CN219357027U - MEMS acoustic sensing chip test equipment - Google Patents

Abstract

The application belongs to the technical field of chip testing, discloses a MEMS sound sensing chip test equipment, including upper end open-ended detection case, the mounting groove has been seted up to the upper surface of detection case, be provided with the upper cover that is used for sealing the detection case in the mounting groove, the spout has all been seted up on two relative inner walls of detection case, all slides in two spouts are provided with the slider, two install the mounting panel on the lateral wall that the slider is close to each other jointly, two mutually symmetrical sliding grooves have been seted up to the upper surface of mounting panel, the sliding block is provided with in the sliding groove, the upper surface fixed with the detection device who is used for detecting the chip, be provided with two pilot lamps on the lateral wall of detection case, pilot lamp and detection device one-to-one and electric connection, be provided with on the detection case and be used for carrying out spacing subassembly to the slider, be provided with the drive assembly who is used for driving the sliding block on the mounting panel. The application has the effect of improving detection efficiency.

Description

MEMS acoustic sensing chip test equipment

Technical Field

The utility model relates to the technical field of chip testing, in particular to MEMS acoustic sensing chip testing equipment.

Background

The chip generally performs power-on operation in the mass production test process, and for low-power chips, the problem of heat generation can be basically eliminated because of low power consumption, and for high-power chips, the problem of heat generation often affects the accuracy of the test because of high power consumption.

In the chinese patent of utility model, publication No. CN209570667U, a chip is usually powered on during mass production test, and for low power chips, the problem of heat generation may be basically not considered due to low power consumption, and for high power chips, the problem of heat generation often affects the accuracy of the test due to high power consumption.

In order to improve the efficiency of test, the device tests two chips through two PCBA boards arranged on the upper surface of the test board, and when the chip in test is an unqualified product, the audible and visual alarm gives out beeping sounds in the test process. At this time, the worker can only wait until the detection of another chip is completed and then take out the unqualified products, thereby being unfavorable for improving the detection efficiency.

Disclosure of Invention

In order to solve the problems, the utility model provides MEMS acoustic sensor chip testing equipment.

The technical aim of the utility model is realized by the following technical scheme: the utility model provides a MEMS sound sensing chip test equipment, includes upper end open-ended detection case, the mounting groove has been seted up to the upper surface of detection case, be provided with the upper cover that is used for sealing the detection case in the mounting groove, all seted up the spout on two relative inner walls of detection case, all slide in two spouts and be provided with the slider, two install the mounting panel on the lateral wall that the slider is close to each other jointly, two mutually symmetrical sliding grooves have been seted up to the upper surface of mounting panel, the sliding block is provided with the sliding block in the sliding groove, the upper surface fixed of sliding block has the detection device who is used for detecting the chip, be provided with two pilot lamps on the lateral wall of detection case, the pilot lamp is connected with detection device one-to-one and electricity, be provided with on the detection case and be used for carrying out spacing subassembly to the slider, be provided with the drive assembly who is used for driving the sliding block on the mounting panel.

Through adopting above-mentioned technical scheme, when the staff need detect a plurality of chips simultaneously, the staff need make chip and detection device one-to-one and interconnect. Subsequently, the worker needs to slide the mounting plate downwards, and the limiting assembly can automatically fix the mounting plate, so that the detection device is kept stable. At this time, the worker can detect the chip by only starting the detection device. Then, when one of the chips under inspection is a defective product, the detection device detects a signal of the defective chip and causes the corresponding indicator lamp to light up. At this moment, the staff only needs to start the drive assembly, can make the sliding block to be close to the direction motion of detecting the groove, and then makes the chip follow the sliding block and remove and finally remove outside the detection box, and at this moment, the staff only need change the chip to make the sliding block reset, can detect new chip, need not to wait for other chips to detect and accomplish, thereby has improved staff's detection efficiency.

