CN219382526U - Crystal bar transport vehicle - Google Patents

Abstract

The embodiment of the utility model provides a crystal bar transport vehicle, which comprises a base, wherein wheels are arranged at the bottom of the base; the support structure is arranged on the surface of the base, which is away from the wheels, and is also provided with a rotating shaft; the crystal support is connected with the support structure through a rotating shaft, and can rotate around the axis of the rotating shaft relative to the support structure; the first limiting part is provided with a first accommodating groove extending along a first direction, a first buffer part is arranged in the first accommodating groove, the first direction is inclined relative to the vertical direction, the first limiting part is fixedly connected with the bracket structure, and the first buffer part is also connected with the crystal support through a connecting structure; the crystal support drives the first buffer part to move in the first accommodating groove along the first direction during the rotation of the crystal support relative to the support structure around the axis of the rotating shaft. The crystal bar transport vehicle provided by the embodiment of the utility model can at least effectively reduce the labor intensity of transporting crystal bars.

Description

Crystal bar transport vehicle

Technical Field

The embodiment of the utility model relates to the technical field of semiconductor material transportation, in particular to a crystal bar transportation vehicle.

Background

In the production process of the crystal bar, firstly, raw material silicon is required to be placed into a single crystal furnace to be melted into silicon melt at high temperature, then, the silicon melt is crystallized to form the crystal bar, and after the crystal bar is taken out of the single crystal furnace, the crystal bar is required to be transported to a detection workshop to carry out quality detection and wait for breaking and slicing, wherein a crystal bar transport vehicle is generally adopted to transport the crystal bar so as to save manpower.

Currently, there is still room for improvement in the design of ingot transport vehicles.

Disclosure of Invention

The embodiment of the utility model provides a crystal bar transport vehicle which is at least beneficial to solving the problem of high labor intensity in transporting crystal bars.

According to some embodiments of the present utility model, an embodiment of the present utility model provides a crystal bar transport vehicle, including: the base is provided with wheels at the bottom; the support structure is arranged on the surface, away from the wheels, of the base, and the support structure is also provided with a rotating shaft; the crystal support is connected with the support structure through the rotating shaft, and can rotate around the axis of the rotating shaft relative to the support structure; the first limiting part is provided with a first accommodating groove extending along a first direction, a first buffer part is arranged in the first accommodating groove, the first direction is inclined relative to the vertical direction, the first limiting part is fixedly connected with the bracket structure, and the first buffer part is also connected with the crystal support through a connecting structure; and the crystal support drives the first buffer part to move in the first accommodating groove along the first direction during the rotation of the crystal support relative to the support structure around the axis of the rotating shaft.

In some embodiments, the first buffer includes: and the rotating wheel is connected with the connecting structure, and the connecting structure drives the rotating wheel to rotate in the first accommodating groove during the rotation of the crystal support relative to the support structure around the axis of the rotating shaft.

In some embodiments, the first buffer includes: and the sliding part is connected with the connecting structure, wherein the connecting structure drives the sliding part to slide in the first accommodating groove during the rotation of the crystal support relative to the bracket structure around the axis of the rotating shaft.

In some embodiments, a sliding rail disposed along the first direction is disposed in the first accommodating groove, and the first buffer part moves on the sliding rail.

In some embodiments, a plurality of protruding portions arranged at intervals are arranged on the bottom surface, which is in contact with the first buffer portion, in the first accommodating groove.

In some embodiments, the wafer support comprises: the first side supporting plate is provided with a first bearing surface, the first bearing surface is used for being opposite to the outer circumferential surface of the crystal bar, and the first side supporting plate is connected with the rotating shaft; the second side supporting plate is connected with the first side supporting plate and is provided with a second bearing surface, and the second bearing surface is used for being opposite to the end face of the crystal bar.

In some embodiments, the wafer carrier further comprises: the second limiting part is arranged on the outer side surface of the first side supporting plate, facing the first limiting part, and is provided with a second accommodating groove extending along a second direction, and the second direction is the same as the extending direction of the outer side surface; the second buffer part is positioned in the second accommodating groove and is connected with the first buffer part through the connecting structure; and the crystal support drives the second buffer part to move in the second accommodating groove along the second direction during the rotation of the crystal support relative to the support structure around the axis of the rotating shaft.

In some embodiments, the first bearing surface has a plurality of pulleys disposed thereon.

In some embodiments, the rotation axis is fixed with the crystal support, the rotation axis being rotatable relative to the support structure; or the rotary shaft is fixed with the support structure, and the crystal support can rotate around the axis of the rotary shaft relative to the rotary shaft.

