CN219377772U

CN219377772U - Glue homogenizing device

Info

Publication number: CN219377772U
Application number: CN202320447598.3U
Authority: CN
Inventors: 雷聪; 李粤鹏; 李亚洲; 梁伟东
Original assignee: Dongguan Smartwin Intelligent Equipment Co ltd
Current assignee: Dongguan Smartwin Intelligent Equipment Co ltd
Priority date: 2023-03-09
Filing date: 2023-03-09
Publication date: 2023-07-21
Anticipated expiration: 2033-03-09

Abstract

The application relates to the technical field of semiconductors, in particular to a glue homogenizing device, which is characterized in that: the motor is arranged at the bottom of the frame, an output shaft of the motor penetrates through the frame and is connected with the glue homogenizing disc, the motor is used for driving the glue homogenizing disc to rotate, the water cooling mechanism is arranged on the motor, and the water cooling mechanism is used for radiating heat for the motor and reducing the temperature of the motor. The beneficial effects of this application are: the motor has good heat dissipation effect and stable temperature of the spin chuck.

Description

Glue homogenizing device

Technical Field

The application relates to the technical field of semiconductors, in particular to a glue homogenizing device.

Background

A wafer is a silicon wafer used for manufacturing a silicon semiconductor integrated circuit, and is called a wafer because the wafer has a circular shape. In the field of wafer production, the thickness and uniformity of photoresist or organic solvent coating with high viscosity on the wafer surface are required to be high. At present, a spin coating method is generally adopted, a wafer is fixed on a spin coater disc rotating at a high speed in an adsorption mode, then photoresist or an organic solvent with high viscosity is dripped, and the photoresist or the organic solvent with high viscosity is thrown away by utilizing the centrifugal force effect during high-speed rotation, so that the specified thickness and uniformity are achieved.

In view of the above, the inventors found that, for a photoresist or an organic material having a low viscosity, it is necessary to uniformly glue the photoresist or the organic material in a room temperature environment, and the temperature of the environment is too high, so that the glue solution is easily solidified, and the glue solution is difficult to spin. At present, a motor is generally used for driving the glue homogenizing disc to rotate at a high speed, and heat is generated during the operation of the motor, so that the temperature of the glue homogenizing disc is increased, and glue solution is solidified, which is not beneficial to glue homogenizing.

Disclosure of Invention

The application provides a spin device has that the radiating effect of motor is good, the temperature stability's of spin dish advantage.

The utility model provides a glue homogenizing device, includes frame, even dish, motor and water-cooling mechanism, the motor install in the bottom of frame, the output shaft of motor run through the frame and with even the dish of gluing is connected, the motor is used for driving even the dish of gluing rotates, water-cooling mechanism set up in on the motor, water-cooling mechanism is used for the motor heat dissipation, reduction the temperature of motor.

Through adopting above-mentioned technical scheme, the output shaft of motor drives even gluey dish high-speed rotation, and the during operation of motor, water-cooling mechanism can be for the motor cooling, reduces the influence of motor to even gluey dish temperature, and even gluey dish's temperature is stable to be favorable to even gluing.

Preferably, the water cooling mechanism comprises a shell, a water tank is arranged on the outer side of the machine body of the motor, the shell is arranged on the machine body of the motor, the shell covers the water tank, a water inlet and a water outlet are further formed in the machine body of the motor, and the water inlet and the water outlet are respectively communicated with two ends of the water tank.

Through adopting above-mentioned scheme, water inlet and delivery port are used for connecting the water pipe respectively, and during motor operation, cooling water gets into from the water inlet, flows through the outside of motor fuselage along the water tank, takes away the heat that the motor work produced, and finally flows from the delivery port.

Preferably, the water tank surrounds the motor along the body of the motor, and two ends of the water tank are separated.

Through adopting above-mentioned technical scheme, the basin surrounds the fuselage round, is favorable to making the area of contact of cooling water and motor fuselage bigger to be favorable to improving the cooling effect of cooling water to the motor, the both ends of basin separate not meet simultaneously, can guarantee the flow direction of cooling water.

Preferably, the water tank is provided with a plurality of bulges, the bulges are uniformly distributed along the length direction vertical to the water tank, and the top surfaces of the bulges are abutted against the inner side wall of the shell.

Through adopting above-mentioned scheme, bellied setting can make the cooling water reposition of redundant personnel become a plurality of trickles, is favorable to reducing the condition that the cooling water piled up in the basin bottom to take place, is favorable to increasing the area of contact of cooling water and motor fuselage simultaneously.

Preferably, the bottom center of the spin chuck is fixedly provided with a connecting part, the connecting part is sleeved on an output shaft of the motor, an inserting groove is formed in the end part of the output shaft of the motor, an inserting part is arranged in the connecting part, the inserting part is inserted in the inserting groove, and a propping piece is further arranged on the connecting part and used for propping against the connecting part.

Through adopting above-mentioned scheme, the cooperation setting of grafting portion and jack groove makes even gluey dish can stably follow the output shaft rotation of motor, and the setting of supporting tight piece simultaneously makes even gluey dish and motor output shaft's connection stable.

