CN219457561U

CN219457561U - Adsorption device

Info

Publication number: CN219457561U
Application number: CN202223438626.XU
Authority: CN
Inventors: 马强; 钮成杰
Original assignee: Suzhou Mega Technology Co Ltd
Current assignee: Suzhou Mega Technology Co Ltd
Priority date: 2022-12-20
Filing date: 2022-12-20
Publication date: 2023-08-01
Anticipated expiration: 2032-12-20

Abstract

The application discloses adsorption equipment, adsorption equipment include the mount and set up in at least one adsorption head on the mount, the adsorption head includes sleeve, body of rod and adsorption component, first locating part and second locating part, set up the fixed orifices on the mount, the sleeve inserts and locates in the fixed orifices and telescopic both ends stretch out in the fixed orifices, first locating part and second locating part are located respectively the both sides of fixed orifices and with telescopic outer peripheral face cooperation is in order to fix the sleeve on the mount; the body of rod runs through the sleeve, the one end of body of rod with adsorption component fixed connection, the other end of body of rod stretch out in the sleeve and have be used for preventing the body of rod is followed the spacing portion of sleeve roll-off. This application can realize the altitude mixture control through adjusting first locating part and second locating part and telescopic outer peripheral face matched with position to adjust the level of the adsorption surface of each adsorption head.

Description

Adsorption device

Technical Field

The utility model relates to the technical field of workpiece movement, in particular to an adsorption device.

Background

Currently, the main processing mode of a wafer is a mode of wafer processing, and when the wafer is processed, the wafer needs to be clamped or absorbed to carry and transfer the wafer, so that the wafer is subjected to different operations at different stations. In the carrying process, the wafer clamping or adsorbing mechanism needs to move in a preset direction under the drive of the driving mechanism so as to approach the wafer, and then reversely moves away from a station for placing the wafer after clamping or adsorbing, and then moves towards the next station under the drive of the power mechanism.

However, the level of the adsorption surface of the existing adsorption device is inconvenient to adjust.

Disclosure of Invention

For solving above-mentioned technical problem, the adsorption equipment that this application provided, the height of adsorption head can be adjusted to improve adsorption equipment's adsorption plane's horizontal height.

The application provides an adsorption device, the adsorption device include the mount and set up in at least one adsorption head on the mount, the adsorption head includes sleeve, body of rod and adsorption component, first locating part and second locating part, set up the fixed orifices on the mount, the sleeve inserts and locates in the fixed orifices and telescopic both ends stretch out in the fixed orifices, first locating part and second locating part are located respectively the both sides of fixed orifices and with telescopic outer peripheral face cooperation is in order to fix the sleeve on the mount; the body of rod runs through the sleeve, the one end of body of rod with adsorption component fixed connection, the other end of body of rod stretch out in the sleeve and have be used for preventing the body of rod is followed the spacing portion of sleeve roll-off.

In a specific mode, the adsorption head further comprises an elastic piece, the elastic piece is sleeved on the periphery of the rod body, one end of the elastic piece is abutted to the second limiting piece, and the other end of the elastic piece is abutted to the adsorption assembly.

In a specific mode, the adsorption component comprises a suction nozzle head base and a suction nozzle head, wherein the suction nozzle head base is fixedly connected with the lower end part of the rod body, and the suction nozzle head is fixedly connected with the suction nozzle head base.

In one embodiment, the rod body and the nozzle head base are integrally formed.

In a specific mode, a through hole is formed in the side face of the suction nozzle head base, the through hole is communicated with the suction nozzle head, and the through hole is communicated with a vacuum source through a pipeline.

In a specific mode, the first limiting piece and the second limiting piece are nuts, and threads matched with the nuts are arranged on the outer side face of the sleeve.

In a specific mode, the limiting part comprises a limiting ring arranged on the outer circumferential surface of the rod body, and the outer diameter of the limiting ring is larger than the inner diameter of the sleeve.

In a specific mode, the limiting ring and the rod body are arranged in a split mode, and the limiting ring is clamped between the end portion of the rod body and the sleeve.

In one embodiment, the limiting portion and the rod body are integrally formed.

In a specific mode, a plurality of suckers are arranged on the fixing frame, the fixing frame is I-shaped, and one sucker is respectively arranged at the four ends of the fixing frame in the I shape.