In some embodiments, the scaffold structure comprises: the support part is positioned on the surface of the base, which faces away from the wheels, and the rotating shaft is arranged on the support part; the supporting and limiting part is positioned on the surface of the base, which is away from the wheels, and is provided with a supporting surface which is opposite to the base and far away from the base, and the supporting surface is used for limiting the crystal support after the crystal support rotates to a preset position relative to the axis of the rotating shaft.

The technical scheme provided by the embodiment of the utility model has at least the following advantages:

the crystal bar transport vehicle provided by the embodiment of the utility model comprises: the bottom surface is provided with the base of wheel, the supporting structure, brilliant support and first spacing portion, wherein, through the rotation axis connection supporting structure and the brilliant support that set up at the supporting structure, the brilliant support can rotate around the axis rotation of rotation axis for supporting structure, so, after the brilliant support bears the crystal bar, can rotate the brilliant support in order to change the state of putting of crystal bar in a flexible way, thereby use manpower sparingly, improve work efficiency, for example, if wait to bear the crystalline bar and put in the vertical state, then bear the crystalline bar in the brilliant support, can rotate the brilliant support and make the crystalline bar put in the horizontal state, compare in making the crystalline bar transport in the vertical state, make the crystalline bar be the state of being more convenient for transport and observing the crystalline bar in the transportation, avoid the crystalline bar to receive the bump, in addition, first spacing portion and supporting structure fixed connection, and first spacing portion have a holding tank, first buffer portion in the first holding tank is connected with the brilliant support, when the brilliant support is moving around the axis motion of rotation axis, for the supporting structure, the brilliant support drives a buffer portion and moves in a holding tank, because the extension direction of first holding tank is vertical state, make the crystalline bar is put in the state, compared with making the crystalline bar in the vertical state, make the crystalline bar transport is in the state, can be reduced, and can avoid the rotation rate to take place, and can be limited to the crystal bar because of the crystal bar is down in the direction. Therefore, the crystal bar transport vehicle provided by the embodiment of the utility model has better safety, can reduce the possibility of collision of the crystal bar, reduces the possibility of injury of operators in the process of placing the crystal bar, is beneficial to reducing the manpower required for transporting the crystal bar, and can transport the crystal bar flexibly and efficiently.

Drawings

One or more embodiments are illustrated by way of example and not limitation in the figures of the accompanying drawings, which are not to be construed as limiting the embodiments unless specifically indicated otherwise; in order to more clearly illustrate the embodiments of the present utility model or the technical solutions in the conventional technology, the drawings required for the embodiments will be briefly described below, and it is apparent that the drawings in the following description are only some embodiments of the present utility model, and other drawings may be obtained according to the drawings without inventive effort for those skilled in the art.

FIG. 1 is a schematic view of a crystal bar transport cart according to an embodiment of the present utility model;

FIG. 2 is a left side view of a boule cart according to an embodiment of the present utility model;

FIG. 3 is a front view of a boule cart according to an embodiment of the present utility model;

FIG. 4 is a side view of a boule cart according to an embodiment of the present utility model;

FIG. 5 is an enlarged view of the structure shown in area A of FIG. 4;

FIG. 6 is a side view of a boule cart according to an embodiment of the present utility model;

fig. 7 is an enlarged view of the structure shown in the region B in fig. 6.

Detailed Description

As known from the background art, the design of the existing ingot transport vehicle needs to be improved.

The embodiment of the utility model provides a crystal bar transport vehicle, a rotating shaft is arranged on a support structure, the support structure is connected with a crystal support through the rotating shaft, and the crystal support can rotate around the axis of the rotating shaft relative to the support structure, so that the crystal support can be rotated to change the placement state of a carried crystal bar, the crystal bar transport vehicle does not need too much manpower to carry, and the manpower is saved; still be provided with the first spacing portion of supporting structure fixed connection, first spacing portion has along the first holding tank of first direction extension, first buffer portion has in the first holding tank, first buffer portion is connected with brilliant support through connection structure, because brilliant support rotates can drive first buffer portion and remove along first direction in first holding tank, through setting up first direction for vertical direction slope, can control the speed that first buffer portion removed, thereby control brilliant support pivoted speed, in order to avoid the crystal bar that makes the bearing because brilliant support rotational speed is too big to be vibrate and collide with or drop phenomenon such as, also can avoid operating personnel to drop and injured possibility because of the crystal bar. By adopting the crystal bar transport vehicle provided by the embodiment of the utility model to transport crystal bars, operators can conveniently operate, the problems of high labor intensity and low working efficiency in manual crystal taking can be solved, and the possibility of injury of operators in the process of placing and transporting the crystal bars can be reduced.