Further, the limiting groove is formed in the inner wall of the sliding groove, the placement groove is formed in the inner wall of the detection box, the limiting assembly comprises a limiting rod arranged in the limiting groove in a sliding mode, a limiting spring with one end fixed on the side wall of the limiting rod away from the sliding block, a fixing rope with one end fixed on the side wall of the limiting rod away from the sliding block, and a sliding rod arranged in the placement groove in a sliding mode, the other end of the limiting spring is fixed on the inner wall of the limiting groove away from the sliding block, and the other end of the fixing rope extends into the placement groove and is fixed with the sliding rod.

Further, a first inclined surface is formed on the edge, intersecting with the side wall, far away from the fixed rope, of the upper surface of the limiting rod.

Through adopting above-mentioned technical scheme, after the staff makes chip and detection device interconnect, the staff needs the downwardly sliding mounting panel, and at this moment, the slider is close to the gag lever post gradually and supports tight first inclined plane to make the gag lever post remove to the spacing inslot completely under the effect of slider, when the slider supports the interior diapire of tight spout, the gag lever post just separates with the slider each other, thereby makes the one end of gag lever post shift out the spacing groove and support tight slider under the effect of spacing spring, and then makes the slider remain stable. Then, when the staff needs to take out the mounting panel, the staff need press the slide bar, can make the fixed rope follow the slide bar and remove to make the gag lever post remove to the spacing inslot completely under the effect of fixed rope, at this moment, the staff only need upwards slide the mounting panel can.

Further, the lateral wall of the detection box is penetrated and provided with a detection groove opposite to the detection device, the inner top wall of the detection groove is provided with a closed groove, the driving assembly comprises a baffle plate arranged in the closed groove in a sliding way, a driving spring with one end fixed on the lateral wall of the baffle plate away from the sliding block and a limiting device arranged on the mounting plate and used for blocking the sliding block, and the other end of the driving spring is fixed on the inner wall of the sliding groove away from the detection groove.

Through adopting above-mentioned technical scheme, when the staff need take out unqualified chip, the staff need upwards slide the baffle to close stop device, can make the sliding block move to the direction that is close to the detection groove under drive spring's effect, and then make the chip cross the detection groove, thereby reduced the degree of difficulty that the staff changed the chip this moment.

Further, a first fixing groove is formed in the inner wall of the sliding groove, a second fixing groove is formed in the inner wall of the first fixing groove, a third fixing groove opposite to the second fixing groove is formed in the side wall of the detection box, and the limiting device comprises a first fixing rod, a fixing spring, a second fixing rod and a third fixing rod, wherein the first fixing rod is arranged in the first fixing groove in a sliding mode, one end of the fixing spring is fixed on the side wall, far away from the sliding block, of the first fixing rod, the second fixing rod is arranged in the second fixing groove in a sliding mode, and the third fixing rod is arranged in the third fixing groove in a sliding mode;

the connecting groove is formed in the side wall, close to the second fixing rod, of the first fixing rod, and the second inclined surface is formed in the edge, intersecting with the side wall, close to the second fixing rod, of the first fixing rod, of the inner wall, far away from the sliding block, of the connecting groove.

Through adopting above-mentioned technical scheme, when the staff need take out the chip, the staff only need press the third dead lever, can make the third dead lever support tight second inclined plane to make first dead lever remove completely to first fixed slot in, and then make first dead lever and sliding block mutually separate, thereby make the sliding block remove under drive spring's effect.

Further, a third inclined surface is formed on the edge, intersecting with the side wall, of the first fixing rod, which is close to the detection groove, and the side wall, which is far away from the driving spring, of the first fixing rod.

Through adopting above-mentioned technical scheme, when the staff unclamps the third dead lever, first dead lever resets under the effect of fixed spring. At this time, if the staff needs to make the sliding block reset, the staff only needs to push the detection device, can make the sliding block support the third inclined plane tightly to make first dead lever slip, need not the staff and continuously exert effort to the third dead lever, and then reduced the operation degree of difficulty of staff.

Further, an accommodating groove matched with the partition plate is formed in the inner bottom wall of the detection groove.

By adopting the technical scheme, the sealing effect of the baffle plate on the detection groove is improved, and the heat loss rate in the detection box is further reduced.

Further, a connecting block for reducing difficulty of sliding the partition plate by workers is arranged on the side wall of the partition plate.

