plate is not larger than the inner diameter of the reaction crucible;

the compression telescopic rod is connected with one side, far away from the third vacuum chuck, of the pressing plate at the telescopic end, and the fixed end of the compression telescopic rod is connected with the compression platform through a bracket so as to drive the pressing plate to move in a direction close to or far away from the third vacuum chuck;

and a second pressure sensor is arranged on one side of the pressing plate, which is close to the third vacuum chuck.

In some embodiments of the present utility model, the apparatus further comprises a vibration mechanism, wherein the vibration mechanism is arranged below the first mixing mechanism and is positioned at one side of the charging mechanism, and is used for vibrating the charged reaction crucible;

the vibration mechanism includes:

the vibration platform is provided with a second vacuum chuck;

the vibration motor is arranged at the bottom of the vibration platform;

the plurality of reset springs are symmetrically arranged below the vibration platform; and one end of the return spring, which is far away from the vibrating platform, is connected with the vibrating plate bracket.

In some embodiments of the utility model, further comprising a transport mechanism comprising:

a first electric telescopic rod disposed on a side of the charging mechanism away from the vibrating mechanism to push the reaction crucible from the charging mechanism onto the vibrating mechanism;

a second electric telescopic rod arranged on a side of the vibrating mechanism away from the compacting mechanism to push the reaction crucible from the vibrating mechanism onto the compacting mechanism;

a third electric telescopic rod arranged on a side of the compacting mechanism away from the charging mechanism to push the reaction crucible from the compacting mechanism onto the charging mechanism;

the first electric telescopic rod, the second electric telescopic rod and the telescopic end of the third electric telescopic rod are respectively provided with an arc-shaped push plate matched with the outer wall of the reaction crucible.

In some embodiments of the utility model, arc-shaped limiting blocks are arranged on the charging mechanism, the vibrating mechanism and the compacting mechanism.

In some embodiments of the present utility model, the mixer further comprises a second mixing mechanism, wherein the second mixing mechanism comprises a second casing, a second cover and a second stirring mechanism, the second casing defines a second accommodating cavity with an open top, and a second discharge valve is arranged at the bottom of the second casing; the second machine cover is arranged at the top of the second machine shell, and a second feeding hopper is arranged on the second machine cover; the top end of the second stirring mechanism can be rotatably arranged at the center of the second cover;

the second stirring mechanism comprises a second stirring rod and a servo motor for driving the second stirring rod to rotate, a second spiral blade is arranged at the lower part of the second stirring rod, and the size of the second spiral blade is gradually increased along the direction from top to bottom of the second stirring rod; a plurality of sub-stirring rods are arranged at the upper part of the second stirring rod;

the second mixing mechanism is located above the first mixing mechanism, and the first feeding hopper is opposite to the second discharging valve.

In some embodiments of the present utility model, the mixer further comprises a support frame, the first mixing mechanism is mounted at the top end of the support frame, and the charging mechanism, the vibrating mechanism and the compacting mechanism are correspondingly mounted on the bottom plate of the support frame

Additional aspects and advantages of the utility model will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the utility model.

Drawings

FIG. 1 is a schematic view of a pretreatment apparatus for preparing tantalum carbide powder according to an embodiment of the present utility model;

FIG. 2 is a schematic view of a loading mechanism of the present utility model;

FIG. 3 is a schematic view of a vibration mechanism of the present utility model;

fig. 4 is a schematic view of a pretreatment apparatus for preparing tantalum carbide powder according to another embodiment of the present utility model;

fig. 5 is a left side view of the pretreatment device for preparing tantalum carbide powder of fig. 4;

FIG. 6 is a top view of the present utility model between the loading mechanism, the vibratory mechanism and the compacting mechanism;

fig. 7 is a schematic view of a second mixing mechanism according to the present utility model.

