CN219226247U - Loading and unloading device of automatic wafer film sticking machine - Google Patents
Loading and unloading device of automatic wafer film sticking machine Download PDFInfo
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- CN219226247U CN219226247U CN202222259178.0U CN202222259178U CN219226247U CN 219226247 U CN219226247 U CN 219226247U CN 202222259178 U CN202222259178 U CN 202222259178U CN 219226247 U CN219226247 U CN 219226247U
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
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- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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Abstract
The utility model belongs to the technical field of feeding devices of wafer cutting equipment, in particular to a feeding and discharging device of an automatic wafer film sticking machine, wherein a steel ring feeding and discharging assembly is fixedly connected to a frame, a wafer feeding assembly positioned at the left side of the steel ring feeding and discharging assembly is fixedly connected to the frame, a steel ring carrying manipulator assembly positioned at the lower side of the steel ring feeding and discharging assembly is fixedly connected to the frame, a wafer taking manipulator assembly positioned at the lower side of the wafer feeding assembly is fixedly connected to the frame, a wafer edge searching assembly positioned at the left side of the wafer taking manipulator assembly is fixedly connected to the frame, and a steel ring trimming assembly positioned between the steel ring carrying manipulator assembly and the wafer taking manipulator assembly is fixedly connected to the frame; the wafer handling manipulator is fixedly connected with the frame and is located between the steel ring regular assembly and the wafer taking manipulator assembly, and the frame is fixedly connected with the steel ring wafer taking manipulator matched with the wafer handling manipulator.
Description
Technical Field
The utility model belongs to the technical field of feeding devices of wafer cutting equipment, and particularly relates to a feeding and discharging device of an automatic wafer film sticking machine.
Background
A thin film is required to attach the wafer to the steel ring prior to the die dicing process. Most of the existing wafer film sticking machines are semi-automatic film sticking, and the feeding and the discharging of the wafer and the steel ring are needed to be manually carried out, so that the film sticking efficiency of the film sticking machine is low, and the labor cost is high.
Disclosure of Invention
Aiming at the defects existing in the prior art, the utility model aims to provide a loading and unloading device of an automatic wafer film sticking machine, which solves the technical problems that the existing wafer film sticking machine is mostly semi-automatic film sticking, the loading and unloading of wafers and steel rings are needed to be carried out manually, the film sticking efficiency of the film sticking machine is low, and the labor cost is high.
The scheme adopted by the utility model is as follows: the loading and unloading device of the automatic wafer film sticking machine comprises a frame and is characterized in that a steel ring loading and unloading assembly is fixedly connected to the frame, a wafer loading assembly positioned on the left side of the steel ring loading and unloading assembly is fixedly connected to the frame, a steel ring carrying manipulator assembly positioned on the lower side of the steel ring loading and unloading assembly is fixedly connected to the frame, a wafer taking manipulator assembly positioned on the lower side of the wafer loading assembly is fixedly connected to the frame, a wafer edge searching assembly positioned on the left side of the wafer taking manipulator assembly is fixedly connected to the frame, and a steel ring regulating assembly positioned between the steel ring carrying manipulator assembly and the wafer taking manipulator assembly is fixedly connected to the frame; the wafer handling manipulator is fixedly connected with the frame and is located between the steel ring regular assembly and the wafer taking manipulator assembly, and the frame is fixedly connected with the steel ring wafer taking manipulator matched with the wafer handling manipulator.
Preferably, the wafer material loading subassembly include fixed connection's wafer material loading module in the frame, wafer material loading module movable block on fixedly connected with wafer material box supporting platform, wafer material loading module on fixedly connected with wafer material loading motor, wafer material box supporting platform on can dismantle and be connected with the wafer material box body, this internal wafer body that has placed of wafer material box.
