CN106684520A - Multimode substrate integrated waveguide resonator for measuring electrical characteristic of PCB substrate and measurement method for resonator - Google Patents

Multimode substrate integrated waveguide resonator for measuring electrical characteristic of PCB substrate and measurement method for resonator Download PDF

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Publication number
CN106684520A
CN106684520A CN201710003252.3A CN201710003252A CN106684520A CN 106684520 A CN106684520 A CN 106684520A CN 201710003252 A CN201710003252 A CN 201710003252A CN 106684520 A CN106684520 A CN 106684520A
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resonator
substrate
waveguide
substrate integration
mode
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CN106684520B (en
Inventor
程钰间
王洪斌
吴亚飞
周明明
樊勇
张波
林先其
张永鸿
赵明华
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University of Electronic Science and Technology of China
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University of Electronic Science and Technology of China
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01P—WAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
    • H01P7/00—Resonators of the waveguide type
    • H01P7/06—Cavity resonators
    • H01P7/065—Cavity resonators integrated in a substrate
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R27/00—Arrangements for measuring resistance, reactance, impedance, or electric characteristics derived therefrom
    • G01R27/02—Measuring real or complex resistance, reactance, impedance, or other two-pole characteristics derived therefrom, e.g. time constant
    • G01R27/26—Measuring inductance or capacitance; Measuring quality factor, e.g. by using the resonance method; Measuring loss factor; Measuring dielectric constants ; Measuring impedance or related variables
    • G01R27/2617—Measuring dielectric properties, e.g. constants
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R27/00—Arrangements for measuring resistance, reactance, impedance, or electric characteristics derived therefrom
    • G01R27/02—Measuring real or complex resistance, reactance, impedance, or other two-pole characteristics derived therefrom, e.g. time constant
    • G01R27/26—Measuring inductance or capacitance; Measuring quality factor, e.g. by using the resonance method; Measuring loss factor; Measuring dielectric constants ; Measuring impedance or related variables
    • G01R27/2688—Measuring quality factor or dielectric loss, e.g. loss angle, or power factor
    • G01R27/2694—Measuring dielectric loss, e.g. loss angle, loss factor or power factor

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Control Of Motors That Do Not Use Commutators (AREA)
  • Measurement Of Resistance Or Impedance (AREA)

Abstract

The invention discloses a multimode substrate integrated waveguide resonator for measuring electrical characteristic of a PCB substrate and a measurement method for the resonator, belongs to the technical field of material dielectric characteristic test, and particularly to a material electrical characteristic measurement method based on a millimeter wave multimode resonant cavity. A signal for inputting feed waveguide enables a working mode of the substrate integrated waveguide resonator to be excited continuously through coupling gap, so that the working mode of the substrate integrated waveguide resonator can be changed by changing the frequency of the input signal; the electrical characteristic of the substrate arranged in the substrate integrated waveguide resonant cavity in a filling way can be measured in each working mode separately; and therefore, the substrate electrical characteristic parameters can be measured in a relatively low and approximate equal-frequency spacing manner.