Reference numerals:

a pretreatment device 100 for preparing tantalum carbide powder;

a first mixing mechanism 10; a first housing 11; a first accommodation chamber 111; a first cover 12; a first feed hopper 13; a first stirring mechanism 14; a main stirring rod 141; an auxiliary stirring rod 142; a first driving mechanism 143; a first helical blade 144; a stirring section 145; a first discharge valve 15;

a charging mechanism 20; a storage hopper 21; a discharge valve 211; a loading platform 22; a rotation mechanism 23; a first vacuum chuck 24;

a vibration mechanism 30; a vibration table 31; a vibration motor 32; a return spring 33; a second vacuum chuck 34; a diaphragm support 35;

a compacting mechanism 40; a compacting table 41; a pressing plate 42; compacting the telescopic rod 43; a third vacuum chuck 44; a bracket 45;

a support 50;

a second mixing mechanism 60; a second casing 61; a second receiving chamber 611; a second cover 62; a second feed hopper 63; a second stirring mechanism 64; a second stirring rod 641; a servo motor 642; a sub-stirring rod 643; a second helical blade 644; a second discharge valve 65;

a conveying mechanism 70; a first electric telescopic rod 71; a second electric telescopic rod 72; a third electric telescopic rod 73; an arcuate push plate 74;

an arc-shaped limiting block 80; a first stopper 81; a second stopper 82; a third stopper 83;

and a reaction crucible 200.

Detailed Description

Embodiments of the present utility model are described in detail below, examples of which are illustrated in the accompanying drawings, wherein like or similar reference numerals refer to like or similar elements or elements having like or similar functions throughout. The embodiments described below by referring to the drawings are illustrative and intended to explain the present utility model and should not be construed as limiting the utility model.

The following disclosure provides many different embodiments, or examples, for implementing different structures of the utility model. In order to simplify the present disclosure, components and arrangements of specific examples are described below. They are, of course, merely examples and are not intended to limit the utility model. Furthermore, the present utility model may repeat reference numerals and/or letters in the various examples. This repetition is for the purpose of simplicity and clarity and does not in itself dictate a relationship between the various embodiments and/or configurations discussed. In addition, the present utility model provides examples of various specific processes and materials, but one of ordinary skill in the art will recognize the applicability of other processes and/or the use of other materials.

A pretreatment apparatus 100 for preparing tantalum carbide powder according to an embodiment of the present utility model is described below with reference to fig. 1 to 7, including: a first mixing mechanism 10, a charging mechanism 20 and a compacting mechanism 40.

Referring to fig. 1 to 3, the first mixing mechanism 10 includes a first housing 11, a first cover 12, and a first stirring mechanism 14, the first housing 11 defining a first accommodation chamber 111 with an open top, and a first discharge valve 15 being provided at a bottom of the first housing 11; the first cover 12 is arranged at the top of the first shell 11, and a first feed hopper 13 is arranged on the first cover 11; the top end of the first stirring mechanism 14 is rotatably installed at the center of the first cover 12; for example, the first housing 11 has a hollow cylindrical structure, a first accommodating cavity 111 is formed in the first housing, and the first cover 12 is detachably mounted on the top of the first housing 11, so that the disassembly, assembly and maintenance of internal components are facilitated; the materials to be mixed can be loaded into the first accommodating cavity 111 through the first feeding hopper 13, and the first stirring mechanism 14 can stir the materials in the first accommodating cavity 111 so as to realize uniform mixing of the materials. The charging mechanism 20 is disposed directly below the first discharging valve 15, and is used for charging the reaction crucible 200, specifically, after the first mixing mechanism sufficiently mixes the materials, the first discharging valve 15 may be opened, so that the uniformly mixed materials enter the charging mechanism 20, and are charged into the reaction crucible 200 under the action of the charging mechanism 20. The compacting mechanism 40 is disposed below the first mixing mechanism 10 on one side of the charging mechanism 20, and is used for compacting the material in the reaction crucible 200 after charging, for example, the compacting mechanism 40 may be disposed side by side with the charging mechanism 20, and after the material in the reaction crucible 200 is loaded as required, the reaction crucible may be moved onto the compacting mechanism 40, and the compacting mechanism 40 is controlled to compact the material in the reaction crucible 200, so as to prepare for subsequent operations. The reaction crucible 200 may reciprocate between the charging mechanism 20 and the compacting mechanism 40, for example, the amount of the mixture charged into the reaction crucible 200 by the charging mechanism 20 each time may be limited, the reaction crucible is compacted by moving the charging mechanism 20 to the compacting mechanism 40 after each charging, and after the compaction is completed, the reaction crucible is moved to the charging mechanism 20 to perform the next charging … … for repeated cycles to perform charging and compaction for a plurality of times, so as to ensure that the compacting effect of the mixture in the reaction crucible 200 is better and the follow-up operation is facilitated.

