CN219321316U

CN219321316U - Piece assembly

Info

Publication number: CN219321316U
Application number: CN202223273873.9U
Authority: CN
Inventors: 林奇; 沈斌
Original assignee: Suzhou Donghong Electronic Technology Co ltd
Current assignee: Suzhou Donghong Electronic Technology Co ltd
Priority date: 2022-12-07
Filing date: 2022-12-07
Publication date: 2023-07-07
Anticipated expiration: 2032-12-07

Abstract

The utility model discloses a wafer assembly, and relates to the field of semiconductor processing. The wafer passing assembly comprises; the main shaft assembly and install first piece assembly, second piece assembly and the third piece assembly of crossing at main shaft assembly top, main shaft assembly includes main shaft main part and installs a plurality of claw poles that collude at main shaft main part surface, the crochet hook is installed to the bottom of claw pole, first piece assembly that crosses includes biax motor and installs the cam Z axle at biax motor output. This cross piece assembly realizes that the crochet hook drives the base plate and carries out accurate removal, and the precision is high, and response speed is fast, and stability is good, and adopts multiaxis adjustment, has improved the compatibility of equipment.

Description

Piece assembly

Technical Field

The utility model relates to the technical field of semiconductor processing, in particular to a wafer passing assembly.

Background

The die bonding process is to bond a silicon-based semiconductor wafer on a frame made of copper, and the die bonding process is based on back-end bonding wires and packaging.

The chip passing process of the die bonder is characterized in that a substrate or PCB is conveyed to the working position of a crochet hook by a feeding mechanism, the crochet hook moves alternately in the Z direction and the X direction to drive the substrate or a PCB to move transversely to a designated position for tin melting, bonding and discharging, the response speed to actions is extremely important, the key point for improving the beats is one of the key points, meanwhile, the matching between the movements is also important, the tin melting position is deviated due to the improper matching, and therefore products are scrapped, and the chip passing assembly is specially provided.

Disclosure of Invention

(one) solving the technical problems

Aiming at the defects of the prior art, the utility model provides a chip passing assembly, and solves the problems that in the chip passing process of the existing die bonder, the tin melting position is deviated due to improper matching in the substrate moving process, so that the product is scrapped.

(II) technical scheme

In order to achieve the above purpose, the utility model is realized by the following technical scheme: a wafer passing assembly comprising;

the main shaft assembly, and the first, second and third sheet passing assemblies are arranged on the top of the main shaft assembly;

the main shaft assembly comprises a main shaft main body and a plurality of claw rods arranged on the outer surface of the main shaft main body, and a crochet hook is arranged at the bottom end of each claw rod;

the first sheet passing assembly comprises a double-shaft motor and a cam Z-axis arranged at the output end of the double-shaft motor;

the second sheet passing assembly comprises a sheet passing X machine seat, a servo motor and a screw rod are arranged in the sheet passing X machine seat, a transmission toothed belt is arranged between the servo motor and the screw rod, and the outer surface of the screw rod is in threaded connection with a sheet passing X-axis sliding block;

the third piece assembly that crosses includes swage mounting panel and sliding connection at the swage slider of swage mounting panel surface, the rotating electrical machines is installed to the one end of swage mounting panel, the output fixed mounting of rotating electrical machines has the rotation axis, the swage eccentric wheel of mutual contact is all installed to the surface of rotation axis and swage slider.

Preferably, the outer surface of the main shaft main body is provided with a Z-axis pressing plate, a bearing seat and an X-axis hoop pushing block, the top of the hook claw rod is provided with a hook claw seat, and the hook claw seat is arranged on the outer surface of the main shaft main body.

Preferably, the motor support is installed to the bottom of biax motor, the spring pull rod is installed to the bottom of motor support, the spring pull rod is installed at the surface of Z axle clamp plate.

Preferably, the side-mounting of motor support has the response support, first photoelectric sensor is installed at the top of response support, rotatory induction piece is installed to the top output of biax motor, the bottom surface of cam Z axle installs deep groove ball bearing.

Preferably, the sliding connection of the X-axis sliding block of passing the piece is in the bottom of the X frame of passing the piece, the surface of X frame of passing the piece installs second photoelectric sensor and crosses piece X induction piece, the surface of X-axis sliding block of passing the piece installs the third photoelectric sensor, the bottom of X-axis sliding block of passing the piece installs and crosses piece X card material induction piece, the internally mounted who crosses piece X-axis sliding block has the guiding axle.

