CN219300515U

CN219300515U - Gas circuit system and reactor

Info

Publication number: CN219300515U
Application number: CN202223503358.5U
Authority: CN
Inventors: 费腾; 鞠子辰; 周伟杰
Original assignee: Piotech Inc
Current assignee: Piotech Inc
Priority date: 2022-12-27
Filing date: 2022-12-27
Publication date: 2023-07-04
Anticipated expiration: 2032-12-27

Abstract

The utility model provides a gas path system and a reactor, and relates to the technical field of semiconductor reaction equipment. The utility model provides a gas circuit system, comprising: the system comprises an air source, a first control valve and a system main body. The system main body comprises a plurality of valves, all of which are communicated with a gas source, and the gas source can convey high-pressure gas to the valves and open the valves. The first control valve is arranged between the air source and the system main body and controls the on-off between the air source and the system main body. Through setting up the first control valve of break-make between air supply and control air supply and the system main part, after the reactor outage, under the effect of air supply, the valve of system main part still can be in the open state for the reaction vapour can flow in the system main part, compares in prior art, can avoid polluting the system main part because of the condensation of reaction vapour in the system main part, reduces the maintenance time and the cost of reactor.

Description

Gas circuit system and reactor

Technical Field

The utility model relates to the technical field of semiconductor reaction equipment, in particular to a gas path system and a reactor.

Background

Chemical Vapor Deposition (CVD) refers to a process in which chemical gases or vapors react on the surface of a substrate to synthesize a coating or nanomaterial, and is the most widely used technique in the semiconductor industry for depositing a variety of materials.

In general, a reactor for chemical vapor deposition includes a reaction chamber, a gas tank, a gas pipe, and other devices, where reaction gas for reaction is vaporized in the gas tank and then is transferred to the reaction chamber through the gas pipe for reaction, and the gas pipe is disposed on a plurality of valves for controlling on-off of the gas pipe and flow paths of the reaction gas.

When the reactor is powered off, a valve on the gas transmission pipeline is closed, so that vaporized reaction gas can stay in the gas transmission pipeline, and if power supply is not restored in a short time, the reaction gas can be condensed, so that the whole gas transmission pipeline is polluted, the maintenance time and cost of the reactor are increased, and the production is influenced.

Disclosure of Invention

The utility model solves the problems that: after the reactor for chemical vapor deposition is powered off, a valve on the gas transmission pipeline is closed, so that vaporized reaction gas can be retained in the gas transmission pipeline, and the problem that the reaction gas is condensed and pollutes the whole gas transmission pipeline can occur.

(II) technical scheme

In order to solve the above technical problems, an embodiment of an aspect of the present utility model provides an air path system, including: the system comprises an air source, a first control valve and a system main body;

the system body comprises a plurality of valves, all of which are communicated with the gas source, and the gas source can convey high-pressure gas to the valves and open the valves;

the first control valve is arranged between the air source and the system main body and controls the on-off between the air source and the system main body.

Further, the gas source comprises a gas tank for storing high pressure gas;

the gas tank is provided with a gas outlet, and all valves are communicated with the gas outlet.

Further, the device also comprises a first air passage;

one end of the first air path is communicated with the air outlet, and the other end of the first air path is provided with a plurality of branches corresponding to the valves, and the branches are communicated with the corresponding valves;

the first control valve is arranged on the first air path and controls the on-off of the first air path.

Further, a pressure relief opening communicated with the outside is formed in the gas tank.

Further, the device also comprises a pressure relief air circuit;

one end of the pressure relief air channel is communicated with the outside, and the other end of the pressure relief air channel is communicated with the pressure relief opening;

the pressure relief air channel is provided with a pressure relief valve and a second control valve for controlling the on-off of the pressure relief air channel.

Further, the second control valve is a normally open electromagnetic valve.

Further, the first control valve is a normally open electromagnetic valve.

Further, the high-pressure gas is compressed air.

Further, the system main body comprises a gas transmission pipeline, an air extraction pipeline and a vacuum pump;

the gas transmission pipeline and the extraction pipeline are provided with valves;

one end of the air extraction pipeline is communicated with the air transmission pipeline, the other end of the air extraction pipeline is communicated with the outside, and the vacuum pump is arranged on the air extraction pipeline.

The embodiment of the utility model also provides a reactor, which comprises the gas path system in any embodiment.

The utility model has the beneficial effects that:

the utility model provides a gas circuit system, comprising: the system comprises an air source, a first control valve and a system main body. The system body includes a plurality of valves, all of which are in communication with the gas source, which is capable of delivering high pressure gas to the valves and opening the valves. The first control valve is arranged between the air source and the system main body and controls the on-off between the air source and the system main body.