It can be understood that the tantalum powder and the carbon powder to be mixed can be poured into the first accommodating cavity 111 through the first feeding hopper 13, and then the first stirring mechanism 14 is controlled to rotate to stir the tantalum powder and the carbon powder in the first accommodating cavity 111 so as to realize the full mixing of the tantalum powder and the carbon powder. After the mixing is completed, the first discharge valve 15 may be controlled to be opened to discharge an appropriate amount of the mixed tantalum powder and carbon powder into the charging mechanism 20, and the mixed powder (tantalum powder and carbon powder, hereinafter referred to as "powder") is charged into the reaction crucible 200 as needed. After the mixed powder is filled, the reaction crucible 200 is moved onto the compacting mechanism 40 by the charging mechanism 20, and the compacting mechanism 40 is controlled to start working, so that the mixed powder in the reaction crucible 200 is compacted. Considering that the charging mechanism 20 performs only one compaction operation after charging a required amount of mixed powder at a time, there may be uneven stress of mixed powder in the reaction crucible 200, poor compaction effect, and adverse effect on the subsequent operation, so that the corresponding mixed powder may be divided into a plurality of equal parts according to the total capacity of the reaction crucible 200 and sequentially charged into the reaction crucible 200, and each time of charging is followed by sequentially performing compaction operation, so that the cycle between charging and compaction is performed multiple times to promote the final compaction effect.

In view of this, according to the pretreatment device for preparing tantalum carbide powder of the embodiment of the present utility model, through the cooperation among the first mixing mechanism 10, the charging mechanism 20 and the compacting mechanism 40, sufficient mixing of tantalum powder and carbon powder can be achieved, mixing uniformity of tantalum powder and carbon powder can be improved, and mixed powder can be split-packed and compacted, so that cost is reduced, and efficiency is improved.

In some embodiments of the present utility model, referring to fig. 1 to 3, the first stirring mechanism 14 includes: the main stirring rod 141, the auxiliary stirring rod 142 and the first driving mechanism 143, wherein a first helical blade 144 is arranged on the side wall of the main stirring rod 141, and the top end of the main stirring rod 141 penetrates through the first cover 12; for example, the main stirring rod 141 extends to the bottom of the first accommodating cavity 111, and the first helical blade 144 extends from the lower end of the main stirring rod 141 to the upper end, so that when the main stirring rod 141 rotates, the material at the bottom of the first accommodating cavity 111 can be conveyed upwards under the action of the first helical blade 144, so that the mixing of the material at the bottom and the material at the upper part is realized, and the mixing uniformity of the material is improved. A plurality of auxiliary stirring rods 142 are uniformly arranged around the main stirring rod 141; each auxiliary stirring rod 142 is provided with a plurality of stirring parts 145, and the stirring parts 145 are sequentially arranged from top to bottom along the axial direction of the auxiliary stirring rod 142; for example, there may be 3, 4, 5, or 6 auxiliary stirring bars 142, etc., and the distances between any two adjacent auxiliary stirring bars 142 are equal. Normally, the plurality of stirring portions 145 on each auxiliary stirring rod 142 are arranged at equal intervals to achieve stirring of the materials everywhere. The first driving mechanism 143 is installed above the first cover 12 and is used for driving the main stirring rod 141 to rotate; the top ends of all the auxiliary stirring rods 142 are connected with the upper portion of the main stirring rod 141, and the main stirring rod 141 and all the auxiliary stirring rods 142 are vertically arranged. For example, the auxiliary stirring bars 142 are arranged in parallel with the main stirring bars 141, the top ends of the respective auxiliary stirring bars 142 are connected to the upper portion of the main stirring bars 141 through a connecting rod arranged laterally, and when the main stirring bars 141 are rotated, the respective auxiliary stirring bars 142 are rotated in synchronization.

It can be understood that when tantalum powder and carbon powder are loaded into the first accommodating cavity 111 through the first feeding hopper 13, the first driving mechanism 143 can be started to work so as to drive the main stirring rod 141 to rotate, meanwhile, each auxiliary stirring rod 142 synchronously rotates around the circumference of the main stirring rod 141, on one hand, under the action of the first helical blade 144, the material at the bottom can move upwards and participate in stirring of the material above; on the other hand, the materials around the main stirring rod 141 in the first accommodating chamber 111 can be stirred by the respective auxiliary stirring rods 142 and the stirring parts 145; under the combined action of the first helical blades 144 and each stirring part 145, all materials in the first accommodating cavity 111 can be mixed and stirred, so that the mixing effect is improved, and more uniformly mixed powder is obtained.

