CN219350171U

CN219350171U - Wafer basket

Info

Publication number: CN219350171U
Application number: CN202320209183.2U
Authority: CN
Inventors: 林基明; 李孟轩; 林宏达; 翟虎
Original assignee: Zhejiang Lihui Intelligent Equipment Co ltd; Tunghsu Technology Group Co Ltd
Current assignee: Zhejiang Lihui Intelligent Equipment Co ltd; Tunghsu Technology Group Co Ltd
Priority date: 2023-01-16
Filing date: 2023-01-16
Publication date: 2023-07-14
Anticipated expiration: 2033-01-16

Abstract

The present disclosure provides a wafer basket of flowers, comprising: the flower basket comprises a flower basket body (2), wherein the flower basket body comprises two main boards (22) which are oppositely arranged along a first direction, a plurality of plugboards (23) which are arranged at intervals along a second direction perpendicular to the first direction are arranged on the main boards, and wafer slots are formed among the plugboards; and the auxiliary piece (1) can be detachably arranged at the insertion end of the flower basket main body (2) along the third direction perpendicular to the first direction and the second direction, and the auxiliary piece (1) comprises two first supporting beams (11) which are respectively aligned with the two main boards along the third direction and limiting plates (12) which are respectively arranged on the first supporting beams and are arranged along the second direction, wherein the limiting plates are aligned with the plugboards along the third direction one by one. Through the technical scheme, the wafer is inserted into the flower basket through the auxiliary piece, the limiting plate can play a limiting role, and the problem that the wafer manually placed into the flower basket is scratched, and the surface scratch caused by improper placement of the serial position fence, the lamination and the like is solved.

Description

Wafer basket

Technical Field

The disclosure relates to the technical field of integrated circuits, and in particular relates to a wafer basket.

Background

In the LED, chip and semiconductor industries, the processing process usually involves taking and placing the wafer, and in most processing processes, the wafer is automatically taken and placed by a manipulator, so that the taking and placing are accurate and quick; in some processing and production processes, the wafer needs to be manually taken and placed, and in the existing wafer basket, most of design sizes have certain standards, so that the wafer basket is suitable for manipulators of various automatic equipment; however, when the wafer is manually taken and placed, the width of the basket slot is loose relative to the thickness of the wafer, meanwhile, the wafer has certain transparency, a certain visual obstacle can be caused, under the long-time mechanical taking and placing operation, the wafer is often caused to scratch or put, and the serial columns and the lamination are caused, so that the surface scratch of the wafer is poor, the wafer cannot be taken and placed accurately and tirlessly like a mechanical arm, the quality of the wafer is greatly influenced, the bad proportion of the scratch is about 0.1%, and meanwhile, the processing production efficiency is also greatly influenced.

Disclosure of Invention

One technical problem to be solved by the present disclosure is: the wafer is manually taken and put, which causes scratch, string columns or lamination and the like, so that the wafer is damaged.

To solve the above technical problem, an embodiment of the present disclosure provides a wafer basket, which is characterized by comprising:

the flower basket body comprises two main boards which are oppositely arranged along a first direction, a plurality of plugboards which are arranged at intervals along a second direction perpendicular to the first direction are arranged on the main boards, and wafer slots are formed among the plugboards; and

the auxiliary piece, the auxiliary piece can be detachably set up at the third direction's of basket of flowers main part along perpendicular to first direction and second direction insert the end, the auxiliary piece is including two first supporting beams of alignment in two mainboard along the third direction respectively and set up the limiting plate of arranging along the second direction on first supporting beam respectively, the limiting plate is aligned in the picture peg along the third direction one by one to the distance between two limiting plates of two first supporting beams alignment each other in the first direction is less than the distance between two picture peg of two mainboard alignment each other in the first direction.

In some embodiments, the basket body further comprises two side plates connected to ends of the two main plates in the second direction.

In some embodiments, the distance between two stop plates aligned with each other in the first direction is less than one third of the wafer diameter.

In some embodiments, the top end of the main board is provided with a flange, the flange is provided with a locating pin, and the auxiliary piece is provided with a locating hole matched with the locating pin.