Description

A kind of multi-mode substrate integration waveguide resonator of measurement PCB substrate electrical characteristics and its survey Amount method
Technical field
The invention belongs to the technical field of dielectric material characteristic test, the more particularly to material based on MMW Multimode resonator Material electrical characteristics measuring method.
Background technology
PCB substrate is widely used in wireless communication system, aobvious to electrical property of substrate energy accurate measurement especially in millimeter wave frequency band Obtain more and more important.At present, measuring method is broadly divided into two kinds of transmission method/bounce technique and the resonance method, and wherein the resonance method is especially fitted For the accurate measurement of low loss dielectric.Based on substrate integration wave-guide resonator measuring method compared with conventional microstrip ring and metal wave Guide cavity resonance method, with characteristics such as low-loss, low sections.
For example, document Simone A.Winkler, Wei Hong, Maurizio Bozzi, and Ke Wu, “Polarization rotating frequency selective surface based on substrate integrated waveguide technology,”IEEE Transactions on Antennas and It is single-ended using GSG feeds that Propagation, vol.58, no.4, Apr.2010. propose a kind of substrate integration wave-guide resonator Oral reflex type measuring method, it includes one layer of dielectric layer and double layer of metal copper clad layers.The measuring method is operated in cavity TE120Mould Formula, test frequency is 60-110GHz, and (frequency interval maximum/frequency interval is most for the frequency interval rate of change of adjacent test frequency Little value) it is 4.1, need 13 resonators to complete 13 Frequency point measurements, testing efficiency is low, and cavity tolerance is little.
Patent CN 104865449 [P], between Cheng Yu, Liu little Liang, Wu Jie, Xue Fei. based on the integrated chamber that shakes of waveguide multi resonant substrate The dielectric substrate measurement apparatus of method and method:Chinese .2015-8-26. proposes a kind of substrate integration wave-guide resonator and utilizes ripple Lead feed single port reflection-type measuring method.The measurement apparatus are from left to right made up of N number of resonator in " one " word arrangement, and its is humorous Vibration frequency successively decreases successively.It is operated in cavity TE101Pattern, test frequency is 88-106GHz, and frequency interval rate of change is 1.5, is surveyed Examination frequency band is not wide enough, equally exists the low problem of testing efficiency.
Document X.C.Zhu, W.Hong, P.P.Zhang, Z.C.Hao, H.J.Tang, K.Gong, J.X.Chen, K.Wu, “Extraction of dielectric and rough conductor loss of printed circuit board using differential method at microwave frequencies,”IEEE Trans.Microw.Theory Techn., vol.63, no.2, pp.494-503, Feb.2015. proposes a kind of based on different-thickness substrate integration wave-guide resonance Chamber, using difference method the electrical characteristic parameter of PCB substrate is extracted.The measuring method belongs to feed microstrip line dual-port mode transmission side Method, is operated in cavity TE10k(k<=9) pattern, test frequency is 10-20GHz, and frequency interval rate of change is 3.3, unfortunately Only TE10k(k is odd number) is energized, and frequency interval is larger and uncontrollable.
It can be found that from existing report, although substrate integration wave-guide resonator measuring method and conventional microstrip ring and metal wave Guide cavity resonance measuring method is compared has advantage in performance, but has that test frequency range is narrow, and frequency difference is uncontrollable, testing efficiency Low problem, will realize substrate integration wave-guide resonator wide-band width measurement, while frequency interval is controllable, testing efficiency is high, difficulty compared with Greatly.
The content of the invention
The purpose of the present invention is ensured under the premise of substrate integration wave-guide resonator wide-band width measurement, is solved existing report structure and is surveyed The low problem of examination efficiency.
To achieve these goals, the technical scheme is that：A kind of multi-mode substrate collection of measurement PCB substrate electrical characteristics Into waveguide resonator, the resonator includes：Input feed waveguide, substrate integration wave-guide resonator, output feed waveguide, input feedback Electric waveguide is arranged at one end of substrate integration wave-guide resonator upper surface, and output feed waveguide is arranged at substrate integration wave-guide resonance The other end of chamber lower surface；It is provided with the connection input, the cavity wall of the substrate integration wave-guide resonator of output feed waveguide Coupling gap；The substrate integration wave-guide resonator includes upper metallic walls, lower metallic walls, surround metallic walls and connect upper and lower metal Some plated-through holes of wall.
A kind of resonant cavity size computing method of the multi-mode substrate integration waveguide resonator of measurement PCB substrate electrical characteristics：
Wherein c0For the light velocity in vacuum, εrFor substrate dielectric constant, leffAnd weffThe respectively effective length and width of resonator Degree, fminAnd fmaxMinimum and maximum frequency respectively in working frequency range.
A kind of measuring method of the multi-mode substrate integration waveguide resonator of measurement PCB substrate electrical characteristics, the method is：Input The coupled gap of signal of feed waveguide makes mode of operation in substrate integration wave-guide resonator continuously be energized, by changing input So as to change the mode of operation of substrate integration wave-guide resonator, the measurement under each mode of operation is filled in substrate to the frequency of signal The electrical characteristics of substrate in integrated wave guide resonance chamber.