In view of this, in order to further improve the working efficiency and reduce the cost, the number and the positions of the stirring portions 145 on each auxiliary stirring rod 142 may be set according to the amount of the materials to be mixed, for example, when the materials to be mixed are less, the stirring portions 145 may be arranged in a concentrated manner only at the lower portion of the auxiliary stirring rod 142. In order to further improve the uniformity of mixing, each stirring portion 145 on two adjacent auxiliary stirring rods 142 may also be arranged in a cross manner, so as to stir the materials at different positions in the first accommodating cavity 111, so that the materials at each position can be stirred, and the uniformity of final mixing after stirring is further improved.

In some embodiments of the present utility model, as shown with reference to fig. 1, 4 and 6, the charging mechanism 20 may comprise: the storage hopper 21, the charging platform 22 and the rotating mechanism 23, wherein the storage hopper 21 is arranged below the first shell 11 and is opposite to the first discharging valve 15, and the bottom of the storage hopper 21 is provided with a discharging valve 211; the loading platform 22 is provided with a first vacuum chuck 24 for adsorbing the reaction crucible 200 on the loading platform 22 and driving the reaction crucible 200 to rotate together; the rotating mechanism 23 is arranged below the charging platform 22 to drive the charging platform 22 to rotate; wherein, first vacuum chuck 24 and storage hopper 21 eccentric setting, the discharge valve deflection setting of first vacuum chuck 24 and storage hopper 41 discharge gate department guarantees that the material can fall into the reaction crucible 200 of first vacuum chuck 24 department on loading platform 22, simultaneously, can avoid the material to pile up in a certain position, has guaranteed the homogeneity of shop material.

It will be appreciated that the first discharge valve 15 may be opened to load the uniformly mixed powder into the storage hopper 21 before loading, and the amount of loading may be set according to the need, for example, not to exceed the total capacity of the storage hopper 21 and be an integer multiple of the capacity of the single reaction crucible 200. Next, the reaction crucible 200 to be filled with the mixed powder is placed on the first vacuum chuck 24 on the charging platform 22 so that the first vacuum chuck 24 attracts it. Then, the discharge valve 211 is opened to drop the mixed powder in the storage hopper 21 into the reaction crucible 200. Simultaneously, the rotating mechanism 23 is started to drive the charging platform 22 to rotate, and the reaction crucible 200 rotates together with the rotation under the action of the first vacuum chuck 24. Since the first vacuum chuck 24 is eccentrically disposed with the storage hopper 21, that is, the reaction crucible 200 is eccentrically disposed with the storage hopper 21, the mixed powder falling into the reaction crucible 200 can be uniformly laid, and thus, the concentrated accumulation at a certain place can be avoided. When the mixed powder to be filled or the filled mixed powder reaches a preset value, the discharging valve 211 can be controlled to be closed so as to prevent the mixed powder in the storage hopper 21 from continuously falling into the reaction crucible 200; at the same time, the rotation mechanism 23 is controlled to stop working, and the first vacuum chuck 24 stops adsorbing, so that the reaction crucible 200 stops rotating and is stationary on the first vacuum chuck 24. Then, the reaction crucible 200 on the charging platform 22 is moved into the compacting mechanism 40, so that the mixed powder in the charged reaction crucible 200 is compacted for later operation. More preferably, the diameter of the discharge valve 211 is equal to the radius of the reaction crucible 200, as shown in fig. 1 and 2, the mixed powder discharged through the discharge valve 211 just falls into the radius range of the reaction crucible 200, so when the reaction crucible 200 on the charging platform 22 rotates for one circle, the mixed powder just falls into the reaction crucible 200 for one circle, and the charging and stopping of the mixed powder can be controlled through the rotation circle number of the reaction crucible 200, so that the thickness of the charged mixed powder is not greatly different, and the follow-up compaction and other operations are facilitated.

Of course, if the mixed powder in the single reaction crucible 200 is loaded in multiple times as required, each loading can be performed according to the above operation, and after each loading is completed, the mixed powder is moved from the loading mechanism 20 to the compacting mechanism 40 to be compacted in multiple times, so as to improve the final sub-packaging and compacting effects, and further facilitate the subsequent operations of sintering tantalum powder and tantalum powder, and the like, so as to prepare tantalum carbide powder.