Embodiments of the present utility model will be described in detail below with reference to the attached drawings. However, it will be understood by those of ordinary skill in the art that in various embodiments of the present utility model, numerous specific details are set forth in order to provide a thorough understanding of the present utility model. However, the claimed technical solution of the present utility model can be realized without these technical details and various changes and modifications based on the following embodiments.

Fig. 1 is a schematic structural view of a crystal bar carrier vehicle according to an embodiment of the present utility model, fig. 2 is a left side view of the crystal bar carrier vehicle according to an embodiment of the present utility model, fig. 3 is a front view of the crystal bar carrier vehicle according to an embodiment of the present utility model, fig. 4 is a side view of the crystal bar carrier vehicle according to an embodiment of the present utility model, fig. 5 is an enlarged view of a structure shown in a region a of fig. 4, fig. 6 is a side view of the crystal bar carrier vehicle according to an embodiment of the present utility model, and fig. 7 is an enlarged view of a structure shown in a region B of fig. 6.

Referring to fig. 1 to 7, the ingot transport vehicle includes: a base 100, wherein wheels 101 are arranged at the bottom of the base 100; the support structure 102 is arranged on the surface of the base 100, which faces away from the wheel 101, and the support structure 102 is also provided with a rotating shaft 103; the crystal support 104, the bearing surface of the crystal support 104 is used for bearing the crystal bar 105, the crystal support 104 is connected with the support structure 102 through the rotating shaft 103, and the crystal support 104 can rotate around the axis of the rotating shaft 103 relative to the support structure 102; the first limiting part 106, the first limiting part 106 is provided with a first accommodating groove 107 extending along a first direction a, a first buffer part 108 is arranged in the first accommodating groove 107, the first direction a inclines relative to the vertical direction, the first limiting part 106 is fixedly connected with the bracket structure 102, and the first buffer part 108 is also connected with the crystal support 104 through a connecting structure 109; during the rotation of the crystal support 104 relative to the support structure 102 about the axis of the rotation shaft 103, the crystal support 104 drives the first buffer portion 108 to move in the first accommodating groove 107 along the first direction a.

Through setting up rotation axis 103, make brilliant support 104 can rotate around rotation axis 103 for support structure 102, thereby can rotate the crystalline support 104 in order to change the state of putting of crystal bar 105 that bears, in order to transport crystal bar 105, for example, can realize single operation and place and transport the crystal bar, can use manpower sparingly, be favorable to improving work efficiency, and when the crystalline support 104 rotates around the axis of rotation axis 103 for support structure 102, still drive first buffer 108 and remove in first holding tank 107, because when crystalline support 104 carries the crystal bar 105 that is vertical state and puts (crystal bar 105 is vertical state and puts the extending direction of referring to crystal bar 105 for vertical direction), rotate crystalline support 104 through the gravity of crystalline support 104 and crystal bar 105 self, through setting up the extending direction slope for vertical direction of first holding tank 107, can slow down the speed that first buffer 108 removed in first holding tank 107, thereby can slow down the speed that crystalline support 104 rotated, and then avoid because the rotational speed receives and shake fast messenger's crystal bar 104 and collide with or drop and the phenomenon that the crystal bar drops, and can avoid the possibility that causes the operator to hurt because of crystal bar drops.

The included angle between the first direction a and the vertical direction is the first included angle, and it can be understood that the rotation speed of the crystal support 104 is related to the first included angle, if the first included angle is too large, when the crystal support 104 is rotated by the gravity of the crystal support 104, the rotation speed of the crystal support 104 is easy to be caused to be too large, which is unfavorable for guaranteeing the safety of the crystal bar 105 and operators in the process of rotating the crystal support 104, and if the first included angle is too small, the rotation speed of the crystal support 104 is too small, the time required for rotating the crystal support 104 is too long, which is unfavorable for improving the working efficiency. In some embodiments, the first included angle may be 45 ° to 75 °, for example, the included angle may be 45 °, 50 °, 60 ° or 75 °, and by setting the included angle in this range, in the process of rotating the crystal support 104 to place the crystal bar 105 in a vertical state to place in a horizontal state, the crystal support 104 can have a moderate rotation speed, and the phenomenon that the crystal bar 105 is difficult to prevent from being knocked or dropped due to the overlarge rotation speed of the crystal support 104 and difficult to control is avoided, so that the safety of the crystal bar 104 and operators can be ensured, and the time required for rotating the crystal support 104 is shorter, which is beneficial to improving the working efficiency.