Preferably, a fourth photoelectric sensor is arranged on the outer surface of the pressing mounting plate, a Y adjusting block is arranged on the outer surface of the pressing sliding block, and an X adjusting block is arranged at the bottom of the Y adjusting block.

The utility model discloses a sheet passing assembly, which has the following beneficial effects:

1. this cross piece assembly, the rotating electrical machines through the third cross piece assembly drive its swage eccentric wheel rotatory, make the Z axle platen of main shaft main part realize Z axle motion, after passing through the cam peak, make it carry out +Z motion under the rethread spring effect, the Z axle platen passes through main shaft main part drive crochet hook, make the crochet hook realize the up-and-down motion of Z axle direction, the servo motor of piece assembly is rotatory simultaneously, drive the lead screw through the driving toothed belt and realize X axle's back-and-forth movement, at and drive main shaft main part X item motion, thereby make the crochet hook realize X to remove, with this realization crochet hook drives the base plate and carries out accurate removal, the precision is high, response speed is fast, stability is good, and adopt multiaxis adjustment, the compatibility of equipment has been improved.

Drawings

In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings that are required in the embodiments or the description of the prior art will be briefly described, it being obvious that the drawings in the following description are only some embodiments of the utility model, and that other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.

FIG. 1 is a schematic diagram of the overall structure of the present utility model;

FIG. 2 is a schematic view of the outer surface structure of a first tab assembly according to the present utility model;

FIG. 3 is a schematic view of the outer surface structure of a second tab assembly according to the present utility model;

FIG. 4 is a schematic view of the outer surface structure of a third tab assembly according to the present utility model;

FIG. 5 is a schematic view of the outer surface structure of the spindle assembly according to the present utility model.

In the figure: 1. a spindle assembly; 11. a main shaft main body; 12. a Z-axis pressing plate; 13. a bearing seat; 14. an X-axis hoop pushing block; 15. a claw hooking seat; 16. a claw rod; 17. a crochet hook;

2. a first tab assembly; 21. a sensing bracket; 22. a first photosensor; 23. rotating the sensing piece; 24. a biaxial motor; 25. a motor support; 26. a spring pull rod; 27. a cam Z axis; 28. deep groove ball bearings;

3. a second sheet passing assembly; 31. a servo motor; 32. a driving toothed belt; 33. a X frame for passing a film; 34. a screw rod; 35. a second photosensor; 36. passing through an X induction sheet; 37. a third photosensor; 38. a slide block on X axis of the passing film; 39. a guide shaft; 310. passing the X-shaped clamping induction piece;

4. a third wafer passing assembly; 41. a pressing mounting plate; 42. a rotating electric machine; 43. a rotation shaft; 44. a fourth photosensor; 45. pressing an eccentric wheel; 46. a pressing slide block; 47. a Y adjusting block; 48. and X adjusting blocks.

Detailed Description

For the purpose of making the objects, technical solutions and advantages of the embodiments of the present utility model more clear, the technical solutions in the embodiments of the present utility model are clearly and completely described, and it is obvious that the described embodiments are some embodiments of the present utility model, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.

According to the embodiment of the application, the sheet passing assembly is provided, so that the problem that products are scrapped due to deviation of tin melting positions caused by improper matching in the substrate moving process in the sheet passing process of the conventional die bonder is solved.

In order to better understand the above technical solutions, the following detailed description will refer to the accompanying drawings and specific embodiments.

Embodiment 1,

The embodiment of the utility model discloses a sheet passing assembly.

According to the accompanying figures 1-5, comprising;

the main shaft assembly 1, and a first passing assembly 2, a second passing assembly 3 and a third passing assembly 4 which are arranged on the top of the main shaft assembly 1;

the main shaft assembly 1 comprises a main shaft main body 11 and a plurality of claw rods 16 arranged on the outer surface of the main shaft main body 11, wherein a crochet hook 17 is arranged at the bottom end of each claw rod 16;

the first passing assembly 2 comprises a double-shaft motor 24 and a cam Z-axis 27 arranged at the output end of the double-shaft motor 24;

the second film passing assembly 3 comprises a film passing X machine seat 33, a servo motor 31 and a screw rod 34 are arranged in the film passing X machine seat 33, a transmission toothed belt 32 is arranged between the servo motor 31 and the screw rod 34, and the outer surface of the screw rod 34 is in threaded connection with a film passing X shaft sliding block 38;

the third passing assembly 4 comprises a material pressing mounting plate 41 and a material pressing sliding block 46 which is connected to the outer surface of the material pressing mounting plate 41 in a sliding mode, a rotating motor 42 is installed at one end of the material pressing mounting plate 41, a rotating shaft 43 is fixedly installed at the output end of the rotating motor 42, and material pressing eccentric wheels 45 which are in contact with each other are installed on the outer surfaces of the rotating shaft 43 and the material pressing sliding block 46.