In summary, the utility model has the following beneficial effects:

1. in this application, when the staff need detect a plurality of chips simultaneously, the staff need make chip and detection device one-to-one and interconnect. Subsequently, the worker needs to slide the mounting plate downwards, and the limiting assembly can automatically fix the mounting plate, so that the detection device is kept stable. At this time, the worker can detect the chip by only starting the detection device. Then, when one of the chips under inspection is a defective product, the detection device detects a signal of the defective chip and causes the corresponding indicator lamp to light up. At the moment, a worker only needs to start the driving assembly, so that the sliding block moves towards the direction close to the detection groove, the chip moves along with the sliding block and finally moves outside the detection box, at the moment, the worker only needs to replace the chip and reset the sliding block, the new chip can be detected, and the detection of other chips is not required to be completed, so that the detection efficiency of the worker is improved;

2. in this application, after the staff makes chip and detection device interconnect, the staff needs the downwardly sliding mounting panel, and at this moment, the slider is close to the gag lever post gradually and supports tight first inclined plane to make the gag lever post remove to the spacing inslot completely under the effect of slider, when the slider supports the interior diapire of tight spout, the gag lever post just separates with the slider each other, thereby makes the one end of gag lever post shift out the spacing groove and support tight slider under the effect of spacing spring, and then makes the slider remain stable. Then, when a worker needs to take out the mounting plate, the worker needs to press the sliding rod, and the fixing rope can move along with the sliding rod, so that the limiting rod can completely move into the limiting groove under the action of the fixing rope, and at the moment, the worker only needs to slide the mounting plate upwards;

3. in this application, when the staff need take out unqualified chip, the staff need upwards slide the baffle to close stop device, can make the sliding block remove to the direction that is close to the detection groove under drive spring's effect, and then make the chip cross the detection groove, thereby reduced the degree of difficulty that the staff changed the chip this moment.

Drawings

FIG. 1 is a schematic overall structure of an embodiment of the present utility model;

FIG. 2 is a schematic diagram of a limiting groove and a connection structure thereof according to an embodiment of the present utility model;

FIG. 3 is a schematic view of a limiting assembly and a connection structure thereof according to an embodiment of the present utility model;

FIG. 4 is a schematic diagram of a detecting device and a connection structure thereof according to an embodiment of the present utility model;

fig. 5 is a schematic diagram of a limiting device and a connection structure thereof according to an embodiment of the utility model.

In the figure: 1. a detection box; 11. a mounting groove; 2. an upper cover; 21. a chute; 3. a slide block; 31. a mounting plate; 32. a sliding groove; 4. a sliding block; 41. a detection device; 5. an indicator light; 51. a limit groove; 52. a placement groove; 6. a limit component; 61. a limit rod; 62. a limit spring; 63. a fixing rope; 64. a slide bar; 65. a first inclined surface; 66. a detection groove; 67. closing the groove; 7. a drive assembly; 71. a partition plate; 72. a drive spring; 73. a first fixing groove; 74. a second fixing groove; 75. a third fixing groove; 8. a limiting device; 81. a first fixing rod; 82. a fixed spring; 83. a second fixing rod; 84. a third fixing rod; 85. a connecting groove; 86. a second inclined surface; 87. a third inclined surface; 9. a receiving groove; 91. and (5) connecting a block.

Detailed Description

The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application; it is apparent that the described embodiments are only a part of the embodiments of the present application, not all of the embodiments, and all other embodiments obtained by a person having ordinary skill in the art without making creative efforts based on the embodiments in the present application are within the scope of protection of the present application.

