CN219393362U - Boat structure - Google Patents

Abstract

The utility model discloses a boat structure, which comprises a boat body and supporting components, wherein the supporting components are arranged in pairs and are arranged on two sides of the boat body which are oppositely arranged, each supporting component is provided with a supporting cambered surface, and the supporting cambered surfaces of the supporting components arranged in pairs are respectively abutted against two sides of a sheet and are in line contact with the sheet. In the actual working process, the two sides of the sheet material are stopped on the supporting cambered surface, the supporting cambered surface is in line contact with the sheet material, and the contact mode reduces the contact area of the supporting component and the sheet material under the condition of ensuring the supporting stability, so that the air flow flowing through the surface of the sheet material is more uniform and can cover the area of the whole sheet material required to react, the probability of air flow printing and boat tooth printing on the edge of the sheet material in the processing process is reduced, the thickness of a coating film or a deposition layer on a silicon wafer is more uniform, and the sheet resistance of a battery piece can be in an optimal value range so as to improve the processing yield.

Description

Boat structure

Technical Field

The utility model relates to the technical field of semiconductor processing equipment, in particular to a boat structure.

Background

The processing of semiconductor or photovoltaic materials is typically accomplished by feeding sheet material into a furnace and reacting at a temperature and pressure and introducing a source of process gas, and during the processing of the semiconductor or photovoltaic material, devices are typically used to load or move the material to be processed, during processing or after processing, such loaded or moved devices are commonly referred to in the industry as quartz boats, graphite boats, boats or baskets.

In the existing photovoltaic apparatus, the boat has a structure as shown in fig. 1-2 below, the boat comprises two end plates 1 and a plurality of grooved bars 2 connected between the two end plates 1, grooves 21 are provided on the grooved bars 2, and during operation, silicon wafers 3 need to be inserted into the grooves 21, i.e., the existing boat holds the silicon wafers 3 through the grooves 21.

The process gas is generally introduced into a thermal field during the processing of the silicon wafer 3 in the semiconductor and general semiconductor industry, and the raw material of the boat is generally a high-temperature and corrosion-resistant material such as quartz silicon carbide. The silicon wafer 3 is loaded in the groove 21 of the grooved bar 2, and the problems of air flow printing, boat tooth printing and the like usually occur at the contact position of the four peripheries of the silicon wafer 3 and the side wall of the groove 21, so that the process of film plating or deposition and the like of the silicon wafer 3 is influenced, and the manufacturing yield is reduced.

Disclosure of Invention

The utility model aims to provide a boat structure, which is in line contact with the edge of a sheet, so that the probability of airflow printing and boat tooth printing on the edge of the sheet in the processing process is reduced, and the manufacturing yield is improved.

In order to achieve the technical effects, the technical scheme of the utility model is as follows:

the utility model discloses a boat structure, which comprises a boat body and supporting components, wherein the supporting components are arranged in pairs and are arranged on two sides of the boat body which are oppositely arranged, each supporting component is provided with a supporting cambered surface, and the supporting cambered surfaces of the supporting components arranged in pairs are respectively abutted against two sides of a sheet and are in line contact with the sheet.

In some embodiments, the support assembly comprises a support block, and the support block is fixedly connected to the boat body.

In some embodiments, a mounting plane is provided on the boat body, the support block has a mounting surface connected with the support cambered surface, and the mounting surface is attached to the mounting plane.

In some embodiments, the boat body is provided with a matching groove, the supporting component comprises an eccentric wheel and an axle, two ends of the axle are connected to two side walls of the matching groove, and the eccentric wheel is mounted on the axle.

In some embodiments, the shaft hole of the eccentric wheel, which is matched with the wheel shaft, forms a notch on the peripheral surface of the eccentric wheel.

In some specific embodiments, the support assembly further comprises a stop mounted to the boat body and configured to stop the eccentric.

In some more specific embodiments, the limiting member includes a limiting shaft, two ends of the limiting shaft are connected to two sidewalls of the mating groove, and the limiting shaft is stopped against a circumferential surface of the eccentric wheel.