Working principle: the crochet hook 17 carries out Z+; z-; x+; z+; x-; z-: X+; z+; the X-circular motion drives the PCB or the substrate to do X-axis forward motion, and the PCB or the substrate is sent to positions such as tin melting, die bonding, discharging and the like;

the Z-axis motion is realized by the Z-axis pressing plate 12 of the main shaft main body 11 through the rotation of the pressing eccentric wheel 45 driven by the rotating motor 42 of the third passing assembly 4, the +Z motion is realized by the Z-axis pressing plate 12 under the action of the spring after passing through the highest point of the cam, and the crochet hook 17 is driven by the Z-axis pressing plate 12 through the main shaft main body 11, so that the crochet hook 17 realizes the up-and-down motion in the Z-axis direction;

the servo motor 31 of the second passing assembly 3 rotates, the driving toothed belt 32 drives the screw rod 34 to move to realize the front-back movement of the X axis, and the main shaft main body 11 is driven to do X-term movement, so that the crochet hook 17 realizes X-direction movement;

embodiment II,

The embodiment of the utility model discloses a sheet passing assembly.

According to the figures 1-5, a Z-axis pressing plate 12, a bearing seat 13 and an X-axis hoop pushing block 14 are arranged on the outer surface of a main shaft main body 11, a hook claw seat 15 is arranged on the top of a hook claw rod 16, and the hook claw seat 15 is arranged on the outer surface of the main shaft main body 11.

The motor support 25 is installed to the bottom of biax motor 24, and spring pull rod 26 is installed to the bottom of motor support 25, and spring pull rod 26 installs the surface at Z axle platen 12.

The side face of the motor support 25 is provided with an induction support 21, the top of the induction support 21 is provided with a first photoelectric sensor 22, the top output end of the double-shaft motor 24 is provided with a rotary induction piece 23, and the bottom outer surface of the cam Z shaft 27 is provided with a deep groove ball bearing 28.

The X-axis sliding block 38 is connected to the bottom of the X-axis base 33 in a sliding manner, the second photoelectric sensor 35 and the X-axis sensing piece 36 are installed on the outer surface of the X-axis sliding block 33, the third photoelectric sensor 37 is installed on the outer surface of the X-axis sliding block 38, the X-axis clamping sensing piece 310 is installed on the bottom of the X-axis sliding block 38, and the guide shaft 39 is installed inside the X-axis sliding block 38.

The outer surface of the pressing mounting plate 41 is provided with a fourth photoelectric sensor 44, the outer surface of the pressing sliding block 46 is provided with a Y adjusting block 47, and the bottom of the Y adjusting block 47 is provided with an X adjusting block 48;

working principle: the first passing assembly 2 is matched with the main shaft main body 11 to realize Z-axis movement, and the rotary sensing piece 23 is matched with the first photoelectric sensor 22 to count the number of rotary circles;

the second passing piece assembly 3 is matched with the main shaft main body 11 to realize X-axis movement, the passing piece X sensing piece 36 is matched with the second photoelectric sensor 35 to count the reciprocating movement times of the X-axis, and the passing piece X clamping sensing piece 310 is matched with the third photoelectric sensor 37 to trigger through the soft limit of a spring during clamping;

the third passing assembly 4 is matched with tin melting and binding parts, and plays a role in fixing a PCB or a base plate, when the PCB or the base plate moves below the tin melting part under the action of the crochet hook 17, the pressing part starts to work, drives the rotating shaft 43 through a motor and drives the pressing eccentric wheel 45 to rotate, applies Z+ force to the cam matching assembly to enable the pressing eccentric wheel to move in the Z+ direction, and after the pressing eccentric wheel 45 passes the highest point, the pressing eccentric wheel moves in the Z-direction under the action of the spring matching assembly and self gravity, so that the pressing piece can realize movement in the Z-axis direction.