The adsorption equipment in this application is when needs adjust the height of adsorption head on the mount, can realize through adjusting first locating part and second locating part and telescopic outer peripheral face matched with position, can conveniently adjust the level of the adsorption face of each adsorption head from this to improve the adsorption effect.

Drawings

FIG. 1 is a schematic diagram of an adsorption device according to an embodiment of the present application;

FIG. 2 is a schematic view of the position of the suction head of FIG. 1;

FIG. 3 is an exploded view of the adsorption head of FIG. 2;

fig. 4 is a front view of fig. 3.

The reference numerals in fig. 1-4 are illustrated as follows:

100-fixing frames; 101-stringers; 102-a beam;

200-an adsorption head; 201-a first limiting piece; 202-a second limiting piece; 203-limiting rings; 2031-bump; 204-an elastic member; 205-sleeve; 206-a rod body; 2061-a head; 207-adsorbing assembly; 2071-connecting piece; 2072-nozzle head base; 2072 a-a first mounting hole; 2073-vent fitting; 2074-nozzle head.

Detailed Description

In order to better understand the aspects of the present utility model, the present utility model will be described in further detail with reference to the accompanying drawings and detailed description.

Referring to fig. 1, fig. 1 is a schematic diagram of an adsorption apparatus according to an embodiment of the present application.

The adsorption apparatus in this embodiment includes an adsorption head 200, and the adsorption head 200 may be used to adsorb a workpiece, such as a wafer, and the adsorption apparatus further includes a holder 100, where the holder 100 is provided with at least one adsorption head 200, and one or more adsorption heads 200 may be used to adsorb one wafer. The fixing frame 100 in fig. 1 is specifically in an i shape, and includes a longitudinal beam 101 and cross beams 102 located at two ends of the longitudinal beam 101, where two ends of each cross beam 102 are respectively provided with an adsorption head 200, that is, four ends of the fixing frame 100 are provided with four adsorption heads 200, so that workpieces can be reliably and stably adsorbed.

With continued reference to fig. 2-4, fig. 2 is a schematic diagram illustrating a position of the suction head 200 in fig. 1; fig. 3 is an exploded view of the adsorption head 200 of fig. 2; fig. 4 is a front view of fig. 3.

The suction head 200 in this embodiment includes a sleeve 205, a rod 206, a suction assembly 207, a first stopper 201, and a second stopper 202. The fixing frame 100 is provided with a fixing hole (not shown in the middle), specifically, the fixing hole is formed at the end of the beam 102 shown in fig. 1, the sleeve 205 is inserted into the fixing hole, two ends of the sleeve 205 extend out of the fixing hole, the first limiting member 201 and the second limiting member 202 are respectively located at two sides of the fixing hole, the first limiting member 201 and the second limiting member 202 are respectively located at the upper side and the lower side of the fixing hole in fig. 2, and the first limiting member 201 and the second limiting member 202 are matched with the outer circumferential surface of the sleeve 205 to fix the sleeve 205 on the fixing frame 100.

The outer diameters of the first limiting piece 201 and the second limiting piece 202 are larger than the aperture of the fixing hole, the first limiting piece 201 limits the sleeve 205 to move downwards, the second limiting piece 202 limits the sleeve 205 to move upwards, the distance between the first limiting piece 201 and the second limiting piece 202 is approximately equal to the thickness of the beam 102, and therefore the beam 102 is clamped between the first limiting piece 201 and the second limiting piece 202, and the sleeve 205 is fixed relative to the fixing frame 100. When the axial positions of the first limiting member 201 and the second limiting member 202 on the sleeve 205 are changed, the axial position of the sleeve 205 relative to the fixing frame 100 can be correspondingly adjusted, that is, the up-down height of the sleeve 205 can be adjusted, and the axial direction of the sleeve 205, that is, the up-down direction, is also the height direction.

Referring to fig. 2 and 3, the rod 206 penetrates through the sleeve 205, one end of the rod 206 is fixedly connected with the adsorption component 207, or may be integrally disposed, the other end of the rod 206 extends out of the sleeve 205 and has a limiting portion for preventing the rod 206 from sliding out of the sleeve 205, and the limiting portion, in this embodiment, is specifically a limiting ring 203 separately disposed with the rod 206, and may limit the rod 206 from sliding out of the sleeve 205 downward under the action of gravity.