In some embodiments, the boat body comprises end plates and support columns, the support columns are arranged in pairs, the end plates are connected to two ends of the support columns, and each support column is provided with a plurality of support assemblies arranged at intervals along the height direction of the support column.

In some embodiments, a handle is provided on the support post.

In some embodiments, the end plate is provided with a clamping protrusion and/or a clamping groove, and the clamping protrusion on one boat structure can be clamped in the clamping groove of the other boat structure.

The boat structure of the utility model has the beneficial effects that: in the actual working process, the two sides of the sheet material are stopped on the supporting cambered surface, the supporting cambered surface is in line contact with the sheet material, and the contact mode reduces the contact area of the supporting component and the sheet material under the condition of ensuring the supporting stability, so that the air flow flowing through the surface of the sheet material is more uniform and can cover the area of the whole sheet material required to react, the probability of air flow printing and boat tooth printing on the edge of the sheet material in the processing process is reduced, the thickness of a coating film or a deposition layer on a silicon wafer is more uniform, and the sheet resistance of a battery piece can be in an optimal value range so as to improve the processing yield.

Additional aspects and advantages of the utility model will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the utility model.

Drawings

FIG. 1 is a schematic structural view of a boat structure of the prior art;

FIG. 2 is a partial schematic view of the structure shown in FIG. 1;

FIG. 3 is a schematic view of a boat structure according to a first embodiment of the present utility model;

FIG. 4 is a schematic view showing a partial structure of a boat structure according to a first embodiment of the present utility model;

FIG. 5 is a schematic view showing another direction of the boat structure according to the first embodiment of the present utility model;

FIG. 6 is a cross-sectional view taken along A-A of the structure shown in FIG. 5;

FIG. 7 is a partial schematic view of the structure shown in FIG. 6;

FIG. 8 is a schematic view of a boat structure according to a second embodiment of the present utility model;

FIG. 9 is a schematic view of another direction of the boat structure according to the second embodiment of the present utility model;

FIG. 10 is a schematic view showing a partial structure of a boat structure according to a second embodiment of the present utility model.

Reference numerals:

in fig. 1-2:

1. an end plate; 2. a grooved bar; 21. a groove; 3. and (3) a silicon wafer.

Fig. 3-10:

100. a boat body; 110. an end plate; 111. a clamping convex; 112. a clamping groove; 120. a support column; 121. a mating groove; 122. a mounting plane; 123. a handle;

200. a support assembly; 201. a supporting cambered surface; 202. a mounting surface; 210. an eccentric wheel; 211. a notch; 220. a wheel axle; 230. a limiting piece;

300. a sheet.

Detailed Description

In order to make the technical problems solved, the technical scheme adopted and the technical effects achieved by the utility model more clear, the technical scheme of the utility model is further described below by a specific embodiment in combination with the attached drawings.

In the description of the present utility model, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings are merely for convenience in describing the present utility model and simplifying the description, and do not indicate or imply that the device or element being referred to must have a specific orientation, be configured and operated in a specific orientation, and therefore should not be construed as limiting the present utility model.

Furthermore, features defining "first", "second" may include one or more such features, either explicitly or implicitly, for distinguishing between the descriptive features, and not sequentially, and not lightly. In the description of the present utility model, unless otherwise indicated, the meaning of "a plurality" is two or more.

In the description of the present utility model, it should be noted that, unless explicitly specified and limited otherwise, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be either fixedly connected, detachably connected, or integrally connected, for example; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present utility model will be understood in specific cases by those of ordinary skill in the art.

The specific structure of the boat structure according to the embodiment of the present utility model will be described below with reference to fig. 3 to 10.

The utility model discloses a boat structure, as shown in fig. 3 and 8, the boat structure of the embodiment comprises a boat body 100 and supporting components 200, wherein the supporting components 200 are arranged in pairs and are arranged on two opposite sides of the boat body 100, each supporting component 200 is provided with a supporting cambered surface 201, and the supporting cambered surfaces 201 of the supporting components 200 arranged in pairs respectively stop on two sides of a sheet 300 and are in line contact with the sheet 300.