The first limiting portion 106 has a first end 16 and a second end 26 opposite to each other along a first direction a, the first end 16 is closer to the base than the second end 26, when the rotary crystal support 104 makes the crystal rod 105 carried by the crystal support 104 put in a horizontal state or put adjacent to the horizontal state, the first buffering portion 108 is driven to move from the second end 26 to the first end 16, wherein a distance between the first end 16 and the base 100 may be greater than or equal to a distance between the rotary shaft 103 and the base 100, so as to ensure that the crystal rod 105 cannot rotate beyond the horizontal direction when the rotary crystal support 104 makes the crystal rod 105 carried by the crystal support 104 move from the vertical direction to the horizontal direction, thereby ensuring that the crystal rod 105 cannot slide out of the crystal support 104.

It can be understood that, when the susceptor 104 drives the first buffer portion 108 to move in the first accommodating groove 107, the first buffer portion 108 may move in such a way that the first buffer portion 108 rotates around its own axis to move, or the first buffer portion 108 slides in the first accommodating groove 107 to move. In some embodiments, the first buffer 108 may include: and the rotating wheel is connected with the connecting structure 109, wherein the connecting structure 109 drives the rotating wheel to rotate in the first accommodating groove 107 during the rotation of the crystal support 104 relative to the bracket structure 102 around the axis of the rotating shaft 103. In some embodiments, the first buffer 108 may include: the sliding part is connected with the connecting structure 109, wherein, the crystal support 104 rotates the period around the axis of rotation axis 103 for the supporting structure 102, the connecting structure 109 drives the sliding part to slide in first holding tank 107, compare in the mode that first buffer part 108 rotated in first holding tank 107 with the removal, the friction force that first buffer part 108 slides in order to remove the in-process receives is great, it is better to reduce crystal support 104 pivoted speed effect, thereby the rotational speed of crystal support 104 is less, be favorable to avoiding the crystal bar to receive the phenomenon of colliding with or droing, improve the security of transporting crystal bar 105.

Referring to fig. 4 to 5, in some embodiments, a sliding rail 110 disposed along a first direction a is disposed in the first accommodating groove 107, the first buffer portion 108 moves on the sliding rail 110, and a movement path of the first buffer portion 108 is planned by the sliding rail 110, so as to avoid the first buffer portion 108 from being separated from the first accommodating groove 107. The sliding rail 110 may be fixedly connected to the first accommodating groove 107, and the first buffer portion 108 moves on the sliding rail 110 in a rotating or sliding manner.

In some embodiments, the sliding rail 110 may also rotate in the first accommodating groove 107, and the first buffer portion 108 and the sliding rail 110 are relatively stationary, and the movement of the first buffer portion 108 is driven by the rotation of the sliding rail 110.

In some embodiments, the sliding rail 110 may be a chain, and the first buffer portion 108 may be connected to the chain through a gear, and the gear is meshed with the chain. In some embodiments, the sliding rail 110 may be a rope, and the first buffer portion 108 moves on the rope, or the first buffer portion 108 fixedly connected to the rope is driven to move by rotating the rope in the first accommodating groove 107.

In some embodiments, the bottom surface of the first accommodating groove 107, which is in contact with the first buffer portion 108, is provided with a plurality of protruding portions (not shown) arranged at intervals, and by setting the protruding portions, the moving speed of the first buffer portion 108 in the first accommodating groove 107 can be slowed down, so that the rotating speed of the crystal support 104 is slowed down, the crystal rod 105 borne by the crystal support 104 is prevented from being knocked or falling off due to too high rotating speed, and the safety of using the crystal rod transport vehicle is improved.

Referring to fig. 1, in some embodiments, the wafer carrier 104 may include: a first side support plate 111, wherein the first side support plate 111 has a first bearing surface, the first bearing surface is used for being opposite to the outer circumferential surface of the crystal bar 105, and the rotating shaft 103 is connected with the first side support plate 111; the second side supporting plate 112, the second side supporting plate 112 is connected with the first side supporting plate 111, the second side supporting plate 112 has a second bearing surface, and the second bearing surface is used for being opposite to the end face of the crystal bar 105.

It will be appreciated that the dimensions of the first side support plate 111 and the second side support plate 112 are adapted to the dimensions of the ingot 105, and that the dimensions of the first side support plate 111 and the dimensions of the second side support plate 112 may be designed according to the dimensions of the ingot 105 when the ingot transport vehicle is put into the process of transporting the ingot in actual use.