To further control the loading or loading of the compaction process, in some embodiments of the utility model, a first pressure sensor (not shown) may be provided on the loading platform 22. For example, considering that the reaction crucible 200 is placed on the first vacuum chuck 24, a first pressure sensor may be provided on the upper side of the first vacuum chuck 24 to achieve real-time detection of the total weight of the reaction crucible 200 and the mixed powder therein. Accordingly, the specific actions of the discharge valve 211, the rotation mechanism 23, the first vacuum chuck 24, etc. can be controlled according to the change of the weight to achieve the controllability and diversification of the operation.

In some embodiments of the present utility model, referring to fig. 1-3, compaction mechanism 40 may include: the compaction platform 41, the pressing plate 42 and the compaction telescopic rod 43 are arranged on the compaction platform 41, and a third vacuum chuck 44 is arranged on the compaction platform 41 so as to adsorb the reaction crucible 200; the pressing plate 42 is horizontally arranged right above the third vacuum chuck 44, the outer diameter of the pressing plate 42 is not greater than the inner diameter of the reaction crucible 200, for example, the outer diameter of the pressing plate 42 is equal to the inner diameter of the reaction crucible 200 or is smaller than the inner diameter of the reaction crucible 200, and the pressing plate 42 can apply downward pressure to the mixed powder to achieve compaction of the mixed powder; the telescopic end of the compaction telescopic rod 43 is connected with one side of the pressing plate 42 far away from the third vacuum chuck 44, and the fixed end of the compaction telescopic rod 43 is connected with the compaction platform 41 through a bracket 45 so as to drive the pressing plate 42 to move in a direction close to or far away from the third vacuum chuck 44; wherein, a second pressure sensor (not shown) is installed on one side of the pressing plate 42 near the third vacuum chuck 44, and the second pressure sensor is used for detecting the pressure of the pressing plate 42 on the mixed powder in the reaction crucible 200 so as to obtain the compacting effect.

It will be appreciated that the first vacuum chuck 24 may be controlled to suck the reaction crucible 200 as the reaction crucible 200 to be charged is moved to the third vacuum chuck 44 on the compacting table 41. Then, the compacting telescopic 43 is controlled to extend to drive the pressing plate 42 to move towards the reaction crucible 200 until the pressing plate 42 contacts and presses the mixed powder. Since the forces are mutually applied, the pressure of the pressing plate 42 on the mixed powder is gradually increased when the pressing plate is contacted with the mixed powder in the pressing process, the reaction force of the mixed powder is also gradually increased, so that the second pressure sensor can detect the acting force between the mixed powder and the pressing plate 42, when the detected reaction force reaches a preset value, the compaction effect is proved to be achieved, the compaction telescopic rod 43 is controlled to stop to extend continuously, and the compaction telescopic rod 43 is controlled to retract after a certain time (a few seconds or a few minutes). Normally, the compaction telescopic bar 43 is in a contracted state.

In some embodiments of the present utility model, referring to fig. 2, 3 and 6, the apparatus may further include a vibration mechanism 30, wherein the vibration mechanism 30 is disposed below the first mixing mechanism 10 at one side of the charging mechanism 20, for vibrating the charged reaction crucible 200; specifically, the vibration mechanism 30 may include: the vibration platform 31, the vibration motor 32 and the return spring 33, and the vibration platform 31 is provided with a second vacuum chuck 34; the vibration motor 32 is installed at the bottom of the vibration platform 31; a plurality of return springs 33 are symmetrically arranged below the vibration platform 31; the end of the return spring 33 remote from the vibration table 31 is connected to a vibration plate bracket 35.

It will be appreciated that the reaction crucible 200 loaded with material in the loading mechanism 20 may be placed at the second vacuum chuck 34 on the vibration table 31, and the second vacuum chuck 34 may be made to adsorb it on the vibration table 31. Then, the vibration motor 32 is started, and the material in the reaction crucible 200 is forced and spread evenly under the action of the vibration motor 32 and the return spring 33. Then, the vibration motor 32 is controlled to stop working, and when the vibration platform 31 stops vibrating, the second vacuum chuck 34 is stopped to absorb, so that the reaction crucible 200 is stationary on the second vacuum chuck 34. Finally, the reaction crucible 200 is moved into the compacting mechanism 40, and the compacting operation of the mixed powder in the reaction crucible 200 is performed according to the above-described operation.

In view of the above, when the reaction crucible 200 is charged in a plurality of times, the reaction crucible 200 is moved into the vibration mechanism 30 to vibrate after each charging is completed, so that the mixed powder is further evenly spread; then the reaction crucible 200 is moved into the compacting mechanism 40 for compacting operation; then, after the compaction operation, the material is moved into the charging mechanism 20 for the next charging … … to be circulated for a plurality of times, until the charged material reaches the preset requirement, and after the material is subjected to vibration and compaction, the material can be directly taken out for later use.

