CN218945503U

CN218945503U - Spin-coating controllable low-temperature type spin coater

Info

Publication number: CN218945503U
Application number: CN202222676033.0U
Authority: CN
Inventors: 孙杭州; 孙斌; 尚博; 梁舰; 李晓刚
Original assignee: Jiangyin Jize Wanjia Technology Co ltd
Current assignee: Jiangyin Jize Wanjia Technology Co ltd
Priority date: 2022-10-11
Filing date: 2022-10-11
Publication date: 2023-05-02
Anticipated expiration: 2032-10-11

Abstract

The utility model relates to the technical field of spin-coating controllable low-temperature spin-coating machines, and particularly discloses a spin-coating controllable low-temperature spin-coating machine which comprises a box body protection mechanism, a cooling mechanism and a main body mechanism, wherein the box body protection mechanism comprises a lower box body assembly, a lower upper box body assembly and a box cover assembly, the main body mechanism comprises a spin-coating main body assembly and a magnetic stirring assembly, and the cooling mechanism comprises a cooling assembly, a left-right blowing assembly and a front-back blowing fan; according to the utility model, the temperature of the solution is accurately reduced through the cooperative operation of the cooling assembly, the front and back blowing fans and the left and right blowing assemblies, the fluid property of the spin-coating solution is changed, and the film forming effect is improved; the temperature of the spin coating atmosphere is accurately reduced through the cooperative operation of the cooling assembly, the front and back blowing fans and the left and right blowing assemblies, the rates of solution crystallization and solvent volatilization are controlled, and the film forming quality is improved; the spin-coating cavity and the jig are integrally processed, and the excellent heat conductivity and heat capacity ensure low temperature disturbance and repeatability of experimental results.

Description

Spin-coating controllable low-temperature type spin coater

Technical Field

The utility model relates to the technical field of spin coating machines, in particular to a spin coating controllable low-temperature spin coating machine.

Background

Perovskite and organic semiconductor thin films have wide applications in the fields of light emitting panels, photovoltaics, semiconductor transistors, and the like. These films are mainly achieved by processes such as solution spin coating, knife coating, screen printing, slot coating, and the like. Spin coating is the most common process means of applying a uniform film to a flat substrate. One typical process involves applying an amount of liquid to a location in the middle of the substrate and then rotating the substrate at a high speed. The centrifugal force spreads the liquid to the monolith substrate to the edges and eventually throws away excess liquid, leaving a film on the surface, the final film thickness and other properties will depend on the properties of the liquid (viscosity, drying rate, percent solids, surface tension, etc.), and the spin process parameters (final speed, acceleration, atmosphere, etc.), which together determine the properties of the film, typically achieved by spin-coating machines in the prior art.

The spin coater in the prior art meets the general use requirements, but has the following defects in the actual use process:

1. the spin coater in the prior art has poor effect on temperature control of spin coating solution, and can not change the fluid property of the solution by accurately reducing the temperature of the solution, thereby improving the film forming effect;

2. the spin coater in the prior art has poor effect on temperature control of spin coating environment, and can not accurately reduce the temperature of spin coating atmosphere, control the rate of solution crystallization and solvent volatilization and improve the film forming quality;

3. spin coating cavity and jig of spin coating machine in the prior art are generally split type processing, and heat conduction is not easy to control together, so that the overall coordination is poor, and the low disturbance of temperature and the repeatability of experimental results can not be ensured when the spin coating cavity and jig are used for experiments.

Disclosure of Invention

The utility model aims to provide a spin-coating controllable low-temperature type spin coater, which is used for solving the problems in the background technology.

In order to achieve the above purpose, the present utility model provides the following technical solutions: the utility model provides a spin coating controllable low temperature formula spin coater, includes box protection machanism, cooling body and main part mechanism, box protection machanism includes lower box subassembly, the last box subassembly that box subassembly upper end was established down and the case lid subassembly that last box subassembly lower extreme was established, main part mechanism includes spin coating main part subassembly and spin coating main part subassembly side magnetic stirring subassembly that establishes, cooling body includes spin coating main part subassembly left and right sides cooling subassembly, the left and right sides of going up box subassembly are established and the front and back fan of blowing that both ends were established around last box subassembly.