Preferably, the wafer transfer manipulator includes fixed connection's wafer operation motor in the frame, the frame on fixedly connected with take a seat bearing, take a seat bearing in be equipped with the wafer and transport the lead screw, the wafer transport the lead screw and transport the belt with the wafer operation motor rotation axle head and be connected through the wafer, the frame on sliding connection have with wafer transfer lead screw threaded connection's wafer chuck connecting plate, the frame on fixedly connected with wafer chuck connecting plate complex wafer transport linear guide, wafer chuck connecting plate on fixedly connected with wafer transport cylinder, wafer transport cylinder output fixedly connected with seek limit subassembly complex wafer chuck backup pad, wafer chuck backup pad bottom be equipped with the wafer chuck, wafer chuck backup pad and wafer chuck be equipped with the spring.
Preferably, the steel ring feeding and discharging comprises a steel ring feeding and discharging linear module arranged on the frame, a steel ring feeding and discharging motor matched with the steel ring feeding and discharging linear module is fixedly connected to the frame, a steel ring feeding and discharging motor moving end is fixedly connected with a steel ring material frame supporting platform, and the steel ring material frame supporting platform is detachably connected with a steel ring material frame.
Preferably, the regular subassembly of piece is got to steel ring include two sets of steel ring regular guide rails of interval fixed connection in the frame, two sets of steel ring regular guide rail on equal sliding connection have the rack connecting plate, rack connecting plate on the regular spout connecting plate fixedly connected with, regular spout connecting plate seted up steel ring body complex spout, the frame on the regular motor of fixedly connected with, regular motor rotation axle head fixedly connected with gear, rack connecting plate on fixedly connected with and gear engagement's rack, the frame be equipped with and get the steel ring module, the frame on fixedly connected with get steel ring module complex get the steel ring motor, get steel ring module remove end fixedly connected with steel ring clamping piece down the connecting plate, steel ring clamping piece down connecting plate fixedly connected with steel ring clamping piece on the connecting plate, steel ring clamping piece on the connecting plate fixedly connected with steel ring clamping piece and get the cylinder, steel ring clamping piece fixedly connected with steel ring clamping piece down on the steel ring clamping piece fixedly connected with steel ring clamping piece down.
Preferably, the steel ring carrying manipulator comprises a steel ring carrying module fixedly connected with a frame, a steel ring carrying cylinder connecting plate is fixedly connected with the moving end of the steel ring carrying module, a steel ring carrying cylinder is fixedly connected with the steel ring carrying cylinder connecting plate, a steel ring carrying manipulator connecting plate matched with the steel ring body is fixedly connected with the output end of the steel ring carrying cylinder, and a steel ring carrying motor matched with the steel ring carrying module is fixedly connected with the frame.
The utility model has the beneficial effects that: the device can realize the full-automatic feeding and discharging process of the wafer and the steel ring, and in the operation process, the device can complete the automatic feeding and discharging process of the wafer film sticking machine by only placing the wafer loaded by the wafer and the material frame at a designated position, is simple to operate, greatly improves the film sticking efficiency of the wafer, and solves the technical problems that the existing wafer film sticking machine is mostly semi-automatic film sticking, the feeding and discharging of the wafer and the steel ring are needed to be manually carried out, the film sticking efficiency of the film sticking machine is low, and the labor cost is high.
Drawings
Fig. 1 is a general structural diagram of the present utility model.
Fig. 2 is a cross-sectional view of a wafer feed assembly of the present utility model.
Fig. 3 is a perspective view of the wafer cassette body of the present utility model.
Fig. 4 is a top view of the wafer transfer robot of the present utility model.
Fig. 5 is a front view of the wafer transfer robot of the present utility model.
Fig. 6 is a cross-sectional view of the steel ring loading and unloading device of the present utility model.
Fig. 7 is a regular elevation view of a steel ring take-off of the present utility model.
Fig. 8 is a top view of the steel ring flaking strategy of the present utility model.
Fig. 9 is a cross-sectional view of the steel ring handling robot of the present utility model.
