CN219285259U - Broadband radio frequency probe based on coaxial gradual change connection - Google Patents
Broadband radio frequency probe based on coaxial gradual change connection Download PDFInfo
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- CN219285259U CN219285259U CN202223169709.3U CN202223169709U CN219285259U CN 219285259 U CN219285259 U CN 219285259U CN 202223169709 U CN202223169709 U CN 202223169709U CN 219285259 U CN219285259 U CN 219285259U
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- 239000000523 sample Substances 0.000 title claims abstract description 133
- 230000005540 biological transmission Effects 0.000 claims abstract description 14
- 238000003860 storage Methods 0.000 claims description 4
- 230000007704 transition Effects 0.000 claims description 2
- 238000003780 insertion Methods 0.000 abstract description 7
- 230000037431 insertion Effects 0.000 abstract description 7
- 230000008054 signal transmission Effects 0.000 description 8
- 125000006850 spacer group Chemical group 0.000 description 8
- 238000012360 testing method Methods 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- -1 polytetrafluoroethylene Polymers 0.000 description 4
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 4
- 239000004810 polytetrafluoroethylene Substances 0.000 description 4
- 238000000034 method Methods 0.000 description 3
- 235000012431 wafers Nutrition 0.000 description 3
- 229910001369 Brass Inorganic materials 0.000 description 2
- 239000010951 brass Substances 0.000 description 2
- 239000004973 liquid crystal related substance Substances 0.000 description 2
- 230000002146 bilateral effect Effects 0.000 description 1
- 230000002860 competitive effect Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 238000012827 research and development Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- 238000004513 sizing Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02D—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN INFORMATION AND COMMUNICATION TECHNOLOGIES [ICT], I.E. INFORMATION AND COMMUNICATION TECHNOLOGIES AIMING AT THE REDUCTION OF THEIR OWN ENERGY USE
- Y02D30/00—Reducing energy consumption in communication networks
- Y02D30/70—Reducing energy consumption in communication networks in wireless communication networks
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Abstract
The utility model relates to a broadband radio frequency probe based on coaxial gradual change connection, which comprises a shell, a connector and a probe, wherein an accommodating groove is formed in the shell, the connector is arranged in the accommodating groove and connected with the probe, electromagnetic signals enter from the front end of the connector and are transmitted to a device to be tested through the probe, the connector comprises a plurality of cylinders with different radiuses and a frustum, the cylinders comprise at least one front end cylinder and at least one rear end cylinder, the frustum is connected between the front end cylinder and the rear end cylinder to form a transitional gradual change structure, and the radius of the front end cylinder is larger than that of the rear end cylinder. The probe is connected with the connector of the gradual change structure through the coplanar waveguide, so that impedance matching (S11\S22) at 0-43.5GHz is lower than-25 dB, insertion loss (S12\S21) is higher than-1 dB, the probe has good transmission function, reusability and good signal shielding property, loss in the transmission process can be effectively reduced, the structure is simple, and investment cost is effectively reduced.
Description
Technical Field
The utility model relates to the technical field of electromagnetic wave transmission and electronic detection, in particular to a broadband radio frequency probe based on coaxial gradual change connection.
Background
With the development of scientific technology, the semiconductor industry is long and will continue to occupy an important place in the national comprehensive competitive power and the daily life of residents, wherein the digital product processor chip and the radio frequency device chip are important products. In the production and manufacturing links of chips, the on-chip test of the wafers and the chip test of the radio frequency devices are carried out through the radio frequency probes, the radio frequency characteristic parameters of the wafers and the radio frequency devices are extracted to detect the quality and the debugging performance of the chips, and the method is an important link for shortening the research and development production period and rapidly analyzing and positioning problems.
The working bandwidth of the rf probe for performing wafer level testing needs to have high accuracy, low loss, and high repeatability. Currently, RF probes in the 300MHz to 300GHz frequency range are designed and manufactured for the world by German GGB industries and Cascade, U.S. A. However, its high price increases the production costs of the enterprise due to the lack of options; the loss of the product is not reduced to the extreme extent within the range of 40-50 GHz.