In some embodiments, the flange is provided with two positioning pins extending along the first direction at intervals, and the first support beam is provided with two positioning holes.

In some embodiments, the auxiliary element further comprises two second support beams connected to ends of the two first support beams in the second direction.

In some embodiments, the side plate includes a first upright, a second upright disposed in spaced relation to the first upright, and a cross member connected to the first upright and the second upright, the first upright and the second upright supporting symmetrically disposed main plates, respectively.

In some embodiments, the cross beam is provided with reinforcing ribs.

In some embodiments, the auxiliary element is made of teflon.

In some embodiments, the basket body is one of a polyetheretherketone structure, a polyetherimide structure, and a polytetramethylene terephthalate structure.

Through above-mentioned technical scheme, the wafer basket of flowers that this disclosure provided, when the manual work got and put the wafer, the wafer was inserted in the basket of flowers through the auxiliary member, and the limiting plate can play limiting effect, when placing for the limiting plate slope, the wafer blocked promptly by the limiting plate and can't place, has effectively solved the wafer that directly manual put into the basket of flowers can appear and cut and scratch, cluster position fence, lamination etc. place improper surface scratch that leads to.

Drawings

In order to more clearly illustrate the embodiments of the present disclosure or the technical solutions in the prior art, the drawings that are required in the embodiments or the description of the prior art will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present disclosure, and other drawings may be obtained according to these drawings without inventive effort to a person of ordinary skill in the art.

FIG. 1 is a schematic structural view of an accessory disclosed in an embodiment of the present disclosure;

fig. 2 is a schematic structural view of a basket body according to an embodiment of the present disclosure.

Reference numerals illustrate:

1. an auxiliary member; 2. a flower basket body; 11. a first support beam; 12. a limiting plate; 13. positioning holes; 14. a second support beam; 21. a side plate; 22. a main board; 23. inserting plate; 24. a positioning pin; 211. a first upright; 212. a second upright; 213. a cross beam; 214. reinforcing ribs.

Detailed Description

Embodiments of the present disclosure are described in further detail below with reference to the drawings and examples. The following detailed description of the embodiments and the accompanying drawings are provided to illustrate the principles of the disclosure and not to limit the scope of the disclosure, which may be embodied in many different forms and not limited to the specific embodiments disclosed herein, but rather to include all technical solutions falling within the scope of the claims.

The present disclosure provides these embodiments in order to make the present disclosure thorough and complete, and fully convey the scope of the disclosure to those skilled in the art. It should be noted that: the relative arrangement of parts and steps, the composition of materials, numerical expressions and numerical values set forth in these embodiments should be construed as exemplary only and not limiting unless otherwise specifically stated.

In the description of the present disclosure, unless otherwise indicated, the meaning of "plurality" is greater than or equal to two; the terms "upper," "lower," "left," "right," "inner," "outer," and the like indicate an orientation or positional relationship merely for convenience of describing the present disclosure and simplifying the description, and do not indicate or imply that the devices or elements being referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus are not to be construed as limiting the present disclosure. When the absolute position of the object to be described is changed, the relative positional relationship may be changed accordingly.

Furthermore, the use of the terms first, second, and the like in this disclosure do not denote any order, quantity, or importance, but rather are used to distinguish one element from another. The "vertical" is not strictly vertical but is within the allowable error range. "parallel" is not strictly parallel but is within the tolerance of the error. The word "comprising" or "comprises" and the like means that elements preceding the word encompass the elements recited after the word, and not exclude the possibility of also encompassing other elements.

It should also be noted that, in the description of the present disclosure, unless explicitly specified and limited otherwise, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be either fixedly connected, detachably connected, or integrally connected, for example; can be directly connected or indirectly connected through an intermediate medium. The specific meaning of the terms in the present disclosure may be understood as appropriate by those of ordinary skill in the art. When a particular device is described as being located between a first device and a second device, there may or may not be an intervening device between the particular device and either the first device or the second device.