Reference numerals: 1. a rigid ring feeding and discharging assembly; 2. a wafer loading assembly; 3. a steel ring handling manipulator assembly; 4. a frame; 5. wafer taking manipulator assembly; 6. a steel ring straightening assembly; 7. a wafer edge-seeking assembly; 8. a wafer handling robot; 9. a steel ring slice taking manipulator; 11. a steel ring material frame; 12. a steel ring material frame supporting platform; 13. a steel ring feeding and discharging linear module; 14. a steel ring feeding and discharging motor; 21. a wafer magazine body; 22 wafer magazine support platform; 23. a wafer loading module; 24. a wafer loading motor; 211. a wafer body; 31. a steel ring sucker; 32. a steel ring sucker connecting plate; 33. the steel ring carrying manipulator connecting plate; 34. a steel ring carrying cylinder; 35. carrying a cylinder connecting plate by a steel ring; 36. a steel ring carrying module; 37. a steel ring carrying motor; 4. a frame; 61. a chute; 62. a rack connecting plate; 63. a rack; 64. a gear; 65. a motor is regulated; 66. a regular chute connecting plate 67 and a steel ring regular guide rail; 68. a regular motor fixing plate; 81. a bearing with a seat; 82. wafer transfer screw rod; 83. a wafer chuck connecting plate; 84. a wafer transfer motor; 85. a wafer transfer pulley; 86. a wafer transfer belt; 87. a wafer chuck support plate; 88. a wafer transfer cylinder; 89. a wafer transfer linear guide rail; 90. a wafer chuck; 80. a spring; 91. taking a steel ring module; 92, taking a steel ring motor; 93. a steel ring clamping piece lower connecting plate; 94. the steel ring clamping piece is connected with the upper connecting plate; 95. a steel ring lower clamping piece; 96. a clamping piece is arranged on the steel ring; 97. the steel ring clamps the air cylinder.
Detailed Description
The foregoing and other features, aspects and advantages of the utility model will become more apparent from the following detailed description of the embodiments with reference to the accompanying drawings 1-6. The following embodiments are described in detail with reference to the drawings.
Exemplary embodiments of the present utility model will be described below with reference to the accompanying drawings.
In the first embodiment, the steel ring feeding and discharging assembly 1 is fixed on the frame 4, the wafer feeding assembly 2 is fixed on the frame 4, the steel ring carrying manipulator assembly is fixed on the frame 4, the wafer taking manipulator 5 is fixed on the frame 4, the steel ring trimming assembly 6 is fixed on the frame 4, the wafer edge searching assembly 7 is fixed on the frame 4, the wafer carrying manipulator 8 is fixed on the frame 4, and the steel ring taking manipulator is fixed on the frame 4.
Wafers are placed in layers in wafer cassettes 22, as shown in fig. 3; as shown in fig. 2, the wafer cassette is placed on the wafer cassette support platform 22, the wafer cassette support platform 22 is fixedly connected with a moving block of the wafer loading module 23, the wafer loading motor 24 is fixed on the wafer loading module 23, and the wafer loading module 23 is fixed on the frame 4. The wafer loading motor 24 drives the moving block of the wafer loading module 23 to move up and down, and the wafer loading box 21 placed on the wafer loading box supporting platform 22 can move up and down along with the moving block to finish wafer loading.