As shown in fig. 1 to 5, the embodiment of the application discloses a MEMS acoustic sensor chip testing apparatus, which includes a detection box 1, an upper cover 2, a slider 3, a mounting plate 31, a slider 4, a detection device 41, an indicator lamp 5, a limiting component 6, and a driving component 7. The detection box 1 is of a cuboid structure with an opening at the upper end, and the upper surface of the detection box 1 is provided with a mounting groove 11. The upper cover 2 has a rectangular plate-like structure, and the upper cover 2 is disposed in the mounting groove 11 for closing the detection box 1. The two opposite inner walls of the detection box 1 are provided with sliding grooves 21, the sliding block 3 is of a rectangular block structure, and the sliding blocks 3 are provided with two sliding grooves 21 and are respectively arranged in the sliding grooves. The mounting plate 31 is of a rectangular plate-shaped structure, and the side walls of the mounting plate 31, which are close to each other, are connected with each other. Two mutually symmetrical sliding grooves 32 are formed in the upper surface of the mounting plate 31, the sliding block 4 is of a rectangular block structure, and the sliding block 4 is arranged in the sliding grooves 32 in a sliding mode. The detecting device 41 is fixed on the upper surface of the slider 4 for detecting the chip. The indicator lamps 5 are arranged on the side wall of the detection box 1 in two, and the indicator lamps 5 are in one-to-one correspondence with the detection devices 41 and are electrically connected.

The limiting groove 51 is formed in the inner wall of the sliding groove 21, the placement groove 52 is formed in the inner wall of the detection box 1, the limiting assembly 6 is arranged on the detection box 1 and used for limiting the sliding block 3, and the limiting assembly 6 comprises a limiting rod 61, a limiting spring 62, a fixing rope 63 and a sliding rod 64. The stop lever 61 is of a rectangular rod-shaped structure, the stop lever 61 is slidably arranged in the stop groove 51, and a first inclined surface 65 is formed on an edge, intersecting with the side wall, far away from the fixed rope 63, of the upper surface of the stop lever 61. One end of the limiting spring 62 is fixed on the side wall of the limiting rod 61 away from the sliding block 3, and the other end of the limiting spring 62 is fixed on the inner wall of the limiting groove 51 away from the sliding block 3. One end of the fixing rope 63 is fixed on the side wall of the limit rod 61 away from the sliding block 3, and the other end of the fixing rope 63 extends into the placement groove 52 and is fixed with the sliding rod 64. The slide bar 64 has a rectangular rod-like structure, and the slide bar 64 is slidably disposed in the placement groove 52.

After the worker connects the chip and the detecting device 41 to each other, the worker needs to slide the mounting plate 31 downward, at this time, the slider 3 gradually approaches the limit lever 61 and abuts against the first inclined surface 65, so that the limit lever 61 moves completely into the limit groove 51 under the action of the slider 3, when the slider 3 abuts against the inner bottom wall of the slide groove 21, the limit lever 61 is just separated from the slider 3, so that one end of the limit lever 61 moves out of the limit groove 51 under the action of the limit spring 62 and abuts against the slider 3, and the slider 3 is kept stable. Then, when the worker needs to take out the mounting plate 31, the worker needs to press the slide bar 64, so that the fixing rope 63 moves along with the slide bar 64, and the limit bar 61 moves completely into the limit groove 51 under the action of the fixing rope 63, and at this time, the worker only needs to slide the mounting plate 31 upwards.

The lateral wall of the detection box 1 is penetrated and provided with a detection groove 66 which is opposite to the detection device 41, the inner top wall of the detection groove 66 is provided with a closed groove 67, the driving component 7 is arranged on the mounting plate 31 and used for driving the sliding block 4, and the driving component 7 comprises a partition plate 71, a driving spring 72 and a limiting device 8. The partition 71 has a rectangular plate-like structure, and the partition 71 is slidably disposed in the closed groove 67. One end of the drive spring 72 is fixed to a side wall of the slider 4 away from the partition plate 71, and the other end of the drive spring 72 is fixed to an inner wall of the slide groove 32 away from the detection groove 66.

When the worker needs to take out the unqualified chip, the worker needs to slide the partition plate 71 upwards and close the limiting device 8, so that the sliding block 4 can move towards the direction close to the detection groove 66 under the action of the driving spring 72, and the chip passes through the detection groove 66, so that the difficulty of replacing the chip by the worker at the moment is reduced.

