CN219277594U

CN219277594U - Locking device for wafer operation

Info

Publication number: CN219277594U
Application number: CN202223362504.7U
Authority: CN
Inventors: 李洪锐
Original assignee: Yuexin Semiconductor Technology Co ltd
Current assignee: Yuexin Semiconductor Technology Co ltd
Priority date: 2022-12-13
Filing date: 2022-12-13
Publication date: 2023-06-30
Anticipated expiration: 2032-12-13

Abstract

The application relates to the technical field of semiconductor equipment and discloses a locking device for wafer operation, which comprises a supporting main body, a bearing pipe arranged on the supporting main body and fixedly connected with a cart frame, and a control motor arranged on the supporting main body and positioned on one side of the bearing pipe; one side of the supporting main body, which is far away from the bearing tube, is connected with the traveling wheel in a switching way, one side of the traveling wheel is provided with a synchronous tooth, a locking rod is sleeved in the bearing tube, penetrates through the supporting main body and is in sliding connection with the supporting main body, one end of the locking rod, which faces the synchronous gear, and one side of the locking rod, which faces the control motor, is respectively provided with a locking tooth and a control tooth, the output end of the control motor is provided with a power tooth meshed with the control tooth and used for controlling the locking rod to move up/down, and the locking tooth is meshed with the synchronous tooth or kept at a certain distance; at least one elastic piece is arranged in the bearing tube and is respectively abutted with the bearing tube and the locking rod. The wafer operation trolley is locked conveniently and rapidly, and the efficiency and the safety of wafer operation are improved.

Description

Locking device for wafer operation

Technical Field

The application relates to the technical field of semiconductor equipment, in particular to a locking device for wafer operation.

Background

In the semiconductor manufacturing process, a cart structure for wafer operation generally consists of a cart frame and travelling wheels, and is driven by manual control, so that the cart is easy to lose control and slide under the condition that a person loosens hands or does not lock the travelling wheels, the wafer is lost, and the great safety risk exists. The trolley travelling wheel in the prior art can not be self-locked, two or more brake buttons are stepped on by feet to drive the brake pad friction wheels to be completely locked, the trolley travelling wheel is inconvenient to lock, the phenomenon that the trolley is slipped due to the fact that the travelling wheel is forgotten to lock in production is caused, under the background, how to design a locking device for the trolley can quickly and effectively lock the trolley, and the operating efficiency and safety of a wafer can be improved definitely.

Disclosure of Invention

The application provides a locking device for wafer operation, the purpose of realizing convenient quick locking wafer operation shallow improves the efficiency and the security of wafer operation.

In order to achieve the aim of the utility model, the technical scheme adopted is as follows:

the locking device comprises a supporting main body, a bearing pipe arranged on the supporting main body and fixedly connected with the cart frame, and a control motor arranged on the supporting main body and positioned on one side of the bearing pipe; the device comprises a supporting main body, a bearing pipe, a traveling wheel, a locking rod, a control motor, a locking tooth and a control tooth, wherein one side of the supporting main body, which is away from the bearing pipe, is connected with the traveling wheel in a switching way, the synchronous tooth is arranged on one side of the traveling wheel, the locking rod is sleeved in the bearing pipe, the locking rod penetrates through the supporting main body and is in sliding connection with the supporting main body, one end of the locking rod, which faces the synchronous gear, is respectively provided with the locking tooth and the control tooth, the output end of the control motor is provided with the power tooth meshed with the control tooth and is used for controlling the locking rod to move up/down, and the locking tooth is meshed with the synchronous tooth or kept at a certain distance; at least one elastic piece is arranged in the bearing tube and is respectively in butt joint with the bearing tube and the locking rod.

The application is further configured to: an output port is arranged on one side of the control motor, and the output port is electrically connected with a control switch arranged on the pushing frame.

The application is further configured to: the control switch comprises a capacitive inductive switch, and the capacitive inductive switch is electrically connected with a power supply battery.

The application is further configured to: the steering bearing is arranged on the supporting main body and is in switching connection with the bearing pipe, and the locking rod penetrates through the steering bearing and is in sliding connection with the supporting main body.

The application is further configured to: the support main part deviates from the one side symmetry of bearing pipe is equipped with the support, the support pass through the pivot with the switching of walking wheel.

The application is further configured to: the synchronous teeth are fixedly connected with the travelling wheels.

The application is further configured to: the locking rod deviates from the one end of locking tooth is equipped with slide damper, slide damper's outline with the inner wall phase-match of bearing pipe.

The application is further configured to: one end of the bearing pipe is provided with an installation seat fixedly connected with the cart frame, and two ends of the elastic piece are respectively abutted to the sliding baffle and the installation seat.

