CN214718732U - High-efficient multi-functional semiconductor wafer belt cleaning device - Google Patents
High-efficient multi-functional semiconductor wafer belt cleaning device Download PDFInfo
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- CN214718732U CN214718732U CN202022974563.4U CN202022974563U CN214718732U CN 214718732 U CN214718732 U CN 214718732U CN 202022974563 U CN202022974563 U CN 202022974563U CN 214718732 U CN214718732 U CN 214718732U
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Abstract
The utility model discloses a high-efficient multi-functional semiconductor wafer belt cleaning device, include: a filter box; the fixed structure is fixedly arranged in the filter box and is positioned at the central part; auxiliary structure, its fixed wall of settling on the rose box, and be located central point department, the utility model relates to a semiconductor wafer washs technical field, through launching first motor, drive the tray at the fixed disk internal rotation, when the tray rotates, can drive the wafer on the tray and be circular motion, through opening the valve, make water spray on the wafer, play the effect that reduces dirt adhesive force, this moment because the wafer is circular motion, dirt on the wafer can be because centrifugal force, throw away along with water together, flow into in the rose box, filtration through the filter, can filter the dirt of aquatic, launch the second motor, it rotates to drive the fan, because the rotation of tray spin-dries, and the air-dry of fan, make the wafer fast drying, alright direct use after taking out, belt cleaning device's cleaning efficiency has been promoted greatly.
Description
Technical Field
The utility model relates to a semiconductor wafer washs technical field, specifically is a high-efficient multi-functional semiconductor wafer belt cleaning device.
Background
A highly clean environment is needed during semiconductor wafer processing to reduce the impact of unwanted particles on the process. However, with the increasing precision, the line width is continuously reduced and the requirement for cleanliness is continuously increased. Not only a high-cleanliness purification environment is required, but also the surface of the wafer is required to be cleaned in many cases so as to meet the requirement on the cleanliness of the surface of the processed wafer;
the existing cleaning device is only provided with a cleaning function due to single function, is not high in practicability, mostly uses cleaning liquid, is easy to corrode a wafer, is not convenient to take out after cleaning, and needs to be dried after being taken out, so that the cleaning time is wasted, and the cleaning efficiency is low.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to provide a high-efficient multi-functional semiconductor wafer belt cleaning device to solve the problem that the cleaning efficiency is low.
In order to achieve the above object, the utility model provides a following technical scheme: an efficient multifunctional semiconductor wafer cleaning device comprising:
a filter box;
the fixed structure is fixedly arranged in the filter box and is positioned at the central part;
the auxiliary structure is fixedly arranged on the upper wall surface of the filter box and is positioned at the central part;
further comprising: the water outlet is fixedly embedded in the front wall surface of the filter box and is positioned on the central line of the bottom end;
the fixing structure includes: the device comprises a filter plate, a base, a first motor, a fixed disc, a tray and a plurality of clamping components with the same structure;
the filter is fixed to be inlayed and is adorned in the rose box, and is located central point department, the base is fixed to be settled on the filter wall, and is located central point department, first motor is fixed to be inlayed and is adorned in the base, and its drive end installs first transmission rod, the fixed disk is the circular slab, and its upper wall central point department has seted up the rotation groove, connecting rod one end is installed apart from equidistant circumference in the fixed disk lateral wall, and the connecting rod other end fixed settling respectively on rose box inside wall top, the tray activity is inlayed and is adorned in the rotation groove, and its lower wall central point department fixedly connected with first transmission rod on the motor, and is a plurality of clamping component fixed settling is on the tray wall, and is located four corners position department mutual symmetry.