The inner wall of the sliding groove 32 is provided with a first fixing groove 73, the inner wall of the first fixing groove 73 is provided with a second fixing groove 74, and the side wall of the detection box 1 is provided with a third fixing groove 75 opposite to the second fixing groove 74. The limiting device 8 is disposed on the mounting plate 31 and is used for blocking the sliding block 4, and the limiting device 8 includes a first fixing rod 81, a fixing spring 82, a second fixing rod 83 and a second fixing rod 83. The first fixing rod 81 is of a rectangular rod-shaped structure, the first fixing rod 81 is slidably arranged in the first fixing groove 73, a connecting groove 85 is formed in the side wall, close to the second fixing rod 83, of the first fixing rod 81, and a second inclined surface 86 is formed in the edge, intersecting with the side wall, close to the second fixing rod 83, of the first fixing rod 81, of the connecting groove 85, away from the inner wall of the sliding block 4. One end of the fixing spring 82 is fixed on the side wall of the first fixing rod 81 far away from the sliding block 4, the second fixing rod 83 is of a rectangular rod-shaped structure, and the second fixing rod 83 is slidably arranged in the second fixing groove 74. The third fixing rod 84 has a rectangular rod-shaped structure, and the third fixing rod 84 is slidably disposed in the third fixing groove 75.

When the worker needs to take out the chip, the worker only needs to press the third fixing rod 84, so that the third fixing rod 84 abuts against the second inclined surface 86, and the first fixing rod 81 is completely moved into the first fixing groove 73, and the first fixing rod 81 and the sliding block 4 are separated from each other, so that the sliding block 4 moves under the action of the driving spring 72.

In order to reduce the difficulty of the operation of the worker, a third inclined surface 87 is formed on the edge of the first fixing lever 81, which is adjacent to the side wall of the detection groove 66 and intersects with the side wall thereof, which is far from the driving spring 72. When the worker releases the third fixing lever 84, the first fixing lever 81 is restored by the fixing spring 82. At this time, if the worker needs to reset the sliding block 4, the worker only needs to push the detecting device 41, so that the sliding block 4 can abut against the third inclined surface 87, thereby sliding the first fixing rod 81, and the worker is not required to continuously apply an acting force to the third fixing rod 84, so that the operation difficulty of the worker is reduced.

In order to improve the sealing effect of the partition plate 71 on the detection tank 66 and further reduce the rate of heat loss in the detection tank 1, the inner bottom wall of the detection tank 66 is provided with a receiving tank 9 which is matched with the partition plate 71.

To reduce the difficulty of a worker sliding the partition 71, a connection block 91 is provided on the sidewall of the partition 71.

The use principle of the MEMS acoustic sensor chip testing device in the embodiment is as follows:

when a worker performs simultaneous detection on a plurality of chips, the worker has to make the chips correspond to the detection devices 41 one by one and connect them to each other. Subsequently, the worker slides the mounting plate 31 downward, so that the limiting assembly 6 automatically fixes the mounting plate 31, and the detecting device 41 is kept stable. At this time, the worker can detect the chip by merely activating the detection device 41. Subsequently, when one of the chips under inspection is a defective product, the detection device 41 detects a signal of the defective chip and causes the corresponding indicator lamp 5 to light up. At this time, the staff only needs to start the driving component 7, can make the sliding block 4 move to the direction close to the detection groove 66, and then makes the chip follow the sliding block 4 and move and finally move to the outside of the detection box 1, at this time, the staff only needs to replace the chip and reset the sliding block 4, and can detect the new chip, and the detection of other chips is not required to be completed, so that the detection efficiency of the staff is improved.

The above description is only a preferred embodiment of the present utility model, and the protection scope of the present utility model is not limited to the above examples, and all technical solutions belonging to the concept of the present utility model belong to the protection scope of the present utility model. It should be noted that modifications and adaptations to the present utility model may occur to one skilled in the art without departing from the principles of the present utility model and are intended to be within the scope of the present utility model.