All terms used in the present disclosure have the same meaning as understood by one of ordinary skill in the art to which the present disclosure pertains, unless specifically defined otherwise. It will be further understood that terms, such as those defined in commonly used dictionaries, should be interpreted as having a meaning that is consistent with their meaning in the context of the relevant art and will not be interpreted in an idealized or overly formal sense unless expressly so defined herein.

Techniques, methods, and apparatus known to one of ordinary skill in the relevant art may not be discussed in detail, but where appropriate, the techniques, methods, and apparatus should be considered part of the specification.

The embodiment of the disclosure provides a wafer basket of flowers, comprising:

the flower basket body 2 comprises two main boards 22 which are oppositely arranged along a first direction, a plurality of plugboards 23 which are arranged at intervals along a second direction perpendicular to the first direction are arranged on the main boards 22, and wafer slots are formed among the plugboards 23; and an auxiliary member 1, the auxiliary member 1 being detachably provided at an insertion end of the basket body 2 in a third direction perpendicular to the first direction and the second direction, the auxiliary member 1 including two first support beams 11 aligned with the two main plates 22 in the third direction, respectively, and limiting plates 12 arranged in the second direction, respectively, provided on the first support beams 11, the limiting plates 12 being aligned with the insert plates 23 one by one in the third direction, and a distance between the two limiting plates 12, in which the two first support beams 11 are aligned with each other in the first direction, being smaller than a distance between the two insert plates 23, in which the two main plates 22 are aligned with each other in the first direction.

As shown in fig. 1 and 2, the length direction of the main board 22 is a first direction, the direction perpendicular to the main board 22 is a second direction, the height direction of the main board 22 is a third direction, the plugboards 23 on two main boards 22 are aligned one by one in the first direction, wafer slots are formed between two adjacent plugboards 23, and one wafer is inserted into the slots on two main boards 22 at the same time; the first supporting beam 11 can be installed at the end of the main board 22 in the third direction, and the limiting plates 12 and the plugboards 23 extend along the first direction and are aligned one by one, so that when the wafer is placed manually, the limiting plates 12 can guide the wafer to be inserted into the basket smoothly.

When the wafer is required to be manually inserted, the auxiliary piece 1 is installed on the flower basket main body 2, the wafer smoothly enters the flower basket through the auxiliary piece 1, and the auxiliary piece 1 is taken down after the placement is completed; because the wafer in the basket body 2 needs to be processed in the production process, and the basket body 2 is simultaneously suitable for a manual production line and an automatic production line, in the automatic production line, the taking and placing of the wafer are completed through a mechanical arm, so that the distance between the two plugboards 23 aligned with each other in the first direction is not too large, and a space is required to be reserved for accommodating the operation of the mechanical arm, the distance between the two plugboards 23 cannot be reduced by increasing the length of the plugboard 3, and the problems of scratch, serial position column and the like of the wafer during manual placement are avoided.

Through the technical scheme, when the wafer is manually taken and placed, the wafer is inserted into the basket body 2 through the auxiliary piece 1, and the limiting plate 12 can play a limiting role because the length of the limiting plate 12 is larger than that of the inserting plate 23, and if the wafer is obliquely placed relative to the limiting plate 12, the wafer is clamped by the limiting plate 12 and cannot be continuously inserted, so that surface scratches caused by improper placement of the wafer in the basket, such as scratch, serial bars, lamination and the like, can be effectively solved.

In some embodiments, the basket body 2 further comprises two side plates 21 connected to the ends of the two main plates 22 in the second direction.

As shown in fig. 2, two ends of the side plate 21 are respectively connected to the ends of the same side of the two main plates 22 in the second direction, the two main plates 22 and the two side plates 21 are sequentially connected end to end, so that the two side plates 21 and the two main plates 22 enclose a square shape, and the bottoms of the main plates 22 shrink inwards to support the wafer; the distance between the two main boards 22 is adjusted by setting the length of the side board 21, for example, 27 cm may be used for placing 8 inch wafers, and 40 cm may be used for placing 12 inch wafers.

In some embodiments, the distance between two limiting plates 12 aligned with each other in the first direction is less than one third of the wafer diameter.