As shown in fig. 4 and 5, a belt seat bearing 81 is fixed on a frame 4, a wafer transfer screw 82 is fixed on the belt seat bearing 81 through a bearing in the belt seat bearing 81, the wafer transfer screw 82 can rotate in two belt seat bearings 81, one end of the wafer transfer screw is fixed with a wafer transfer belt wheel 85, a wafer transfer motor 84 is fixed on the frame 4, a wafer transfer belt wheel 84 is fixed on the shaft of the wafer transfer motor 84, a wafer transfer belt 86 is wound on the two wafer transfer belt wheels 84, and the wafer transfer motor 84 can drive the wafer transfer screw 82 to rotate through the two wafer transfer belt wheels 84 and the wafer transfer belt 86; the wafer transfer linear guide 89 is fixed on the frame 4, be fixed with wafer sucking disc connecting plate 83 on the removal slider of wafer transfer linear guide 89, wafer sucking disc connecting plate 83 still is fixed on the nut seat of wafer transfer lead screw 82 simultaneously, when wafer transfer lead screw 82 rotates, wafer sucking disc connecting plate 83 and can follow the nut seat to move, the removal slider on the wafer transfer linear guide 89 moves thereupon, be fixed with wafer transfer cylinder 88 on the wafer sucking disc connecting plate 83, be fixed with wafer sucking disc backup pad 87 on the removal guide arm of wafer transfer cylinder 88, wafer sucking disc 90 is fixed on wafer sucking disc backup pad 87 through spring 80, can have certain movement space under the effect of spring 80 when wafer sucking disc 90 atress, the return to the normal position under the effect of spring 80 when wafer sucking disc 90 atress disappears.
The steel ring and the steel ring attached with the wafer through the film are layered in the steel ring material frame 11; as shown in fig. 6, the steel ring frame 11 is placed on the steel ring frame support platform 12, the steel ring frame support platform 12 is fixedly connected with a moving block of the steel ring feeding and discharging linear module 13, the steel ring feeding and discharging motor 14 is fixed on the steel ring feeding and discharging module 13, and the steel ring feeding and discharging module 13 is fixed on the frame 4. The steel ring feeding and discharging motor 14 drives the moving block of the steel ring feeding and discharging module 13 to move up and down, and the steel ring material frame 11 placed on the steel ring material frame supporting platform 12 can move up and down along with the steel ring material frame to finish feeding and discharging of the steel ring.
As shown in fig. 7 and 8, the steel ring taking module 91 is fixed on the frame 4, the steel ring taking motor 92 is fixed on the steel ring taking module 91, the steel ring taking motor 92 can drive the moving block on the steel ring taking module 91 to move along the module direction, the steel ring clamping piece lower connecting plate 93 is fixed on the moving block of the steel ring taking module 91, the steel ring lower clamping piece 95 is fixed on the steel ring clamping piece lower connecting plate 93, the steel ring clamping piece upper connecting plate 94 is fixed on the steel ring module lower connecting plate 93, the steel ring clamping cylinder 97 is fixed on the steel ring clamping piece upper connecting plate 94, and the steel ring upper clamping piece 96 is fixed on the moving guide rod of the steel ring clamping cylinder 97.
The regular motor fixing plate 68 is fixed on the frame 4, the regular motor 65 is fixed on the regular motor fixing plate 68, the two steel ring regular guide rails 67 are fixed on the frame 4, four moving sliders are respectively arranged on the two steel ring regular guide rails 67, the rack connecting plate 62 on the upper side is fixedly connected with the two moving sliders on the upper side of the two steel ring regular guide rails 67, and the rack connecting plate 62 on the lower side is fixedly connected with the two moving sliders on the lower side of the two steel ring regular guide rails 67; the upper and lower rack connecting plates 62 are respectively fixed with a rack 63, a gear 64 is fixed on the shaft of the regulating motor 65, the two racks 63 are simultaneously meshed with the gear 64, when the gear 64 rotates, the two rack connecting plates 62 can simultaneously move towards the direction of the gear 64, and when the gear 64 reversely rotates, the two rack connecting plates can simultaneously move towards the direction far away from the gear 64; two regular chute connecting plates 66 are respectively fixed on the two rack connecting plates 62, and one chute 61 is respectively fixed on the two regular chute connecting plates 66; the two regular sliding grooves 61 can be simultaneously closed towards the middle or simultaneously separated towards the two sides according to the rotation direction of the gear 64.