Preferably, the upper box assembly comprises an upper box, a feeding hole is formed in the middle of the upper end face of the upper box, a magnetic stirring bottle placing opening is formed in the side face of the feeding hole, cooling air outlets are symmetrically formed in the front end and the rear end of the upper box, and cooling air inlets are symmetrically formed in the left end and the right end of the upper box;

the box cover assembly comprises an upper cover plate, and a hinge fixedly connected with one side of an upper port of the feeding hole is fixedly arranged at the lower end of the upper cover plate.

Preferably, the lower box assembly comprises an upper supporting plate and a lower supporting plate which are arranged at the lower end of the upper box, the upper box is fixedly arranged at the upper end of the upper supporting plate, air holes are formed in the middle of the lower supporting plate, a left supporting plate and a right supporting plate are respectively and fixedly arranged at the left side and the right side of the lower supporting plate of the upper supporting plate, an emergency braking button is fixedly arranged on the side face of the right supporting plate, a rear supporting plate is fixedly arranged at the rear ends of the upper supporting plate and the lower supporting plate, and an external slot is formed in the wall body of the rear supporting plate.

Preferably, the front ends of the upper supporting plate and the lower supporting plate are fixedly provided with a front supporting plate, a touch panel mounting groove is formed in the middle of the front supporting plate, and a touch panel is fixedly mounted in the touch panel mounting groove.

Preferably, a guide sleeve fixing hole is formed in the middle of the upper end face of the upper supporting plate, and a condensation water collecting groove plate is fixedly arranged at the upper end of the upper supporting plate and at the upper port of the guide sleeve fixing hole.

Preferably, the spin-coating main body assembly comprises a main body seat fixedly arranged at the upper end of the condensation water collecting tank plate, a low-temperature working cavity corresponding to the feeding hole is formed in the middle of the upper end of the main body seat, an upper positioning lantern ring which is inserted and matched with the feeding hole is arranged at the upper port of the low-temperature working cavity, and a turntable mounting hole is formed in the lower end of the low-temperature working cavity towards the bottom of the main body seat;

refrigerating positioning grooves with groove body structures are symmetrically formed in the left side and the right side of the main body seat;

the side of low temperature working chamber and set up the magnetic stirring groove corresponding with magnetic stirring bottle placement port position in the upper end of main part seat, the lower extreme in magnetic stirring groove and set up the magnetic stirring drive groove in the bottom of main part seat.

Preferably, a guide sleeve is fixedly arranged in a guide sleeve fixing hole in the middle of the upper supporting plate at the lower end of the main body seat, the upper end of the guide sleeve is matched with the rotary disc mounting hole in a penetrating manner, a middle mounting groove is formed in the middle of the guide sleeve, and a rotary disc is sleeved at the upper port of the middle mounting groove;

the motor mounting seat is fixedly mounted at the upper port of the air hole, the spin motor is fixedly mounted on the motor mounting seat, a main shaft of the spin motor penetrates through the middle mounting groove and is fixedly connected with the lower end of the rotary disc, and motor drivers and power supplies are fixedly mounted on the left side and the right side of the spin motor and on the upper end face of the lower supporting plate.

Preferably, the cooling assembly comprises a semiconductor refrigerating sheet, a positioning mounting plate is fixedly arranged on the inner side surface of the semiconductor refrigerating sheet, the positioning mounting plate is embedded with a refrigerating positioning groove, the left and right air blowing assembly comprises an air inlet machine mounting plate fixedly arranged in a cooling air inlet, a fan II is fixedly arranged on the wall body of the air inlet machine mounting plate, and front and rear air blowing fans are fixedly arranged in cooling air outlets at the front end and the rear end of the upper box body.