Disclosure of Invention
In view of the foregoing, it is necessary to provide a broadband radio frequency probe based on coaxial gradual change connection, which has a simple structure, can effectively reduce transmission loss, save cost and improve efficiency.
The utility model provides a broadband radio frequency probe based on coaxial gradual change is connected, includes shell, connector, probe, be equipped with the storage tank in the shell, the connector is arranged in the storage tank with the probe is connected, electromagnetic signal gets into from the connector front end and passes through the probe transmission to the device that awaits measuring, the connector includes a plurality of cylinders and the frustum of radius variation, the cylinder includes at least one front end cylinder and at least one rear end cylinder, the frustum connect in the front end cylinder with form transition gradual change structure between the rear end cylinder, the radius of front end cylinder is greater than the radius of rear end cylinder.
Further, the front end cylinder is a first cylinder, the number of the rear end cylinders is two, the rear end cylinder comprises a second cylinder and a third cylinder, and each cylinder is coaxial with the frustum.
Further, the first column body is divided into a first front end and a first rear end, the second column body is divided into a second front end and a second rear end, the third column body is divided into a third front end and a third rear end, the frustum is connected between the first rear end of the first column body and the second front end of the second column body, and the third rear end of the third column body is connected with the probe.
Further, the radius of the first cylinder is larger than that of the second cylinder, the first front end of the first cylinder is provided with an adapter, the electromagnetic wave signal enters from the adapter, and the first front end of the first cylinder is the front end of the connector.
Further, the length of the first cylinder is respectively greater than the length of the second cylinder and the length of the frustum so as to adjust the bandwidth and the working frequency thereof.
Further, the radius of the front end and the rear end of the frustum is respectively the same as the radius of the first rear end of the first cylinder and the radius of the second front end of the second cylinder, and the radius of the second cylinder is larger than or equal to the radius of the third cylinder.
Further, the connector is further provided with a connecting cylinder, and the connecting cylinder is hollow and sleeved at the joint of the second rear end of the second cylinder and the third front end of the third cylinder, so that the connector is always in an accurate position.
Further, the probe comprises three probe sheets arranged side by side, an S signal line probe sheet is arranged in the middle, G signal line probe sheets are arranged on the left side and the right side, G signals are grounded through the shell, and the S signal line probe sheet is fixedly connected with the third rear end of the third column body to receive conducted electromagnetic signals.
Further, two the G signal line probe piece afterbody is kept away from the terminal surface of S signal line probe piece has been seted up the tail groove, two the G signal line probe piece afterbody is towards the terminal surface of S signal line probe piece has been seted up the sink groove, two the G signal line probe piece corresponds towards the terminal surface of S signal line probe piece has been seted up the notch, the notch is close to the afterbody of S signal line probe piece, two the G signal line probe piece is kept away from S signal line probe piece terminal surface edge is equipped with the tilting part, two each groove that the G signal line probe piece shape size was offered is the same, and is bilateral symmetry and locates S signal line probe piece both sides.
Further, the probe is further provided with two gaskets, the gaskets are respectively clamped on the upper side and the lower side of the probe, and the gaskets and the notch are used for jointly adjusting the impedance matching of the probe.
According to the broadband radio frequency probe based on coaxial gradual change connection, the connector and the probe are arranged in the accommodating groove, the connector comprises the cylinders and the frustum with different radiuses, the connector is of the conical gradual change structure, the connector of the gradual change structure can reduce the loss caused by electromagnetic waves in the transmission process, the cylinders comprise the front end cylinder and the rear end cylinder, the frustum is connected between the front end cylinder and the rear end cylinder to form the transitional gradual change structure, the loss of the electromagnetic waves caused by the change of the coaxial radiuses in the transmission process can be effectively reduced, electromagnetic signals enter through the adapter at one end of the connector, the connector of the gradual change structure and the probe are transmitted to a device to be tested, the connector of the gradual change structure can reduce the loss in the electromagnetic signal transmission process so as to realize lower return loss and insertion loss, the probe is connected with the connector of the gradual change structure through the coplanar waveguide, the impedance matching (S11/S22) at 0-43.5GHz is lower than-25 dB, the insertion loss (S12/S21-1) is greatly utilized, the signal transmission cost is reduced, the signal transmission efficiency is good, the signal transmission efficiency is reduced, and the investment is easy, and the signal transmission cost is reduced.