Preferably, the abutting piece comprises a plurality of bolts, a plurality of threaded holes are formed in the side wall of the connecting portion in a penetrating mode, the bolts are in threaded connection with the threaded holes, and the tail portions of the bolts are used for being abutted to an output shaft of the motor.

Through adopting above-mentioned scheme, use the lateral wall of bolt tight motor output shaft, not only can restrict the reciprocates of connecting portion to further guarantee that connecting portion follows the output shaft rotation of motor, be favorable to making connecting portion and motor output shaft's connection more stable.

Preferably, the number of the bolts and the threaded holes is three, and the threaded holes are distributed around the axis.

Through adopting above-mentioned scheme, the quantity of bolt is three, and the position of follow three direction fixed connection portion respectively further makes connecting portion can stably follow the output shaft rotation of motor.

Preferably, the plugging groove is specifically a square groove, and the plugging part is abutted with the groove wall of the plugging groove.

Through adopting above-mentioned scheme, square spliced groove can further guarantee that connecting portion follows the output shaft rotation of motor, has improved the stability of even mucilage binding during operation.

In summary, the beneficial technical effects of the application are:

1. when the motor works, the water cooling mechanism can cool the motor, the influence of the motor on the temperature of the glue homogenizing disc is reduced, and the temperature of the glue homogenizing disc is stable, so that glue homogenizing is facilitated.

2. The bellied setting can make the cooling water reposition of redundant personnel be a plurality of thin flows, is favorable to reducing the condition that the cooling water piled up in the basin bottom and takes place, is favorable to increasing the area of contact of cooling water and motor fuselage simultaneously.

Drawings

Fig. 1 is a schematic structural diagram of a spin coater in the present application.

Fig. 2 is a schematic diagram of a mechanism of the motor with a hidden casing.

Fig. 3 is a schematic cross-sectional structure of a spin chuck in the present application.

Reference numerals illustrate:

1. a frame; 2. a glue homogenizing disc; 3. a motor; 4. a housing; 5. a water tank; 6. a water inlet; 7. a water outlet; 8. a water inlet channel; 9. a water outlet channel; 10. a protrusion; 11. a connection part; 12. a plug-in part; 13. and (5) a screw.

Detailed Description

The present application is described in further detail below in conjunction with fig. 1-3.

The application discloses even device of gluing, see fig. 1, including frame 1, even dish 2, motor 3 and water-cooling mechanism, motor 3 installs in the bottom of frame 1, and the output shaft of motor 3 runs through frame 1 and is connected with even dish 2, and motor 3 is used for driving even dish 2 and rotates, and water-cooling mechanism sets up on motor 3, and water-cooling mechanism is used for the heat dissipation of motor 3, reduces motor 3's temperature. The output shaft of the motor 3 drives the spin chuck 2 to rotate at a high speed, the water cooling mechanism can cool the motor 3 when the motor 3 works, the influence of the motor 3 on the temperature of the spin chuck 2 is reduced, and the temperature of the spin chuck 2 is stable, so that spin is facilitated.

Specifically, referring to fig. 2, the water cooling mechanism includes a housing 4, a water tank 5 is provided outside the body of the motor 3, the housing 4 is provided on the body of the motor 3, the housing 4 covers the water tank 5, a water inlet 6 and a water outlet 7 are further provided on the body of the motor 3, and the water inlet 6 and the water outlet 7 are respectively communicated with two ends of the water tank 5. The water inlet 6 and the water outlet 7 are respectively used for connecting a water pipe, when the motor 3 works, cooling water enters from the water inlet 6 and flows through the outer side of the motor 3 body along the water tank 5, heat generated by the work of the motor 3 is taken away, and finally, the cooling water flows out from the water outlet 7.

The water tank 5 is wound around the outer periphery of the body of the motor 3, and both ends of the water tank 5 are a water inlet end and a water outlet end, respectively, and the water inlet end and the water outlet end of the water tank 5 are separated, that is, the water inlet end and the water outlet end of the water tank 5 are not communicated. The water inlet end of the water tank 5 is provided with a water inlet channel 8, the water inlet channel 8 is communicated with the water inlet 6, the water outlet end of the water tank 5 is provided with a water outlet channel 9, and the water outlet channel 9 is communicated with the water outlet 7. The water tank 5 surrounds the machine body for one circle, so that the contact area between the cooling water and the machine body of the motor 3 is larger, the cooling effect of the cooling water on the motor 3 is improved, and meanwhile, the two ends of the water tank 5 are separated from each other, so that the flow direction of the cooling water can be ensured.

The water tank 5 is provided with a plurality of protrusions 10, and the protrusions 10 are specifically arranged in a long strip shape. In this embodiment, the number of the protrusions 10 is three, and the three protrusions 10 are uniformly distributed along the length direction perpendicular to the water tank 5. The top surface of the projection 10 abuts against the inner wall of the housing 4. The bulge 10 divides the water tank 5 into four water flow channels, so that the cooling water is divided into a plurality of trickles, the occurrence of the condition that the cooling water is accumulated at the bottom of the water tank 5 is reduced, and the contact area between the cooling water and the machine body of the motor 3 is increased.