Preferably, the magnetic stirring assembly comprises a magnetic stirring base fixedly arranged at the lower end of the magnetic stirring driving groove, a magnetic stirrer is fixedly arranged in the middle of the magnetic stirring base, a temperature sensor is fixedly inserted on the side face of the magnetic stirrer and the side face of the magnetic stirring driving groove body, and a magnetic stirring bottle corresponding to the position of the magnetic stirrer is arranged in the groove body of the magnetic stirring groove.

Compared with the prior art, the utility model has the beneficial effects that: the utility model has reasonable structure and strong functionality and has the following advantages:

1. according to the utility model, the temperature of the solution is accurately reduced through the cooperative operation of the cooling assembly, the front and back blowing fans and the left and right blowing assemblies, the fluid property of the spin-coating solution is changed, and the film forming effect is improved;

2. according to the utility model, the temperature of the spin coating atmosphere is accurately reduced through the cooperative operation of the cooling assembly, the front and back blowing fans and the left and right blowing assemblies, the rates of solution crystallization and solvent volatilization are controlled, and the film forming quality is improved;

3. in the utility model, the spin-coating cavity and the jig are integrally processed, and the excellent heat conductivity and heat capacity ensure low temperature disturbance and repeatability of experimental results.

Drawings

FIG. 1 is an exploded view of the upper right axial side of the overall structure of the present utility model;

FIG. 2 is a left lower shaft side exploded view of the overall structure of the present utility model;

FIG. 3 is an isometric view of the overall structure of the present utility model;

FIG. 4 is a front view of the overall structure of the present utility model;

FIG. 5 is an isometric view of the cross-sectional structure of FIG. 4 at B-B;

FIG. 6 is an isometric view of the cross-sectional structure of FIG. 4 at E-E;

FIG. 7 is a left side view of the overall structure of the present utility model;

FIG. 8 is an isometric view of the cross-sectional structure of FIG. 7 at F-F;

fig. 9 is an isometric view of the cross-sectional structure of fig. 7 at I-I.

In the figure: 1. an upper housing assembly; 2. a cover assembly; 3. a lower housing assembly; 4. a cooling assembly; 5. a front and rear blowing fan; 6. a left and right air blowing component; 8. a magnetic stirring assembly; 9. a spin main body assembly; 10. condensing the water collecting tank plate; 101. an upper case; 102. a feeding hole; 103. a magnetic stirring bottle placing opening; 104. cooling the air outlet; 105. a cooling air inlet; 201. an upper cover plate; 202. a hinge; 301. an upper supporting plate; 302. a lower supporting plate; 303. ventilation holes; 304. a left supporting plate; 305. a right supporting plate; 306. an emergency brake button; 307. a front support plate; 308. a touch panel mounting groove; 309. a touch panel; 310. a rear support plate; 311. an external slot; 401. a semiconductor refrigeration sheet; 402. positioning the mounting plate; 601. an air inlet machine mounting plate; 602. a fan II; 801. a magnetic stirring base; 802. a magnetic stirrer; 803. a temperature sensor; 804. a magnetic stirring bottle; 901. a main body seat; 902. a low temperature working chamber; 903. a turntable mounting hole; 904. a magnetic stirring tank; 905. a magnetic stirring driving groove; 906. a refrigeration positioning groove; 907. an upper positioning collar; 908. a spin motor for spin coating; 909. a motor driver; 910. a power supply; 911. a guide sleeve; 912. a middle mounting groove; 913. a turntable.

Detailed Description

The following description of the embodiments of the present utility model will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present utility model, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.

Referring to fig. 1 to 9, the present utility model provides a technical solution: the utility model provides a spin coating controllable low temperature formula spin coater, including box protection machanism, cooling body and main part mechanism, box protection machanism includes box subassembly 3 down, box subassembly 1 and box subassembly 2 that box subassembly 1 lower extreme was established down in last box subassembly 3 upper end were established, main part mechanism includes spin coating main part subassembly 9 and spin coating main part subassembly 9 magnetic stirring subassembly 8 that the side was established, cooling body includes spin coating main part subassembly 9 left and right sides cooling subassembly 4, the front and back air blast fan 5 that upper box subassembly 1 left and right sides was established and the front and back air blast fan 6 that upper box subassembly 1 front and back both ends were established, wherein, upper box subassembly 1 relatively cooling subassembly 4, magnetic stirring subassembly 8 and spin coating main part subassembly 9 play a guard action, upper box subassembly 1 relatively front and back air blast fan 5 and left and right air blast fan 6 play a supporting action, magnetic stirring subassembly 8 play a spin coating solution's stirring effect, spin coating and supporting action are played to spin coating main part subassembly 9, cooling subassembly 4, front and right and back air blast fan 6 play a role in adjusting the temperature of spin coating main part 8 and spin coating main part 6.