Preferably, the auxiliary structure includes: the water tank is connected with the water outlet pipe through the water inlet pipe;
the protection box is of a square box structure without a lower bottom, a left through groove and a right through groove are formed in the center line of the bottom end of the right wall surface of the protection box, a T-shaped groove is formed in the center line of the right end of the rear wall surface of the protection box, the protection box is fixedly arranged on the upper wall surface of the filter box and is positioned at the center part, one end of the sealing plate is arranged at the left end of the front wall surface of the protection box through a pin shaft, a moving groove is formed in the center part of the right wall surface of the sealing plate, one end of the T-shaped block is arranged in the moving groove through the pin shaft, the other end of the T-shaped block is matched with the T-shaped groove in the protection box, the water tank is fixedly arranged at the left side of the center line of the upper wall surface of the protection box, a water inlet is formed in the left side of the center line of the upper wall surface of the protection box, one end of the water outlet pipe is fixedly embedded in the front wall surface of the water tank and is positioned at the right side of the center line of the bottom end, a spray nozzle is fixedly installed at the other end of the water outlet pipe, and the valve is fixedly embedded in the water outlet pipe, and the upper wall surface of the fan is fixedly provided with a rotating rod, the fixed box is fixedly arranged on the right side of the central line of the upper wall surface of the protection box, the left wall surface of the fixed box is tightly attached to the left wall surface of the water tank, the second motor is fixedly embedded in the fixed box, the driving end of the second motor is fixedly provided with a second transmission rod, and the fan is fixedly arranged at the other end of the second transmission rod on the second motor and is positioned at the central part.
Preferably, the clamping assembly comprises; the device comprises a supporting plate, a pair of pressing blocks with the same structure, a threaded rod and a rotary end cover;
the supporting plate is fixedly arranged at the four corners of the upper wall surface of the tray, the rear end of the upper wall surface of the supporting plate is provided with a limiting groove, one end of each pressing block is movably embedded in the limiting groove in the supporting plate, the top ends of the front wall surface and the rear wall surface of each pressing block are provided with clamping grooves with the same structure, one end of the threaded rod movably penetrates through the front wall surface of the supporting plate, the other end of the threaded rod movably penetrates through the front wall surface of the pressing block and is connected with the pressing block in a rotating mode, the rotating end cover is fixedly arranged at one end of the threaded rod, and the rear wall surface of the rotating end cover is tightly attached to the front wall surface of the supporting plate.
Preferably, the clamping groove on the pressing block is triangular.
Preferably, the threads at the front end and the rear end of the central line of the threaded rod are reversely arranged.
Preferably, the lower wall in the filter box is arranged obliquely.
Compared with the prior art, the beneficial effects of the utility model are that: this high-efficient multi-functional semiconductor wafer belt cleaning device, through starting first motor, drive the tray at the fixed disk internal rotation, when the tray rotates, can drive the wafer on the tray and be circular motion, through opening the valve, make water spout on the wafer, play the effect of reducing dirt adhesive force, at this moment because the wafer is circular motion, dirt on the wafer can be because centrifugal force, throw away along with water together, flow in the rose box, through the filtration of filter, can filter the dirt of aquatic, start the second motor, drive the fan and rotate, because the rotation of tray is spin-dried, and the air-dry of fan, make the wafer quick drying, alright direct use after taking out, belt cleaning device's cleaning efficiency has been promoted greatly.
Drawings
Fig. 1 is a schematic view of the installation structure of the present invention;
FIG. 2 is a schematic view of the assembly structure of the present invention;
fig. 3 is a schematic view of the split structure of the present invention;
fig. 4 is a schematic view of the split structure of the present invention;
fig. 5 is an enlarged view of the structure at a of the present invention.
In the figure: 1. the filter box comprises a filter box body, 2, a fixing structure, 21, a filter plate, 22, a base, 23, a first motor, 24, a fixing disc, 25, a tray, 26, a clamping assembly, 261, a supporting plate, 262, a pressing block, 263, a threaded rod, 264, a rotating end cover, 3, an auxiliary structure, 31, a protection box, 32, a sealing plate, 33, a T-shaped block, 34, a water tank, 35, a water outlet pipe, 36, a valve, 37, a fixing box, 38, a second motor, 39, a fan, 4 and a water outlet.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.