As shown in fig. 1, according to the calculation, when the wafer placement angle and the placement of the limiting plates 12 are more parallel, that is, when both ends of the wafer are located at the center position of the slot (both ends of the wafer are respectively located in the slots of adjacent columns and not in the same column), the distance between the two limiting plates 12 aligned with each other in the first direction should be less than one third of the diameter of the wafer, otherwise, the limiting plates 12 will fail; for example, the diameter of the simulated wafer is 100mm, the thickness is 7mm, the distance between the adjacent limiting plates 12 is 20mm, that is, the width of the slot is 20mm, the wafer is placed according to the above-mentioned limit position, when the wafer is just connected with the limiting plates 12, the distance between the two aligned limiting plates 12 is close to 33mm, that is, when the distance between the two aligned limiting plates 12 is smaller than 33mm, the limiting plates 12 interfere with the wafer placed obliquely (that is, the two ends of the wafer are not inserted into the slot of the same column), so that the wafer cannot be inserted continuously, and the phenomenon of column stringing during the manual placement of the wafer can be effectively prevented from causing scratches.

In some embodiments, the top end of the main board 22 is provided with a flange, the flange is provided with a positioning pin 24, and the auxiliary piece 1 is provided with a positioning hole 13 matched with the positioning pin 24.

As shown in fig. 2, in order to facilitate the fixing of the auxiliary member 1, a flange is provided at the top end of the main plate 22, the first support beam 11 in the auxiliary member 1 can be placed on the flange of the main plate 22, and the fixing of the first support beam 11 is achieved by the cooperation of the positioning pins 24 and the positioning holes 13, so that the limiting plates 12 on the first support beam 11 are aligned with the insertion plates 23 on the main plate 22 in the third direction, and the limiting plates 12 are in one-to-one correspondence with the insertion plates 23.

In some embodiments, two positioning pins 24 are provided on the flange, and two positioning holes 13 are provided on the first support beam 11, wherein the positioning pins are provided at intervals extending in the first direction.

As shown in fig. 2, positioning pins 24 are respectively disposed at two ends of the flange of the main board 22, and accordingly, positioning holes 13 are also disposed at two ends of the first support beam 11, so that the first support beam 11 can be mounted and dismounted through simple plugging, and the operation is simple, convenient and quick.

In some embodiments, the auxiliary element 1 further comprises two second support beams 14 connected to the ends of the two first support beams 11 in the second direction.

As shown in fig. 1, two second supporting beams 14 are respectively connected to two ends of two first supporting beams 11, the two first supporting beams 11 and the two second supporting beams 14 are sequentially connected end to form a frame-shaped thin plate with a hollowed-out middle, and the limiting plate 12 is located at the hollowed-out position, so that the integration of the auxiliary piece 1 is realized, and the auxiliary piece 1 is simpler and more convenient to install.

In some embodiments, the side plate 21 includes a first upright 211, a second upright 212 spaced apart from the first upright 211, and a cross member 213 connected to the first and

second uprights

211, 212, the first and

second uprights

211, 212 supporting the symmetrically disposed main plate 22, respectively.

As shown in fig. 2, the profile of the side plate 21 is set to be in an H-shaped structure, so that the production equipment can identify and position the front and back surfaces of the basket main body 2, and thus, different processes such as etching, photoetching, coating and the like can be performed on the wafer; the H-shaped structure comprises two first upright posts 211, two second upright posts 212 and a cross beam 213, wherein the cross beam 213 is horizontally arranged, two ends of the cross beam are respectively connected to the central positions of the first upright posts 211 and the second upright posts 212 along the length direction, and the first upright posts 211 and the second upright posts 212 respectively support the main boards 22 on two sides, so that the structural stability of the two main boards 22 is ensured. In addition, the width of the cross beam 213 can be properly increased according to actual requirements, so that the deformation of the basket main body 2 can be avoided, and the structural stability is enhanced.

In some embodiments, the cross beam 213 is provided with a stiffener 214.

As shown in fig. 2, the reinforcing ribs 214 are horizontally disposed on the outer surface of the cross beam 213, and both ends of the reinforcing ribs 214 are supported between the first upright post 211 and the second upright post 212, so that the supporting effect of the cross beam 213 can be further enhanced, thereby further improving the overall stability of the basket body 2.