Further, the upper box assembly 1 comprises an upper box 101, a feeding hole 102 is formed in the middle of the upper end face of the upper box 101, a magnetic stirring bottle placing opening 103 is formed in the side face of the feeding hole 102, cooling air outlets 104 are symmetrically formed in the front end and the rear end of the upper box 101, and cooling air inlets 105 are symmetrically formed in the left end and the right end of the upper box 101;

the cover assembly 2 comprises an upper cover plate 201, and a hinge 202 fixedly connected with one side of the upper port of the feeding hole 102 is fixedly arranged at the lower end of the upper cover plate 201, wherein the cover assembly 2 plays a role of top sealing relative to the spin main body assembly 9 in the middle of the upper box body 101.

Further, the lower case assembly 3 includes an upper supporting plate 301 and a lower supporting plate 302 disposed at the lower end of the upper case 101, the upper case 101 is fixedly mounted at the upper end of the upper supporting plate 301, the middle of the lower supporting plate 302 is provided with an air hole 303, the left and right sides of the lower supporting plate 302 of the upper supporting plate 301 are respectively fixedly mounted with a left supporting plate 304 and a right supporting plate 305, the side surfaces of the right supporting plate 305 are fixedly mounted with an emergency braking button 306, the rear ends of the upper supporting plate 301 and the lower supporting plate 302 are fixedly mounted with a rear supporting plate 310, and an external slot 311 is formed in the wall body of the rear supporting plate 310, wherein the upper supporting plate 301 plays a supporting role relative to the upper end of the spin main assembly 9, the lower supporting plate 302 plays a bottom supporting role relative to the complete machine, the left supporting plate 304 and the right supporting plate 305 play a supporting and protecting role relative to the left and right sides of the lower supporting plate 302, the rear supporting plate 310 plays a supporting role at the rear end of the lower case assembly 3, and the external slot 311 plays a role in conveniently interfacing with an external electrical appliance.

Further, the front supporting plate 307 is fixedly arranged at the front ends of the upper supporting plate 301 and the lower supporting plate 302, the touch panel mounting groove 308 is formed in the middle of the front supporting plate 307, the touch panel 309 is fixedly arranged in the touch panel mounting groove 308, the touch panel 309 is electrically connected with the semiconductor refrigerating plate 401, the front and rear blowing fans 5, the fan II 602, the magnetic stirrer 802, the temperature sensor 803, the magnetic stirring bottle 804 and the motor driver 909, the temperature of the low-temperature working cavity 902 and the magnetic stirring groove 904 in the whole machine is monitored in real time through the magnetic stirring bottle 804, the monitoring result is uploaded to the touch panel 309, the cooling intensity of the semiconductor refrigerating plate 401, the rotating speed of the front and rear blowing fans 5, the rotating speed of the fan II 602 and the stirring speed of the magnetic stirrer 802 are regulated and the rotating speed and the working time of the glue homogenizing rotating motor 908 are controlled through controlling the motor driver, and the stirring state and the temperature state of the solution in the magnetic stirring bottle 804 are controlled, and the temperature of the magnetic stirring bottle 904 are regulated and the temperature of the magnetic stirring bottle 904 is the temperature of the magnetic stirring bottle 904.

Further, a guide sleeve fixing hole is formed in the middle of the upper end face of the upper supporting plate 301, the upper end of the upper supporting plate 301 is fixedly provided with the condensation water collecting tank plate 10 at the upper port of the guide sleeve fixing hole, and the upper supporting plate 301 plays a role in fixing and supporting the condensation water collecting tank plate 10.