The height position of the sleeve 205 relative to the fixing frame 100 can be adjusted by the first limiting member 201 and the second limiting member 202, and the rod 206 is in limiting connection with the sleeve 205, which is equivalent to hanging on the sleeve 205 through the limiting portion, so that the height of the sleeve 205 can be adjusted, and accordingly, the heights of the rod 206 and the adsorption assembly 207 can be adjusted. Therefore, when the height of the adsorption heads 200 on the fixing frame 100 needs to be adjusted, the adsorption device in this embodiment can be realized by adjusting the positions of the first limiting member 201 and the second limiting member 202 matched with the outer peripheral surface of the sleeve 205, so that the horizontal height of the adsorption surface of each adsorption head 200 can be conveniently adjusted, and the adsorption effect is improved.

Further, the adsorption head 200 in this embodiment further includes an elastic member 204, the elastic member 204 is sleeved on the outer periphery of the rod 206, one end of the elastic member 204 abuts against the second limiting member 202, and the other end of the elastic member 204 abuts against the adsorption assembly 207. As shown in fig. 2, the limiting portion prevents the rod 206 from sliding downward from the sleeve 205, and the rod 206 is suspended from the sleeve 205 by the limiting portion, and the elastic member 204 is provided, so that the elastic member 204 may be precompressed between the adsorbing component 207 and the second limiting member 202, and thus the position of the rod 206 in the sleeve 205 is relatively stable, and the elastic member 204 may be a spring as illustrated in fig. 2-4, or may be other elastic structures. Based on the elastic characteristic of the elastic member 204, the adsorption assembly 207 has a certain moving stroke in the axial direction of the sleeve 205, thereby allowing the adsorption device to have a certain floating range in the up-down direction when the workpiece is adsorbed by the adsorption assembly 207, for example, when the adsorption assembly 207 is moved downward to contact with the wafer, the wafer is not damaged due to excessive movement.

With continued reference to fig. 3, the suction assembly 207 specifically includes a nozzle base 2072 and a nozzle base 2074, the nozzle base 2072 is fixedly connected to the lower end of the rod 206, and the nozzle base 2074 is fixedly connected to the nozzle base 2072. That is, one end of the elastic member 204 abuts against the second limiting member 202, and the other end abuts against the upper surface of the nozzle base 2072, and the nozzle base 2072 can provide a sufficient upper surface to abut against the elastic member 204. The nozzle head 2074 is a part that directly contacts the surface of the workpiece, and the nozzle head 2074 may adsorb the wafer-like workpiece by vacuum adsorption.

It will be appreciated that the stem 206 and the nozzle base 2072 may be integrally formed to provide greater strength and eliminate the need for a connection therebetween.

As shown in fig. 3 and 4, the two opposite sides of the nozzle head base 2072 are provided with mounting holes, which are a first mounting hole 2072a and a second mounting hole (not shown), respectively, and the suction assembly 207 further comprises a connector 2071 and a ventilation joint 2073, wherein the connector 2071 is inserted into the first mounting hole 2072a, and the connector 2073 is inserted into the second mounting hole and fixed to the connector 2071. Wherein the vent fitting 2073 communicates with the nozzle tip 2074, and the vent fitting 2073 communicates with a vacuum source through a pipe. Thus, the vacuum source vacuumizes the nozzle head 2074, so that the nozzle head 2074 can firmly suck the workpiece.

In this embodiment, the first limiting member 201 and the second limiting member 202 may be nuts, the outer side surface of the sleeve 205 is provided with threads matched with the nuts, and the sleeve 205 is matched with the threads of the sleeve 205 to achieve reliable fixation, and the position adjustment is simple. Of course, the first limiting member 201 and the second limiting member 202 may have other structures, for example, a plurality of clamping grooves distributed along the axial direction may be provided on the outer periphery of the sleeve 205, the first limiting member 201 and the second limiting member 202 may be clamping rings, and after the height position of the sleeve 205 relative to the fixing frame 101 is adjusted, the first limiting member 201 and the second limiting member 202 may be clamped into the corresponding clamping grooves.

As will be understood with continued reference to fig. 2-4, the limiting portion in this embodiment includes a limiting ring 203 disposed on an outer peripheral surface of the rod 206, and an outer diameter of the limiting ring 203 is larger than an inner diameter of the sleeve 205. Under the action of gravity, the rod 206 tends to drop downward in the sleeve 205, and the existence of the limiting portion prevents the rod 206 from sliding out of the sleeve 205. Of course, the limiting portion may also be other forms, such as a limiting rod transversely inserted on the rod body 206.