Referring to fig. 1-5, the present invention provides a technical solution: an efficient multifunctional semiconductor wafer cleaning device comprising: a filter box 1; a fixed structure 2 fixedly disposed in the filter tank 1 and located at a central portion; the auxiliary structure 3 is fixedly arranged on the upper wall surface of the filter box 1 and is positioned at the central part; further comprising: the water outlet 4 is of a square box body structure without an upper wall, and the water outlet 4 is fixedly embedded in the front wall surface of the filter box 1 and is positioned on the central line of the bottom end; the fixed structure 2 comprises: the filter plate 21, the base 22, the first motor 23, the fixed disc 24, the tray 25 and a plurality of clamping assemblies 26 with the same structure; the filter 21 is fixedly embedded in the filter box 1 and is located at the center part, the base 22 is fixedly arranged on the upper wall surface of the filter 21 and is located at the center part, the first motor 23 is fixedly embedded in the base 22, the first transmission rod is installed at the driving end of the first motor, the fixed disk 24 is a circular plate, a rotating groove is formed in the center part of the upper wall surface of the fixed disk, one end of a connecting rod is installed on the side wall surface of the fixed disk 24 at equal circumferential distance, the other end of the connecting rod is fixedly arranged at the top end of the inner side wall of the filter box 1 respectively, the tray 25 is movably embedded in the rotating groove, the center part of the lower wall surface of the tray is fixedly connected with the first transmission rod on the first motor 23, the clamping components 26 are fixedly arranged on the upper wall surface of the tray 25 and are located at four corners and are symmetrical to each other, the wafers can be fixed through the fixing structures 2, and the wafers can be driven to do circular motion.
The following electric devices have the following types and functions:
a motor: it is prior art, as long as the motor that is applicable to this scheme all can use.
Preferably, the auxiliary structure 3 further comprises: the protection box 31, the sealing plate 32, the T-shaped block 33, the water tank 34, the water outlet pipe 35, the valve 36, the fixed box 37, the second motor 38 and the fan 39;
the protection box 31 is a square box structure without a lower bottom, a groove which is through from left to right is arranged on the central line of the bottom end of the right wall surface of the protection box 31, a T-shaped groove is arranged on the central line of the right end of the rear wall surface of the protection box 31, the protection box 31 is fixedly arranged on the upper wall surface of the filter box 1 and is positioned at the central part, one end of a sealing plate 32 is arranged at the left end of the front wall surface of the protection box 31 through a pin shaft, a moving groove is arranged at the central part of the right wall surface of the protection box 31, one end of a T-shaped block 33 is arranged in the moving groove through a pin shaft, the other end of the T-shaped block is matched with the T-shaped groove on the protection box 31, the water tank 34 is fixedly arranged at the left side of the central line of the upper wall surface of the protection box 31, a water inlet hole is arranged at the left side of the central line of the upper wall surface, one end of a water outlet pipe 35 is fixedly embedded in the front wall surface of the water tank 34 and is positioned at the right side of the central line of the bottom, a nozzle is fixedly arranged at the other end of the water outlet pipe 35, a valve 36 is fixedly embedded in the water outlet pipe 35, and the upper wall surface is fixedly provided with a rotating rod, the fixed box 37 is fixedly arranged on the right side of the central line of the upper wall surface of the protection box 31, the left wall surface of the fixed box is tightly attached to the left wall surface of the water tank 34, the second motor 38 is fixedly embedded in the fixed box 37, the driving end of the second motor is fixedly provided with a second transmission rod, and the fan 39 is fixedly arranged at the other end of the second transmission rod on the second motor 38 and is positioned at the central part.
Preferably, further, the clamping assembly 26, includes; a support plate 261, a pair of press blocks 262 with the same structure, a threaded rod 263 and a rotary end cover 264;
the supporting plate 261 is fixedly arranged at the four corners of the upper wall surface of the tray 25, the rear end of the upper wall surface of the supporting plate is provided with a limiting groove, one end of each pressing block 262 is movably embedded in the limiting groove of the supporting plate 261, the top ends of the front wall surface and the rear wall surface of each pressing block are provided with clamping grooves with the same structure, one end of the threaded rod 263 movably penetrates through the front wall surface of the supporting plate 261, the other end of the threaded rod 263 movably penetrates through the front wall surface of the pressing block 262 and is connected with the pressing block 262 in a screwing mode, the rotating end cover 264 is fixedly arranged at one end of the threaded rod 263, and the rear wall surface of the rotating end cover is tightly attached to the front wall surface of the supporting plate 261.
Preferably, the clamping grooves of the pressing block 262 are triangular to prevent the wafer from sliding up and down after being clamped.
Preferably, the threads of the front and rear ends of the center line of the threaded rod 263 are arranged in opposite directions, so that the pair of pressing pieces 262 can move in opposite directions when the threaded rod 263 rotates.