Through setting up the first control valve of break-make between air supply and control air supply and the system main part, after the reactor outage, under the effect of air supply, the valve of system main part still can be in the open state for the reaction vapour can flow in the system main part, compares in prior art, can avoid polluting the system main part because of the condensation of reaction vapour in the system main part, reduces the maintenance time and the cost of reactor.

Drawings

In order to more clearly illustrate the embodiments of the present utility model or the technical solutions in the prior art, the drawings that are needed in the description of the embodiments or the prior art will be briefly described, and it is obvious that the drawings in the description below are some embodiments of the present utility model, and other drawings can be obtained according to the drawings without inventive effort for a person skilled in the art.

Fig. 1 is a schematic structural diagram of a reactor according to an embodiment of the present utility model.

Icon: 1-a system body; 11-a gas transmission pipeline; 12-an air extraction pipeline; 13, an air box; 14-valve islands; 15-valve; 16-a vacuum pump;

2-air source; 21-a gas tank;

3-a first control valve;

4-a first air path;

51-a pressure relief air path; 52-a pressure relief valve; 53-a second control valve;

6-reaction chamber.

Detailed Description

The technical solutions of the present utility model will be clearly and completely described in connection with the embodiments, and it is apparent that the described embodiments are some embodiments of the present utility model, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.

It should be noted that, in the description of the present utility model, the directions or positional relationships indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. are based on the directions or positional relationships shown in the drawings, are merely for convenience of describing the present utility model and simplifying the description, and do not indicate or imply that the apparatus or elements referred to must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the present utility model. Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.

It should be noted that, in the description of the present utility model, the terms "connected" and "mounted" should be understood in a broad sense, and for example, may be a fixed connection, a detachable connection, or an integral connection; can be directly connected or connected through an intermediate medium; either mechanically or electrically. The specific meaning of the above terms in the present utility model can be understood by those of ordinary skill in the art according to the specific circumstances.

As shown in fig. 1, an embodiment of the present utility model provides an air path system, which includes an air source 2, a first control valve 3, and a system body 1. The system body 1 comprises a plurality of valves 15, all of the valves 15 being in communication with the gas source 2, the gas source 2 being capable of delivering high pressure gas to the valves 15 and opening the valves 15. The first control valve 3 is arranged between the air source 2 and the system main body 1, and controls the on-off between the air source 2 and the system main body 1.

The gas path system provided by the embodiment of the utility model is used for supplying gas to the reaction cavity 6 for chemical vapor deposition and extracting air in the reaction cavity 6, so that the reaction cavity 6 is in a vacuum state, and the normal operation of the reaction in the reaction cavity 6 is ensured to be influenced.

In this embodiment, the gas circuit system includes a gas source 2, a first control valve 3, and a system body 1. The system main body 1 comprises a gas transmission pipeline 11 for supplying gas to the reaction cavity 6, and a suction pipeline 12 for sucking out air in the reaction cavity 6, the system main body 1 comprises a plurality of valves 15, the valves 15 are respectively arranged on the gas transmission pipeline 11 and the suction pipeline 12, the gas circuit system further comprises valve islands 14, and the valves 15 are pressurized through the valve islands 14 to control the opening or closing of the valves 15. The gas source 2 is capable of delivering high pressure gas to each valve 15, i.e. supplying pressure to each valve 15 to open the valve 15; the first control valve 3 is arranged between the air source 2 and the system main body 1 and is used for controlling the on-off path between the air source 2 and the system main body 1.

When the reactor is suddenly powered off, the valve island 14 cannot continuously supply pressure to each valve 15 of the system main body 1, at this time, the valve 15 is closed, so that reaction gas stays in the system main body 1, at this time, the first control valve 3 is opened, so that the gas source 2 can deliver high-pressure gas to each valve 15, the valve 15 of the system main body 1 is changed from a closed state to an open state, so that the reaction gas can flow in the system main body 1, and the reaction gas staying in the system main body 1 can leave the system main body 1 by arranging a pump or sweeping, so that the pollution of the system main body 1 caused by the reaction gas staying in the system main body 1 and condensation is avoided.

According to the gas circuit system provided by the embodiment of the utility model, the gas source 2 and the first control valve 3 for controlling the on-off between the gas source 2 and the system main body 1 are arranged, when the reactor is powered off, the valve 15 of the system main body 1 can still be in an open state under the action of the gas source 2, so that the reaction gas can flow in the system main body 1, and compared with the prior art, the pollution to the system main body 1 caused by condensation of the reaction gas in the system main body 1 can be avoided, and the maintenance time and cost of the reactor are reduced.