In some embodiments of the present utility model, as shown with reference to fig. 2, 3 and 6, a transfer mechanism 70 may also be included, the transfer mechanism 70 comprising: a first electric telescopic rod 71, a second electric telescopic rod 72, and a third electric telescopic rod 73, the first electric telescopic rod 71 being arranged on a side of the charging mechanism 20 away from the vibration mechanism 30 to push the reaction crucible 200 from the charging mechanism 20 onto the vibration mechanism 30; the second electric telescopic rod 72 is arranged at a side of the vibration mechanism 30 away from the compacting mechanism 40 to push the reaction crucible 200 from the vibration mechanism 30 onto the compacting mechanism 40; the third electric telescopic rod 73 is arranged on the side of the compacting mechanism 40 remote from the charging mechanism 20 to push the reaction crucible 200 onto the charging mechanism 20 by the compacting mechanism 40; wherein, the telescopic end parts of the first electric telescopic rod 71, the second electric telescopic rod 72 and the third electric telescopic rod 73 are respectively provided with an arc-shaped push plate 74 matched with the outer wall of the reaction crucible 200.

Specifically, the first electric telescopic rod 71 is arranged on an extension line of the connection line of the second vacuum chuck 34 and the first vacuum chuck 24, and the reaction crucible 200 can be pushed onto the second vacuum chuck 34 from the first vacuum chuck 24 by controlling the extension and retraction of the first electric telescopic rod 71, so that the reaction crucible 200 can be replaced from the loading platform 22 in the loading mechanism 20 to the vibration platform 31 in the vibration mechanism 30. The second electric telescopic rod 72 is arranged on the extension line of the connecting line of the third vacuum chuck 44 and the second vacuum chuck 34, and the reaction crucible 200 can be pushed onto the third vacuum chuck 44 from the second vacuum chuck 34 by controlling the extension and retraction of the second electric telescopic rod 72, so that the reaction crucible 200 can be replaced from the vibration platform 31 in the vibration mechanism 30 to the compaction platform 41 in the compaction mechanism 40. The third electric telescopic rod 73 is arranged on the extension line of the connecting line of the third vacuum chuck 44 and the first vacuum chuck 24, and the reaction crucible 200 can be pushed onto the first vacuum chuck 24 by the third vacuum chuck 44 by controlling the extension and retraction of the third electric telescopic rod 73, so that the reaction crucible 200 can be replaced from the compaction platform 41 in the compaction mechanism 40 to the position of the loading platform 22 in the loading mechanism 20. Wherein, the connection line of the three vacuum chucks can be in an equilateral triangle shape, and the loading platform 22, the vibration platform 31 and the compacting platform 41 are positioned on the same horizontal plane, so as to facilitate the replacement of the reaction crucible 200 between the platforms.

It will be appreciated that, according to the preset charging flow, the reaction crucible 200 can be correspondingly operated according to the foregoing charging, vibration and compaction, and when the position of the reaction crucible 200 needs to be changed, the corresponding electric telescopic rod can be controlled to operate so as to realize the position change, and taking the charging back-rotation vibration operation as an example: after the loading is completed, the first vacuum chuck 24 is controlled to stop adsorbing the reaction crucible 200, the first electric telescopic rod 71 is controlled to extend, and the reaction crucible 200 is pushed to move from the loading platform 22 to the second vacuum chuck 34 on the vibration platform 31 along a straight line due to the action of the arc-shaped push plate 74 at the end part of the first electric telescopic rod 71, and then the second vacuum chuck 34 is controlled to adsorb the reaction crucible. Similarly, the operation flow of vibration transfer compaction and compaction transfer loading is similar, and will not be described in detail herein. And

in some embodiments of the present utility model, and as shown with reference to FIGS. 1 and 6, arcuate stop blocks 80 are provided on each of the charging mechanism 20, the vibratory mechanism 30 and the compacting mechanism 40. For example, three arc-shaped limiting blocks 80 are respectively a first limiting block 81, a second limiting block 82 and a third limiting block 83, wherein the first limiting block 81 is arranged on the charging mechanism 20 at a position close to the first vacuum chuck 24, the second limiting block 82 is arranged on the vibration mechanism 30 at a position close to the second vacuum chuck 34, and the third limiting block 83 is arranged on the compacting mechanism 40 at a position close to the third vacuum chuck 44.