It can be understood that in the actual working process, the two sides of the sheet 300 are abutted against the supporting cambered surface 201, and the supporting cambered surface 201 is in line contact with the sheet 300, and the contact mode reduces the contact area of the supporting component 200 and the sheet 300 under the condition of ensuring the supporting stability, so that the air flow flowing through the surface of the sheet 300 is more uniform and can cover the area of the whole sheet 300 required to react, the probability of air flow printing and boat stamping at the edge of the sheet 300 in the processing process is reduced, the thickness of a coating film or a deposition layer on a silicon wafer is more uniform, and the sheet resistance of a battery piece can be in an optimal value range so as to improve the processing yield. In addition, it is possible to ensure that the double sheets (i.e., two overlapped sheets 300 are supported by one support assembly 200) are tightly adhered during the process, and to avoid the occurrence of the plating and the expanding phenomenon.

In some embodiments, as shown in fig. 8-9, the support assembly 200 includes support blocks, and the support blocks are fixedly connected to the boat body 100. It can be appreciated that the supporting blocks are fixedly connected to the boat body 100, so that the connection stability of the supporting blocks and the boat body 100 can be ensured, and in the actual working process, the supporting of the boat structure to the sheet 300 is better ensured by using the gravity action of the sheet 300 to keep on the two supporting blocks arranged in pairs.

In some embodiments, as shown in fig. 8, the boat body 100 is provided with a mounting plane 122, and the support block has a mounting surface 202 connected to a support cambered surface 201, where the mounting surface 202 is attached to the mounting plane 122. It will be appreciated that the attachment of the mounting surface 202 to the mounting surface 122 further ensures the stability of the connection of the support blocks to the boat body 100, thereby better ensuring the support of the sheet 300 by the boat structure.

It should be noted that, in the embodiment of the present utility model, the mounting surface 202 and the mounting plane 122 may be bonded or welded, or one of the support block and the boat body 100 may be provided with a fixing post and the other may be provided with a fixing hole. Of course, in other embodiments of the utility model, the support blocks may also be integrally formed with the boat body 100.

In some embodiments, as shown in fig. 3 to 4, the boat body 100 is provided with a coupling groove 121, the support assembly 200 includes an eccentric 210 and an axle 220, both ends of the axle 220 are coupled to both sidewalls of the coupling groove 121, and the eccentric 210 is mounted to the axle 220. Firstly, as shown in fig. 1-2, in the prior art, the silicon wafer 3 needs to be inserted into the groove 21, and during the actual working process, the silicon wafer 3 is deviated in the groove 32, so that the silicon wafer 3 is not located at the center of the boat.

It will be appreciated that in the present utility model, the eccentric 210 is used to support the sheet 300, the sheet 300 can be horizontally clamped by two eccentric wheels 210 arranged in pairs by using the center of gravity of the eccentric wheels 210, and the sheet 300 can drive the eccentric wheels 210 to slightly rotate under the gravity action of the sheet 300, so that the sheet 300 is always located in the center of the boat body 100, and the adaptive support of the sheet 300 is realized.

In some embodiments, as shown in fig. 7, the shaft hole of the eccentric 210, which is engaged with the shaft 220, forms a notch 211 on the circumferential surface of the eccentric 210. It will be appreciated that during the actual installation process, only the notch 211 of the eccentric wheel 210 needs to be inserted into the wheel shaft 220, and the eccentric wheel 210 does not need to be inserted from the shaft end of the wheel shaft 220, so that the installation manner is very convenient, and the installation and the disassembly of the eccentric wheel 210 are convenient.

In some embodiments, as shown in fig. 6-7, the support assembly 200 further includes a stop 230, the stop 230 being mounted to the boat body 100 and configured to stop the eccentric 210. It will be appreciated that the stopper 230 can prevent the occurrence of the unstable supporting phenomenon caused by the excessive rotation of the eccentric 210, thereby ensuring that the eccentric 210 can stably support the sheet 300.