As shown in fig. 1, in the gas path system provided by the embodiment of the present utility model, the gas source 2 includes a gas tank 21, and the gas tank 21 is used for storing high-pressure gas. The gas tank 21 has a gas outlet, and all the valves 15 are communicated with the gas outlet.

In this embodiment, the air source 2 is an air tank 21, which has a simple structure and low cost. The gas tank 21 stores high-pressure gas, which is high-pressure gas having a pressure higher than the atmospheric pressure by more than one atmosphere. I.e. the gas with absolute pressure greater than two atmospheres is a high pressure gas. Typically barometers show a pressure greater than one atmosphere (this is the pressure relative to the atmosphere).

In this embodiment, in use, the first control valve 3 is opened, high-pressure gas in the gas tank 21 flows to each valve 15 of the system main body 1 under the action of pressure, and the valve 15 is lifted up, so that the valve 15 is in an open state, and reaction gas can flow in the system main body 1, so that subsequent processing is facilitated.

It will be appreciated that in this embodiment, the air source 2 may also be an air pump, and by operating the air pump, high pressure air is generated and delivered to the valves 15 of the system main body 1, which also can function as a jacking valve 15.

As shown in fig. 1, specifically, the gas circuit system further includes a first gas circuit 4, where one end of the first gas circuit 4 is communicated with the gas tank 21, and the other end of the first gas circuit has a plurality of branches corresponding to the valves 15, and the branches are communicated with the corresponding valves 15. The first control valve 3 is disposed on the first air path 4 and controls on-off of the first air path 4.

In this embodiment, the gas path system includes a first gas path 4, where the first gas path 4 is used to communicate the gas tank 21 with each valve 15 of the system main body 1, one end of the first gas path 4 is communicated with the gas outlet of the gas tank 21, and multiple branches are formed at the other end, and the branches are in one-to-one correspondence with the valves 15 of the system main body 1, that is, each valve 15 corresponds to one branch. The branch is communicated with the corresponding valve 15, and can convey high-pressure gas to the corresponding valve 15 so as to jack the corresponding valve 15, so that the valve 15 of the system main body 1 is changed from a closed state to an open state, the system main body 1 is in a passage, and reaction steam in the system main body 1 can flow in the system main body 1, thereby facilitating subsequent operation.

It can be understood that in this embodiment, the air tanks 21 may also be provided with a plurality of air outlets, where the air outlets are in one-to-one correspondence with the valves 15 of the system main body 1, and the air outlets are communicated with the corresponding valves 15, so that the purpose of conveying high-pressure air to each valve 15 by the air tanks 21 in this embodiment can be achieved.

Optionally, in this embodiment, the high-pressure gas is compressed air, which is convenient to obtain and has low cost.

It will be appreciated that in this embodiment, the high pressure gas may also be a compressed inert gas such as helium or nitrogen.

In the gas circuit system provided by the embodiment of the utility model, as shown in fig. 1, a pressure relief opening communicated with the outside is formed in the gas tank 21.

In this embodiment, the gas tank 21 is further provided with a pressure relief port for releasing pressure, so as to close each valve 15 of the system main body 1 in time, and avoid the backflow of the reaction gas.

Specifically, when the reactor is powered off, the first control valve 3 is opened, compressed air stored in the air tank 21 is delivered to each valve 15 of the system main body 1, and each valve 15 of the system main body 1 is opened, and then, reaction vapor retained in the system main body 1 is pumped out by the vacuum pump 16; in this process, the pressure relief opening is opened and the pressure in the gas tank 21 starts to be relieved, the pressure of the compressed air in the gas tank 21 gradually cannot open the valves 15 of the system main body 1 under the action of the pressure relief opening, at this time, the valves 15 of the system main body 1 start to be closed, so that the reaction gas pumped by the vacuum pump 16 is prevented from flowing back into the system main body 1, and the system main body 1 is prevented from being polluted due to condensation of the reaction gas in the system main body 1.

The air circuit system provided by the embodiment of the utility model, specifically, as shown in fig. 1, further includes a pressure release air circuit 51. One end of the pressure relief air channel 51 is communicated with the outside, and the other end is communicated with the pressure relief opening. The pressure relief air channel 51 is provided with a pressure relief valve 52 and a second control valve 53 for controlling the on-off of the pressure relief air channel 51.