Further, the spin-coating main body assembly 9 comprises a main body seat 901 fixedly installed at the upper end of the condensation water collection tank plate 10, a low-temperature working cavity 902 corresponding to the position of the feeding hole 102 is formed in the middle of the upper end of the main body seat 901, an upper positioning collar 907 which is inserted and matched with the feeding hole 102 is arranged at the upper port of the low-temperature working cavity 902, a turntable mounting hole 903 is formed in the lower end of the low-temperature working cavity 902 towards the bottom of the main body seat 901, wherein the middle of the condensation water collection tank plate 10 is of a boss structure, the periphery of the condensation water collection tank plate 10 is of a groove structure, and the main function of the spin-coating main body assembly is to collect water drops condensed outside the main body seat 901, and water in the tank body of the condensation water collection tank plate 10 is conveyed to the lower port of the air holes 303 through a pipeline and discharged;

the left side and the right side of the main body seat 901 are symmetrically provided with refrigerating positioning grooves 906 with groove structures, and the main function of the refrigerating positioning grooves 906 is to facilitate the positioning and the installation of the cooling assembly 4 on the left side and the right side of the main body seat 901;

the side of low temperature working chamber 902 and at the upper end of main part seat 901 seted up magnetic stirring groove 904 corresponding with magnetic stirring bottle placement port 103 position, magnetic stirring groove 904's lower extreme and at the bottom of main part seat 901 set up magnetic stirring drive groove 905, here magnetic stirring groove 904 and magnetic stirring drive groove 905 are convenient for the holistic installation of magnetic stirring subassembly 8.

Further, a guiding sleeve 911 is fixedly installed in a guiding sleeve fixing hole in the middle of the upper supporting plate 301 at the lower end of the main body seat 901, the upper end of the guiding sleeve 911 is penetrated and matched with the turntable mounting hole 903, a middle mounting groove 912 is formed in the middle of the guiding sleeve 911, and a turntable 913 is sleeved at the upper port of the middle mounting groove 912;

the motor mounting seat is fixedly mounted at the upper port of the air hole 303, the spin coater 908 is fixedly mounted on the motor mounting seat, a main shaft of the spin coater 908 penetrates through the middle mounting groove 912 and is fixedly connected with the lower end of the turntable 913, a motor driver 909 and a power supply 910 are fixedly mounted on the left side and the right side of the spin coater 908 and on the upper end surface of the lower supporting plate 302, the power supply 910 provides power supply support for the spin coater 908 and the motor driver 909, the motor driver 909 can control the rotation direction, rotation speed and on-off of the power supply 910, and when in operation, the spin coater 908 drives the guide sleeve 911 and the turntable 913 to rotate together, so that spin coating operation is performed on a workpiece adsorbed on the upper end of the turntable 913.

Further, the cooling assembly 4 includes the semiconductor refrigeration piece 401, and fix and be equipped with location mounting panel 402 on the medial surface of semiconductor refrigeration piece 401, location mounting panel 402 is inlayed mutually with refrigeration constant head tank 906, the left and right sides blast assembly 6 includes the air inlet machine mounting panel 601 of fixed mounting in cooling air intake 105, and fixed mounting has fan II 602 on the wall of air inlet machine mounting panel 601, the front and back blast fan 5 of fixed mounting has in the cooling air outlet 104 at the front and back both ends of upper box 101, during operation, start semiconductor refrigeration piece 401 to cool down main part seat 901, blow outside air to semiconductor refrigeration piece 401 through air inlet machine mounting panel 601, circulate other everywhere in the complete machine after cooling air through semiconductor refrigeration piece 401, the air after the cooling is outside the complete machine through front and back blast fan 5 discharge after the complete machine flow process heat exchange, cooling to main part seat 901 and surrounding is realized, and then can regulate and control the temperature in low temperature working chamber 902 and magnetic stirring tank 904 that the temperature that the main part seat 901 is correlated with, realize the regulation and control of temperature in the spin-coating working environment and magnetic stirring bottle 804.