In some more specific embodiments, as shown in fig. 4, the limiting member 230 includes a limiting shaft, two ends of the limiting shaft are connected to two sidewalls of the mating groove 121, and the limiting shaft is stopped against the circumferential surface of the eccentric 210. It will be appreciated that the limiting shaft is directly connected to the two side walls of the mating groove 121, so that stability of the limiting shaft can be ensured, and thus the limiting shaft can be stably stopped against the circumferential surface of the eccentric wheel 210 to ensure a limiting effect on the eccentric wheel 210.

In some embodiments, as shown in fig. 3 and 8, the boat body 100 includes end plates 110 and support columns 120, the support columns 120 are arranged in pairs, the end plates 110 are connected to both ends of the support columns 120, and each support column 120 is provided with a plurality of support assemblies 200 arranged at intervals along the height direction thereof. It can be appreciated that the boat body 100 is assembled by the end plates 110 and the support columns 120, which simplifies the structure of the boat body 100, facilitates the manufacture of the boat body 100, and reduces the manufacturing cost of the boat body 100.

In some embodiments, as shown in fig. 3, 5 and 8, a handle 123 is provided on the support column 120. It will be appreciated that during actual operation, a user or robotic arm may carry the boat structure via handle 123, and handle 123 may also be configured to support the boat structure on a boat support or support paddle of the furnace.

In some embodiments, the end plate 110 is provided with a clamping protrusion 111 and/or a clamping groove 112, and the clamping protrusion 111 on one boat structure can be clamped in the clamping groove 112 of the other boat structure. It should be noted that, in some embodiments, two adjacent boat structures are provided, wherein two sides of the end plate 110 of one boat structure are provided with the clamping protrusions 111, and two sides of the end plate 110 of the other boat structure are provided with the clamping grooves 112; in some embodiments, in two adjacent boat structures, two sides of the end plate 110 of one boat structure are respectively provided with a clamping convex 111 and a clamping groove 112, and two sides of the end plate 110 of the other boat structure are respectively provided with a clamping groove 112 and a clamping convex 111, and the structures of the clamping groove 112 and the clamping convex 111 can be selected according to actual needs. It will be appreciated that in the actual working process, the boat support or the supporting paddle for supporting the boat structure is generally provided with a plurality of boat structures, and in this embodiment, two adjacent boat structures are fixed by the clamping protrusions 111 and the clamping grooves 112, so that stability of the boat support or the supporting paddle of the boat structures can be better ensured.

Embodiment one:

as shown in fig. 3 to 7, the boat structure of the present embodiment includes a boat body 100 and support assemblies 200, the boat body 100 includes two end plates 110 and four support columns 120, the four support columns 120 are arranged in two pairs, the end plates 110 are connected to both ends of the support columns 120, and each support column 120 is provided with a plurality of support assemblies 200 arranged at intervals along the height direction thereof. Each support column 120 is provided with a handle 123, the support columns 120 are also provided with a matching groove 121 extending along the height direction, and two opposite sides of each end plate 110 are respectively provided with a clamping convex 111 and a clamping groove 112. The support assembly 200 includes an eccentric 210, an axle 220, and a stopper 230, both ends of the axle 220 are connected to both sidewalls of the coupling groove 121, and the eccentric 210 is mounted to the axle 220. The shaft hole of the eccentric 210, which is engaged with the shaft 220, forms a notch 211 on the circumferential surface of the eccentric 210. The limiting member 230 includes a limiting shaft, two ends of the limiting shaft are connected to two sidewalls of the matching groove 121, and the limiting shaft is stopped against the circumferential surface of the eccentric wheel 210.