In summary, compared with the prior art, the method has the following beneficial effects:

1. the rotating motor 42 of the third passing assembly 4 drives the material pressing eccentric wheel 45 to rotate, so that the Z-axis pressing plate 12 of the main shaft main body 11 realizes Z-axis movement, after passing through the highest point of the cam, the Z-axis pressing plate 12 is driven by a spring to perform +Z movement, the Z-axis pressing plate 12 drives the crochet hook 17 through the main shaft main body 11, so that the crochet hook 17 realizes up-and-down movement in the Z-axis direction, meanwhile, the servo motor 31 of the second passing assembly 3 rotates, the driving toothed belt 32 drives the screw rod 34 to move to realize front-and-back movement of the X-axis, and the main shaft main body 11 is driven to perform X-axis movement, so that the crochet hook 17 realizes X-axis movement, the crochet hook 17 drives the substrate to perform accurate movement, the precision is high, the response speed is high, the stability is good, and the compatibility of equipment is improved by adopting multi-axis adjustment.

It is noted that relational terms such as first and second, and the like are used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Moreover, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising one … …" does not exclude the presence of other like elements in a process, method, article, or apparatus that comprises the element.

The foregoing has shown and described the basic principles and main features of the present utility model and the advantages of the present utility model. It will be understood by those skilled in the art that the present utility model is not limited to the embodiments described above, and that the above embodiments and descriptions are merely illustrative of the principles of the present utility model, and various changes and modifications may be made without departing from the spirit and scope of the utility model, which is defined in the appended claims. The scope of the utility model is defined by the appended claims and equivalents thereof.

Claims

1. A wafer passing assembly comprising;

the device comprises a main shaft assembly (1), and a first sheet passing assembly (2), a second sheet passing assembly (3) and a third sheet passing assembly (4) which are arranged at the top of the main shaft assembly (1);

the method is characterized in that: the main shaft assembly (1) comprises a main shaft main body (11) and a plurality of claw rods (16) arranged on the outer surface of the main shaft main body (11), wherein a crochet hook (17) is arranged at the bottom end of each claw rod (16);

the first sheet passing assembly (2) comprises a double-shaft motor (24) and a cam Z-axis (27) arranged at the output end of the double-shaft motor (24);

the second sheet passing assembly (3) comprises a sheet passing X machine seat (33), a servo motor (31) and a screw rod (34) are arranged in the sheet passing X machine seat (33), a transmission toothed belt (32) is arranged between the servo motor (31) and the screw rod (34), and the outer surface of the screw rod (34) is in threaded connection with a sheet passing X-axis sliding block (38);

the third piece assembly (4) comprises a pressing mounting plate (41) and a pressing sliding block (46) which is connected to the outer surface of the pressing mounting plate (41) in a sliding mode, a rotating motor (42) is installed at one end of the pressing mounting plate (41), a rotating shaft (43) is fixedly installed at the output end of the rotating motor (42), and pressing eccentric wheels (45) which are in contact with each other are installed on the outer surfaces of the rotating shaft (43) and the pressing sliding block (46).

2. The wafer assembly of claim 1, wherein: the novel spindle is characterized in that a Z-axis pressing plate (12), a bearing seat (13) and an X-axis hoop pushing block (14) are arranged on the outer surface of the main spindle body (11), a hook claw seat (15) is arranged at the top of the hook claw rod (16), and the hook claw seat (15) is arranged on the outer surface of the main spindle body (11).

3. The wafer assembly of claim 2, wherein: the bottom of biax motor (24) is installed motor support (25), spring pull rod (26) are installed to the bottom of motor support (25), spring pull rod (26) are installed at the surface of Z axle clamp plate (12).

4. A wafer assembly as defined in claim 3, wherein: the side-mounted induction support (21) of motor support (25), first photoelectric sensor (22) are installed at the top of induction support (21), rotatory induction piece (23) are installed at the top output of biax motor (24), deep groove ball bearing (28) are installed to the bottom surface of cam Z axle (27).

5. The wafer assembly of claim 1, wherein: the X-axis sliding block (38) is slidably connected to the bottom of the X-axis base (33), a second photoelectric sensor (35) and an X-axis sensing piece (36) are mounted on the outer surface of the X-axis base (33), a third photoelectric sensor (37) is mounted on the outer surface of the X-axis sliding block (38), an X-axis clamping sensing piece (310) is mounted on the bottom of the X-axis sliding block (38), and a guide shaft (39) is mounted in the X-axis sliding block (38).

6. The wafer assembly of claim 1, wherein: the outer surface of the material pressing mounting plate (41) is provided with a fourth photoelectric sensor (44), the outer surface of the material pressing sliding block (46) is provided with a Y adjusting block (47), and the bottom of the Y adjusting block (47) is provided with an X adjusting block (48).