It can be appreciated that the limiting blocks can limit the positions of the reaction crucible 200 on each platform, ensure that the reaction crucible 200 is positioned above the corresponding vacuum chuck on each platform, and ensure the adsorptivity of each vacuum chuck to the reaction crucible 200. Further, each limiting block is matched with the outer wall of the reaction crucible 200, so that the accurate positioning of the reaction crucible 200 on each platform is realized.

In view of this, in order to ensure accurate positioning while not affecting the replacement of the reaction crucible 200 between the respective stages, the first stopper 81 is disposed opposite to the arc-shaped push plate 74 at the end of the third electric telescopic rod 73, i.e., the first stopper 81 is located at a position on the extension line of the third vacuum chuck 44 and the first vacuum chuck 24 close to the first vacuum chuck 24. Similarly, the second limiting block 82 is disposed opposite to the arc-shaped push plate 74 at the end of the first electric telescopic rod 71, that is, the second limiting block 82 is located at a position close to the second vacuum chuck 34 on the extension line of the first vacuum chuck 24 and the second vacuum chuck 34. The third limiting block 83 is disposed opposite to the arc-shaped push plate 74 at the end of the second electric telescopic rod 72, that is, the third limiting block 83 is located at a position close to the third vacuum chuck 44 on the extension line of the second vacuum chuck 34 and the third vacuum chuck 44. Thus, each limiting block not only can play a good role in positioning, but also can not influence the replacement of the reaction crucible 200 between the platforms.

In some embodiments of the present utility model, referring to fig. 1 and 7, the mixer further comprises a second mixing mechanism 60, wherein the second mixing mechanism 60 comprises a second casing 61, a second cover 62 and a second stirring mechanism 64, the second casing 61 defines a second accommodating cavity 611 with an open top, and a second discharge valve 65 is arranged at the bottom of the second casing 61; the second cover 62 is arranged on the top of the second casing 61, and a second feeding hopper 63 is arranged on the second cover 62; the top end of the second stirring mechanism 64 is rotatably installed at the center of the second cover 62; the second stirring mechanism 64 includes a second stirring rod 641 and a servo motor 642 for driving the second stirring rod 641 to rotate, a second helical blade 644 is provided at the lower part of the second stirring rod 641, and the size of the second helical blade 644 gradually increases along the direction from top to bottom of the second stirring rod 641; a plurality of sub-stirring rods 643 are arranged at the upper part of the second stirring rod 641; wherein, the second mixing mechanism 60 is located above the first mixing mechanism 10, and the first feeding hopper 13 is opposite to the second discharging valve 65.

It can be appreciated that the tantalum powder and the carbon powder to be mixed are poured into the second accommodating cavity 611 through the second feeding hopper 63, and then the second stirring mechanism 64 is controlled to rotate, so as to stir the tantalum powder and the carbon powder in the second accommodating cavity 611, thereby realizing preliminary mixing of the tantalum powder and the carbon powder. On the one hand, under the action of the second helical blade 644, the bottom material can move upward and participate in the stirring of the upper material; on the other hand, the materials around the second stirring rod 641 in the second accommodating cavity 611 can be stirred under the action of each sub stirring rod 643; under the combined action of the second helical blade 644, each sub-stirring rod 643 and the falling of the materials under the gravity, all the materials in the second accommodating cavity 611 can be mixed and stirred, so as to improve the mixing effect and obtain more uniformly mixed powder. After the mixing is completed, the second discharge valve 65 can be controlled to be opened so as to discharge the tantalum powder and the carbon powder after preliminary mixing into the first mixing mechanism 10 through the first feeding hopper 13. Then, the first stirring mechanism 14 is controlled to rotate, and the mixed powder row in the first accommodating cavity 111 is stirred again, so that the tantalum powder and the carbon powder are fully mixed, and the uniformity of the mixed powder is improved.

In some embodiments of the present utility model, referring to fig. 1 to 3, the mixer further comprises a support frame 50, the first mixing mechanism 10 is mounted on the top end of the support frame 50, and the charging mechanism 20, the vibrating mechanism 30 and the compacting mechanism 40 are correspondingly mounted on the bottom plate of the support frame 50. Each mechanism is installed on the supporting frame 50 in a centralized way, so that centralized management is facilitated.