The boat structure of this embodiment has the following advantages:

first: under the condition of ensuring the supporting stability, the contact area between the supporting component 200 and the sheet 300 is reduced, so that the air flow flowing through the surface of the sheet 300 is more uniform and can cover the area of the whole sheet 300 required to react, the probability of air flow printing and boat tooth printing at the edge of the sheet 300 in the processing process is reduced, and the thickness of a coating film or a deposition layer on a silicon wafer is more uniform;

second, an adaptive eccentric rotation support is realized so that the sheet 300 is always at the center position of the boat body 100;

third, when two overlapped sheets 300 are supported by one support assembly 200, the double sheets are tightly attached, and the occurrence of the winding plating and the winding expansion phenomenon is avoided.

Embodiment two:

as shown in fig. 8 to 10, the boat structure of the present embodiment includes a boat body 100 and support assemblies 200, the boat body 100 includes two end plates 110 and four support columns 120, the four support columns 120 are arranged in two pairs, the end plates 110 are connected to both ends of the support columns 120, and each support column 120 is provided with a plurality of support assemblies 200 arranged at intervals along the height direction thereof. Each support column 120 is provided with a handle 123, the support column 120 is also provided with a mounting plane 122 extending along the height direction thereof, and the support assembly 200 comprises a support block, the support block is provided with a mounting surface 202 connected with a support cambered surface 201, and the mounting surface 202 is attached to the mounting plane 122.

In the description of the present specification, reference to the term "some embodiments," "other embodiments," etc., means that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the utility model. In this specification, schematic representations of the above terms do not necessarily refer to the same embodiments or examples. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.

The foregoing is merely exemplary of the present utility model, and those skilled in the art should not be considered as limiting the utility model, since modifications may be made in the specific embodiments and application scope of the utility model in light of the teachings of the present utility model.

Claims (10)

1. The boat structure is characterized by comprising a boat body (100) and supporting components (200), wherein the supporting components (200) are arranged in pairs, and are arranged on two sides of the boat body (100) which are oppositely arranged, each supporting component (200) is provided with a supporting cambered surface (201), and the supporting cambered surfaces (201) of the supporting components (200) which are arranged in pairs are respectively stopped on two sides of a sheet (300) and are in line contact with the sheet (300).

2. The boat structure of claim 1, characterized in that the support assembly (200) comprises a support block, and the support block is fixedly connected to the boat body (100).

3. The boat structure according to claim 2, characterized in that a mounting plane (122) is provided on the boat body (100), the support block has a mounting surface (202) connected to the support cambered surface (201), and the mounting surface (202) is attached to the mounting plane (122).

4. The boat structure of claim 1, wherein the boat body (100) is provided with a mating groove (121), the support assembly (200) comprises an eccentric wheel (210) and an axle (220), two ends of the axle (220) are connected to two side walls of the mating groove (121), and the eccentric wheel (210) is mounted on the axle (220).

5. The boat structure of claim 4, characterized in that a shaft hole on the eccentric wheel (210) that mates with the wheel shaft (220) forms a notch (211) on the peripheral surface of the eccentric wheel (210).

6. The boat structure of claim 4, wherein the support assembly (200) further comprises a stopper (230), the stopper (230) being mounted to the boat body (100) and configured to stop the eccentric (210).

7. The boat structure of claim 6, wherein the stopper (230) includes a stopper shaft, both ends of the stopper shaft are connected to both side walls of the fitting groove (121), and the stopper shaft is stopped against the peripheral surface of the eccentric wheel (210).

8. The boat structure according to any one of claims 1 to 7, wherein the boat body (100) comprises end plates (110) and support columns (120), the support columns (120) are arranged in pairs, the end plates (110) are connected to both ends of the support columns (120), and each support column (120) is provided with a plurality of support assemblies (200) arranged at intervals along the height direction thereof.

9. The boat structure according to claim 8, characterized in that a handle (123) is provided on the support column (120).

10. The boat structure according to claim 8, characterized in that the end plate (110) is provided with a clamping protrusion (111) and/or a clamping groove (112), and the clamping protrusion (111) on one boat structure can be clamped in the clamping groove (112) of the other boat structure.