CN219394010U - Intracavity frequency doubling resonant cavity and intracavity frequency doubling laser - Google Patents

Intracavity frequency doubling resonant cavity and intracavity frequency doubling laser Download PDF

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CN219394010U
CN219394010U CN202320605881.4U CN202320605881U CN219394010U CN 219394010 U CN219394010 U CN 219394010U CN 202320605881 U CN202320605881 U CN 202320605881U CN 219394010 U CN219394010 U CN 219394010U
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mirror
total reflection
light
dichroic mirror
laser
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郑浩
韩思濛
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Tianjin Novartis Optoelectronic Technology Co ltd
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Tianjin Novartis Optoelectronic Technology Co ltd
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    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02DCLIMATE CHANGE MITIGATION TECHNOLOGIES IN INFORMATION AND COMMUNICATION TECHNOLOGIES [ICT], I.E. INFORMATION AND COMMUNICATION TECHNOLOGIES AIMING AT THE REDUCTION OF THEIR OWN ENERGY USE
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Abstract

The utility model relates to the technical field of lasers and discloses an intracavity frequency doubling resonant cavity and an intracavity frequency doubling laser. Wherein the intracavity frequency doubling resonant cavity comprises: the light source assembly comprises a light source assembly, a nonlinear crystal, a first dichroic mirror, a first total reflection plane mirror and a second total reflection plane mirror. A dichroic mirror group is arranged between the nonlinear crystal and the first total reflection plane mirror, and comprises a second dichroic mirror and a third total reflection mirror. The beam waist is prolonged and the distance between the second dichroic mirror and the third total reflection mirror is larger than the distance between the second dichroic mirror and the first total reflection mirror by arranging the dichroic mirror group, so that the purpose of prolonging the light path and keeping away from the beam waist is realized, the light spot of the frequency doubling light returning to the nonlinear crystal is enlarged, the power density is reduced, the pressure of the surface film layer of an optical device is reduced, and the service life of the intracavity frequency doubling resonant cavity is prolonged.