As shown in fig. 9, the steel ring carrying module 36 is fixed on the frame 4, the steel ring carrying motor 37 is fixed on the steel ring carrying module 36, the steel ring carrying motor 67 can drive the moving block on the steel ring carrying module 36 to move, the steel ring carrying cylinder connecting plate 35 is fixed on the moving slide block of the steel ring carrying module 36, the steel ring carrying cylinder 34 is fixed on the steel ring carrying cylinder connecting plate 35, the steel ring carrying manipulator connecting plate 33 is fixed on the moving guide rod of the steel ring carrying cylinder 34, the steel ring carrying manipulator connecting plate 33 is fixed with the steel ring sucker connecting plate 32, the steel ring sucker connecting plate 32 and the waist-shaped hole for the screw hole of the steel ring carrying manipulator connecting plate 33 can conveniently adjust the distance between the steel ring sucker 31; the steel ring sucker 31 is fixed on the steel ring sucker connecting plate 32, the steel ring sucker 31 is vacuumized, and the steel ring can be adsorbed by opening the vacuum valve.
In the use process of the embodiment, the wafer loading assembly 2 moves the wafer material box 21 in the wafer material box 21 to a to-be-taken position; the wafer taking manipulator 5 moves to the wafer material box 21 of the wafer material assembly 2 to clamp the wafer, then withdraws from the wafer material box 21 and positions and clamps the circle center of the wafer; the wafer manipulator 5 transfers the wafer to the wafer edge searching assembly 7, and the wafer edge searching assembly 7 can find the notch or the flat edge on the wafer and align the notch or the flat edge to the appointed direction. The wafer carrying manipulator 8 moves to the upper part of the wafer edge searching assembly 7, adsorbs the wafer and moves the wafer to a designated position, so that the next process is convenient. The steel ring feeding and discharging assembly 1 moves the steel ring material frame 11 to a position to be taken, the steel ring taking manipulator 9 moves to a plate taking position to clamp the steel ring and enable the steel ring to move along with the steel ring, the steel ring slides on a chute of the regulating assembly 6 in the moving process, and when the steel ring slides to a designated position, the steel ring taking manipulator 9 loosens the steel ring and moves to an initial position. The steel ring remains on the runner 61 of the gauge assembly 6. The steel ring straightening assembly 6 straightens the steel ring to the middle, the steel ring conveying manipulator 3 moves to the position above the straightened steel ring, and adsorbs the steel ring to convey the steel ring to a designated position for waking up the next step; after the steel ring and the wafer film are adhered, the steel ring carrying manipulator 3 adsorbs the steel ring and moves the steel ring adhered with the wafer to the chute 61 of the regulating assembly 6, at the moment, the steel ring feeding and discharging assembly moves the steel ring material frame 11 to the discharging position, the steel ring slice taking manipulator pushes the wafer adhered with the steel ring to the steel ring material frame, and the steel ring is stored in the original position before adhering the wafer.
In the wafer loading process, the wafer loading motor 24 rotates and drives the moving block of the wafer loading module 23 to move up and down, the wafer loading frame supporting platform fixed on the moving block of the wafer loading module 23 moves up and down along with the movement of the wafer loading frame supporting platform, the wafer moves to the position to be taken, the wafer loading motor 24 stops rotating, and after the wafer taking mechanical arm 5 takes a wafer, the wafer loading motor 24 continues to rotate, and the next wafer moves to the position to be taken. After all the wafers in the wafer material box 21 are taken out, the wafer material motor 24 reversely rotates, the wafer material box 21 moves to the initial position, and the next wafer taking can be performed after the wafer material box 21 is taken down and replaced by the material box filled with the wafers.