As a preferred scheme, furthermore, the lower wall in the filter box 1 is arranged obliquely, so that filtered water can conveniently flow into the water outlet 4.
All the electrical components in the present application are connected with the power supply adapted to the electrical components through the wires, and an appropriate controller should be selected according to actual conditions to meet the control requirements, and specific connection and control sequences should be obtained.
Example (b): as can be seen from fig. 1 to 5 of the specification, firstly, the clamping assembly 26 is fixed by the tray 25 in the fixed structure 2, the wafer is placed between the pair of pressing blocks 262, the rotating end cap 264 is rotated to drive the threaded rod 263 to rotate, so that the pair of pressing blocks 262 reversely slide in the limiting grooves on the supporting plate 261 to clamp the wafer, the sealing plate 32 in the auxiliary structure 3 is covered, the T-shaped block 33 is moved to the T-shaped groove on the protecting box 31 to lock the sealing plate 32, the tray 25 is driven to rotate in the fixed disk 24 by starting the first motor 23, when the tray 25 rotates, the wafer on the tray 25 is driven to make a circular motion, the water in the water tank 34 flows into the water outlet pipe 35 by opening the valve 36 and is sprayed onto the wafer through the spray head, so as to reduce the adhesion capacity of dirt, at this time, because the wafer makes a circular motion, dirt on the wafer can be thrown out along with water due to centrifugal force and flows into the filter box 1, water can be prevented from flowing into the first motor 23 through protection of the base 22, the dirt in the water can be filtered through filtering of the filter plate 21, the filtered water can flow out through the water outlet 4, the water can be recycled due to filtering, the second motor 38 in the fixed box 37 is started after cleaning, the fan 39 is driven to rotate, the tray 25 rotates to spin, and the fan 39 is dried in the air, so that the wafer is dried quickly.
In the description of the present invention, it is to be understood that the terms "coaxial", "bottom", "one end", "top", "middle", "other end", "upper", "one side", "top", "inner", "front", "center", "both ends", and the like, indicate orientations or positional relationships based on the orientations or positional relationships illustrated in the drawings, and are only for convenience of description and simplicity of description, and do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation; also, unless expressly stated or limited otherwise, the terms "fixedly attached," "removably attached," "movably attached through," or "movably attached" are to be construed broadly and may, for example, be fixedly attached, removably attached, or integrally formed; can be mechanically or electrically connected; they may be directly connected or indirectly connected through an intermediate medium, and may be connected through the inside of two elements or in an interaction relationship between two elements, unless otherwise specifically defined, and the specific meaning of the above terms in the present invention will be understood by those skilled in the art according to specific situations.
Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.
Claims (6)
1. An efficient multifunctional semiconductor wafer cleaning apparatus, comprising:
a filter box (1);
a fixed structure (2) which is fixedly arranged in the filter box (1) and is positioned at the central part;
the auxiliary structure (3) is fixedly arranged on the upper wall surface of the filter box (1) and is positioned at the central part;
further comprising: the water outlet (4) is of a square box body structure without an upper wall, and the water outlet (4) is fixedly embedded in the front wall surface of the filter box (1) and is positioned on the central line of the bottom end;
the fixed structure (2) comprises: the device comprises a filter plate (21), a base (22), a first motor (23), a fixed disc (24), a tray (25) and a plurality of clamping components (26) with the same structure;
the filter plate (21) is fixedly embedded in the filter box (1) and is positioned at the central part, the base (22) is fixedly arranged on the upper wall surface of the filter plate (21), and is positioned at the central part, the first motor (23) is fixedly embedded in the base (22), and the driving end is provided with a first transmission rod, the fixed disc (24) is a circular plate, the center part of the upper wall surface of the fixed disc is provided with a rotating groove, the side wall surface of the fixed disc (24) is provided with one end of a connecting rod at equal circumferential distance, the other end of the connecting rod is respectively and fixedly arranged at the top end of the inner side wall of the filter box (1), the tray (25) is movably embedded in the rotating groove, and the center of the lower wall surface of the tray is fixedly connected with a first transmission rod on a first motor (23), and the clamping components (26) are respectively and fixedly arranged on the upper wall surface of the tray (25) and are respectively positioned at the four corners to be symmetrical with each other.