In this embodiment, one end of the pressure relief air path 51 is communicated with the outside, the other end is communicated with the pressure relief opening, and the pressure relief air path 51 is sequentially provided with a pressure relief valve 52 and a second control valve 53 along the direction from the pressure relief opening to the outside. In normal use, the second control valve 53 is in a closed state; when the power is turned off, the second control valve 53 is opened, and the gas tank 21 starts to gradually depressurize until the pressure of the compressed air in the gas tank 21 fails to open the respective valves 15 of the system main body 1 by the pressure release valve 52.

Alternatively, in the present embodiment, the second control valve 53 is a normally open solenoid valve, that is, when energized, the second control valve 53 is in a closed state, and when deenergized, the second control valve 53 is turned into an open state.

In this embodiment, the second control valve 53 can be directly connected to the circuit system of the reactor by using the practical normally open electromagnetic valve as the second control valve 53, and an independent power supply circuit is not required to be provided for the second control valve 53, so that the cost can be reduced, and the valves 15 of the system main body 1 can be automatically adjusted according to the condition of the reactor, so that the reaction steam is prevented from flowing back.

According to the air path system provided by the embodiment of the utility model, optionally, the first control valve 3 is a normally open electromagnetic valve.

In this embodiment, the first control valve 3 is in a closed state when the reactor is normally used, and the first control valve 3 is turned to an open state when the reactor is powered off.

In this embodiment, by using the normally open electromagnetic valve as the first control valve 3, the first control valve 3 can be directly connected to the circuit system of the reactor, and a separate power supply circuit is not required to be provided for the first control valve 3, so that the cost can be reduced, the reaction is timely, the reaction steam is prevented from being retained in the system main body 1, and the system main body 1 is prevented from being polluted due to condensation of the reaction steam.

In the air path system provided by the embodiment of the utility model, as shown in fig. 1, the system main body 1 includes an air conveying pipeline 11, an air extracting pipeline 12 and a vacuum pump 16. The valve 15 is disposed on the gas transmission pipeline 11 and the air extraction pipeline 12. One end of the air extraction pipeline 12 is communicated with the air transmission pipeline 11, the other end of the air extraction pipeline is communicated with the outside, and the vacuum pump 16 is arranged on the air extraction pipeline 12.

In this embodiment, the gas circuit system is applied to a reactor having a reaction chamber 6, and chemical vapor deposition can be performed in the reaction chamber 6. The system main body 1 further comprises a gas tank 13, wherein a liquid reaction source is stored in the gas tank 13, and the liquid reaction source is vaporized and converted into reaction steam by heating the liquid reaction source.

In the present embodiment, the system main body 1 mainly includes a gas delivery line 11, a suction line 12, and a vacuum pump 16. The gas transmission pipeline 11 is used for transmitting the reaction gas in the gas tank 13 into the reaction cavity 6, and the air extraction pipeline 12 is used for extracting the air in the reaction cavity 6, so that the reaction cavity 6 is in a vacuum state. The reaction gas is retained in the system main body 1, i.e., mainly retained in the gas delivery pipeline 11 and the gas exhaust pipeline 12. And heating structures, such as electric heating wires and the like, are further arranged on the gas transmission pipeline 11 and the air extraction pipeline 12 and are used for heating the gas transmission pipeline 11 and the air extraction pipeline 12, so that reaction steam is condensed in the gas transmission pipeline 11 and the air extraction pipeline 12 when the gas transmission pipeline is avoided.

In this embodiment, one end of the gas transmission pipeline 11 is communicated with the gas tank 13, the other end is communicated with the reaction chamber 6, and a plurality of valves 15 are arranged on the gas transmission pipeline 11, and the valves 15 are used for controlling the on-off of the gas transmission pipeline 11, changing the flow path of the reaction gas, and the like. The valves 15 on the gas transmission pipeline 11 are communicated with the valve islands 14, and the on-off of the valves 15 is controlled through the valve islands 14. The reaction gas formed in the gas box 13 is conveyed into the reaction chamber 6 through the gas conveying pipeline 11.

In this embodiment, one end of the pumping pipe 12 is connected to the reaction chamber 6, the other end is connected to the outside, and the vacuum pump 16 is disposed at one end of the pumping pipe 12 away from the reaction chamber 6. Similarly, a plurality of valves 15, such as a temperature control valve, a gate valve and the like, are arranged on the air extraction pipeline 12, and the valves 15 on the air extraction pipeline 12 are also communicated with the valve islands 14, and the on-off of the valves 15 is controlled through the valve islands 14. In use, air in the reaction chamber 6 can be evacuated by the vacuum pump 16.