In some embodiments, the length of the first side support plate 111 may be 0.4m to 1.7m in the extending direction along the first side support plate 111, for example, the length may be 0.4m, 0.6m, 0.9m, 1.3m, 1.5m, or 1.7m, within which the possibility of falling off the ingot 105 carried by the too short length of the first side support plate 111 can be avoided, the length of the first side support plate 111 can be adapted to the length of the ingot 105 in the extending direction, and the phenomenon that it is difficult to rotate the susceptor 104 due to the too long length of the first side support plate 111 can be avoided; it will be appreciated that if the width of the first side support plate 111 is too small in the direction perpendicular to the extension of the first side support plate 111, the susceptor 104 may not be able to accommodate the ingot 105, and if the width of the first side support plate 111 is too large, it may be detrimental to control the cost of manufacturing the ingot transporter, and in some embodiments, the width of the first side support plate 111 may be 0.28m to 0.32m, for example, 0.28m, 0.29m, 0.3m, 0.31m, or 0.32m in the direction perpendicular to the extension of the first side support plate 111, within which the susceptor 104 may be able to accommodate the ingot 105, and be able to control the cost of manufacturing the ingot transporter.

The length of the second side support plate 112 may be 0.28m to 0.32m in the extending direction along the second side support plate 112, for example, the length may be 0.28m, 0.29m, 0.3m, 0.31m or 0.32m, within which the possibility of the ingot 105 being detached due to the too short length of the second side support plate 112 can be avoided, the length of the second side support plate 112 can be adapted to the diameter of the end face of the ingot 105, and the cost of manufacturing the ingot transporter can be controlled; in some embodiments, the width of the second side blade 112 may be 0.28m to 0.32m in the direction perpendicular to the extension of the second side blade 112, e.g., the width may be 0.28m, 0.29m, 0.3m, 0.31m, or 0.32m, within which width the susceptor 104 is facilitated to accommodate the boule 105 and the cost of manufacturing the boule transporter can be controlled.

In some embodiments, the rotation shaft 103 is fixed to the susceptor 104, and the rotation shaft 103 is rotatable relative to the support structure 102. In some embodiments, the rotation shaft 103 is fixed to the support structure 102, and the susceptor 104 is rotatable about the axis of the rotation shaft 103 relative to the rotation shaft 103.

The distance between the rotation shaft 103 and the side of the first side support plate 111 near the second side support plate 112 in the extending direction along the first side support plate 111 is a first length. If the ratio of the length of the first side supporting plate 111 in the extending direction along the first side supporting plate 111 to the first length is too large, in order to ensure that the crystal support 104 can rotate between the vertical direction and the horizontal direction, the distance between the rotating shaft 103 and the base 100 needs to be set to be large, when the crystal bar 105 is carried by the crystal bar carrier, in order to operate the crystal support 104 with the extending direction of the first side supporting plate 111 being the vertical direction to rotate, an operator needs to provide a large force, which is not beneficial for the operator to rotate the crystal support 104; if the ratio of the length of the first side supporting plate 111 in the extending direction of the first side supporting plate 111 to the first length is too small, the path of rotation of the susceptor 104 is long and the time required to rotate the susceptor 104 is long. In some embodiments, the ratio of the length of the first side supporting plate 111 in the extending direction along the first side supporting plate 111 to the first length may be 2-3, for example, the ratio may be 2, 2.3, 2.5, 2.7 or 3, where the distance between the rotating shaft 103 and the base 100 is moderate, when the crystal ingot 105 is carried by the crystal ingot carrier, when the crystal support 104 with the extending direction of the first side supporting plate 111 being in the vertical direction is operated, the force required by the operator is smaller, which is beneficial to reducing the labor intensity of the operator, and the time for operating the rotation of the crystal support 104 is shorter, which is beneficial to improving the working efficiency.

In some embodiments, the length of the first side supporting plate 111 may be 0.4m to 1.7m along the extending direction of the first side supporting plate 111, and the first length may be 0.13m to 0.85m according to the length value of the first side supporting plate 111, for example, the first length may be 0.13m, 0.27m, 0.55m, 0.75m or 0.85m, and within the length range, the distance between the rotation shaft 103 and the base 100 is moderate, which is beneficial to reducing the labor intensity of operators, the time required for operating the rotation of the crystal support 104 is shorter, and the working efficiency can be improved.