Further, magnetic stirring subassembly 8 includes the magnetic stirring base 801 of fixed mounting in magnetic stirring drive groove 905 lower extreme, and there is magnetic stirrer 802 in the centre fixed mounting of magnetic stirring base 801, the side of magnetic stirrer 802 and at the fixed plug-in of the side of magnetic stirring drive groove 905 cell body, be equipped with the magnetic stirring bottle 804 corresponding with magnetic stirrer 802 position in the cell body of magnetic stirring groove 904, during operation, magnetic stirrer 802 drive magnetic stirring bottle 804 is rotatory, stir the solution in the magnetic stirring bottle 804, monitor the bulk temperature of main part seat 901 in real time through temperature sensor 803, and then indirect monitoring low temperature working chamber 902 and the temperature in the magnetic stirring groove 904.

Working principle: during operation, the magnetic stirrer 802 is started to control the magnetic stirrer 804 to rotate so as to stir the solution in the magnetic stirrer 804, meanwhile, according to temperature data fed back to the touch panel 309 by the temperature sensor 803, the refrigerating intensity of the semiconductor refrigerating sheet 401 is regulated and controlled by the touch panel 309, the rotation speeds of the front and rear blowing fans 5 and the fan II 602 are regulated and controlled, and then the temperatures in the low-temperature working cavity 902 and the magnetic stirring tank 904 can be regulated and controlled, the purposes of regulating the internal spin coating environment temperature of the low-temperature working cavity 902 and the solution temperature in the magnetic stirrer 804 are achieved, after the temperatures of the magnetic stirrer 804 and the low-temperature working cavity 902 are controlled within a specified temperature range, the solution in the magnetic stirrer 804 is taken out to perform the spin coating operation of a conventional spin coater, so that the fluid property of the solution is changed by accurately reducing the temperature of the solution, and the crystallization rate of the solvent is controlled so as to achieve the purposes of improving the film forming quality and the effect.

Although embodiments of the present utility model have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made therein without departing from the principles and spirit of the utility model, the scope of which is defined in the appended claims and their equivalents.

Claims

1. A spin-coating controllable low-temperature type spin coater is characterized in that: including box protection machanism, cooling body and main part mechanism, box protection machanism includes last box subassembly (1) that lower box subassembly (3) upper end was established and last box subassembly (1) lower extreme is established case lid subassembly (2), main part mechanism includes even magnetic stirring subassembly (8) that glue main part subassembly (9) and even glue main part subassembly (9) side were established, cooling body includes cooling module (4) that even glue main part subassembly (9) left and right sides established, the front and back fan (5) that bloies subassembly (6) and last box subassembly (1) front and back both ends were established about going up that box subassembly (1) left and right sides were established.

2. The spin-coating controllable low-temperature spin coater according to claim 1, wherein: the upper box body assembly (1) comprises an upper box body (101), a feeding hole (102) is formed in the middle of the upper end face of the upper box body (101), a magnetic stirring bottle placing opening (103) is formed in the side face of the feeding hole (102), cooling air outlets (104) are symmetrically formed in the front end and the rear end of the upper box body (101), and cooling air inlets (105) are symmetrically formed in the left end and the right end of the upper box body (101);

the box cover assembly (2) comprises an upper cover plate (201), and a hinge (202) fixedly connected with one side of an upper port of the feeding hole (102) is fixedly arranged at the lower end of the upper cover plate (201).

3. The spin-coating controllable low-temperature spin coater according to claim 2, wherein: the lower box body assembly (3) comprises an upper supporting plate (301) and a lower supporting plate (302) which are arranged at the lower end of the upper box body (101), the upper box body (101) is fixedly arranged at the upper end of the upper supporting plate (301), ventilation holes (303) are formed in the middle of the lower supporting plate (302), a left supporting plate (304) and a right supporting plate (305) are respectively and fixedly arranged at the left side and the right side of the lower supporting plate (302) of the upper supporting plate (301), an emergency braking button (306) is fixedly arranged at the side face of the right supporting plate (305), a rear supporting plate (310) is fixedly arranged at the rear end of the upper supporting plate (301) and the rear end of the lower supporting plate (302), and external slots (311) are formed in the wall body of the rear supporting plate (310).