After the wafer edge searching assembly 7 searches for a notch or a flat edge on the wafer, the notch or the flat edge on the wafer faces the designated direction, the wafer transferring motor 84 rotates and drives the wafer transferring screw 82 to rotate through the two wafer transferring pulleys 85 and the wafer transferring belt 86, the wafer transferring screw 82 rotates to drive a nut seat on the screw to move, a guide rod of the wafer transferring cylinder 88 extends after the wafer sucking disc 90 moves to the upper side of the wafer edge searching assembly 7 is fixed on the nut seat, the wafer sucking disc 90 is attached to the wafer, and the wafer sucking disc 90 can not be crushed by the wafer sucking disc 90 due to a spring in the middle of the guide rod of the wafer transferring cylinder 88. After the wafer chuck 90 is attached to the wafer, the vacuum on the wafer chuck 90 is turned on, the wafer chuck 90 holds the wafer, and the guide rod of the wafer transfer cylinder 88 is retracted. After the wafer is moved to the designated position by the rotation of the wafer transfer motor 84, the guide rod of the wafer transfer cylinder 88 is extended, the vacuum on the wafer chuck is turned off, the guide rod of the wafer transfer cylinder 88 is retracted, and the wafer remains at the designated position. The wafer transfer motor 84 rotates and the wafer chuck 90 moves to the initial position.
In the steel ring feeding process, the steel ring feeding and discharging motor 14 rotates and drives the moving block of the steel ring feeding and discharging linear module 13 to move up and down, the wafer material frame supporting platform fixed on the moving block of the steel ring feeding and discharging module 13 moves up and down along with the movement, the steel ring moves to a position to be taken, the steel ring feeding and discharging motor 14 stops rotating, and after the steel ring sheet taking manipulator 5 finishes taking sheets, the steel ring feeding and discharging motor 14 continues to rotate, and the next steel ring moves to the position to be taken. After the steel ring patch is completed, the steel ring feeding and discharging motor 14 rotates to move the original storage position of the steel ring to the material taking position, and after the steel ring sheet taking manipulator 5 withdraws the steel ring after the film is completed into the steel ring material frame 11, the steel ring feeding and discharging motor rotates to take the next steel ring. After all steel ring patches in the steel ring material frame 11 are completed and the steel ring material frame 11 is retracted, the steel ring feeding and discharging motor 24 reversely rotates, the steel ring material box 11 moves to the initial position, and the next sheet taking can be performed after the steel ring material frame 11 is taken down and replaced by the material frame filled with the steel ring.
In the process of taking and regulating the steel rings, a steel ring taking motor 92 rotates and drives a moving block of a steel ring taking module 91 to move, after the moving block of the steel ring taking module 91 and parts fixed on the moving block move to a position for clamping the steel rings, a guide rod of a steel ring clamping cylinder 97 extends, a steel ring upper clamping piece 96 and a steel ring lower clamping piece 95 clamp the steel rings, the steel ring taking motor 92 reversely rotates and pulls the steel rings out of a steel ring material frame 11, the steel rings move along with the moving block of the steel ring taking module 91 on a sliding groove 61 after being pulled out of the steel ring material frame 11, after the steel rings move to a specified position, the guide rod of the steel ring clamping cylinder 97 withdraws, the steel ring upper clamping piece 96 and the steel ring lower clamping piece 95 release the steel rings, the steel ring taking motor 92 continues to rotate, the steel ring upper clamping piece 96 and the steel ring lower clamping piece 95 leave the steel rings, and the steel rings leave the sliding groove 61; the regulating motor 65 rotates, and the two sliding grooves 61 draw close to the middle and clamp the steel ring; after the steel ring is taken away by the steel ring carrying manipulator assembly 3, the regular motor 65 rotates, and the two sliding grooves 61 are separated to two sides; after the steel ring carrying manipulator assembly 3 moves the film-stuck steel ring onto the sliding groove 61, the guide rod of the steel ring clamping cylinder 97 extends out, the steel ring lower clamping piece 95 and the steel ring upper clamping piece 96 are clamped, the steel ring taking motor 92 rotates, and the steel ring lower clamping piece 95 and the steel ring upper clamping piece 96 push the steel ring into the steel ring material frame 11. The steel ring taking motor 92 reversely rotates, the steel ring lower clamping piece 95 moves to the initial position, the guide rod of the steel ring clamping cylinder 97 retracts, and the steel ring lower clamping piece 95 and the steel ring upper clamping piece 96 are changed from clamping to loosening.