It can be appreciated that if the distance between the rotation shaft 103 and the bottommost part of the crystal bar carrier is too large, when the first side supporting plate 111 is close to or in a horizontal state by rotating the crystal support 104, the distance between the crystal bar 105 carried by the crystal support 104 and the bottommost part of the crystal bar carrier is large, which is not beneficial for an operator to observe the state of the crystal bar 105 in the process of placing and transporting the crystal bar 105, and if the distance between the rotation shaft 103 and the bottommost part of the crystal bar carrier is too small, the first length is smaller, so that the time required for rotating the crystal support 104 is increased, which is not beneficial for improving the working efficiency. In some embodiments, the distance between the rotation shaft 103 and the bottommost part of the crystal bar carrier may be 0.44 m-0.45 m, for example, the distance may be 0.44m, 0.443m, 0.445m, 0.447m or 0.45m, where in the distance value range, when the crystal support 104 is rotated so that the first side support plate 111 is in a horizontal state, the distance between the first side support plate 111 and the bottommost part of the crystal bar carrier is moderate, which is favorable for an operator to observe the state of the crystal bar 105 in the process of placing and transporting the crystal bar 105 by using the crystal bar carrier, avoiding the crystal bar 105 from being knocked or the like, and the rotation path of the crystal support 104 is shorter, which is favorable for saving the time required for rotating the crystal support 104, thereby improving the working efficiency.

In some embodiments, a raised portion (not shown) may be further disposed on the second bearing surface, where the raised portion is used to raise the center of gravity of the ingot 105 when the ingot 104 bears the ingot 105, so as to reduce the force required for the first side supporting plate 111 to move from the vertical state to the horizontal state in an initial stage, and facilitate the rotation of the ingot 105 and the ingot 104 from the vertical direction to the horizontal direction.

The length of the raised portion in the direction along which the first side support 111 extends may be designed according to the length of the ingot 105. If the length of the raised portion is too large in the extending direction of the first side supporting plate 111, the quality of the raised portion is also increased, and when the crystal support 104 with the first side supporting plate 111 extending direction being the vertical direction is rotated, the crystal support 104 carrying the crystal bar 105 rotates by the gravity of the crystal support 104, the crystal bar 105 and the raised portion, so that the rotation speed of the crystal support 104 is increased, which is not beneficial to ensuring the safety of operators and the crystal bar 105; if the length of the raised portion is too small, the degree of raising the center of gravity of the ingot 105 is small, and the effect of reducing the labor intensity of placing the ingot 105 is poor. In some embodiments, the dimension of the raised portion may be designed according to the length of the crystal bar 105, so that the distance between the center of gravity of the crystal bar 105 and the bottommost portion of the crystal bar transport vehicle is 0.7 m-0.9 m, for example, the distance may be 0.7m, 0.75m, 0.8m, 0.85m or 0.9m, within this distance range, the total weight of the crystal bar 105 and the raised portion carried by the crystal support 104 and the crystal support 104 may be avoided from being too large, so that the speed of the crystal support 104 may be controlled within a smaller range, the possibility that the crystal bar 105 is knocked due to too fast and difficult control of the rotation speed may be avoided, the safety of the operator and the crystal bar 105 may be guaranteed, and the center of gravity of the crystal bar 105 may be effectively raised, and the labor intensity of the process may be reduced.

Referring to fig. 2, in some embodiments, the susceptor 104 may further include a side portion 113, where the side portion 113 is located on two opposite sides of the first side supporting plate 111 perpendicular to the first bearing surface, and the side portion 113 is fixedly connected to the first side supporting plate 111 and the second side supporting plate 112, and when the first side supporting plate 111 is in a vertical state to bear the ingot 105, the side portion 113 may prevent the ingot 105 from falling from two opposite sides of the first side supporting plate 111 perpendicular to the first bearing surface, so as to avoid the ingot 105 falling to generate damage or injury to an operator, which is beneficial to ensuring safety of the ingot 105 and the operator.

Referring to fig. 2, 6, and 7, in some embodiments, the wafer carrier 104 may further include: the second limiting part 114, the second limiting part 114 is arranged on the outer side surface of the first side supporting plate 111 facing the first limiting part 106, the second limiting part 114 is provided with a second accommodating groove 115 extending along a second direction b, and the second direction b is the same as the extending direction of the outer side surface; the second buffer portion 116, the second buffer portion 116 is located in the second accommodating groove 115 and is connected with the first buffer portion 108 via the connection structure 109; during the rotation of the crystal support 104 relative to the support structure 102 about the axis of the rotation shaft 103, the crystal support 104 drives the second buffer portion 116 to move in the second accommodating groove 115 along the second direction b.

In some embodiments, the second buffer portion 116 may be a rotating wheel, and when the crystal support 104 rotates around the axis of the rotation shaft 103 relative to the support structure, the rotating wheel is driven to rotate in the second accommodating groove 115 along the second direction b, so that the first buffer portion 108 connected to the rotating wheel moves in the first accommodating groove 107 along the first direction a. In some embodiments, the second buffer portion 116 may also be a sliding portion, that is, the second buffer portion 116 may move in the second receiving groove 115 in a sliding manner, so as to drive the first buffer portion 108 to move in the first receiving groove 107.