Drawings
The accompanying drawings, which are included to provide a further understanding of embodiments of the utility model and are incorporated in and constitute a part of this specification, illustrate embodiments of the utility model and together with the description serve to explain the principles of the utility model. It is evident that the figures in the following description are only some embodiments of the utility model, from which other figures can be obtained without inventive effort for a person skilled in the art. In the drawings:
fig. 1 is a schematic diagram of a broadband radio frequency probe structure based on coaxial gradual change connection according to the present utility model.
Fig. 2 is a schematic view of the structure of the present utility model with the housing removed.
Fig. 3 is a schematic view of the structure of the present utility model with the housing and gasket removed.
Fig. 4 is a schematic illustration of a broadband radio frequency probe dimensioning based on coaxial taper connection according to the utility model.
FIG. 5 is a schematic illustration of the sizing of a probe according to the present utility model.
Fig. 6 is a graph of S signal line probe tile parameters measured by HFSS simulation software.
Wherein, the liquid crystal display device comprises a liquid crystal display device,
100 broadband radio frequency probes based on coaxial gradual change connection;
20 a housing;
30 probes: 31S signal line probe sheet, 32G signal line probe sheet, 33 tail groove, 34 notch, 35 sink groove, 36 inclined part, 37 gasket;
40 connector: 41 adapter, 42 first column: 421 first front end, 422 first back end; 43 second column: 431 a second front end, 432 a second rear end; 44 third column: 441 third front end, 442 third rear end; 45 frustum, 46 connecting cylinder.
Detailed Description
It is to be understood that the terminology used herein, the specific structural and functional details disclosed are merely representative for the purpose of describing particular embodiments, but that the utility model may be embodied in many alternate forms and should not be construed as limited to only the embodiments set forth herein.
The present utility model will be described in detail with reference to specific embodiments and drawings.
Referring to fig. 1, 2, 4, 5 and 6, a broadband radio frequency probe 100 based on coaxial gradual change connection provided by the utility model comprises a housing 20, a connector 40 and a probe 30, wherein a containing groove is arranged in the housing 20, the connector 40 is arranged in the containing groove and connected with the probe 30, electromagnetic signals enter from the front end of the connector 40 and are transmitted to a device to be tested through the probe 30, the connector 40 comprises a plurality of cylinders with different radiuses and a frustum 45, the cylinders comprise at least one front end cylinder and at least one rear end cylinder, the frustum 45 is connected between the front end cylinder and the rear end cylinder to form a transitional gradual change structure, and the radius of the front end cylinder is larger than that of the rear end cylinder. The connector 40 with the gradual change structure can reduce the loss caused by electromagnetic waves in the transmission process, the frustum 45 is connected between the front end column body and the rear end column body to form a transitional gradual change structure, so that the loss caused by the change of the coaxial radius of the electromagnetic waves in the transmission process can be effectively reduced, the shell 20 is preferably made of brass, and the brass shell 20 is used as a supporting structure of the probe 30 for loading the probe 30 and the connector 40; the gradual change structure of the connector 40 and the characteristic impedance of the probe 30 in the electromagnetic signal transmission path are close to 50 ohms, and the working frequency is 0GHz-43.5GHz.
Specifically, the front end columns are first columns 42, and the rear end columns are two, including second columns 43 and third columns 44, each of which is coaxial with the frustum 45.