Claims (8)

1. The MEMS acoustic sensing chip testing equipment comprises a detection box (1) with an opening at the upper end, and is characterized in that: the utility model discloses a detection device for detecting a chip, including detection box (1), mounting panel (31) has been seted up to the upper surface of detection box (1), upper cover (2) that are used for sealing detection box (1) have been offered to the upper surface of mounting panel (11), spout (21) have all been offered on two relative inner walls of detection box (1), all slide in two spouts (21) and are provided with slider (3), two install mounting panel (31) on the lateral wall that slider (3) are close to each other jointly, two mutually symmetrical sliding grooves (32) have been seted up to the upper surface of mounting panel (31), the sliding groove (32) is provided with slider (4) in the slip, the upper surface of slider (4) is fixed with detection device (41) that are used for detecting the chip, be provided with two pilot lamps (5) on the lateral wall of detection box (1), be provided with on detection box (1) and be used for carrying out spacing subassembly (6) to slider (3), be provided with on mounting panel (31) and be used for driving subassembly (7).

2. The MEMS acoustic sensor chip testing apparatus of claim 1, wherein: the utility model discloses a slide groove, including slider (3) and slide bar (64), including slider (3) and slide bar (61), locating groove (52) have been seted up on the inner wall of spout (21), locating groove (52) have been seted up on the inner wall of detection case (1), spacing subassembly (6) are including sliding setting up gag lever post (61) in locating groove (51), spacing spring (62) that one end was fixed on gag lever post (61) kept away from on slider (3) lateral wall, one end is fixed rope (63) and sliding rod (64) of sliding setting in locating groove (52) on slider (3) lateral wall are kept away from to gag lever post (61), the other end of spacing spring (62) is fixed on locating groove (51) is kept away from on the inner wall of slider (3), the other end of fixed rope (63) extends to in locating groove (52) and is fixed with slide rod (64) each other.

3. The MEMS acoustic sensor chip testing apparatus of claim 2, wherein: a first inclined surface (65) is formed on the edge, intersecting with the side wall, far away from the fixed rope (63), of the upper surface of the limiting rod (61).

4. The MEMS acoustic sensor chip testing apparatus of claim 1, wherein: a detection groove (66) opposite to the detection device (41) is arranged on the side wall of the detection box (1) in a penetrating way, a closed groove (67) is arranged on the inner top wall of the detection groove (66), the driving assembly (7) comprises a baffle plate (71) arranged in the closed groove (67) in a sliding mode, a driving spring (72) with one end fixed on the side wall of the sliding block (4) away from the baffle plate (71) and a limiting device (8) arranged on the mounting plate (31) and used for blocking the sliding block (4), and the other end of the driving spring (72) is fixed on the inner wall of the sliding groove (32) away from the detection groove (66).

5. The MEMS acoustic sensor chip testing apparatus of claim 4, wherein: a first fixing groove (73) is formed in the inner wall of the sliding groove (32), a second fixing groove (74) is formed in the inner wall of the first fixing groove (73), a third fixing groove (75) opposite to the second fixing groove (74) is formed in the side wall of the detection box (1), and the limiting device (8) comprises a first fixing rod (81) arranged in the first fixing groove (73) in a sliding mode, a fixing spring (82) with one end fixed on the side wall, far away from the sliding block (4), of the first fixing rod (81), a second fixing rod (83) arranged in the second fixing groove (74) in a sliding mode and a third fixing rod (84) arranged in the third fixing groove (75) in a sliding mode;

the side wall of the first fixing rod (81) close to the second fixing rod (83) is provided with a connecting groove (85), and the edge, intersecting with the side wall of the first fixing rod (81) close to the second fixing rod (83), of the inner wall of the connecting groove (85) far away from the sliding block (4) is provided with a second inclined surface (86).

6. The MEMS acoustic sensor chip testing apparatus of claim 5, wherein: a third inclined surface (87) is formed on the edge, intersecting with the side wall, close to the detection groove (66), of the first fixing rod (81) and the side wall, far away from the driving spring (72), of the first fixing rod.

7. The MEMS acoustic sensor chip testing apparatus of claim 4, wherein: an accommodating groove (9) matched with the partition plate (71) is formed in the inner bottom wall of the detection groove (66).

8. The MEMS acoustic sensor chip testing apparatus of claim 7, wherein: the side wall of the partition plate (71) is provided with a connecting block (91) for reducing the difficulty of sliding the partition plate (71) by workers.