The application is further configured to: one side of the supporting main body, which is away from the bearing pipe, is integrally connected with a guide seat, and the guide seat is matched with the locking rod.

The application is further configured to: the locking rod is positioned on one side of the travelling wheel and is arranged coaxially with the bearing pipe and the elastic piece.

To sum up, compared with the prior art, the application discloses a locking device for wafer operation, be applied to wafer operation shallow, including supporting the main part, bearing pipe and control motor, bear each spare part of locking device and the walking wheel of switching shallow through supporting the main part, wherein, one side of walking wheel is equipped with the synchronizing tooth, the bearing pipe endotheca is equipped with the locking lever, the locking lever passes and supports the main part and meshes with the power tooth of the output of control motor through the control tooth, under the prerequisite of elastic component with bearing pipe and locking lever butt respectively, control motor drive locking lever up/down motion, and then make locking tooth and synchronizing tooth meshing or keep a distance, thereby realize convenient quick locking wafer operation shallow's purpose, improve wafer operation's efficiency and security.

Drawings

In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings that are needed in the description of the embodiments will be briefly introduced below, it being obvious that the drawings in the following description are only some embodiments of the present application, and that other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.

Fig. 1 is a schematic view of a first structure of a locking device for wafer operation according to the present embodiment;

FIG. 2 is a schematic view showing a second structure of the locking device for wafer operation according to the present embodiment;

fig. 3 is an electrical connection schematic diagram of the locking device for wafer operation according to the present embodiment.

1. A support body; 11. a bracket; 12. a rotating shaft; 13. a guide seat; 2. a load-bearing tube; 21. a locking lever; 22. locking teeth; 23. a control tooth; 24. a sliding baffle; 25. a mounting base; 3. controlling a motor; 31. a power tooth; 32. an output port; 4. synchronizing teeth; 5. an elastic member; 6. a steering bearing; 101. a pushing frame; 102. a walking wheel; 103. and controlling the switch.

Detailed Description

Reference will now be made in detail to exemplary embodiments, examples of which are illustrated in the accompanying drawings. When the following description refers to the accompanying drawings, the same numbers in different drawings refer to the same or similar elements, unless otherwise indicated. The implementations described in the following exemplary examples are not representative of all implementations consistent with the present application. Rather, they are merely examples of apparatus and methods consistent with some aspects of the present application as detailed in the accompanying claims.

It should be noted that, in this document, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, the element defined by the phrase "comprising one … …" does not exclude the presence of other identical elements in a process, method, article, or apparatus that comprises the element, and furthermore, elements having the same name in different embodiments of the present application may have the same meaning or may have different meanings, a particular meaning of which is to be determined by its interpretation in this particular embodiment or by further combining the context of this particular embodiment.

It should be understood that the specific embodiments described herein are for purposes of illustration only and are not intended to limit the present application.

In the following description, suffixes such as "module", "component", or "unit" for representing elements are used only for facilitating the description of the present application, and are not of specific significance per se. Thus, "module," "component," or "unit" may be used in combination.

In the description of the present application, it should be noted that the positional or positional relationship indicated by the terms such as "upper", "lower", "left", "right", "inner", "outer", etc. are based on the positional or positional relationship shown in the drawings, are merely for convenience of describing the present application and simplifying the description, and do not indicate or imply that the apparatus or element in question must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the present application. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.

The technical solutions shown in the present application will be described in detail by specific examples. The following description of the embodiments is not intended to limit the priority of the embodiments.

Referring to fig. 1 and 2, a locking device for wafer operation is applied to a wafer operation cart, and the wafer operation cart in this embodiment includes a cart frame 101 and a traveling wheel 102 disposed on the cart frame 101, wherein the locking device is fixed on the cart frame 101 and is in switching connection with the traveling wheel 102, specifically, the locking device includes a supporting body 1, a bearing tube 2 disposed on the supporting body 1 and fixedly connected with the cart frame 101, and a control motor 3 disposed on the supporting body 1 and located on one side of the bearing tube 2, wherein one side of the supporting body 1 facing away from the bearing tube 2 is switched with the traveling wheel 102, that is, through the arrangement, the locking device is respectively connected with the traveling wheel 102 and the cart frame 101 so as to brake the wafer operation cart by locking the traveling wheel 102.