Specifically, the first column 42 is divided into a first front end 421 and a first rear end 422, the second column 43 is divided into a second front end 431 and a second rear end 432, the third column 44 is divided into a third front end 441 and a third rear end 442, the frustum 45 is connected between the first rear end 422 and the second front end 431, and the third rear end 442 is connected with the probe 30. The radius of the first cylinder 42 is 1.2mm, the radius of the second cylinder 43 is 0.55mm, and the radius of the third cylinder 44 is 0.38mm.
Specifically, the first front end 421 of the first column 42 has an adapter 41, the electromagnetic wave signal enters from the adapter 41, and the first front end 421 of the first column 42 is the front end of the connector 40. The impedance matching characteristics can be effectively adjusted by adjusting the radius of each cylinder.
Specifically, the length of the first cylinder 42 is greater than the length of the second cylinder 43 and the length of the frustum 45, respectively, so as to adjust the bandwidth and the operating frequency thereof. The length of the first column 42 is preferably 5mm, and the lengths of the second column 43 and the frustum 45 are each preferably 3mm.
Specifically, the radii of the front and rear ends of the frustum 45 are respectively the same as the radius of the first rear end 422 of the first cylinder 42 and the radius of the connecting end of the second front end 431 of the second cylinder 43, and the radius of the second cylinder 43 is greater than or equal to the radius of the third cylinder 44.
Specifically, the connector 40 further has a connecting cylinder 46, and the connecting cylinder 46 is hollow and sleeved at a connection position between the second rear end 432 of the second post 43 and the third front end 441 of the third post 44, so that the connector 40 is always in an accurate position. The impedance matching characteristics of the connector 40 can be adjusted by adjusting the radius of the connecting tube 46, and the bandwidth and operating frequency of the connector 40 can be adjusted by adjusting the length of the connecting tube 46, wherein the connecting tube 46 is preferably made of polytetrafluoroethylene material with a dielectric constant of 2.1.
Specifically, the probe 30 includes three probe tiles arranged side by side, an S signal line probe tile 31 in the middle, and G signal line probe tiles 32 on the left and right sides, where the G signal is grounded through the housing 20, and the S signal line probe tile 31 is fixedly connected to the third rear end 442 of the third column 44 to receive the conducted electromagnetic signal. The probe 30 is preferably a metallic material.
Specifically, tail grooves 33 are formed in the end faces, away from the S signal line probe sheet 31, of the tail portions of the two G signal line probe sheets 32, sinking grooves 35 are formed in the end faces, facing the S signal line probe sheet 31, of the tail portions of the two G signal line probe sheets 32, notch 34 is formed in the end faces, facing the S signal line probe sheet 31, of the two G signal line probe sheets 32 correspondingly, the notch 34 is close to the tail portion of the S signal line probe sheet 31, inclined portions 36 are formed in the edges, away from the end faces of the S signal line probe sheet 31, of the two G signal line probe sheets 32, and the grooves formed in the shape, size and arrangement of the two G signal line probe sheets 32 are identical and are symmetrically arranged on two sides of the S signal line probe sheet 31. The two sinking grooves 35 prevent the connector 40 from contacting the probe 30, and the two tail grooves 33 can improve impedance matching and prevent the S-signal line probe sheet 31 from being grounded.
Specifically, the probe 30 is further provided with two gaskets 37, the two gaskets 37 are respectively clamped on the upper side and the lower side of the probe 30, and the gaskets 37 and the notch 34 jointly adjust the impedance matching of the probe 30. The notch 34 can counteract the change of the impedance matching characteristic caused by the spacer 37 above and below the probe 30, the spacer 37 is used for fixing the probe 30, avoiding deformation and displacement of the probe 30 during use, and further reducing the loss of electromagnetic signals when transmitting on the probe 30, the spacer 37 is a square spacer, the bandwidth, the working frequency and the impedance matching characteristic of the spacer 37 are adjusted by adjusting the size of the spacer 37, and the spacer 37 is preferably made of polytetrafluoroethylene material with a dielectric constant of 2.1.