Referring to fig. 3, a connecting part 11 is fixedly arranged at the bottom center of the spin chuck 2, and the connecting part 11 is sleeved on an output shaft of the motor 3. The end of the output shaft of the motor 3 is provided with a plug-in groove, the inside of the connecting part 11 is provided with a plug-in part 12, and the plug-in part 12 is inserted in the plug-in groove. The plugging groove is specifically a square groove, and the plugging portion 12 is abutted with the groove wall of the plugging groove. The square inserting groove can further ensure that the connecting part 11 rotates along with the output shaft of the motor 3, so that the stability of the glue homogenizing device during working is improved. The connecting portion 11 is further provided with a tightening member for tightening the connecting portion 11. The cooperation setting of grafting portion 12 and jack groove makes even gum dish 2 can stably follow the output shaft rotation of motor 3, and the setting of supporting the tight piece makes even gum dish 2 and motor 3 output shaft's connection stable simultaneously.

Specifically, the abutting piece comprises a plurality of bolts, a plurality of threaded holes are formed in the side wall of the connecting portion 11 in a penetrating mode, the bolts are in threaded connection with the threaded holes, and the tail portions of the bolts are used for being abutted with the outer side wall of the output shaft of the motor 3. The side wall of the output shaft of the motor 3 is abutted by the bolts, so that the up-and-down movement of the connecting portion 11 can be limited, the connecting portion 11 is further ensured to rotate along with the output shaft of the motor 3, and the connecting portion 11 is connected with the output shaft of the motor 3 more stably. In this embodiment, the number of bolts and screw holes is set to three, and the screw holes are distributed around the axis. The number of the bolts is three, and the positions of the connecting parts 11 are fixed from three directions respectively, so that the connecting parts 11 can stably rotate along with the output shaft of the motor 3. In other embodiments, the number of bolts may be increased or decreased as appropriate.

The implementation principle of the embodiment is as follows:

when the motor 3 works, cooling water enters one end of the water tank 5 from the water inlet 6, flows along the water tank 5 around the outer surface of the machine body of the motor 3, is split into trickles by the protrusions 10, reaches the other end of the water tank 5, and is finally discharged from the water outlet 7. The cooling water flows on the surface of the machine body of the motor 3, so that heat generated by the operation of the motor 3 can be taken away, the influence of the motor 3 on the temperature of the spin chuck 2 is reduced, and the temperature of the spin chuck 2 is stable, thereby being beneficial to spin.

The foregoing are all preferred embodiments of the present application, and are not intended to limit the scope of the present application in any way, therefore: all equivalent changes in structure, shape and principle of this application should be covered in the protection scope of this application.

Claims

1. A spin coater is characterized in that: including frame (1), even dish (2), motor (3) and water-cooling mechanism, motor (3) install in the bottom of frame (1), the output shaft of motor (3) run through frame (1) and with even dish (2) are connected, motor (3) are used for driving even dish (2) rotate, water-cooling mechanism set up in on motor (3), water-cooling mechanism is used for motor (3) heat dissipation, reduction the temperature of motor (3).

2. A spin coater as set forth in claim 1 wherein: the water cooling mechanism comprises a shell (4), a water tank (5) is arranged outside the machine body of the motor (3), the shell (4) is arranged on the machine body of the motor (3), the shell (4) covers the water tank (5), a water inlet (6) and a water outlet (7) are further formed in the machine body of the motor (3), and the water inlet (6) and the water outlet (7) are respectively communicated with two ends of the water tank (5).

3. A spin coater as set forth in claim 2 wherein: the water tank (5) surrounds the motor (3) along the machine body for one circle, and two ends of the water tank (5) are separated.

4. A spin coater as set forth in claim 2 wherein: be provided with a plurality of archs (10) on basin (5), a plurality of protruding (10) are along perpendicular to the length direction evenly distributed of basin (5), the top surface of protruding (10) with the inside wall butt of shell (4).

5. A spin coater as set forth in claim 1 wherein: the utility model discloses a spin coater, including spin coater, motor (3), spin coater, connecting portion (11) are fixed in the bottom center of spin coater (2), connecting portion (11) cover is located on the output shaft of motor (3), the grafting groove has been seted up to the tip of motor (3) output shaft, the inside of connecting portion (11) is provided with grafting portion (12), grafting portion (12) are inserted and are located in the grafting groove, still be provided with on connecting portion (11) and support tight piece, support tight piece and be used for supporting tightly connecting portion (11).

6. The spin coater of claim 5, wherein: the abutting piece comprises a plurality of bolts, a plurality of threaded holes are formed in the side wall of the connecting portion (11) in a penetrating mode, the bolts are in threaded connection with the threaded holes, and the tail portions of the bolts are used for being abutted to an output shaft of the motor (3).

7. The spin coater of claim 6, wherein: the number of the bolts and the threaded holes is three, and the threaded holes are distributed around the axis.

8. The spin coater of claim 5, wherein: the inserting groove is specifically a square groove, and the inserting part (12) is abutted with the groove wall of the inserting groove.