Of course, each vacuum chuck may be connected to a vacuum apparatus (such as a vacuum generator, not shown in the drawings) through a connection pipe, when the reaction crucible 200 is placed on each vacuum chuck, the vacuum apparatus may be started to suck, so as to generate negative air pressure in the vacuum chuck, thereby firmly sucking the reaction crucible 200, and driving the reaction crucible 200 to rotate, vibrate, etc., so that the connection between the vacuum chuck and the vacuum apparatus belongs to the prior art, and therefore will not be described in detail herein.

In the description of the present utility model, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings are merely for convenience in describing the present utility model and simplifying the description, and do not indicate or imply that the device or element being referred to must have a specific orientation, be configured and operated in a specific orientation, and therefore should not be construed as limiting the present utility model.

Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include one or more such feature. In the description of the present utility model, the meaning of "a plurality" is two or more, unless explicitly defined otherwise.

In the present utility model, unless explicitly specified and limited otherwise, the terms "mounted," "connected," "secured," and the like are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally formed; the device can be mechanically connected, electrically connected and communicated; can be directly connected or indirectly connected through an intermediate medium, and can be communicated with the inside of two elements or the interaction relationship of the two elements. The specific meaning of the above terms in the present utility model can be understood by those of ordinary skill in the art according to the specific circumstances.

In the present utility model, unless expressly stated or limited otherwise, a first feature "up" or "down" a second feature may be the first and second features in direct contact, or the first and second features in indirect contact via an intervening medium. Moreover, a first feature being "above," "over" and "on" a second feature may be a first feature being directly above or obliquely above the second feature, or simply indicating that the first feature is level higher than the second feature. The first feature being "under", "below" and "beneath" the second feature may be the first feature being directly under or obliquely below the second feature, or simply indicating that the first feature is less level than the second feature.

In the description of the present specification, a description referring to terms "one embodiment," "some embodiments," "examples," "specific examples," or "some examples," etc., means that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the present utility model. In this specification, schematic representations of the above terms are not necessarily directed to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples. Furthermore, the different embodiments or examples described in this specification and the features of the different embodiments or examples may be combined and combined by those skilled in the art without contradiction.

While embodiments of the present utility model have been shown and described, it will be understood by those of ordinary skill in the art that: many changes, modifications, substitutions and variations may be made to the embodiments without departing from the spirit and principles of the utility model, the scope of which is defined by the claims and their equivalents.

Claims

1. A pretreatment device for preparing tantalum carbide powder, comprising:

2. The pretreatment device for preparing tantalum carbide powder according to claim 1, wherein said first stirring mechanism comprises:

3. A pretreatment device for producing tantalum carbide powder according to claim 1, wherein said charging mechanism comprises:

the charging platform is provided with a first vacuum chuck;

wherein, first vacuum chuck with the storage hopper eccentric setting.

4. A pretreatment device for preparing tantalum carbide powder according to claim 3, wherein said loading platform is provided with a first pressure sensor.

5. A pretreatment device for producing tantalum carbide powder according to claim 1, wherein said compacting means comprises:

the compaction platform is provided with a third vacuum chuck;

6. The pretreatment device for tantalum carbide powder according to any one of claims 1 to 5, further comprising a vibration mechanism provided below the first mixing mechanism on one side of the charging mechanism for vibrating the charged reaction crucible;

the vibration mechanism includes:

the vibration platform is provided with a second vacuum chuck;

the vibration motor is arranged at the bottom of the vibration platform;

7. The pretreatment device for preparing tantalum carbide powder according to claim 6, further comprising a conveying mechanism comprising:

8. The pretreatment device for preparing tantalum carbide powder according to claim 7, wherein arc-shaped limiting blocks are arranged on the charging mechanism, the vibrating mechanism and the compacting mechanism.

9. The pretreatment device for preparing tantalum carbide powder according to claim 1, further comprising a second mixing mechanism, wherein the second mixing mechanism comprises a second shell, a second cover and a second stirring mechanism, the second shell defines a second containing cavity with an open top, and a second discharge valve is arranged at the bottom of the second shell; the second machine cover is arranged at the top of the second machine shell, and a second feeding hopper is arranged on the second machine cover; the top end of the second stirring mechanism can be rotatably arranged at the center of the second cover;

10. The pretreatment device for preparing tantalum carbide powder according to claim 6, further comprising a supporting frame, wherein the first mixing mechanism is mounted on the top end of the supporting frame, and the charging mechanism, the vibrating mechanism and the compacting mechanism are correspondingly mounted on a bottom plate of the supporting frame.