In the broadband radio frequency probe 100 based on coaxial gradual change connection, the connector 40 and the probe 30 are placed in the accommodating groove, the connector 40 comprises a plurality of cylinders and a frustum 45 with different radiuses, the connector 40 is in a conical gradual change structure, the connector 40 of the gradual change structure can reduce loss caused by electromagnetic waves in the transmission process, the cylinders comprise a front cylinder and a rear cylinder, the frustum 45 is connected between the front cylinder and the rear cylinder to form a transitional gradual change structure, loss caused by coaxial radius change of the electromagnetic waves in the transmission process can be effectively reduced, electromagnetic signals enter through an adapter 41 at one end of the connector 40, and are transmitted to a device to be tested through the connector 40 and the probe 30, the connector 40 of the gradual change structure and a gasket 37 of polytetrafluoroethylene material with a dielectric constant of 2.1 can reduce loss in the electromagnetic signal transmission process, so that lower return loss and insertion loss are realized, and the gradual change structure of the connector 40 and the probe 30 in the electromagnetic signal transmission path have an ohmic characteristic impedance of approximately 0.5 GHz to 43 GHz at each place; the probe 30 is provided with different grooves, the bandwidth, the working frequency and the impedance matching of the probe 30 are adjusted by adjusting the length and the size of the grooves, the probe 30 is also provided with a gasket 37 made of polytetrafluoroethylene material with a dielectric constant of 2.1, and the bandwidth, the working frequency and the impedance matching characteristic of the probe are adjusted by adjusting the size of the gasket 37; the connecting cylinder 46 is sleeved at the connection position between the second rear end 432 of the second cylinder 43 and the third front end 441 of the third cylinder 44, the impedance matching characteristic of the connector 40 can be adjusted by adjusting the radius of the connecting cylinder 46, the bandwidth and the working frequency of the connector 40 can be adjusted by adjusting the length of the connecting cylinder 46, and the probe 30 is connected with the connector 40 in a gradual change structure through a coplanar waveguide, so that the impedance matching (S11\S22) at 0-43.5GHz is lower than-25 dB, the insertion loss (S12\S21) is higher than-1 dB, the transmission function is good, the repeated use performance and the signal shielding performance are good, the loss in the transmission process can be effectively reduced, the structure is simple, and the investment cost is effectively reduced.
The performance of the broadband radio frequency probe based on the coaxial gradual change connection is further described in combination with experiments:
the specific dimensions of the broadband radio frequency probe based on coaxial taper connection are shown in the table.
Units: millimeter (mm)
Referring to fig. 4, 5 and 6, the length, radius and size of the connector 40 and the spacer 37 of the broadband rf probe 100 based on the coaxial gradient connection are shown to show S parameters measured by HFSS simulation software, and it can be seen from the figure that the working range (s11\s22 < -25 dB) of the broadband rf probe 30 of the broadband rf probe 100 connector 40 based on the coaxial gradient connection is 0GHz-43.5GHz, the bandwidth is 50%, and the insertion loss in the passband is smaller than 0.6dB.
As can be seen from the test results, the broadband radio frequency probe 100 based on coaxial gradual change connection provided by the utility model realizes lower return loss and insertion loss of the chip test frequency band of 0GHz-43.5GHz, and has excellent performance.
The above description of the utility model in connection with specific alternative embodiments is further detailed and it is not intended that the utility model be limited to the specific embodiments disclosed. It will be apparent to those skilled in the art that several simple deductions or substitutions may be made without departing from the spirit of the utility model, and these should be considered to be within the scope of the utility model.
Claims (10)
1. The utility model provides a broadband radio frequency probe based on coaxial gradual change is connected, includes shell, connector, probe, its characterized in that is equipped with the storage tank in the shell, the connector is arranged in the storage tank with the probe is connected, electromagnetic signal gets into from the connector front end and passes through the probe transmission to the device that awaits measuring, the connector includes a plurality of cylinders and the frustum that the radius is different, the cylinder includes at least one front end cylinder and at least one rear end cylinder, the frustum connect in front end cylinder with form transition gradual change structure between the rear end cylinder, the radius of front end cylinder is greater than the radius of rear end cylinder.