Beneficial effects of the present invention：
The present invention makes full use of substrate integration wave-guide cavity resonator structure characteristic, by rational feed structure design, makes chamber Bulk-mode TE10kIt is continuous energized, the frequency difference measurement substrate unit for electrical property parameters such as less and approximate can be realized.Compare tradition to set Meter, the present invention has three below outstanding advantages:
1st, broadband (such as whole W-waveband) measuring method is realized only with single resonator, testing efficiency is high.
2nd, adjacent test frequency spacing-controllable, under being capable of achieving same working frequency range, the equidistant Frequency point measurement of high density.
3rd, based on higher order cavity resonant mode, Q values are higher, and measuring accuracy is higher.
Description of the drawings
Fig. 1 is the present invention based on multi-mode substrate integration waveguide resonator measurement apparatus three dimensional structure diagram.
Fig. 2 is the present invention based on multi-mode substrate integration waveguide resonator measurement apparatus structure sectional view.
Fig. 3 is the present invention based on multi-mode substrate integration waveguide resonator measurement apparatus emulation S parameter result figure.
Specific embodiment
Embodiment：As shown in Figure 1, Figure 2 and Figure 3, it is a kind of to be based on multi-mode substrate integration waveguide resonator wide-band width measurement PCB Substrate approach, it is characterised in that stack gradually standard W-waveband metal feed waveguide 1, resonator 2, the first metal from top to bottom and cover Layers of copper 21, dielectric layer 22, the second metal copper clad layers 23, standard W-waveband metal feed waveguide 3；The edge of first metal copper clad layers 21 Upper etching rectangular aperture 211, constitutes feed coupling gap；The edge surrounding of dielectric layer 22 runs through plated through-hole 221, with the first metal Copper clad layers 21, the second metal copper clad layers 23 constitute together substrate integration wave-guide waveguide resonant cavity；The edge of second metal copper clad layers 23 Upper etching rectangular aperture 231.
Operation principle：The present invention adopts single substrate integration wave-guide resonator, in mode of operation TEmnkIt is right respectively in selection Modal index selects to have done labor in three dimensions.Under normal circumstances, cavity thickness is much smaller than cavity length and width, chamber Body resonant frequency changes very greatly with corresponding modal index n of substrate thickness dimension, even more than operating frequency range, therefore n= 0。
In the selection of the corresponding modal index of housing width dimension, obtained by contrasting difference m (modal index) size Adjacent cavity mode frequencies spacing, draws and works as m>When 1, in the range of whole working frequency range, frequency difference is changed greatly, can not Control, therefore m=1.
Based on a determination that m and n value, by the derivation to frequency difference formula (3), when k is very big, frequency difference is approximate Tend to constant value, such as formula (4).
Frequency difference design principle is waited based on above-mentioned, separately below to substrate media loss angle and dielectric constant measurement step Elaborate.
1st, dielectric loss measurement
Using vector network analyzer test substrate integration wave-guide resonator transmission coefficient, according to formula (5), (6) and (7) nonloaded Q of resonator, is obtained.
Quk=QLk(1+β1k+β2k) (6)
Wherein QLkAnd QukRepresent TE10kThe corresponding resonator loaded Q of mould and nonloaded Q.β1kAnd β1kTo be input into and exporting The port coefficient of coup.
Cavity loss includes conductor losses, dielectric loss and radiation loss.Metal due to constituting substrate integration wave-guide chamber Through-hole diameter is more than 0.5 with through-hole spacing ratio, and radiation loss is negligible.Conductor losses QcBy being obtained using CST emulation, During wherein simulated conditions are arranged, dielectric loss is set to zero.So as to pass through the Q being previously obtaineduDielectric loss is obtained with formula (8) Angle tangent tan δ.
2nd, dielectric constant measurement
With reference to the loss angle tangent that measurement is obtained, show that dielectric is normal with measurement resonant frequency contrast using emulation resonant frequency Number.A kind of specific design of substrate integration wave-guide resonator test system is completed for the program, operating frequency is 75- 110GHz, neighboring modes frequency difference is 3.9GHz.From dielectric layer 22 be TLY-5, dielectric constant is 2.2, and loss angle is just It is cut to 0.0009 (obtaining under 10GHz tests).First metal copper clad layers 21, the thickness of the second metal copper clad layers 23 are 0.018mm.Substrate integration wave-guide cavity length and width are 24mm, 3mm, a diameter of 0.4mm in side wall hole 221, hole center Away from for 0.6mm.The length and width of the rectangular aperture 211 (231) etched in copper clad layers is respectively 0.7mm, 0.4mm.To the sample Product are tested, and test result is as shown in the table：
The loss angle tangent and dielectric constant measurement result of the medium substrate of table 1
Test frequency (GHz) tanδ εr
77.01 0.00147 2.204
80.61 0.00107 2.205
84.28 0.00138 2.205
88.08 0.00119 2.205
91.95 0.00143 2.208
95.90 0.00160 2.210
99.95 0.00149 2.211
104.04 0.00159 2.212
108.15 0.00179 2.214