In some embodiments, a sliding rail (not shown) may also be disposed in the second accommodating groove 115, where the sliding rail is disposed in the second accommodating groove 115 along the second direction b, and the second buffer portion 116 moves on the sliding rail, so that the sliding rail plans a movement path of the second buffer portion 116, and prevents the second buffer portion 116 from being separated from the second accommodating groove 115.

In some embodiments, the first bearing surface is provided with a plurality of pulleys 117, and by arranging the pulleys 117, the crystal bar 105 can be assisted to slide into or slide out of the crystal support 104, so that manpower required by the process is saved, and the working efficiency can be improved.

In some embodiments, the scaffold structure 102 can comprise: a bracket portion 118, the bracket portion 118 being located on a face of the base 100 facing away from the wheel 101, the rotation shaft 103 being provided on the bracket portion 118, the length of the bracket portion 118 in the extending direction along the bracket portion 118 being not particularly limited in this embodiment, the bracket portions 118 provided at different positions in the extending direction along the bracket portion 118 may have the same or different lengths; the abutting limiting part 119, the abutting limiting part 119 is located on a surface of the base 100 facing away from the wheel 101, the abutting limiting part 119 is provided with an abutting surface opposite to the base 100 and far away from the base 100, after the crystal support 104 rotates to a preset position relative to the axis of the rotating shaft 103, the crystal support 104 is limited, wherein the preset position can be that the first side supporting plate 111 of the crystal support 104 is in a horizontal state, or the preset position can be that the end part of the first side supporting plate 111, adjacent to the second side supporting plate 112, is lower than the other end part of the first side supporting plate 111 in the vertical direction, in addition, after the crystal support 104 bearing the crystal bar 105 is in the preset position, the abutting limiting part 119 can support the crystal support 104 bearing the crystal bar 105, and the pressure born by the support structure 102 is relieved, so that the reliability of the crystal bar carrier is ensured.

It will be appreciated that, in the vertical direction, if the height of the abutment surface is lower than the height of the rotation shaft 103, when the susceptor 104 is rotated, the susceptor 104 may continue to rotate beyond the preset position, so that the first side supporting plate 111 is obliquely disposed, and the ingot 105 carried by the susceptor 104 may slide out of the susceptor 105 to fall or be knocked. In some embodiments, the height of the abutment surface is not lower than the height of the rotation shaft 103 in the vertical direction, so as to ensure that the first side supporting plate 111 rotates between the vertical direction and the horizontal direction, avoiding the situation that the height of the end of the first side supporting plate 111 far from the second side supporting plate 112 is lower compared with the end of the first side supporting plate near to the second side supporting plate 112, which is beneficial to ensuring the safety of the crystal bar 105 and operators.

In some embodiments, the abutment limit 119 may include a support portion 120 and an abutment portion 121, one end of the support portion 120 is connected to a face of the base 100 facing away from the wheel 101, and the other end of the support portion 120 is connected to the abutment portion 121, the support portion 120 is configured to support the abutment portion 121, and the abutment portion 121 has an abutment face.

According to the working principle of the crystal bar transport vehicle provided by the embodiment of the utility model, when the crystal bar transport vehicle is put into a crystal bar transport process for use, firstly, according to the placement state of the crystal bar 105, the crystal support 104 can be rotated to adapt to the placement state of the crystal bar 105, so that a person can conveniently place the crystal bar 105 on the crystal support 104, for example, when the crystal bar 105 is placed in a vertical state, the crystal support 104 can be rotated, so that the first side supporting plate 111 is arranged in a vertical state, and the person can conveniently place the crystal bar 105; during transportation of the crystal bar 105, the crystal support 104 can be rotated to a preset position, namely, the crystal bar 105 is placed in a horizontal state or is placed close to the horizontal state, so that an operator pays attention to the state of the crystal bar 105 during transportation, and collision is avoided; after the crystal bar 105 is transported to the designated position by adopting the crystal bar transport vehicle, the crystal support can be rotated according to the placement state of the crystal bar 105 required by the next process, so that the time required by reasonably placing the crystal bar 105 in the next process can be saved, and the working efficiency can be improved.