2. The broadband radio frequency probe based on coaxial gradient connection according to claim 1, wherein the front end cylinder is a first cylinder, the rear end cylinder is two, and the broadband radio frequency probe comprises a second cylinder and a third cylinder, and each cylinder is coaxial with the frustum.
3. The broadband radio frequency probe based on coaxial gradient connection according to claim 2, wherein the first column is divided into a first front end and a first rear end, the second column is divided into a second front end and a second rear end, the third column is divided into a third front end and a third rear end, the frustum is connected between the first rear end and the second front end, and the third rear end is connected with the probe.
4. The broadband radio frequency probe based on coaxial gradient connection according to claim 3, wherein the first front end of the first cylinder has an adapter from which electromagnetic wave signals enter, and the first front end of the first cylinder is the front end of the connector.
5. The broadband radio frequency probe based on coaxial gradient connection according to claim 3, wherein the length of the first cylinder is greater than the length of the second cylinder and the length of the frustum, respectively, to adjust the bandwidth and the operating frequency thereof.
6. The broadband radio frequency probe based on coaxial gradual change connection according to claim 3, wherein the radius of the front and rear ends of the frustum is respectively the same as the radius of the first rear end of the first cylinder and the radius of the second front end of the second cylinder, and the radius of the second cylinder is greater than or equal to the radius of the third cylinder.
7. The broadband radio frequency probe based on coaxial gradual change connection according to claim 6, wherein the connector is further provided with a connecting cylinder, and the connecting cylinder is hollow and sleeved at the connection part of the second rear end of the second cylinder and the third front end of the third cylinder, so that the connector is always in an accurate position.
8. The broadband radio frequency probe based on coaxial gradient connection according to claim 7, wherein the probe comprises three probe pieces arranged side by side, an S signal line probe piece in the middle, and G signal line probe pieces on the left and right sides, wherein the G signal is grounded through the housing, and the S signal line probe piece is fixedly connected with the third rear end of the third column to receive the conducted electromagnetic signal.
9. The broadband radio frequency probe based on coaxial gradual change connection according to claim 8, wherein tail grooves are formed in the end faces of the tail parts of the two G signal line probe pieces, which are far away from the S signal line probe pieces, sinking grooves are formed in the end faces of the tail parts of the two G signal line probe pieces, which face the S signal line probe pieces, notch grooves are formed in the end faces of the two G signal line probe pieces, which face the S signal line probe pieces, the notch grooves are close to the tail parts of the S signal line probe pieces, inclined parts are formed in the edges of the end faces of the two G signal line probe pieces, which are far away from the S signal line probe pieces, and the shapes and the sizes of the two G signal line probe pieces are identical and the grooves formed in the two G signal line probe pieces are symmetrically arranged on two sides of the S signal line probe pieces.
10. The broadband radio frequency probe based on coaxial gradual change connection according to claim 9, wherein the probe is further provided with two gaskets, the gaskets are respectively clamped on the upper side and the lower side of the probe, and the gaskets and the notch are used for jointly adjusting the impedance matching of the probe.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202223169709.3U CN219285259U (en) | 2022-11-29 | 2022-11-29 | Broadband radio frequency probe based on coaxial gradual change connection |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202223169709.3U CN219285259U (en) | 2022-11-29 | 2022-11-29 | Broadband radio frequency probe based on coaxial gradual change connection |
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| Publication Number | Publication Date |
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| CN219285259U true CN219285259U (en) | 2023-06-30 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202223169709.3U Active CN219285259U (en) | 2022-11-29 | 2022-11-29 | Broadband radio frequency probe based on coaxial gradual change connection |
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| Country | Link |
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| CN (1) | CN219285259U (en) |
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- 2022-11-29 CN CN202223169709.3U patent/CN219285259U/en active Active
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