In the steel ring conveying process, after the steel ring is completed, the steel ring conveying motor 37 rotates and drives the moving block of the steel ring conveying module 36 to move, parts fixed on the moving block of the steel ring conveying module 36 move along with the moving block, after the steel ring sucker 31 moves above the steel ring after being completed, the guide rod of the steel ring conveying cylinder 34 stretches out, the steel ring sucker 31 is attached to the steel ring, the vacuum of the steel ring sucker 31 is opened, the steel ring sucker 31 adsorbs the steel ring, the guide rod of the steel ring conveying cylinder 34 retracts, the steel ring conveying motor 37 rotates, after the steel ring is conveyed to a specified position, the guide rod of the steel ring conveying cylinder 34 stretches out, the vacuum of the steel ring sucker 31 is closed, and the guide rod of the steel ring conveying cylinder 34 retracts; after the film pasting of the steel ring is completed, the steel ring carrying motor 37 rotates, the steel ring sucker 31 moves to the upper side of the rigid ring after film pasting, the guide rod of the steel ring carrying cylinder 34 extends, the vacuum of the steel ring sucker 31 is opened, the steel ring sucker 31 adsorbs the steel ring, the guide rod of the steel ring carrying cylinder 34 retracts, the steel ring carrying motor 37 rotates, the steel ring sucker 31 moves to the upper side of the steel ring regulating assembly 6 after film pasting, the guide rod of the steel ring carrying cylinder 34 extends, the vacuum of the steel ring sucker 31 is closed, the guide rod of the steel ring carrying cylinder 34 retracts, the steel ring after film pasting is left on the chute 61 of the rigid ring regulating assembly 6, and the steel ring after film pasting is pushed back into the steel ring material frame 11 by the steel ring sheet taking manipulator 9.
The above description is only for the purpose of illustrating the utility model, and it should be understood that the utility model is not limited to the above embodiments, but various modifications consistent with the idea of the utility model are within the scope of the utility model.
Claims (6)
1. The loading and unloading device of the automatic wafer film sticking machine comprises a frame and is characterized in that a steel ring loading and unloading assembly is fixedly connected to the frame, a wafer loading assembly positioned on the left side of the steel ring loading and unloading assembly is fixedly connected to the frame, a steel ring carrying manipulator assembly positioned on the lower side of the steel ring loading and unloading assembly is fixedly connected to the frame, a wafer taking manipulator assembly positioned on the lower side of the wafer loading assembly is fixedly connected to the frame, a wafer edge searching assembly positioned on the left side of the wafer taking manipulator assembly is fixedly connected to the frame, and a steel ring regulating assembly positioned between the steel ring carrying manipulator assembly and the wafer taking manipulator assembly is fixedly connected to the frame; the wafer handling manipulator is fixedly connected with the frame and is located between the steel ring regular assembly and the wafer taking manipulator assembly, and the frame is fixedly connected with the steel ring wafer taking manipulator matched with the wafer handling manipulator.
2. The feeding and discharging device of the automatic wafer film sticking machine according to claim 1, wherein the wafer feeding assembly comprises a wafer feeding module fixedly connected to the frame, a wafer feeding module moving block is fixedly connected with a wafer feeding motor, the wafer feeding module is detachably connected with a wafer feeding box body, and the wafer feeding box body is placed in the wafer feeding box body.