Description

Intracavity frequency doubling resonant cavity and intracavity frequency doubling laser
Technical Field
The utility model relates to the technical field of lasers, in particular to an intracavity frequency doubling resonant cavity and an intracavity frequency doubling laser.
Background
The laser is known as one of the most serious utility models in the 20 th century, and the development of the laser forms a huge industry so far, which affects various fields of national economy. The all-solid-state laser refers to a semiconductor laser pumped solid-state laser, has the advantages of high efficiency, long service life, good beam quality, compact structure and the like, and the processing equipment based on the laser is widely applied to the fields of automobiles, railways, ships, metallurgy, petrifaction, national defense, aerospace and the like.
When a laser is operated at high power, nonlinear crystals and mirrors in the optical path tend to suffer from a large power density. For intracavity frequency doubled lasers, nonlinear crystals and mirrors in the intracavity frequency doubled resonant cavity also suffer from higher power densities. Under the long-time action of high-power laser, the surface film layers of the optical devices are easy to be damaged slowly, so that the index of the laser is reduced, and the service life of the laser is influenced.
Disclosure of Invention
Based on the above, the present utility model aims to provide an intracavity frequency doubling resonant cavity and an intracavity frequency doubling laser, which can increase the service life of the laser without changing the mode distribution and oscillation state of fundamental frequency light.
In order to achieve the above purpose, the utility model adopts the following technical scheme:
an intracavity frequency doubled resonant cavity comprising: the device comprises a light source assembly, a nonlinear crystal, a first dichroic mirror, a first total reflection plane mirror and a second total reflection plane mirror, wherein the first dichroic mirror reflects frequency doubling light and transmits fundamental frequency light, the first total reflection plane mirror is close to the nonlinear crystal, and the second total reflection plane mirror is far away from the nonlinear crystal;
a dichroic mirror group is arranged between the nonlinear crystal and the first total reflection plane mirror; the dichroic mirror group includes a second dichroic mirror reflecting the frequency-multiplied light and transmitting the fundamental frequency light, and a third total reflection mirror configured to be perpendicular to an optical path of the frequency-multiplied light reflected by the second dichroic mirror; the distance between the second dichroic mirror and the third total reflection mirror is greater than the distance between the second dichroic mirror and the first total reflection mirror.
As an alternative scheme of the intracavity frequency doubling resonant cavity, a plano-concave lens is arranged between the second dichroic mirror and the third total reflection mirror, the plane of the plano-concave lens faces the third total reflection mirror, and the concave surface of the plano-concave lens faces the second dichroic mirror.
As an alternative to the intracavity frequency doubling resonant cavity, the third total reflection mirror is a convex mirror.
As an alternative scheme of the intracavity frequency doubling resonant cavity, the light source assembly comprises a laser crystal, a pump source and a Q-switched module, wherein the laser crystal is configured to be pumped by the pump source to generate the fundamental frequency light, and the fundamental frequency light is changed into the pulse fundamental frequency light after being acted by the Q-switched module.
As an alternative scheme of the intracavity frequency doubling resonant cavity, the number of the laser crystal and the number of the pumping sources are two, the two laser crystals are coaxially arranged, and the two pumping sources are respectively arranged around the circumference of one laser crystal.
As an alternative scheme of the intracavity frequency doubling resonant cavity, a quartz rotary wafer is arranged between the two laser crystals.
An intracavity frequency doubled laser comprising an intracavity frequency doubled resonant cavity as claimed in any preceding aspect.
The beneficial effects of the utility model are as follows:
the utility model provides an intracavity frequency doubling resonant cavity, comprising: the device comprises a light source assembly, a nonlinear crystal, a first dichroic mirror, a first total reflection plane mirror and a second total reflection plane mirror, wherein the first dichroic mirror reflects frequency doubling light and transmits fundamental frequency light, the first total reflection plane mirror is close to the nonlinear crystal, and the second total reflection plane mirror is far away from the nonlinear crystal. A dichroic mirror group is provided between the nonlinear crystal and the first total reflection plane mirror, the dichroic mirror group including a second dichroic mirror reflecting the frequency-multiplied light and transmitting the fundamental frequency light, and a third total reflection mirror configured to be perpendicular to an optical path of the frequency-multiplied light reflected by the second dichroic mirror, thereby making the frequency-multiplied light return along the original optical path. The distance between the second dichroic mirror and the third total reflection mirror is larger than the distance between the second dichroic mirror and the first total reflection mirror. The beam waist of the resonant cavity is positioned at the first total reflection plane mirror according to the Gaussian propagation characteristic of the laser beam and the analytic calculation of the resonant cavity. The beam waist is prolonged and the distance between the second dichroic mirror and the third total reflection mirror is larger than the distance between the second dichroic mirror and the first total reflection mirror by arranging the dichroic mirror group, so that the purpose of prolonging the light path and keeping away from the beam waist is realized, the light spot of the frequency doubling light returning to the nonlinear crystal is enlarged, the power density is reduced, the pressure of the surface film layer of an optical device is reduced, and the service life of the intracavity frequency doubling resonant cavity is prolonged.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present utility model, the following description will briefly explain the drawings needed in the description of the embodiments of the present utility model, and it is obvious that the drawings in the following description are only some embodiments of the present utility model, and other drawings may be obtained according to the contents of the embodiments of the present utility model and these drawings without inventive effort for those skilled in the art.