According to the crystal bar transport vehicle provided by the embodiment, the crystal support 104 is connected with the support structure 102 through the rotating shaft 103, and the crystal support 104 can rotate around the axis of the rotating shaft 103 relative to the support structure 102 through the gravity of the crystal support 104, so that the placement state of the crystal bars 105 borne by the crystal support 104 can be changed through rotating the crystal support 104, for example, the crystal bars 105 placed in the vertical state can be placed in the horizontal state through rotating the crystal support 104, the condition that a carrier pays attention to the crystal bars 105 in the transport process is facilitated, the crystal bars 105 are prevented from being knocked or falling and the like in the transport process, when the crystal support 104 can rotate around the axis of the rotating shaft 103 relative to the support structure 102, the first buffer part 108 connected with the crystal support 104 can move in the first accommodating groove 107, and the first direction a is inclined relative to the vertical direction, so that the moving speed of the first buffer part 108 can be slowed down, and the rotating speed of the crystal support 104 is slowed down, and the crystal support 104 is prevented from rotating too fast, so that the crystal bars 105 are prevented from being knocked or falling in the transport process, and the safety of the crystal support 104 is facilitated to be controlled.

It will be understood by those of ordinary skill in the art that the foregoing embodiments are specific examples of carrying out the utility model and that various changes in form and details may be made therein without departing from the spirit and scope of the utility model. Various changes and modifications may be made by one skilled in the art without departing from the spirit and scope of the utility model, and the scope of the utility model should be assessed accordingly to that of the appended claims.

Claims (10)

1. A crystal bar carrier vehicle, comprising:

the base is provided with wheels at the bottom;

the support structure is arranged on the surface, away from the wheels, of the base, and the support structure is also provided with a rotating shaft;

the crystal support is connected with the support structure through the rotating shaft, and can rotate around the axis of the rotating shaft relative to the support structure;

the first limiting part is provided with a first accommodating groove extending along a first direction, a first buffer part is arranged in the first accommodating groove, the first direction is inclined relative to the vertical direction, the first limiting part is fixedly connected with the bracket structure, and the first buffer part is also connected with the crystal support through a connecting structure;

and the crystal support drives the first buffer part to move in the first accommodating groove along the first direction during the rotation of the crystal support relative to the support structure around the axis of the rotating shaft.

2. The ingot carrier as set forth in claim 1, wherein the first buffer includes:

and the rotating wheel is connected with the connecting structure, and the connecting structure drives the rotating wheel to rotate in the first accommodating groove during the rotation of the crystal support relative to the support structure around the axis of the rotating shaft.

3. The ingot carrier as set forth in claim 1, wherein the first buffer includes:

and the sliding part is connected with the connecting structure, wherein the connecting structure drives the sliding part to slide in the first accommodating groove during the rotation of the crystal support relative to the bracket structure around the axis of the rotating shaft.

4. The ingot carrier as set forth in claim 2 or 3, wherein a slide rail provided in the first direction is provided in the first receiving groove, and the first buffer moves on the slide rail.

5. The ingot truck of claim 2 or 3, wherein a plurality of protrusions are arranged at intervals on a bottom surface of the first accommodating groove, which contacts the first buffer part.

6. The boule transport cart of claim 1, wherein the boule comprises:

the first side supporting plate is provided with a first bearing surface, the first bearing surface is used for being opposite to the outer circumferential surface of the crystal bar, and the first side supporting plate is connected with the rotating shaft;

the second side supporting plate is connected with the first side supporting plate and is provided with a second bearing surface, and the second bearing surface is used for being opposite to the end face of the crystal bar.

7. The boule transport cart of claim 6, wherein the boule further comprises:

the second limiting part is arranged on the outer side surface of the first side supporting plate, facing the first limiting part, and is provided with a second accommodating groove extending along a second direction, and the second direction is the same as the extending direction of the outer side surface;

the second buffer part is positioned in the second accommodating groove and is connected with the first buffer part through the connecting structure;

and the crystal support drives the second buffer part to move in the second accommodating groove along the second direction during the rotation of the crystal support relative to the support structure around the axis of the rotating shaft.

8. The ingot carrier as set forth in claim 6, wherein a plurality of pulleys are provided on the first bearing surface.

9. The ingot carrier as set forth in claim 1 wherein the rotation shaft is fixed to the susceptor, the rotation shaft being rotatable relative to the support structure; or alternatively, the process may be performed,

the rotary shaft is fixed with the support structure, and the crystal support can rotate around the axis of the rotary shaft relative to the rotary shaft.

10. The ingot carrier as set forth in claim 1, wherein the support structure comprises:

the support part is positioned on the surface of the base, which faces away from the wheels, and the rotating shaft is arranged on the support part;

the supporting and limiting part is positioned on the surface of the base, which is away from the wheels, and is provided with a supporting surface which is opposite to the base and far away from the base, and the supporting surface is used for limiting the crystal support after the crystal support rotates to a preset position relative to the axis of the rotating shaft.