3. The feeding and discharging device of the automatic wafer film sticking machine according to claim 2, wherein the wafer transferring manipulator comprises a wafer operation motor fixedly connected with a frame, a seat bearing is fixedly connected with the frame, a wafer transferring screw rod is arranged in the seat bearing, the wafer transferring screw rod is connected with a rotating shaft end of the wafer operation motor through a wafer transferring belt, a wafer sucker connecting plate in threaded connection with the wafer transferring screw rod is connected with the frame in a sliding manner, a wafer transferring linear guide rail matched with the wafer sucker connecting plate is fixedly connected with the frame, a wafer transferring cylinder is fixedly connected with the wafer sucker connecting plate, a wafer sucker supporting plate matched with a searching edge component is fixedly connected with an output end of the wafer transferring cylinder, a wafer sucker is arranged at the bottom of the wafer sucker supporting plate, and a spring is arranged between the wafer sucker supporting plate and the wafer sucker.
4. The feeding and discharging device of the automatic wafer film sticking machine according to claim 3, wherein the feeding and discharging of the steel ring comprises a steel ring feeding and discharging linear module arranged on a frame, a steel ring feeding and discharging motor matched with the steel ring feeding and discharging linear module is fixedly connected to the frame, a steel ring material frame supporting platform is fixedly connected to the moving end of the steel ring feeding and discharging motor, and a steel ring material frame is detachably connected to the steel ring material frame supporting platform.
5. The feeding and discharging device of the automatic wafer film sticking machine according to claim 4, wherein the steel ring film taking and sorting assembly comprises two groups of steel ring sorting guide rails which are fixedly connected with each other at intervals on a frame, two groups of steel ring sorting guide rails are respectively and slidably connected with a rack connecting plate, each rack connecting plate is fixedly connected with a sorting chute connecting plate, each sorting chute connecting plate is provided with a steel ring body matched chute, each frame is fixedly connected with a sorting motor, each sorting motor rotating shaft end is fixedly connected with a gear, each rack connecting plate is fixedly connected with a rack meshed with the corresponding gear, each frame is provided with a steel ring taking module, each frame is fixedly connected with a steel ring taking motor matched with the corresponding steel ring taking module, each steel ring taking module is fixedly connected with a steel ring clamping piece lower connecting plate, each steel ring clamping piece lower connecting plate is fixedly connected with a steel ring clamping piece upper connecting plate fixedly connected with a ring clamping cylinder, each steel ring lower connecting plate is fixedly connected with a steel ring clamping piece lower connecting plate, and each steel ring clamping piece lower clamping piece is fixedly connected with a steel ring clamping piece lower cylinder.
6. The automatic wafer film sticking machine feeding and discharging device according to claim 5, wherein the steel ring conveying manipulator comprises a steel ring conveying module fixedly connected to a frame, a steel ring conveying cylinder connecting plate is fixedly connected to a moving end of the steel ring conveying module, a steel ring conveying cylinder is fixedly connected to the steel ring conveying cylinder connecting plate, a steel ring conveying manipulator connecting plate matched with a steel ring body is fixedly connected to an output end of the steel ring conveying cylinder, and a steel ring conveying motor matched with the steel ring conveying module is fixedly connected to the frame.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202222259178.0U CN219226247U (en) | 2022-08-26 | 2022-08-26 | Loading and unloading device of automatic wafer film sticking machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202222259178.0U CN219226247U (en) | 2022-08-26 | 2022-08-26 | Loading and unloading device of automatic wafer film sticking machine |
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| Publication Number | Publication Date |
|---|---|
| CN219226247U true CN219226247U (en) | 2023-06-20 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202222259178.0U Active CN219226247U (en) | 2022-08-26 | 2022-08-26 | Loading and unloading device of automatic wafer film sticking machine |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115384847A (en) * | 2022-08-27 | 2022-11-25 | 郑州轨道交通信息技术研究院 | Loading and unloading device and method of automatic wafer film sticking machine |
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2022
- 2022-08-26 CN CN202222259178.0U patent/CN219226247U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115384847A (en) * | 2022-08-27 | 2022-11-25 | 郑州轨道交通信息技术研究院 | Loading and unloading device and method of automatic wafer film sticking machine |
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