FIG. 1 is a schematic diagram of an intracavity frequency doubling resonant cavity provided in an embodiment of the present utility model;
fig. 2 is a cross-sectional view of a laser crystal and pump source provided in an embodiment of the present utility model.
In the figure:
fundamental frequency light; 110-a light source assembly; 111-laser crystal; 112-a pump source; 113-a Q-switching module; 120-nonlinear crystals; 130-a first dichroic mirror; 140-a first total reflection plane mirror; 150-a second total reflection plane mirror; 160-quartz rotary optical sheet; 200-frequency doubling light; 210-a dichroic mirror group; 211-a second dichroic mirror; 212-a third total reflection mirror; 213-plano-concave lens.
Description of the embodiments
In order to make the technical problems solved by the present utility model, the technical solutions adopted and the technical effects achieved more clear, the technical solutions of the embodiments of the present utility model will be described in further detail below with reference to the accompanying drawings, and it is obvious that the described embodiments are only some embodiments of the present utility model, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.
As shown in fig. 1, this embodiment provides an intracavity frequency doubling resonant cavity, including: a light source assembly 110, a nonlinear crystal 120, a first dichroic mirror 130, a first total reflection mirror 140, and a second total reflection mirror 150. The light source assembly 110 can generate fundamental frequency light 100, and the nonlinear crystal 120 can change the fundamental frequency light 100 passing through the nonlinear crystal 120 into frequency-doubled light 200; the first dichroic mirror 130 reflects the frequency-doubled light 200 and transmits the fundamental frequency light 100.
The nonlinear crystal 120 is positioned between the first dichroic mirror 130 and the first full-reflecting mirror 140, and the light source assembly 110 is positioned between the first dichroic mirror 130 and the second full-reflecting mirror 150. The light source assembly 110 and the nonlinear crystal 120 are located on opposite sides of the first dichroic mirror 130. The first total reflection mirror 140 is close to the nonlinear crystal 120, and the second total reflection mirror 150 is far from the nonlinear crystal 120. The fundamental frequency light 100 oscillates between the first full-reflecting mirror 140 and the second full-reflecting mirror 150, and the frequency-doubled light 200 is transmitted through the first dichroic mirror 130 and output to the outside of the intracavity frequency-doubled resonant cavity.
The intracavity frequency doubling resonant cavity is suitable for lasers with different frequencies of light according to the difference of the light source assemblies 110. For example, when the wavelength of the fundamental light 100 is 1064nm or 1053nm, the wavelength of the frequency-doubled light 200 is 532nm or 527nm, i.e., the cavity is suitable for a green laser.
In this embodiment, a green laser is taken as an example for detailed description. Specifically, the light source assembly 110 includes a laser crystal 111, a pump source 112, and a Q-switching module 113. The laser crystal 111 is a neodymium-doped laser crystal, such as Nd: YAG, nd: YVO4, nd: YLF, etc., and both end surfaces of the laser crystal 111 are coated with a fundamental laser antireflection film, thereby improving the transmittance of the fundamental laser and the optical power. The pump source 112 adopts an LD side pump array, and the wavelength is 808nm or 806 nm. The pump sources 112 are arranged circumferentially around the laser crystal 111 and may be generally 3-, 5-, or 7-way, as shown in fig. 2. The laser crystal 111 is pumped by the pump source 112 to generate the fundamental light 100, and the fundamental light 100 is a continuous laser. When the fundamental frequency light 100 is acted by the Q-switched module 113, the fundamental frequency light 100 is changed into pulse fundamental frequency light 100. Common Q-switching modules 113 include acousto-optic Q-switching modules and electro-optic Q-switching modules. The acousto-optic Q-switching module can be composed of an acousto-optic modulator and a polaroid, and can be replaced by an electro-optic Q-switching module under the condition of low laser repetition frequency.
Preferably, in other embodiments, the laser crystals 111 and the pump sources 112 are two, and the two laser crystals 111 are coaxially disposed, and the two pump sources 112 are circumferentially arranged around one laser crystal 111, respectively, so as to increase the optical power of the fundamental laser.
Further preferably, a 90 ° quartz optical rotation piece 160 is disposed between the two laser crystals 111, and both surfaces of the 90 ° quartz optical rotation piece 160 are coated with an antireflection film of the fundamental frequency light 100, so that the fundamental frequency light 100 oscillating in the intracavity frequency doubling resonant cavity is in an orthogonal polarization state in the two laser crystals 111, thereby compensating for the thermal depolarization effect under the state of strong pumping high power laser. Still further preferably, the 90 ° quartz rotary piece 160 may also be replaced by two 45 ° quartz rotary pieces 160.
The first total reflection plane mirror 140 and the second total reflection plane mirror 150 are respectively arranged at two ends of the intracavity frequency doubling resonant cavity, and when the fundamental frequency light 100 passes through the first total reflection plane mirror 140 or the second total reflection plane mirror 150, the reverse transmission is realized through 0 degree reflection, so that the fundamental frequency light 100 oscillates in the intracavity frequency doubling resonant cavity. In this embodiment, the first and second total reflection mirrors 140 and 150 are parallel and the projections are not coincident, as shown in fig. 1, so as to reduce the volume of the resonant cavity. Preferably, the surfaces of the first total reflection mirror 140 and the second total reflection mirror 150 are coated with a total reflection film of the fundamental frequency light 100, so as to improve the reflectivity of the fundamental frequency light 100, reduce reflection loss, and improve the optical power.