Claims (3)

1. a kind of multi-mode substrate integration waveguide resonator of measurement PCB substrate electrical characteristics, the resonator includes：Input feed ripple Lead, substrate integration wave-guide resonator, output feed waveguide, input feed waveguide be arranged at substrate integration wave-guide resonator upper surface One end, export feed waveguide and be arranged at the other end of substrate integration wave-guide resonator lower surface；The connection input, output feedback Coupling gap is provided with the cavity wall of the substrate integration wave-guide resonator of electric waveguide；The substrate integration wave-guide resonator includes upper Metallic walls, lower metallic walls, around metallic walls and connect some plated-through holes of upper and lower metallic walls.
2. it is a kind of measurement PCB substrate electrical characteristics multi-mode substrate integration waveguide resonator resonant cavity size computing method：
1 2 &epsiv; r &CenterDot; c 0 f m i n &le; w e f f &le; 3 2 &epsiv; r &CenterDot; c 0 f m a x
l e f f = c 0 2 &epsiv; r &CenterDot; 1 &Delta; f
Wherein c0For the light velocity in vacuum, εrFor substrate dielectric constant, leffAnd weffThe respectively effective length and width of resonator, fminAnd fmaxMinimum and maximum frequency respectively in working frequency range.
3. a kind of measuring method of the multi-mode substrate integration waveguide resonator of measurement PCB substrate electrical characteristics, the method is：Input feedback The coupled gap of signal of electric waveguide makes mode of operation in substrate integration wave-guide resonator continuously be energized, by changing input letter Number frequency so as to change the mode of operation of substrate integration wave-guide resonator, the measurement under each mode of operation is filled in substrate collection The electrical characteristics of substrate in waveguide resonant cavity.
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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2582757A (en) * 2019-03-29 2020-10-07 Sony Semiconductor Solutions Corp Substrate and material characterisation method and device
CN112798870A (en) * 2020-12-09 2021-05-14 西南大学 Microwave differential sensor based on substrate integrated waveguide reentry type resonant cavity and microfluidic technology
CN113484615A (en) * 2021-07-29 2021-10-08 华南理工大学 Material dielectric constant broadband test structure and test method thereof

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20100117768A1 (en) * 2007-06-27 2010-05-13 Industrial Technology Research Institute Vertical coupling structure for non-adjacent resonators
CN103901278A (en) * 2014-03-28 2014-07-02 电子科技大学 Method for measuring material complex permittivity based on substrate integrated waveguide round resonant cavities
CN104865449A (en) * 2015-05-25 2015-08-26 电子科技大学 Dielectric substrate measurement apparatus based on multi-resonant waveguide substrate integration vibration cavity method and method thereof

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20100117768A1 (en) * 2007-06-27 2010-05-13 Industrial Technology Research Institute Vertical coupling structure for non-adjacent resonators
CN103901278A (en) * 2014-03-28 2014-07-02 电子科技大学 Method for measuring material complex permittivity based on substrate integrated waveguide round resonant cavities
CN104865449A (en) * 2015-05-25 2015-08-26 电子科技大学 Dielectric substrate measurement apparatus based on multi-resonant waveguide substrate integration vibration cavity method and method thereof

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
王飞: "基片集成功率合成技术研究", 《中国优秀硕士学位论文全文数据库 信息科技辑》 *

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2582757A (en) * 2019-03-29 2020-10-07 Sony Semiconductor Solutions Corp Substrate and material characterisation method and device
US12007424B2 (en) 2019-03-29 2024-06-11 Sony Semiconductor Solutions Corporation Substrate and material characterisation method and device
CN112798870A (en) * 2020-12-09 2021-05-14 西南大学 Microwave differential sensor based on substrate integrated waveguide reentry type resonant cavity and microfluidic technology
CN113484615A (en) * 2021-07-29 2021-10-08 华南理工大学 Material dielectric constant broadband test structure and test method thereof
CN113484615B (en) * 2021-07-29 2022-05-24 华南理工大学 Material dielectric constant broadband test structure and test method thereof

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