In this embodiment, the limiting ring 203 is separately disposed from the rod 206, and the limiting ring 203 is clamped between the end of the rod 206 and the sleeve 205. In fig. 3, the end of the rod 206 is a head 2061 with a larger diameter, at least the radial dimension of the part of the rod 206 below the head 2061, which is connected with the head 2061, is smaller than the dimension of the head 2061 and smaller than the inner diameter of the sleeve 205, so that the smaller-dimension part can be positioned in the sleeve 205, the larger-dimension head 2061 is positioned above the sleeve 205, and the limiting ring 203 is clamped between the head 2061 and the upper end surface of the sleeve 205. As shown in fig. 3, the stop ring 203 is not a closed ring shape, and has a ring structure with a notch, thus having a certain elasticity, so as to be convenient to be clamped between the head 2061 and the sleeve 205, and in addition, a plurality of protrusions 2031 are arranged on the inner side of the stop ring 203, and the protrusions 2031 are clamped between the head 2061 and the sleeve 205.

It will be appreciated that the stop portion may also be provided integrally with the stem 206. Therefore, the strength is increased, the connecting structure between the two parts can be omitted, and the processing is convenient. Of course, the head 2061 of the rod 206 may be used for limiting, so that the limiting ring 203 may be provided for more reliable limiting.

Specifically, the adsorption device may be further connected to a driving mechanism, where the driving mechanism may drive the adsorption device to move along a preset direction, for example, vertically move, so that the adsorption device approaches the workpiece, lifts the workpiece after adsorbing the workpiece, and transfers the workpiece to another position, and the driving mechanism may specifically be an air cylinder.

The principles and embodiments of the present utility model have been described herein with reference to specific examples, the description of which is intended only to facilitate an understanding of the method of the present utility model and its core ideas. It should be noted that it will be apparent to those skilled in the art that various modifications and adaptations of the utility model can be made without departing from the principles of the utility model and these modifications and adaptations are intended to be within the scope of the utility model as defined in the following claims.

Claims

1. The adsorption device comprises a fixed frame and at least one adsorption head arranged on the fixed frame, and is characterized in that the adsorption head comprises a sleeve, a rod body, an adsorption assembly, a first limiting piece and a second limiting piece, a fixing hole is formed in the fixed frame, the sleeve is inserted into the fixing hole, two ends of the sleeve extend out of the fixing hole, and the first limiting piece and the second limiting piece are respectively positioned on two sides of the fixing hole and are matched with the outer peripheral surface of the sleeve to fix the sleeve on the fixed frame; the body of rod runs through the sleeve, the one end of body of rod with adsorption component fixed connection, the other end of body of rod stretch out in the sleeve and have be used for preventing the body of rod is followed the spacing portion of sleeve roll-off.

2. The adsorption device of claim 1, wherein the adsorption head further comprises an elastic member, the elastic member is sleeved on the outer periphery of the rod body, one end of the elastic member is abutted to the second limiting member, and the other end of the elastic member is abutted to the adsorption assembly.

3. The suction device of claim 1, wherein the suction assembly comprises a nozzle head base and a nozzle head, the nozzle head base is fixedly connected with the lower end of the rod body, and the nozzle head is fixedly connected with the nozzle head base.

4. The suction apparatus of claim 3 wherein the wand is integrally formed with the nozzle head base.

5. The suction apparatus of claim 3, wherein a through hole is formed in a side surface of the nozzle head base, the through hole is communicated with the nozzle head, and the through hole is communicated with a vacuum source through a pipeline.

6. The adsorption device of any one of claims 1-5, wherein the first and second stop members are nuts, and the outer side of the sleeve is provided with threads that mate with the nuts.

7. The adsorption device of any one of claims 1-5, wherein the stop portion comprises a stop collar disposed on an outer peripheral surface of the rod body, and an outer diameter of the stop collar is greater than an inner diameter of the sleeve.

8. The adsorption device of claim 7, wherein the stop collar is separate from the rod body, and the stop collar is clamped between the end of the rod body and the sleeve.

9. The adsorption device of claim 7, wherein the stop is integrally formed with the lever body.

10. The suction device as claimed in any one of claims 1 to 5, wherein a plurality of suction cups are provided on the fixing frame, the fixing frame is in an i shape, and four ends of the i-shaped fixing frame are respectively provided with one suction cup.