The intracavity frequency doubling resonant cavity further includes a nonlinear crystal 120 and a first dichroic mirror 130. In this embodiment, the nonlinear crystal 120 is a frequency-doubling nonlinear crystal, such as an LBO crystal, and the frequency-doubling nonlinear crystal can implement a nonlinear frequency conversion process of generating the frequency-doubling light 200 by the fundamental frequency light 100. I.e., the fundamental light 100 passing through the nonlinear crystal 120 is changed into the frequency-doubled light 200. Preferably, both end surfaces of the frequency doubling nonlinear crystal are coated with antireflection films of the fundamental frequency light 100 and the frequency doubling light 200. The first dichroic mirror 130 is a mirror that reflects the fundamental frequency light 100 and transmits the frequency-doubled light 200. One side of the first dichroic mirror 130 facing the inner cavity frequency doubling resonant cavity is plated with a high reflection film of fundamental frequency light 100 and a frequency doubling light 200, and the other side is plated with a frequency doubling light 200 anti-reflection film, so that the frequency doubling light 200 passing through the first dichroic mirror 130 can be transmitted and output.
In this embodiment, the optical path of the nonlinear crystal 120 is perpendicular to the optical path of the light source assembly 110, and the first dichroic mirror 130 is located between the nonlinear crystal 120 and the light source assembly 110. The first dichroic mirror 130 is disposed at 45 ° to the optical path. The 45-degree mirror is adopted in the optical path scheme to transmit and reflect laser, so that the spot size of the laser on the lens can be increased, the power density of the laser is reduced, and the service life of the laser is prolonged.
In the present embodiment, since the fundamental light 100 oscillates, i.e., reciprocates, in the intracavity frequency doubling resonator, the fundamental light 100 passes through the nonlinear crystal 120 from two directions. Therefore, we provide that the fundamental light 100 is reflected by the first dichroic mirror 130, and enters the nonlinear crystal 120, and the optical path direction is the first direction. The fundamental frequency light 100 is reflected by the first total reflection plane mirror 140, and passes through the nonlinear crystal 120, and the light path direction is the second direction. The frequency-doubled light 200 transmitted in the second direction is transmitted as it continues to pass through the first dichroic mirror 130.
A dichroic mirror group 210 is provided between the nonlinear crystal 120 and the first total reflection plane mirror 140. The dichroic mirror group 210 includes a second dichroic mirror 211 and a third total reflection mirror 212, the second dichroic mirror 211 reflecting the frequency-multiplied light 200 and transmitting the fundamental frequency light 100, the third total reflection mirror 212 being configured to be perpendicular to the optical path of the frequency-multiplied light 200 reflected by the second dichroic mirror 211. The distance between the second dichroic mirror 211 and the third total reflection mirror 212 is greater than the distance between the second dichroic mirror 211 and the first total reflection mirror 140.
Combining the Gaussian propagation characteristics of the laser beam and analytical calculations of the cavity, the beam waist of the cavity is at the first full-reflection plane 140 mirror. By providing the dichroic mirror group 210 with a distance between the second dichroic mirror 211 and the third total reflection mirror 212 larger than a distance between the second dichroic mirror 211 and the first total reflection mirror 140, the purpose of extending the optical path and keeping away from the beam waist is achieved. According to Gaussian propagation characteristics, the light beam diverges after passing through the beam waist, so that the light spot of the frequency doubling light 200 returned to the nonlinear crystal 120 is enlarged, meanwhile, the power density is reduced, the pressure of the surface film layer of the optical device is further reduced, and the service life of the intracavity frequency doubling resonant cavity is prolonged.
As a preferable embodiment, a plano-concave lens 213 is provided between the second dichroic mirror 211 and the third total reflecting mirror 212, the plane of the plano-concave lens 213 faces the third total reflecting mirror 212, and the concave surface of the plano-concave lens 213 faces the second dichroic mirror 211. The frequency-doubled light 200 reflected by the third total reflection mirror 212 is further diverged by passing through the concave surface of the plano-concave lens 213, thereby further increasing the light spot. And the degree of divergence can be adjusted by changing the plano-concave lens 213 at a different concave angle.
The basic structure of the laser provided in this embodiment is the same as that in the first embodiment, and only part of the structure is different. This embodiment will be described only in terms of a structure different from that of the embodiment. As another preferred solution, the third total reflection mirror 212 is configured as a convex mirror, and the frequency-doubled light 200 also plays a role of diverging the light beam after being reflected by the convex mirror, so as to further increase the light spot. And the divergence degree can be adjusted by changing the convex mirror with different external drawing angles.
The utility model also provides an intracavity frequency doubling laser which comprises the intracavity frequency doubling resonant cavity, and the service life of the laser is prolonged under the condition of not changing the mode distribution and the oscillation state of the fundamental frequency light 100.
Note that the above is only a preferred embodiment of the present utility model and the technical principle applied. It will be understood by those skilled in the art that the present utility model is not limited to the particular embodiments described herein, but is capable of various obvious changes, rearrangements and substitutions as will now become apparent to those skilled in the art without departing from the scope of the utility model. Therefore, while the utility model has been described in connection with the above embodiments, the utility model is not limited to the embodiments, but may be embodied in many other equivalent forms without departing from the spirit or scope of the utility model, which is set forth in the following claims.
In the description of the present utility model, it should be noted that the directions or positional relationships indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. are based on the directions or positional relationships shown in the drawings, are merely for convenience of describing the present utility model and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the present utility model. Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying relative importance. Wherein the terms "first position" and "second position" are two different positions.
In the description of the present utility model, it should be noted that, unless explicitly specified and limited otherwise, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be either fixedly connected, detachably connected, or integrally connected, for example; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present utility model will be understood in specific cases by those of ordinary skill in the art.