4. A spin-coating controllable low temperature spin coater according to claim 3, wherein: front supporting plates (307) are fixedly arranged at the front ends of the upper supporting plates (301) and the lower supporting plates (302), a touch panel mounting groove (308) is formed in the middle of the front supporting plates (307), and a touch panel (309) is fixedly arranged in the touch panel mounting groove (308).

5. A spin-coating controllable low temperature spin coater according to claim 3, wherein: the middle of the upper end face of the upper supporting plate (301) is provided with a guide sleeve fixing hole, and the upper end of the upper supporting plate (301) is fixedly provided with a condensation water collecting groove plate (10) at the upper port of the guide sleeve fixing hole.

6. The spin-coating controllable low-temperature spin coater according to claim 5, wherein: the spin coater main body assembly (9) comprises a main body seat (901) fixedly arranged at the upper end of the condensation water collecting tank plate (10), a low-temperature working cavity (902) corresponding to the feeding hole (102) is formed in the middle of the upper end of the main body seat (901), an upper positioning lantern ring (907) which is inserted and matched with the feeding hole (102) is arranged at the upper port of the low-temperature working cavity (902), and a turntable mounting hole (903) is formed in the lower end of the low-temperature working cavity (902) towards the bottom of the main body seat (901);

refrigerating positioning grooves (906) with groove body structures are symmetrically formed in the left side and the right side of the main body seat (901);

the side of low temperature working chamber (902) and at the upper end of main part seat (901) seted up magnetic stirring groove (904) corresponding with magnetic stirring bottle placement port (103) position, magnetic stirring driving groove (905) are seted up in the lower extreme of magnetic stirring groove (904) and in the bottom of main part seat (901).

7. The spin-coating controllable low-temperature spin coater according to claim 6, wherein: a guide sleeve (911) is fixedly arranged in a guide sleeve fixing hole in the middle of the upper supporting plate (301) at the lower end of the main body seat (901), the upper end of the guide sleeve (911) is penetrated and matched with the turntable mounting hole (903), a middle mounting groove (912) is formed in the middle of the guide sleeve (911), and a turntable (913) is sleeved and matched at the upper port of the middle mounting groove (912);

the motor mounting seat is fixedly mounted at the upper port of the air hole (303), the spin motor (908) is fixedly mounted on the motor mounting seat, a main shaft of the spin motor (908) penetrates through the middle mounting groove (912) and is fixedly connected with the lower end of the rotary table (913), and motor drivers (909) and a power supply (910) are fixedly mounted on the left side and the right side of the spin motor (908) and on the upper end face of the lower supporting plate (302).

8. The spin-coating controllable low-temperature spin coater according to claim 6, wherein: the cooling assembly (4) comprises a semiconductor refrigerating sheet (401), a positioning mounting plate (402) is fixedly arranged on the inner side surface of the semiconductor refrigerating sheet (401), the positioning mounting plate (402) is embedded with a refrigerating positioning groove (906), the left and right air blowing assembly (6) comprises an air inlet machine mounting plate (601) fixedly arranged in a cooling air inlet (105), a fan II (602) is fixedly arranged on the wall body of the air inlet machine mounting plate (601), and front and rear air blowing fans (5) are fixedly arranged in cooling air outlets (104) at the front and rear ends of the upper box body (101).

9. The spin-coating controllable low-temperature spin coater according to claim 6, wherein: the magnetic stirring assembly (8) comprises a magnetic stirring base (801) fixedly installed at the lower end of a magnetic stirring driving groove (905), a magnetic stirrer (802) is fixedly installed in the middle of the magnetic stirring base (801), a temperature sensor (803) is fixedly inserted into the side face of the magnetic stirring driving groove (905) and the side face of the magnetic stirring driving groove body, and a magnetic stirring bottle (804) corresponding to the magnetic stirrer (802) in position is arranged in the groove body of the magnetic stirring groove (904).