In this embodiment, after the reactor is powered off, the valves 15 on the gas delivery pipeline 11 and the gas extraction pipeline 12 are still kept in an open state under the action of the gas source 2, and at this time, the reaction gas retained in the gas extraction pipeline 12 and the gas delivery pipeline 11 can be extracted by the vacuum pump 16, so that condensation of the reaction gas in the gas delivery pipeline 11 and the gas extraction pipeline 12 is avoided, and the gas delivery pipeline 11 and the gas extraction pipeline 12 are polluted.

In this embodiment, the specific composition of the liquid reaction source is known in the art, and will not be described herein.

In normal use, the gas circuit system provided by the embodiment of the utility model is characterized in that a liquid reaction source in a gas phase is heated and vaporized to form reaction gas, the reaction gas is conveyed into the reaction cavity 6 through the gas transmission pipeline 11, and meanwhile, the vacuum pump 16 works to pump out air in the reaction cavity 6, so that the reaction cavity 6 is in a vacuum state. When the reactor is powered off, the first normally open electromagnetic valve (the first control valve 3) and the second normally open electromagnetic valve (the second control valve 53) are changed from the closed state to the open state, compressed air in the air tank 21 passes through the first air passage 4 to each valve 15 of the system main body 1, and the valves 15 of the system main body 1 are opened, and then, reaction steam retained in the system main body 1 is pumped out through the vacuum pump 16, so that the reaction steam is prevented from condensing in the system main body 1 to pollute the system main body 1.

The vacuum pump 16 and the system main body 1 do not share a power supply system, that is, after the reactor is powered off, the valve island 14 controls the valve 15 of the system main body 1 to supply power, but the vacuum pump 16 is not affected.

As shown in fig. 1, another embodiment of the present utility model further provides a reactor, including the gas path system described in any one of the foregoing embodiments.

Finally, it should be noted that: the above embodiments are only for illustrating the technical solution of the present utility model, and not for limiting the same; although the utility model has been described in detail with reference to the foregoing embodiments, it will be understood by those of ordinary skill in the art that: the technical scheme described in the foregoing embodiments can be modified or some or all of the technical features thereof can be replaced by equivalents; such modifications and substitutions do not depart from the spirit of the utility model.

Claims

1. A gas circuit system, comprising: a gas source (2), a first control valve (3) and a system main body (1);

the system main body (1) comprises a plurality of valves (15), all the valves (15) are communicated with the gas source (2), and the gas source (2) can convey high-pressure gas to the valves (15) and open the valves (15);

the first control valve (3) is arranged between the air source (2) and the system main body (1) and controls the on-off between the air source (2) and the system main body (1).

2. The gas circuit system according to claim 1, wherein the gas source (2) comprises a gas tank (21), the gas tank (21) being adapted to store high pressure gas;

the gas tank (21) is provided with a gas outlet, and all the valves (15) are communicated with the gas outlet.

3. The gas circuit system according to claim 2, further comprising a first gas circuit (4);

one end of the first air channel (4) is communicated with the air outlet, and the other end of the first air channel is provided with a plurality of branches corresponding to the valves (15), and the branches are communicated with the corresponding valves (15);

the first control valve (3) is arranged on the first air passage (4) and controls the on-off of the first air passage (4).

4. The gas circuit system according to claim 2, wherein a pressure relief port communicated with the outside is formed in the gas tank (21).

5. The gas circuit system according to claim 4, further comprising a pressure relief gas circuit (51);

one end of the pressure relief air channel (51) is communicated with the outside, and the other end of the pressure relief air channel is communicated with the pressure relief opening;

the pressure relief air channel (51) is provided with a pressure relief valve (52) and a second control valve (53) for controlling the on-off of the pressure relief air channel (51).

6. A gas circuit system according to claim 5, wherein the second control valve (53) is a normally open solenoid valve.

7. A gas circuit system according to any one of claims 1 to 6, wherein the first control valve (3) is a normally open solenoid valve.

8. A gas circuit system according to claim 1, wherein the high pressure gas is compressed air.

9. The gas circuit system according to claim 1, wherein the system body (1) comprises a further gas line (11), a suction line (12) and a vacuum pump (16);

the gas transmission pipeline (11) and the air extraction pipeline (12) are provided with the valves (15);

one end of the air extraction pipeline (12) is communicated with the air transmission pipeline (11), the other end of the air extraction pipeline is communicated with the outside, and the vacuum pump (16) is arranged on the air extraction pipeline (12).

10. A reactor comprising a gas circuit system as claimed in any one of claims 1 to 9.