Claims (7)

1. An intracavity frequency doubling resonant cavity comprising: a light source assembly (110), a nonlinear crystal (120), a first dichroic mirror (130), a first total reflection plane mirror (140), and a second total reflection plane mirror (150), the first dichroic mirror (130) reflecting the frequency doubled light (200) and transmitting the fundamental frequency light (100), the first total reflection plane mirror (140) being close to the nonlinear crystal (120), the second total reflection plane mirror (150) being far from the nonlinear crystal (120);
a dichroic mirror group (210) is arranged between the nonlinear crystal (120) and the first total reflection plane mirror (140); the dichroic mirror group (210) includes a second dichroic mirror (211) and a third total reflection mirror (212), the second dichroic mirror (211) reflecting the frequency-doubled light (200) and transmitting the fundamental frequency light (100), the third total reflection mirror (212) being configured to be perpendicular to an optical path of the frequency-doubled light (200) reflected by the second dichroic mirror (211); the distance between the second dichroic mirror (211) and the third total reflection mirror (212) is larger than the distance between the second dichroic mirror (211) and the first total reflection mirror (140).
2. The intracavity frequency doubling resonant cavity of claim 1 wherein a plano-concave lens (213) is provided between the second dichroic mirror (211) and the third total reflecting mirror (212), the plane of the plano-concave lens (213) is oriented towards the third total reflecting mirror (212), and the concave surface of the plano-concave lens (213) is oriented towards the second dichroic mirror (211).
3. The intracavity frequency doubling resonator of claim 1 wherein the third total reflecting mirror (212) is a convex mirror.
4. The intracavity frequency doubling resonant cavity of claim 1 wherein the light source assembly (110) comprises a laser crystal (111), a pump source (112) and a Q-switched module (113), the laser crystal (111) being configured to be pumped by the pump source (112) to generate the fundamental frequency light (100), the fundamental frequency light (100) being converted into pulsed fundamental frequency light by the Q-switched module (113).
5. The intracavity frequency doubling resonator of claim 4 wherein the number of the laser crystals (111) and the number of the pump sources (112) are two, and the two laser crystals (111) are coaxially arranged, and the two pump sources (112) are circumferentially arranged around one of the laser crystals (111), respectively.
6. The intracavity frequency doubling resonator of claim 5 wherein a quartz spin wafer (160) is provided between two of the laser crystals (111).
7. An intracavity frequency doubled laser comprising an intracavity frequency doubled resonant cavity as claimed in any of claims 1 to 6.
CN202320605881.4U 2023-03-24 2023-03-24 Intracavity frequency doubling resonant cavity and intracavity frequency doubling laser Active CN219394010U (en)

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CN202320605881.4U CN219394010U (en) 2023-03-24 2023-03-24 Intracavity frequency doubling resonant cavity and intracavity frequency doubling laser

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CN202320605881.4U CN219394010U (en) 2023-03-24 2023-03-24 Intracavity frequency doubling resonant cavity and intracavity frequency doubling laser

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