In some embodiments, the auxiliary element 1 is made of teflon.

The teflon high-performance special coating is a fluorine coating taking polytetrafluoroethylene as matrix resin, combines heat resistance, chemical inertness, excellent insulation stability and low friction, can be particularly made of PFA (perfluoro alkyl), has the advantages of higher continuous use temperature of 260 ℃ and stronger rigidity and toughness, and is particularly suitable for the application fields of anti-sticking and chemical resistance under high temperature conditions.

In some embodiments, the basket body 2 is one of a polyetheretherketone structure, a polyetherimide structure, and a polytetramethylene terephthalate structure.

Through a great deal of test and comparison, the product is made of one of polyether-ether-ketone structure, polyetherimide structure and polymethyl terephthalate structure, and the rigidity of the product and the antistatic performance required by the integrated circuit industry can be improved.

Thus, various embodiments of the present disclosure have been described in detail. In order to avoid obscuring the concepts of the present disclosure, some details known in the art are not described. How to implement the solutions disclosed herein will be fully apparent to those skilled in the art from the above description.

Although some specific embodiments of the present disclosure have been described in detail by way of example, it should be understood by those skilled in the art that the above examples are for illustration only and are not intended to limit the scope of the present disclosure. It will be understood by those skilled in the art that the foregoing embodiments may be modified and equivalents substituted for elements thereof without departing from the scope and spirit of the disclosure. In particular, the technical features mentioned in the respective embodiments may be combined in any manner as long as there is no structural conflict.

Claims

1. A wafer basket, comprising:

the flower basket comprises a flower basket body (2), wherein the flower basket body (2) comprises two main boards (22) which are oppositely arranged along a first direction, a plurality of plugboards (23) which are arranged at intervals along a second direction perpendicular to the first direction are arranged on the main boards (22), and wafer slots are formed among the plugboards (23); and

the auxiliary piece (1), auxiliary piece (1) can detachably set up in the tip of the third direction of basket of flowers main part (2) along being perpendicular to first direction and second direction, auxiliary piece (1) is including respectively along the third direction alignment two first supporting beam (11) of two mainboard (22) and set up respectively on first supporting beam (11) along limiting plate (12) of second direction arrangement, limiting plate (12) are along the third direction one-to-one alignment in picture peg (23), and two first supporting beam (11) are in the first direction each other aligned two limiting plate (12) between the distance, be less than two mainboard (22) are in the first direction each other aligned two picture peg (23) between the distance.

2. Wafer basket according to claim 1, characterized in that the basket body (2) further comprises two side plates (21) connected to the ends of two main plates (22) in the second direction.

3. Wafer basket according to claim 1, characterized in that the distance between two limiting plates (12) aligned with each other in the first direction is less than one third of the wafer diameter.

4. Wafer flower basket according to claim 1, characterized in that the top end of the main plate (22) is provided with a flange, the flange is provided with a positioning pin (24), and the auxiliary member (1) is provided with a positioning hole (13) matched with the positioning pin (24).

5. Wafer flower basket according to claim 4, characterized in that the flange is provided with two positioning pins (24) extending in the first direction at intervals, and the first support beam (11) is provided with two positioning holes (13).

6. Wafer basket according to claim 1, characterized in that the auxiliary element (1) further comprises two second support beams (14) connected to the ends of the two first support beams (11) in the second direction.

7. The wafer flower basket according to claim 2, characterized in that the side plate (21) comprises a first upright (211), a second upright (212) spaced from the first upright (211) and a cross beam (213) connected to the first upright (211) and the second upright (212), the first upright (211) and the second upright (212) respectively supporting the symmetrically arranged main plates (22).

8. Wafer flower basket according to claim 7, characterized in that the cross beam (213) is provided with a stiffening rib (214).

9. Wafer basket according to claim 1, characterized in that the auxiliary element (1) is made of teflon.

10. The wafer basket according to claim 1, wherein the basket body (2) is one of a polyetheretherketone structure, a polyetherimide structure and a polytetramethylene terephthalate structure.