In this embodiment, a synchronous tooth 4 is disposed on one side of the travelling wheel 102, a locking rod 21 is sleeved in the bearing tube 2, the locking rod 21 penetrates through the supporting body 1 and is slidably connected with the supporting body 1, one end of the locking rod 21 facing the synchronous tooth 4 is provided with a locking tooth 22 and a control tooth 23 respectively, one side of the locking rod 21 facing the control motor 3 is provided with a power tooth 31 meshed with the control tooth 23 for controlling the locking rod 21 to move up/down, the locking tooth 22 is meshed with the synchronous tooth 4 or kept at a certain distance, at least one elastic piece 5 is disposed in the bearing tube 2, and the elastic piece 5 is respectively abutted with the bearing tube 2 and the locking rod 21.

In the specific implementation process, the control teeth 23 are meshed with the power teeth 31, namely, the locking rod 21 is driven to move up/down by controlling the start and stop of the motor 3 and matching with the elastic piece 5 so as to enable the locking teeth 22 to be meshed with the synchronous teeth 4 or keep a certain distance, and it can be understood that when the wafer operation cart is required to move freely, the motor 3 is controlled to drive the locking rod to move upwards so as to enable the locking teeth 22 to keep a certain distance from the synchronous teeth 4, and the travelling wheel 102 rotates universally; when the wafer operation trolley is required to be braked and fixed, the motor 3 is controlled to stop outputting torque to drive, the locking rod 21 moves downwards under the compression of elastic potential energy of the elastic piece 5, the locking teeth 22 are meshed with the synchronous teeth 4, the travelling wheels 102 are locked, the purpose of conveniently and rapidly locking the wafer operation trolley is achieved, and the efficiency and the safety of wafer operation are improved.

It should be noted that, after the motor 3 is controlled to overcome the elastic member 5 to move the locking rod 21 upward, the distance between the locking teeth 22 and the synchronizing teeth 4 is adjustable, and in some embodiments, the distance is 2cm, 3cm or 4cm, so as to provide a redundant space for the synchronizing teeth 4 to rotate along with the travelling wheel 102.

Referring to fig. 1-3, an output port 32 is disposed at one side of the control motor 3, and the output port 32 is electrically connected with a control switch 103 disposed on the cart frame 101, so as to implement rapid control of locking the wafer operation cart through the control switch 103.

Further, the control switch 103 includes a capacitive sensing switch, which does not need direct contact of a human body, and can be used even if a user wears gloves, so that the control switch 103 has long service life and is not affected by the humidity of the environment, and the practicability of the control switch 103 is improved.

In some embodiments, the capacitive sense switch is electrically connected to a power supply battery.

It can be appreciated that the specific functions of the capacitive sensing switch in this embodiment are available to those skilled in the art according to the prior art, and the structure and the working principle of the capacitive sensing switch are not described herein.

In this embodiment, the control switch 103 is connected in series with the control motor 3, so that the on/off of the control motor 3 is operated by the on/off of the control switch 103, specifically, taking a capacitive inductive switch as an example, when an operator holds the capacitive inductive switch on the cart frame 101 and then is under the action of human body resistance, the capacitive inductive switch is turned on, and then the control motor 3 drives the locking rod 21 to slide upwards, so as to unlock the travelling wheel 102.

In some embodiments, the control motor 3 may be a servo motor or a stepper motor.

In some embodiments, the output port 32 of the control motor 3 may be configured as a wireless transceiver port for wirelessly connecting to a smart terminal for wireless control, where the smart terminal includes a smart phone or a smart tablet or smart bracelet for intelligent control purposes.

In a specific implementation process, the locking device further comprises a steering bearing 6, the steering bearing 6 is arranged on the support main 1 and is in switching connection with the bearing tube 2, and the locking rod 21 penetrates through the steering bearing 6 and is in sliding connection with the support main 1 so as to facilitate the universal rotation of the travelling wheel 102.

Further, the support main body 1 is provided with a support 11 symmetrically on one side away from the bearing tube 2, the support 11 is in switching connection with the travelling wheel 102 through the rotating shaft 12, and the support 11 can be in threaded fixation or welded fixation or integral connection fixation with the support main body 1 so as to improve the overall structural strength.

The synchronizing teeth 4 are fixedly connected to the travelling wheel 102, and the synchronizing teeth 4 and the travelling wheel 102 can be fixed by threads, welded or integrally connected.

In some embodiments, the synchronizing teeth 4 are a transverse tooth structure extending along a single side of the road wheel 102 to facilitate engagement of the locking teeth 22.

In this embodiment, a sliding baffle 24 is disposed at one end of the locking rod 21 facing away from the locking teeth 22, the outer contour of the sliding baffle 24 is matched with the inner wall of the bearing tube 2, an installation seat 25 fixedly connected with the cart frame 101 is disposed at one end of the bearing tube 2, and two ends of the elastic member 5 are respectively abutted to the sliding baffle 24 and the installation seat 25, so that the elastic member 5 stretches/contracts stably, and the locking rod 21 can slide stably under the elastic force of the elastic member 5.