2. A high efficiency multifunctional semiconductor wafer cleaning apparatus as defined in claim 1, wherein: the auxiliary structure (3) comprising: the device comprises a protection box (31), a sealing plate (32), a T-shaped block (33), a water tank (34), a water outlet pipe (35), a valve (36), a fixed box (37), a second motor (38) and a fan (39);
the protection box (31) is of a square box structure without a lower bottom, a left-right through groove is formed in the center line of the bottom end of the right wall surface of the protection box (31), a T-shaped groove is formed in the center line of the right end of the rear wall surface of the protection box (31), the protection box (31) is fixedly arranged on the upper wall surface of the filter box (1) and is positioned at the center part, one end of the sealing plate (32) is arranged at the left end of the front wall surface of the protection box (31) through a pin shaft, a moving groove is formed in the center part of the right wall surface of the protection box (31), one end of the T-shaped block (33) is arranged in the moving groove through a pin shaft, the other end of the T-shaped block is matched with the T-shaped groove in the protection box (31), the water tank (34) is fixedly arranged on the left side of the center line of the upper wall surface of the protection box (31), a water inlet hole is formed in the left side of the center line of the upper wall surface of the front wall surface of the protection box, one end of the water outlet pipe (35) is fixedly embedded in the water tank (34), the water tank is characterized in that the water tank is located on the right side of the center line of the bottom end, a spray head is fixedly mounted at the other end of the water tank, the valve (36) is fixedly embedded in the water outlet pipe (35), a rotating rod is fixedly mounted on the upper wall surface of the water tank, the fixing box (37) is fixedly mounted on the right side of the center line of the upper wall surface of the protection box (31), the left wall surface of the fixing box is tightly attached to the left wall surface of the water tank (34), the second motor (38) is fixedly embedded in the fixing box (37), a second transmission rod is fixedly mounted at the driving end of the second motor, and the fan (39) is fixedly mounted at the other end of the second transmission rod on the second motor (38) and located at the center.
3. A high efficiency multifunctional semiconductor wafer cleaning apparatus as defined in claim 2, wherein: the clamping assembly (26) comprising; the device comprises a supporting plate (261), a pair of pressing blocks (262) with the same structure, a threaded rod (263) and a rotary end cover (264);
the supporting plate (261) is fixedly arranged at the four corners of the upper wall surface of the tray (25), a limiting groove is formed in the rear end of the upper wall surface of the supporting plate, one end of each pressing block (262) is movably embedded in the limiting groove of the supporting plate (261), clamping grooves with the same structure are formed in the top ends of the front wall surface and the rear wall surface of each pressing block, one end of each threaded rod (263) movably penetrates through the front wall surface of the supporting plate (261), the other end of each threaded rod movably penetrates through the front wall surface of the pressing block (262) and is connected with the pressing block (262) in a rotating mode, the rotating end cover (264) is fixedly arranged at one end of the threaded rod (263), and the rear wall surface of each rotating end cover is tightly attached to the front wall surface of the supporting plate (261).
4. A high efficiency multifunctional semiconductor wafer cleaning apparatus as defined in claim 3, wherein: the clamping groove on the pressing block (262) is triangular.
5. A high efficiency multifunctional semiconductor wafer cleaning apparatus as defined in claim 4, wherein: the front and rear threads of the central line of the threaded rod (263) are arranged in opposite directions.
6. A high efficiency multifunctional semiconductor wafer cleaning apparatus as defined in claim 1, wherein: the inner lower wall of the filter box (1) is obliquely arranged.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202022974563.4U CN214718732U (en) | 2020-12-12 | 2020-12-12 | High-efficient multi-functional semiconductor wafer belt cleaning device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202022974563.4U CN214718732U (en) | 2020-12-12 | 2020-12-12 | High-efficient multi-functional semiconductor wafer belt cleaning device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN214718732U true CN214718732U (en) | 2021-11-16 |
Family
ID=78631770
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202022974563.4U Active CN214718732U (en) | 2020-12-12 | 2020-12-12 | High-efficient multi-functional semiconductor wafer belt cleaning device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN214718732U (en) |
-
2020
- 2020-12-12 CN CN202022974563.4U patent/CN214718732U/en active Active
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