Further, the support main 1 is integrally connected with a guiding seat 13 at one side facing away from the bearing tube 2, and the guiding seat 13 is matched with the locking rod 21, so that the locking rod 21 can stably slide under the driving of the control motor 3 and the elastic piece 5.

The locking rod 21 is located at one side of the travelling wheel 102 and is coaxially disposed with the bearing tube 2 and the elastic member 5, and is used for universal rotation of the travelling wheel 102 and improving structural stability of the locking device.

In summary, the application discloses a locking device for wafer operation, the locking device is applied to wafer operation shallow, including supporting main part 1, bearing pipe 2 and control motor 3, bear each spare part of locking device and transit shallow's walking wheel 102 through supporting main part 1, wherein, one side of walking wheel 102 is equipped with synchronous tooth 4, the bearing pipe 2 endotheca is equipped with locking lever 21, locking lever 21 passes and supports main part 1 and meshes with the power tooth 31 of the output of control motor 3 through control tooth 23, under the prerequisite that elastic component 5 was in contact with bearing pipe 2 and locking lever 21 respectively, control motor 3 drive locking lever 21 up/down motion, and then make locking tooth 22 and synchronous tooth 4 meshing or keep a certain distance, thereby realize convenient quick locking wafer operation shallow's purpose, improve wafer operation's efficiency and security.

The foregoing has outlined rather broadly the more detailed description of the present application, wherein specific examples have been provided to illustrate the principles and embodiments of the present application, the description of the examples being provided solely to assist in the understanding of the core concepts of the present application; meanwhile, those skilled in the art will have variations in the specific embodiments and application scope in light of the ideas of the present application, and the present description should not be construed as limiting the present application in view of the above.

Claims

1. A locking means for wafer operation is applied to wafer operation shallow, wafer operation shallow includes the shallow frame and locates walking wheel on the shallow frame, its characterized in that:

the locking device comprises a supporting main body, a bearing pipe which is arranged on the supporting main body and fixedly connected with the cart frame, and a control motor which is arranged on the supporting main body and is positioned at one side of the bearing pipe;

the device comprises a supporting main body, a bearing pipe, a traveling wheel, a locking rod, a control motor, a locking tooth and a control tooth, wherein one side of the supporting main body, which is away from the bearing pipe, is connected with the traveling wheel in a switching way, the synchronous tooth is arranged on one side of the traveling wheel, the locking rod is sleeved in the bearing pipe, the locking rod penetrates through the supporting main body and is in sliding connection with the supporting main body, one end of the locking rod, which faces the synchronous tooth, is respectively provided with the locking tooth and the control tooth, the output end of the control motor is provided with the power tooth meshed with the control tooth and is used for controlling the locking rod to move up/down, and the locking tooth is meshed with the synchronous tooth or kept at a certain distance;

at least one elastic piece is arranged in the bearing tube and is respectively in butt joint with the bearing tube and the locking rod.

2. The wafer locking device according to claim 1, wherein an output port is provided at one side of the control motor, and the output port is electrically connected to a control switch provided on the cart frame.

3. The wafer handling locking apparatus of claim 2, wherein the control switch comprises a capacitive sense switch electrically connected to a power supply battery.

4. The wafer handling locking apparatus of claim 1, further comprising a steering bearing disposed on the support body and adapted to interface with the load bearing tube, the locking rod extending through the steering bearing and slidably coupled to the support body.

5. The wafer handling locking device of claim 1, wherein the support body is symmetrically provided with brackets on a side facing away from the load bearing tube, the brackets being adapted to engage the road wheels via a shaft.

6. The wafer handling locking device of claim 5 wherein said synchronizing teeth are fixedly connected to said road wheels.

7. The wafer handling locking device of claim 1, wherein an end of the locking lever facing away from the locking teeth is provided with a sliding baffle, the sliding baffle having an outer contour matching an inner wall of the load bearing tube.

8. The wafer handling locking apparatus of claim 7, wherein one end of the load-bearing tube is provided with a mounting seat fixedly connected to the cart frame, and both ends of the elastic member are respectively abutted against the sliding baffle and the mounting seat.

9. The wafer handling locking apparatus of claim 1, wherein a guide seat is integrally connected to a side of the support body facing away from the load bearing tube, the guide seat being mated with the locking lever.

10. The wafer handling locking device according to any one of claims 1 to 9, wherein the locking lever is located on one side of the travelling wheel and is arranged coaxially with the load bearing tube and the elastic member.